浸炭焼入れ鋼の化学研磨処理

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1 27 Chemical Polishing Process of Carburized Steel Ken-ichi Suzuki, Masaki Kajino, Fumio Shimizu HF-H 2 O 2 H 2 O 2 H 2 O 2 HF Carburized steel, which is widely used for transmission gears, has an abnormal layer in its surface portion. Therefore, mechanical properties of the steel are improved by removing its surface layer. Since this type of products require dimensional accuracy, it is important to develop a chemical polishing process which uniformly polishes such products regardless of their shape. An HF-H 2 O 2 system was selected as basic bath composition. Although this system has been found to be a good agent by a preliminary experiment, spontaneous decomposition of H 2 O 2 is a major problem. To overcome this problem, additives for stabilizing the bath composition have been explored and a superior stabilizer which extends the service life of the bath was found. A polishing rate sensor was also developed to control the bath composition, and a high dimensional accuracy of the workpiece is obtained with this sensor. A recovery of HF is important for reducing the sludge amount from the bath waste, and the decomposition of H 2 O 2 is required in advance because it hampers the HF recovery process. A new catalyst which effectively decomposes H 2 O 2 was found. This polishing method is expected to be applied to the manufacturing of hardened steel parts of complicated shapes in the future.

2 28 µm µm HF-HNO 3 HF-H 2 O 2 -H 2 O 2 ( ) HF-H 2 O 2 HF-H 2 O 2 JIS SCr420 ( mm ) 0.7mm HF ( 47 % ) H 2 O 2 ( 30 % ) 1L HF H 2 O 2 HF H 2 O 2 HF 2mol/L 100µm/mim

3 29 30µm µm/mim HF 1mol/LH 2 O 2 H 2 O 2 1.5mol/L Fe 3HF FeF 3 3H + 3e (1) 2H 2 O 2 2H 2 O O 2 (2) Relations between chemical polishing rate of carburized steel(scr420) and HF concentration in polishing solution at 40. O 2 4H + 4e 2H 2 O (3) Fe 3HF 1.5H 2 O 2 FeF 3 3H 2 O (4) (4) Fe HF Ag/AgCl H 2 O 2 1.5mol/L Effect of H 2 O 2 concentration on bright polishing and polishing rate. Electrode potential dependence of hardened steel(scr420) on H 2 O 2 concentration in polishing solution at 40.

4 30 HF 1mol/L H 2 O 2 2mol/L 10µm/mim SEM photographs of polished surface of carburized steel remaining carbon contamination. ( 2dm 2 ) 1L ( HF1mol/L H 2 O 2 2mol/L ) 25µm40 3 1µm H 2 O 2 Fe 3+ Cr 3+ Mn 2+ (2) H 2 O 2 H 2 O 2 ( ) H 2 O 2 H 2 O 2 1L SCr420 40g 40

5 31 H 2 O 2 H 2 O 2 10g/L 50 H 2 O 2 HF H 2 O 2 Fig. 1 HF HF H 2 O 2 HF H 2 O 2 HF H 2 O 2 Fig. 1 ( ) I E 1 R R= E I 10µm/min Effect of caffeine on stabilizing of H 2 O 2 in rich metal ion bath at 40. Schematic of measuring circuit for polarization resistance.

6 32 SCr420 SUS304, ( SUS304 ) 30 ( ) HK-103 SCr420 ( ) HF H 2 O 2 (4) Fe 1 ( 55.8g ) HF 3 ( 60.0g ) H 2 O ( 51.0g ) Fe1HF 3 H 2 O 2 3 HF H 2 O 2 1:1 (4) ( 1:0.5 ) Polishing rate sensor. Relations between polarization resistance of stainless steel electrodes and polishing rate of carburized steel at 40. Change in sensor output during chemical polishing treatment.

7 33 2 (2) O 2 50% H 2 O 2 HF H 2 O 2 1:1.2 HF 5.6mol/L H 2 O 2 6.7mol/L H 2 O 2 10µm/mim ±10% Fe g/L HF ( Ca(OH) 2 ) HF CaF 2 Fe(OH) 3 SCr Cr Cr 3+ H 2 O 2 Cr 6+ HF H 2 O 2 2mol/L H 2 O 2 H 2 O 2 H 2 O 2 F H 2 O 2 H 2 O 2 Fig g/L H 2 O 2 F 2mol/L H 2 O 2 15 Bath solution supplying system. Catalytic decomposition of H 2 O 2 in waste solution by phthalocyanine complexes.

8 34 O 2 F 2mol/L H 2 O 2 HF( ) HF ( 1mol/L ) HF recovery from waste solution by electro-dialysis. HF (1) (5) (1) (5) 25µm SCr420 25µm 25µm ( µmrz ) Typical polishing cycle. (1) Shot peenig (2) Alkalline cleaning (3) Water rinse (4) Chemical polishing (5) Chemical polishing(dilute solution) (6) Water rinse (7) Pickling (8) Alkalline neutralization (9) Water rinse (10) Drying Transmission gear sample.

9 35 Fig. 14 Cross-sectional views of carburized steel. Fig. 15 Smoothing of ground surface with chemical polishing. 化がわかりにくい しかし粗さ曲線からは微小凹凸が できた さらに廃液処理の際に障害となるH 2O 2 の迅 完全に消失していることが見て取れよう 速分解法を見いだし 中和処理の問題を解消すると共 5 まとめ 焼入れ鋼を対象とした化学研磨処理について 実用 化をめざした技術開発を行い 加工速度10 µ m/min以 に廃棄物低減をめざした透析法による酸回収の見通し を得た 本処理法は現在 小規模テストプラントによる実証 試験が行われている 上で安定的に研磨作業が行える化学研磨浴組成を完成 なお本研究を進めるにあたり ご協力を頂いたトヨ した 次に分極抵抗法を応用した浴組成管理技術の確 タ自動車(株)の関係者各位に深謝いたします また当 立により 研磨速度の一定保持が可能となり 歯車等 所材料2部 材料1部並びに分析部の方々には貴重な の精密部品で求められる研磨深さの高精度管理が実現 ご助言 ご協力を頂きました 豊田中央研究所 R&D レビュー Vol. 30 No. 1 ( )

10 1), : " ",, -1(1966), 19 2), : " ", (A ), -488(1987), 702 3) [a] : "- ",, -13(1985), 130 [b] : "- ",, -12(1990), ) Barnes, C. and Crichton, T. J. : "Chemical Polishing of Steel Mouls and Dies", Trans. Inst. Met. Fin., (1988), 18 5) :, (1962), 319, 6) Lacal, R. : "Method of Chemically Polishing Iron Zinc and Alloys Thereof", USP (1968) 7) Hart, A. C. : "Bright Dipping and Etching of Copper Based Materials in Solutions of Sulphuric Acid and Hydrogen Peroxide", Trans. Inst. Met. Fin., (1983), 46 8),,,, : " ", 1, (1993), 353 9),,,, : " ", (C ), -572(1994), ) Fischer, G. and City, E. : "Chemical Brightening of Ironcontaining Surfaces of Workpieces", USP (1970) 11), : " ",, -6(1981), ) :

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