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1 [Co/Ru] 20 Antiferromagnetic Exchange Coupling Energy in [Co/Ru] 20 19
2 SF TAMR Co
3 M-H A Ru
4
5 1 1.1 CD DVD MD (HDD) ,1, 1
6 1.2.2 (MR;Magneto Resistance) GMR(Giant Magneto Resistance) GMR GMR (FC;Ferromagnetic Exchange Coupling) (AFC;Antiferromagnetic Exchange Coupling) 1-3 FC AFC FC AFC Ru (Spacer ) Co Spacer Ru FC AFC (Ru) 1-3 FC AFC
7 M-H 1-4 M s t J(>0) 1-4 M-H H E M s H E=-M s thcos -M s thcos +Jcos2 (1) (1) 0 E E θ = 2M sth sin θ 2J sin 2θ = 0 M s thsin -Jsin2 =0 M s thsin -2Jsin cos =0 sin (M s th-2jcos )=0 sin =0 (2-1) M s th-2jcos =0 (2-2) 3
8 (2-1) =0 = (3-1) (2-2) cos θ = M s t 2J H (3-2) cosθ 1 M s t 2J H 1 1 M s t 2J H 1 2J M s t H 2J M s t (4) (3-2) H=2J/M s t (3-2) cos =1, =0 2J M s t H (5) (3-1) =0 H=-2J/M s t (3-2) cos =-1, = H 2J M s t (6) (3-1) = (3-2) 2M s t cosθ = 2M s t M s t 2J H (7) 2M s tcos Mt-H Mt Mt H H s = ± 2J M s t (8) 2M s t Mt H s J = M s th s 2 J m J = mm th s s 2(2m - 1)
9 1.4.2 M-H 1-5 J(>0) M s,t 2M s th H AFC J=M s th 1-5 M-H HDD V K u V/k B T K u k B T K u V/k B T K u H c =2K u /M s M s HD SFMedia TAMR 5
10 1) SF SF (Synthetic Ferri) SF SF nm Ru K u V/k B T SF Co-Cr-Pt-B Ru E-layers Co 2) SFMedia 3)4) TAMR (TAMR;Thermally Assisted Magnetic Recording) K u V/k B T K u V K u H c H c H c TAMR V K u V/k B T K u H c 6
11 t 1 t 2 K u V/k B T (a) T c K u K u V/k B T (b) K u
12 2 2.1 (Ferromagnetic Exchange Coupling;FC) (Antiferromagnetic Exchange Coupling;AFC)., J, AFC. 5)6) 2.2 Cr,Ru,Cu (TM;Transition Metal) (Spacer-layer) Co 3d,4d,5d Co Ru (Ru ) (FC) (AFC) 2-1 [(20 )Co/(t Ru )Ru] 20 t Ru Ru AFC 2-1 [(20 )Co/(t Ru )Ru] 20 t Ru (a) (b) 5) 8
13 Spacer-layer Ru V,Mo,Rh Spacer-layer 2-2 Spacer-layer AFC 6) 2-2 [(20 )Co/(t TM )TM] 20 t TM 2-1 J 1 t peak Spacer-layer t 1st Spacer-layer P AFC 2-1 1st Spacer-layer Ru t peak =3 J=5erg/cm Spacer-layer J,t peak, t P 6) 9
14 Tb-Fe-Co,Gd-Fe-Co Spacer-layer Ru,Rh Spacer-layer ( ) 2-3 7) 1 Spacer-layer Ru,Rh 3,7.9 t peak Spacer-layer 7) 2-3 2M s th w Ru,Rh 8) 2.3 Co 2-4 Co Co 4 M s Co Co Co H s H s Co Co 60 4 M s Co 4 M s -H s =H k E a =K u =(M s H k )/2 K u 8) 2-4 Co 4 M s H s
15 9) 2.4 M-H J=mM s th s /2(2m-1) M-H Co M s A M s =886emu/cm 3,A= erg/cm (a) M-H (b) M-H ( ) Co Co (M-H ) 11
16 2-6 Co 80% 2-6(a) Co 2-6(b),(c) A Co Co A Co 2-6 Co
17 2.5 [Co/Ru] 20 ( )Co (2) [Co/TM] 20 Co [Co/Ru] 20
18 ( SBH-2306RDE) 3 RF13.56MHz 1kW ( 800V 4A)
19 3.2.2 (76mm 26mm mm) 10 ( ) Pa Pa Ar Co,Ru Ru RF Co DC 3-2 Ru Co AFC Ru Co AFC Ru Co Ar 0.9Pa 20rpm
20 cm 1cm ( ( )VSM-5 ) VSM, µm 1/ ( BH-800TC4) 3 5 M-H (z ) Co1 (x,y ) z TM Co 2m= erg/cm 3-3
21 4.1 [Co/Ru] 20 Co 4.2 Co 22.5,54.8 M-H 4-1,4-2 AFC Ru Co 22.5 H s =1.56erg/cm 2 =1.60erg/cm Co 54.8 H s H s =1.77erg/cm 2 =1.50erg/cm 2 A erg/cm 4-1 t Co =22.5 M-H 17
22 4-2 t Co =54.8 M-H 4-1 [Co/Ru] 20 Ru Co Co Co Co Co H s Co
23 4.3 M-H 4-3 M-H Co M-H Co M-H A 4-3 M-H Co Ru Co Co M-H H s Ru M-H M-H 19
24 J M-H, AFC 4-4 M-H (t Co =55 ) 4.4 A M-H A A M-H 4-5 Co 54.8 Co 4-5 A M-H (t Co =55 ) A Co M s 20
25 A Co A Co X Co X deg hcp A erg/cm Co A erg/cm erg/cm A A erg/cm 4-7 A M-H (Etching, t Co =57 ) 21
26 M-H A M-H A A erg/cm M-H A erg/cm M-H M-H A A erg/cm A M-H A erg/cm M-H Ru 4-8 M-H H s M s M-H H s,m s 1.50erg/cm erg/cm 2 22
27 4.6 Ru 2.2 Co Ru t Ru [(60 )Co/(t Ru )Ru] 20 t Ru 4-9 Co Co 60 Co 60 Ru 3 [6] Ru 3 AFC Ru 5~7 AFC t Ru ( t Co = 60 ) 4.7 Co Co60 Ru Co20 AFM
28 M-H (a) (b) (c) (d) 4-10 (a) 1 (b) 1 (c) 20 (d) 20 10) [Co/Ru] 20 Gd-Fe-Co/Ru/Gd-Fe- Co 4-11 Gd-Fe-Co/Ru/Gd-Fe-Co [Co/Ru] Gd-Fe-Co Co 24
29 10) Co/Ru Co Co Co Co Co M-H Co M-H A M-H Ru Co M-H Co Co/Ru 100 Gd-Fe-Co/Ru/Gd-Fe-Co 25
30 5 SF TAMR (AFC) SF TAMR M-H 2m =mm s th s /2(2m-1) M s t H s J Co,AFC Ru [Co/Ru] 20 J M-H Co Co Co Co Co Co M-H Co Ru Co [Co/Ru] 20
31
32 1) ( BP No.779) p ) A.Inomata, B.R.Acharya, E.N.Abarra, A.Ajan, D.Hasegawa, and I.Okamoto,:J. Appl. Phys., 91,7671(2002) 3),,,, MR , pp.13-18, March ),,,, MR , pp.5-9, February 20064) S.S.P.Parkin et al., Phys, Rev. Lett 64, 2304(1990) 5) S.S.P.Parkin et al., Phys, Rev. Lett 64, 2304(1990) 6) S.S.P.Parkin, Phys, Rev. Lett 67, 3598(1991) 7) RE-TM ) H.Wakabayashi, H.Notarys, J.C.Suits and T.Suzuki,;Mat. Res. Soc. Proc. Vol.150(1989) 9) ) Gd-Fe-Co
33 1) RE-TM (2006) 2) (2006) 3) [Co/Ru] 20 14pD-8 p.377(2007) 4) 14pD-7 p.376(2007) 5) ( )
èCémò_ï (1Å`4èÕ).pdf
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