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1 PZT TSC Measurement for Degraded and Damaged PZT Thin Films Capacitors Prepared by Sputtering.

2 FeRAM MFIS : XRD, TEM : XRF, EDS, EPMA, SIMS : SPM, NDM? DLTS DLTS (TSC) (TSC) fatigue,, ( )

3 (1) (2) J T TSC (1) (2) Temp. 28 (1) (2) R.T voltage 2/min Time Trapping Voltage: V t =1.V Collecting Voltage:V c =.5V Time

4 Current (A.U.) TSC Polarization (C/cm 2 ) 8 fatigue TSC (a) (b) (c) (d) (e) (f) +P* ṟ - P*r - -8 P* Switching Cycles 8 (a)fresh (d)1 6 cycles (b)1 4 cycles (e)1 7 cycles (c)1 5 cycles (f)1 8 cysles 8 W (a) (b) (c) (d) (e) (f) Temperature (K) +P * TSC Polarization (C/cm 2 ) - Current (A.U.) Voltage (V) PbOTSC 1 Polarization (C/cm 2 ) TSC - (a) PbO W (b) PbO 5W (c) PbO 6W -8-1 (d) PbO 7W -5 5 Voltage (V) 3 5 Temperature (K) 8 5W DE (a) (b) (c) (d) 53K, PZTPbO( ) FatiguePbO 1 Polarization (C/cm 2 ) W -5 5 Voltage (V) 1 6

5 Fatigue TSC PZT ( )TSC TSC TSCPb TSC O 2 /Ar PZT ( )TSC TSC TSCPb TSC O 2 /Ar TSC (Fatigue) TSC Pb (PbO ) (Ar ) TSC

6 Current (pa) TSC (I) 15 Voltage Temperature Polarization TSC1 TSC2 2 2K/min 1 3 Trapping Voltage: Vt=1.V Collecting Voltage:Vc=.5 Time Temperature (K) TSC TSC1 TSC2 1 2

7 Current (pa) TSC (II) TSC 2 TSC TSC fit J ( T ) E B T = l E l A exp exp dt ' kt β T kt ' E l : : , B: Measured Date Background Temperature (K) Peak2:.61eV Fit Peak1:.8eV TSCfitting 6 (1) Et (2) Jn(T)dt

8 PZT PZT 6 3min (O 2 Ar) 6 5min Pt/PZT/Pt/Ti/SiO 2 /Si(1) PZT :17nm Pt :15nm =.2mm Target r.f. power Substrate temperature Sputtering gas Gas pressure Substrate Deposition time Thickness PZT Pb(Zr.5 Ti.5 )O 3, PbO, TiO 2 Pb(Zr.5 Ti.5 )O 3 5W PbO -7W TiO 2 W 35 Ar:O 2 =4.5:1 1.5Pa Pt/Ti/SiO 2 /Si 6-12min 17nm EVP-24468(ANELVA)

9 8 Switching charge density (C/cm 2 ) P * (a) (b) (c) (d) (e) (f) +P * r -P * r -P * Current (a.u.) (a)fresh (d)1 6 cycles (b)1 4 cycles (e)1 7 cycles (c)1 5 cycles (f)1 8 cysles (a) (b) (c) (d) (e) (f) pa Switching Cycles Temperature () TSC Fatigue 25

10 cycles cycles cycles -1.76eV -1.72eV -1.71eV TSC (pa) -2-3 Background Fit Measured Date.95eV eV eV cycles cycles cycles -1.75eV -1.74eV -1.76eV eV eV eV Temperature ().75eV,.75eV,.95eVTSC.95eV

11 .95eV.75eV eV.95eV

12 TSC (63min) Ar:O 2 = 1:, 9:1, 8:2, 6:4, :1 5TSC 6 Ar 6 Ar:O 2 =9:1 6 Ar:O 2 =8: Polarization (C/cm 2 ) Ar:O 2 =6: O Applied Voltage (V) XRD: (111) (111) XRF: Pb, Zt, Ti

13 TSC 2 Ar:O 2 =9:1 Ar Ar:O 2 =8:2 2 Current (a.u) Ar:O 2 =6:4 O 2 TSC (na) pa Temperature () Temperature () Ar:O2 25 Ar Ar 1% ( ) )

14 TSC 5 Ar:O 2 =9:1 5 Ar:O 2 =8:2 1 Ar:O 2 =6:4-5.5eV -5.51eV -1 TSC (A) O 2 Background Fit Measured Date.9eV.98eV Temperature () eV eV eV Fatigue.95eV.5eV

15 (PbO ) TSC PbO(PbO rf ) rf W, 5W, 6W, 7W 4TSC Pt 111 PbO 7W Intensity (a.u) 1/1 11/ /2 Pb PbO=7W PbO=6W PbO=5W Polarization (C/cm 2 ) PbO 6W PbO 5W PbO W PbO=W 1C/cm (deg.) XRD pattern Applied voltage D-E hysteresis loops

16 (PbO ) TSC 1 1 TSC (pa) PbO=W PbO=5W PbO=6W PbO=7W TSC (pa) PbO=W PbO=5W PbO=6W Temperature () Temperature () PbO 25

17 (PbO ) TSC 2 PbO W 2 1 PbO 5W 2 1 PbO 6W -2 TSC (pa) eV Background Fit Measured Date PbO 7W.94eV Temperature ().96eV eV eV.95eV eV.95eV.95eV Fatigue

18 Pb Pb Pb (PbOx) TSC 25.95eV TSC (.95eV) Pb TSC Pb TSC (PbO ) TSC TSC (PbO ) TSC TSC ( )TSC

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