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1 Fantastic Voyage
2 Fantastic Voyage
3 How Small is Micro & Nano? 1mm 10µm 2nm 1m DNA (m) Macroscopic Mesoscopic Microscopic LSI 100µm M 3 = /MEMS/MST Micromachine (Japan) MST (Micro System Technology) (Europe MEMS Micro ElectroMechanical Systems US 3
4 :10 : ( ) ( ) ( ) 15 SII
5 Bell Lab. 5
6 ? MIT 6
7 MIT Linear Rack Sandia National Lab. 7
8 MEMS2006 at Istanbul 19th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2006 January 22-26, 2006 Lütfi Kirdar Convention and Exhibition Centre, Istanbul Abstracts and Contributions for MEMS Conf. 800 MEMS2006 Submitted; 789 Submitted Accepted Poster Oral
9 Abstracts by Country Asian Countries USA Japan South Korea Taiwan Germany China Switzerland Denmark France UK Canada Netherlands Turkey Singapore Israel Sweden Belgium Italy Misc Micromachine Market Forecast MARKET (billion ) Estimation by Micromachine Center 15 NEW MARKET REPLACE
10 MST/MEMS Market MST NEWS Vol MST/MEMS Market by Application Fields MST NEWS Vol
11 MST/MEMS Market in Consumer Electronics MST NEWS Vol Why Micro? ex. 11
12 bit/inch AFM Data Storage Millipede by IBM, bit/inch 2 Dia: 10 nm, pitch: 20 nm 12
13 Why Micro? ex Digital Micromirror Device (DMD) Texas Instruments 13
14 Why Micro? ex DNA 50µm Conventional CE (35 mm 20 mm) CE using Micro/Nano Structure 14
15 Bio-Disk Platform Bio-Disk droplet of blood Mobile Player Courtesy of Prof. Zengerle Vision application specific disk low-cost disposable process control by frequency integrated detection unit Why Micro? ex. 15
16 Automotive
17 mm 3.6mm SENS (Synthesis Engineering for Nano Systems) Lab. 17
18 Promising Application Fields ACRONYM Bio MEMS Optical MEMS µtas RF MEMS Power MEMS Space MEMS Marine MEMS Agro MEMS Environment MEMS 18
19 Fingerprint Sensor NTT Bio-Detector Kovacs, Stanford Univ. 19
20 Information Technology From RF Communication 20
21 Optical Router by Lucent & AT&T Bell Lab Microsystem for the Land Warrior G. Fleming (TACOM 2001) 21
22 Space Aeronautics z Micro bubble actuator z by CALTEC θ α x y 22
23 MEMS for Amenity, Safety, Maintenance Small Complex System = MEMS Fracture origin 1µm 23
24 Research Trend in MEMS MEMS = Small Complex System in Interdiscipline Multi Scale (Scale Down) MEMS/MS NEMS/NS Multi Physics (Interdiscipline) Physical Sensor BioMEMS, µtas Multi Material (Complexify) Metal, Ceramics, Polymer Miniaturization of Complex System Initially Feature of MM,MEMS MST Batch-Process Pre-Assemble Nowadays In future Nano System Big Question? Can we hold? Batch Process Pre-assemble 24
25 Richard P. Feynman 1959 vs "There's Plenty of Room at the Bottom" Engines for Creation" Eric Drexler MEMS Analysis Synthesis MEMS 25
26 / SENS: Synthetic Engineering for Nano System /
27 COE (1) 21
28 MEMS Micro Electro Mechanical Systems µtas Micro Total Analysis Systems (1, 3) µm µ µ µ
29 µ, Vol.47, pp.6-7, 2004 (4) Basic Operations Applicable Examples Substrate Rotation Stage Resist Moving Mask Stage X-Ray Exposure System Y-axis Stage Alignment Stage X-axis Stage y x z Shutter Substrate Tilting Stage 1 ~180 V Microscope Probe Loadcell Specimens PZT Stage 2
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ISSN 1340-6671 POWER & ENERGY SYSTEM NEWSLETTER No.41 Nov 2010 POWER & ENERGY SYSTEM NEWSLETTER No.41 Nov 2010 POWER & ENERGY SYSTEM 200mm 300mm 450mm 650mm NEWSLETTER No.41 Nov 2010 Abstracts Submitted
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Park NX10 www.parkafm.co.jp Park Systems The Most Accurate Atomic Force Microscope Park NX10 Park NX10 Park Systems The Most Accurate Atomic Force Microscope Park NX10 nm 12 8 4 0 Park Systems The Most
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Park AFM www.parkafm.co.jp Park AFM 02 Park Systems Enabling Nanoscale Advances 04 06 08 10 11 12 14 15 16 18 19 03 Park AFM SmartScan TM 04 Park Systems Enabling Nanoscale Advances 05 Park AFM 06 Park
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107th Annual Meetiung & Exposition of The American Ceramic Society 2005 suzuki@iae.kyoto-u.ac.jp 2005 4 10 13 107 4 11 16 30 1 Baltimore Marriott Waterfront 20 27 15 3 10 2 1 4 6 4 9 10 11 11 15 30 2 Exposition
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Original (English version) Copyright 2001 Semiconductor Industry Association All rights reserved ITRS 2706 Montopolis Drive Austin, Texas
INTERNATIONAL TECHNOLOGY ROADMAP FOR SEMICONDUCTORS 2001 EDITION EECA, European Electronic Component Manufacturers Association () JEITA, Japan Electronics and Information Technology Industries Association
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