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1 PFW7 7 M.L/min 6L/min L/min L/min 6 /8 / / N F (L/min) 6 Rc NPT G PFW7PFW7 PFW7PFW7 PFW7PFW7 PFW7 P. N M m 7 NPN 67 PNP M SI SI L/min L ms Rc,NPT,G PFW7 PFW7 PFW7 PFW7..L/min.77.L/min.L/min 7L/min..L/min.77.L/min.L/min 7L/min.L/min 6L/min L/min L/min.L/min.L/min.L/min L/min.L/pulse.L/pulse.L/pulse L/pulse F.S. F.S. F.S. F.S. F.S. 7m 8m 6g g 7g g /8 /8/ // / LED L/mingal(US)/min Lgal(US) MPa.MPa L -8 NPN 8mV8mV PNP 8m.V8m NPNPNP ON OUT OUT s 6digits DCV IP6 CV MDCV Vp-p s ns PFW7F.S. SIL/minL OFF 6HdigitsP_P_n_n_7digits OUTn_,n_,P_,P_, 7CE

2 PFW C 6 /8 / /.L/min 6L/min L/min L/min 6 N F (L/min) Rc NPT G PFWPFW PFWPFW PFWPFW PFW C P. N P. e-con M m V m PFW PFW/ PFW PFW PFW PFW PFW.L/min 6L/min L/min L/min MPa.MPa F.S. F.S. RcNPTG F.S. F.S.F.S. N PFW mv V F.S.kk m F.S.DCV6DCV DCV m IP6-8 CV MDCV Vp-p s ns F.S.PFW F.S.PFW g 7g 6g,g /8 /8/ // / PFW/ g CE lphabet Index

3 NPN PNP M SI SI L/min L.L/min 6L/min L/min L/mim PFW PFW PFW PFW..L/min..L/min.L/min.L/pulse L/mingalUS/min LgalUS L g NPNPNP LED ON OUT OUT DCV s 6digits NPNPFWPFW 8m V8m V 8m.V8m PNPPFWPFW.77.L/min.77.L/min.L/min.L/pulse.L/min.L/min.L/min.L/pulse 7L/min 7L/min L/min L/pulse SIL/minL OFF PFW 6HdigitsP_P_n_n_7digitsOUTn_,n_,P_,P_, 7CE PFW/ PFW/ ms F.S. F.S. m F.S. F.S. 6m IP -8 CV MDCV Vp-p s ns PFW F.S.F.S. M

4 PFW C P. M SI NPN PNP B P. MSIL/minLOFF VccV CE..L/min..L/min.L/min L/mingalUS/min LgalUS L999999galUS DCV m mm DCV8k NPNPNP digits s F.S. F.S. F.S. ON OUT IP6IP 6 8RH Vpp s ns 8PPe-con PBTPETCR 6g 7 7.L/pulse PFW/T--.77.L/min.77.L/min.L/min.L/pulse PFW/T--..L/min..L/min.L/min.L/pulse PFW/T-- 7L/min 7L/min L/min L/pulse PFW-- ms NPNPFW 8m V8m V 8m V8m PNPPFW L/min L PFW/ M PFWV lphabet Index

5 PFW7, (MPa) PFW7, (MPa)..... PFW7, (MPa) (L/min) (L/min) (L/min) PFW7,... (MPa) (L/min) q w e w r SUS NBR PPS PPS 6

6 zv 6 6 OUT FOR WTER FLOW SWITCH ø. DOWN UP SET OUT PFW77 PFW7 DOWN UP SET OUT OUT FOR WTER FLOW SWITCH L ø. 6 PFW7 PFW7 L 6 PFW7--7(-M)NPN PFW7--67(-M)PNP OUT DC V DC V OUT OUT OUT DC(+) OUT DC( ) OUT ø. 7 lphabet Index

7 PFW FLOW SWITCH UP SET OUT OUT DOWN ø

8 zx, PFW-(N)- PFW-(N) L 6 B.6 ø.. ø. PFW PFW L ø..6 B. ()DC() ()OUT ()NC/ ()DC() SMCPFW/ B 6 7 B PFW/ DC V DC V DC V NC PFW/ PFW- PFW/ DC(+) NC DC( ) OUT PFW-- PFW-- 9 lphabet Index

9 PFW-(N)- ø B B DCV [V] [L/min] PFW-- PFW-- PFW-- PFW [L/min] [L/min] DCm [m] [L/min] PFW-- PFW-- PFW-- PFW-- [L/min] [L/min]

10 PFW- zx,.8 SMC FLOW SWITCH RESET SET UNIT.8.. PFW NC PFW OUT OUT DC V 9. 7.= M PFW NC c PFW OUT OUT DC V R..mm R. lphabet Index

11 PFW L/min L OUT SMC SET FLOW CH R.8mm

12 CH P r e w q PIN q DC w N.C. e DC r IN V 8P q w e r t y PIN q w e r t y u i u i DC () DC () CH_OUT N.C. CH_OUT CH_OUT CH_OUT N.C. No. 8 N.C. 7 CH_OUT 6 CH_OUT CH_OUT N.C. CH_OUT DC(-) DC(+).9mm 8.mm.mm.8mm PFW NC NC NC NC DC CH_OUT CH_OUT CH_OUT CH_OUT DC DCV PFW NC NC NC NC DC CH_OUT CH_OUT CH_OUT CH_OUT DC DCV lphabet Index

13 PFW7 T 7.L/min 6L/min L/min N F Rc NPT G T 9 6 /8 / / (L/min) 6 PFW7TPFW7T PFW7TPFW7T PFW7T P. N M m 7 NPN 67 PNP M SI SI L/min L ms Rc,NPT,G PFW7T PFW7T PFW7T..L/min.77.L/min.L/min..L/min.77.L/min.L/min.L/min 6L/min L/min.L/min.L/min.L/min.L/pulse.L/pulse.L/pulse 9() F.S. F.S. F.S.9 7m 7g /8 /8/ // LED L/mingal(US)/min Lgal(US) MPa.MPa L NPN 8mV8mV PNP 8m.V8m NPNPNP ON OUT OUT s 6digits DCV IP6-8 CV MDCV Vp-p s ns F.S.F.S. SIL/minL OFF 6HdigitsP_P_n_n_7digitsOUTn_,n_,P_,P_, 7CE

14 .L/min 6L/min L/min N F Rc NPT G PFW 6 /8 / / 6 (L/min) PFWTT PFWTT PFWT T T 9 RcNPTG PFWT L/min.L/min 6L/min MPa.MPa 9 F.S. F.S. F.S.F.S. N PFWmV V F.S.kk m F.S.DCV6DCV DCV m 66g // /8/ /8 PFWT PFWT PFW/ g CE IP6-8 CV MDCV Vp-p s ns /(PFW/PFW) P. N P. M m C C e-con V m PFW PFW/ PFW P. lphabet Index

15 PFW7T,T PFW7T,T PFW7T,T...7 (MPa)..... (MPa).... (MPa) (L/min) (L/min) (L/min) q w e w r SUS FKM PPS PPS 6

16 (.) 77 DOWN U P SET OUT OUT FOR WTER ø. FLOW SWITCH PFW7T7T7T zv PFW7T--7(-M) PFW7T--67(-M) OUT DC V OUT OUT OUT DC V DC(+) OUT DC( ) OUT 7 lphabet Index

17 B DCV [V] [L/min] PFWT-- PFWT-- PFWT--. 6 [L/min] [L/min] DCm [m] [L/min] PFWTTT-(N) ()DC() ()OUT ()NC/ ()DC() SMCPFW ø B zx, PFW/ DC V DC V DC V NC PFW/ PFWT- PFW/ PFWT-- PFWT-- PFWT-- [L/min] [L/min] DC(+) NC DC( ) OUT PFWT-- PFWT-- 8

18 LED PF7 PF nor OUT OUT UP SET DOWN OUTON OUTON RESET UPDOWNRESET q w e r t y u LCD OUT OUTON SIL/minLm m PF CHnor L/minL UP SET DOWN MODE RESET UPDOWNRESET q w e r t y u i LCD OUTCHON UP SET DOWN q w e r t y u i OUT SET CH L/min L DOWN UP OUT OUT SET SMC FLOW SWITCH SET RESET UNIT r e w q q w e t y r u t y u q w e y u q e w t y r i u PF77777 PFW7T7T7T7 PF7H76H7H PF PFW PF PFW r t i U P SET MODE DOWN 9 PF lphabet Index

19 PF OFF PF7H CFM=ft /min L/min CFM - CFM - L/min CFM L/min GPM GPM=galUS/min.kPa.kPa6%RH(NR) L, m,m SI(L/minL, m,m ) PF7H L ft - ft,ft,ft 6 L galus OUT OUT OUT P n P n ON OFF ON OFF YES NO YES NO P- n- ON OFF P- P- H H H ON OFF P- P- ON OFF n- n- H H H ON OFF n- n- P ON OFF OUT msec ON n OFF SIL/min L, m,m

20 LED OUT8m OUT8m OUT OUT RESET PF7H PF7H LED PF q w em r t ypf u PF OFF PF PF/W PF PF lphabet Index

21 WG.7mm.mm PVC.mm M PF7H PFW7T PF PFWT e-con PF PFW ZS-8-C- e-con M 7--FL -76- XN- V-D XS P-I HR CM-8DPS M ZS-7- m e-con RoHS B ZS--E ZS-6-B ZS-6-C M UP DOWN SET OUT OUT M e-con PF PFW PF PFW M8L B PF

22 CEU Series CEU NPN P PNP CV D DCV RS-C B RS-C BCD COM COM COM B DCV GND F.G. R.S. HOLD BNK BNK MULTI COUNTER:CEU UP COUNT PRESET FUNC. LEFT RIGHT MODE DOWN SEL. SET C~VCOM OUTOUTOUTOUTOUTS.STOP RD SD SG RS-C (PF) COM COM COM B DCV GND F.G. R.S. HOLD BNK BNK MULTI COUNTER:CEU UP COUNT PRESET FUNC. LEFT MODE DOWN SEL. RIGHT SET BCD C~VCOM OUTOUTOUTOUTOUTS.STOP RD SD SG RS-C OUTOUT RS-C OUTOUT Lft UPDown CEU PHSEUPDown UPDown-COMB-COM Best Pneumatics No.eCE Series lphabet Index

23 PFq SMCM-- q w e r t y u i o PF7H! Rc /8 Rc / Rc /8 Rc / Rc / Rc Rc / Rc q EEPROM 6 w PF7H q Nm w e r t 9m/s y 9N u i

24 q w e etc. r t q w(98m/s )(9m/s ) e r CE t y u 9! Nm!8 o!8 q SMCM-- PFw lphabet Index

25 q w e r t %% y qoff w e 6 r t L/min.kPanor.kPa6RHNR L/min.kPa.kPa f=kv fvk q w e u SMCM-- 6 PFe

26 PFr SMCM-- () PF PF PF PF L/min L/min L/minL/min L/min L/min L/min L/min L/min.L/min.L/min L/min L/min L/min L/min.L/min L/min.L/min L/min L/min PF PF PFW PFW PFWT PFW PFWT PFW PFWT L/min L/min L/min L/min L/min L/min L/min L/min.L/min L/min L/min L/min L/min L/min L/min.L/min L/min.L/min.L/min L/min 6L/min.7L/min 7L/min L/min L/min.L/min L/min PFW 7L/min L/min L/min L/min lphabet Index 7

27 PFt SMCM-- q (98m/s ) wn N q w() e r F.G. qce w e"ip6" IP6 M8L // 8 ZS-6-B qzs-8-c- mm DC DC INV w No. 8 N.C. 7 CH_OUT 6 CH_OUT CH_OUT N.C. CH_OUT DC DC m

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