Journalof the Ceramic Society of Japan 110 [ 8 ] (2002) Paper 透光性ナノ構造γ-AI2O3の光学特性及び粒径依存性 野田弘之 金 煕濬 豊橋技術科学大学, 豊橋市天伯町雲雀i一丘111 Optical Pr

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1 Journalof the Ceramic Society of Japan 110 [ 8 ] (2002) Paper 透光性ナノ構造γ-AI2O3の光学特性及び粒径依存性 野田弘之 金 煕濬 豊橋技術科学大学, 豊橋市天伯町雲雀i一丘111 Optical Properties and Dependence of Optical Transmittance on the Particle Sizes of Nano-Structured Translucent γ-al2o3 Ceramics Hiroyuki NOI A and Hee Joon KIM Toyokashi University of Technology, Hibagaoka, Tempaku-cko, Toyohashi-shi Nano-size γ-al2o3 particles of four different sizes were synthesized by MOCVD (Metal Organic Chemical Vapor Deposition) method and then translucent nano-structured γ-al2o3 ceramics are pelletized under a pressure of 2.5 GPa by a uniaxial compaction-method. Although these nano-structured γ-al2o3 ceramics showed low density, they were fairly translucent. The relationship between transmittance and thickness of these specimens can be described by lambert-beer's law. The nano-structured γ-al2o3 ceramics with differ- ent particle diameter and thickness have been prepared in order to clarify the dependence of particle size on the optical transmittance. The optical transmittance decreased with increasing initial particle diameter. In the case of 0.20 mm thickness samples, the γ-al2o3 with 5.6 nm initial particle diameter showed an optical transmittance of about 60%. However, the optical transmittance decreases less than 5% when initial particle diameter is increased to 34.4 nm. This phenomenon could be explained by Rayleigh scattering, which is the scattering due to the particle diameter being much smaller than the wavelength of light. In these visible regions( nm), a scattering coefficient related with Rayleigh scattering was inversely related to the fourth power of the wavelength and directly proportional to the square of the grain size. [Received February 8, 2002; Accepted April 18, 2002] Key-word: Nano-structure, Rayleigh scattering, Alumina, CVD, Nano-Particle, Translucent ceramics 1.緒 言 一般に.アルミナは広いバンドギャップ 10.5eV)を持つ ため,近赤外から紫外線の慣域で良好な透光性を示すことが予 想される.可視光のエネJI/ギ-では.電子は低エネ)L'ギ-から 高エネルギー域に励起することができず.原子価帯(Ⅴ血nce Band)から導電帯(Conduc亡ion Band)に移動しないた軌 光吸収は起こらない.ア}L,ミナはこのような戟点からも光透過 材料として期待=される材料の一つである. 多くのセラミック材料は粒界及び粒界に存在する気孔に起因 した光の散乱 吸収のため光透過性が乏しい. Lかしながら, 高密度に購結することでこれらの要田を排除すれば遣光性を有 するセラミックスを得ることができる.この例としてルカロッ クス1), -サイアロンB)が知られており.これに関連してホッ トプレスを用いる方法や,添加物を加えることによゥて気孔を 減らす方法等が研究されている.一方.初期粒子サイズをナノ サイズまで小さ(することで遠光性ア)i,ミナを作製しようとす またγ-Al呈03ナノ粒子は触媒迫体としても用いられている.粉 砕法でKaragedovとLyakhovら9)が微細なα-A120 粒子を得 た例もあるがその大きさは平均粒径で10nm以下になるとい う報告はない. 本研究で必要な原料瀞体は紫外線 可視光の故長よりも小さ く,粒径が異なるナノサイズのγ-A1203粉体が数種類必要で ある この原料粉体はNodaら過去の研究結果10)をもとに MOCVD法により任意の粒径に制御させて合成することとし た.不純物の影響を最小化するた軌添加卦を加 ずに-軸成 形によって作製したナノ構造アJtJミナの光透過性の初期粒子径 俵有性を可視光の蘭城山 nm)で定量的に検討した. 2.実験方法 ナノサイズアルミナ粉体の合成に用いた管状MOCVD反応 装置を図1に示す 出発原料として高純度AI(CH3)3 (Aldridi る動きもある ナノ粉体を出発原料と.した透光性材料の製作 は,.庫括助剤や添加物を使わずに成形体を得ることが可能で, 添加剤による第二相の影響を排除することができる利点もあ る. Ouyangら3)叫まSol-Gel韓で作製した蝿03ナノ粒子膜 の光透過性を報告している. Shandanら5)叫まY203及びA1203 ナノ粒子を-軸成形することで良好な光透過性を有するセラ ミッグスが合成できることを報告している.しかし,これらの 結果はナノ粒子を用いれば良好な光透過性セラミックスが得ら れる事実を定性的に示したにすぎず,ナノサイズ粒子における 粒子径と光透過率の関係を定量的に明らかにした報告昧まだな されていない. 対象とする材料はy-Al203とした.ア)レミナのナノ粒子を液 相や気相で合成した場合,熟的に安定なα相ではなく6又は γ-a1203相などの遷移ア)i/ミナとなることが知られている7),8) Fig. 1, Schematic diagram of thermal MOCVD system.

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