Microsoft PowerPoint - TMTinst_ _summerschool_akiyama
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11 590nm 2200nm
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30 1.0 x x x x0.1 bg/30ms GS/30ms GS/sqrt(bg) R-band I-band J-band H-band K-band x x x x0.1 bg/100ms GS/100ms GS/sqrt(bg) R-band I-band J-band H-band K-band
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35 W22 W 21 W 21 W 22 S1 X S1 Y W 11 W 12 S1 Y S1 X W 11 W 12 S1 X =C x 1/2 x ( W 12 W 11 + W 22 W 21 ) S1 Y =C x 1/2 x ( W 21 W 11 + W 22 W 12 ) S1 X =C x 1/2 x ( W 12 W 11 ) S1 Y =C x 1/2 x ( W 21 W 11 ) 35
36 S1 X W 11 W 12 S1 Y W S2 X W 21 S2 Y W = 1/2 S3 X S3 Y S4 X S4 Y s = A w w =( A T A ) -1 A T s 36 W 23 W 31 W 32 W 33
37 BS-plate 37
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42 Element count 1024 = 32x32 (goal: 4096 = 64x64) Pitch Aperture size Fill factor 98% Actuator yield > 99% Stroke (overall) 300 1,000 um 10 30mm (goal: 20 60mm) 20 um Stroke (at highest spatial freq.) 4 um Surface roughness (RMS) Flatness (controlled; RMS) Bandwidth First resonance < 20nm (goal: <10nm) < 20 nm > 100Hz > 1kHz Hysteresys < 0.1% Reflective surface Uniformity of surface reflectivity Stability Repeatability Resolution Maximum drive voltage Gold (Silver) w/ overcoat ±1% RMS < 4nm < 4nm < 4nm < 300V Operating temperature (goal: ) Relative Humidity 0 90 % Altitude m 42
43 Continuous mirror (smooth phase control) Segmented mirror (uncoupled control) 43
44 IRIS AO web page 44
45 ALPAO web page. AO4ELT2 booth 45
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47 ピエゾを いた場合の現状として Palomer/PALM3000 の例 Xinetics 3388 素 66x66 素 が1.8mmピッチで並ぶ ケーブリングが 変なことになっている 隣どうしのストロークは 12um 1.2um Bouchez et al. 2008, SPIE 47
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69 Acquisition camera DM CL- WFS To IRCS Science pickoff CL-WFS OAE Room for CU OL- WFS OL- WFS DM Beam from the telescope OL- WFS Room for LGS- 69 WFS
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73 Laser Guide Star Tip-Tilt Guide Star 73
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75 Target Star 3 Gide Stars 3 Guide Star WFSs Atmospheres Target WFS Aperture 75
76 位相板と口径との距離が 48.3cm 位相板上での光路の重なり トモグラフィーで 200 直接測定した波面 推定した波面 残差波面 RMS = 310.0nm RMS = 30.07nm 76
77 Si/HfO2 Bimorph spring Original Points 1. HfO2 crystallization-induced stress is used to introduce large out-of-plane deflection. 2. Relatively soft spring structure (small spring constant) instead of fixed posts is used to increase the stroke. 3. High optical quality mirror surface is guaranteed by the top layer of SOI wafer and the Si-Si plasma activation bonding. High-stroke MEMS-DM Structure 77
78 (c) Bonding and release 78
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スライド 1
R&D activities targeting MOAO and demands from a university group 多天体補償光学系の基礎実験と大学からの要望 秋山正幸 ( 東北大学理学研究科 天文学専攻 ) Masayuki Akiyama (Astronomical Institute, Tohoku) 多天体補償光学系の基礎実験 : 羽根一博, 呉同 ( 東北大学工学研究科 光
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可視赤外線観測装置技術ワークショップ 2 月 23 日 14:30-15:00 光 MEMS :Deformable mirror 東北大学大学院工学研究科ナノメカニクス専攻羽根一博 発表内容 1. 光 MEMS の紹介 マイクロミラー 可変格子 集積型センサ Si 導波路干渉計 2. 焦点可変デフォーマブルミラーの製作 曲げモーメント駆動による焦点可変ミラー 焦点可変ミラーを備えた光スキャナー 波面補償デフォーマブルミラーの製作
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