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1 光学応用MEMSデバイスの最適化設計 MEMS 光学設計ソリューションセミナー 2014年11月6日 15 10 15 50 ベルギー王国大使館 もくじ OOFELIE::Multiphysicsによる 光学応用MEMSデバイスの最適化設計 (MEMS = Micro Electro Mechanical Systems) Optimized Design for Optical MEMS Devices using OOFELIE::Multiphysics 年吉 洋 2 光MEMS研究室紹介 3 事例 MEMS画像ディスプレィ 4 事例 天文分光器シャッタ 5 結論 Hiroshi TOSHIYOSHI 東京大学 1 MEMSとは 先端科学技術研究センター Research Center for Advanced Science and Technology (RCAST) The University of Tokyo Page 1 Page K. Takahashi, 2007 米国テキサスインスツルメンツ社のデジタルミラー プロジェクタ T. Takahashi, IIS, Univ. of Tokyo 2006 光ファイバ通信 マイクロステージ機構 光学アラインメント シャッタ K. Isamoto, Santec Corp., 代表的なMEMSデバイスの例 K. Takahashi, IIS, Univ. of Tokyo 2005 MEMS静電アクチュエータ Page 2 Page 4

2 1975年のマイクロミラー型ディスプレィ MEMS World-wide Market ( ) MEMS市場が新たな成長期に入った R. N. Thomas, J. Guldberg, H. C. Nathanson, P. R. Malmberg, IEEE Trans. ED vo. 22, 1975 Westinghouse Research Labs & Philips 2009年までは インクジェット用 ヘッドと画像プ ロジェクタが市場を牽引 2010年のMEMS市場は 71億280万米ドル その後2ケタ成長して 2015年には113億米ドル スマートフォン タブレット端末のセンサが牽引役 Page 5 Misc. Thermopile Drug Delivery Lab-on-Chip Micro Valve Gas Sensor Flat Panel Display Auto Focus& Zoom Clock Oscillator Fiber Optic Communication RF-MEMS Switch and Varactor Bolometer Wafer Probe Card Silicon Microphone BAW DLP (Digital Light Processing) Ink-jet Print Gyroscope Pressure Sensor Accelerometer Page 6 光学応用MEMSデバイスの最適化設計 もくじ 1 MEMSとは 2 光MEMS研究室紹介 3 事例 MEMS画像ディスプレィ 4 事例 天文分光器シャッタ 5 結論 Page 7 Telecom Display Telecom CMOS-MEMS Medical Endoscope Light Modulation CMOS-MEMS Flexible MEMS Photonic CrystalPage 8

3 x x x Optical Coupling Transmitter Receiver LD l 1 WL MOD LD l 2 WL MOD Rerouting WF WF PD l 1 PD l 2 LD l 3 WL MOD LD l 4 WL MOD MUX Fiber Amp Sw Sw DEMUX WF WF PD l 3 PD l 4 LD l N WL MOD Wavelength Tuning Intensity Modulation Wavelength Equalizer Wavelength Equalizer / Dispersion Compensator OADM / OXC Rx Tx WF Wavelength Filtering / Tracking PD l N Page 9 Page 10 Powering at 1.5 um OCT measurement at 1.3 um OCT Probe λ 1.3 µm Tissue under Test OCT Probe In (λ 1.3 µm) Power Supply (λ 1.5 µm, 500 Hz) OCT Probe Out (λ 1.3 µm) Photovoltaic Cell 10 mw, λ 1.5 µm! max. 11 V GRIN Lens (Collimator) Beam Splitter MEMS Scanner 7 ~ 10 V, 250 Hz Focusing Lens 5 mm Sheath φ 6 mm Single Mode Fiber Photovoltaic Cell MEMS Scanner Page 12 Page 13

4 1.5 µm Modulation Outside Body Inside Body (in vivo) 1.3 µm Photo Detector Probe WDM Filter Reference Mirror Connectors Single Mode Fiber Disposable Modulation Probe Endoscope Back-scattered Probe Signal Tissue MEMS Scanner Head Photo by C. Chong, Santec. Co Photo by C. Chong, Santec. Co Page 14 Page 15 External Cavity Laser Scanner Beam Expander Gain Chip Output 3cm MEMS Scanner Diffraction Grating Page 17 Page 18

5 This research is supported by Optoelectronic Industry and Technology Development Association (OITDA), subsidized by JKA through its Promotion funds from KEIRIN RACE. Page 20 Tadpole Page 21 Page 22 Page 23

6 ! Bonding Pad for Piezo H-scan A B Page 24 Page 25 Upper Electrode PZT To Mirror Bottom Electrode Substrate Torsion Bar To Substrate Torsion Bar Applied Voltage with Resonant frequency PZT Actuator Group-A PZT Actuator Group-B Mirror PZT Mirror tilt by twisted torsion bar Page 26 Page 27

7 サスペンション上の電極 配線 目標性能 SVGAクラス 水平25kHz 画角40 くらい To Next Stage Piezo A From Previous Stage Piezo B Piezo A Target This work (720p) Piezo B Electrode for H-Scan Bottom Electrode Ref.) Aslihan Arslan, Dean Brown,Wyatt O. Davis, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,VOL.19,NO.4,AUGUST2010 Page 28 MEMS光スキャナの駆動原理比較 プロジェクタ Electromagnetic drive Electrostatic drive Deflection angle Large Large Small Driving voltage 10-60V <3V V Power consumption Small Large Small Package compact Large(Magnet) Compact(vacuum seal) Vacuum seal Not needed Not needed Needed Curie temperature External force - Magnetic energy Stanley Electric Co., Ltd. Ref.) Microvision Inc. デモ CEATEC 2013 圧電 コンパクト フラット 大角度 Piezoelectric drive Page 30 - Ref.) Fraunhofer ISIT Page 31 Page 42

8 z θ d 2 x 0 r d 1 d1 d = z 2 x0 d 2 d d rs + D z d f z d = z f = 2 θ < 0.14rad Page 44 Page 47 Gyro Scanner Page 48 Page 49

9 Page 50 Page 51 Incident Light from Galaxies MEMS Shutter Array (Multi Slits) Gratings / Prism Spectra Page 52 Page 53

10 Page 57 Page 58 Electrical Drive Mechanical Response Optical Ray Tracing Electrostatic Latch Aperture Control Stray Light Estimation Incident Light Reflection Drive Voltage V d 8,000 Shutters SOI BOX Shutter/Mirror 1 x 10 Subunit Electrostatic Micro Shutter Array for Infrared Spectrograph T. Takahashi, M. Mita, H. Fujita and H. Toshiyoshi IEEE / LOES Optical MEMS 2005, Finland (Collaboration with Astronomical Center, Univ. of Tokyo) Page 59 Silicon Substrate Torsion Hinge Shutter Angle Bias Voltage θ" Electrostatic Torque V b Micro Torsion Plate (Mirror / Shutter) 100 um x 1000 um 3 x 10 Array Page 60

11 Page 62 Page 63 Page 64 Page 65

12 Page 66 Page 67 Page 68 Page 69

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