SEC-N100Series.indd

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1 Digital Mass Flow Controller SEC-N102 SEC-N102W 124~ 106~ SEC-N104 SEC-N104W 124~ 106~ CC-Link SEC-N ~ DC24V SEC-N ~ 1.0% S.P. 1 RoHS

2 LED HORIBA STEC Series CC-Link Series CC-Link 124mm106mmW 10 SCCM1000 SLM WSEC-N102SEC-N104 1/4VCR RS485 F-Net Protocol 05VDC 15VDC5% PE ODVA 05VDC, 010VDC 420mA 24VDC 1332VDC 05VDC, 010VDC 420mA 24VDC 1332VDC SEC-N102 SEC-N102W SEC-N104 SEC-N104W SEC-N ~ 106~ 124~ 106~ 124~ SEC-N ~ 10 SCCM 10 SLM SEC-N112 SEC-N112W SEC-N114 SEC-N114W SEC-N115 SEC-N SLM SEC-N122 SEC-N122W SEC-N124 SEC-N124W SEC-N125 SEC-N SLM SEC-N132 SEC-N134 SEC-N mm 132mm 132mm SEC-N mm 200 SLM SEC-N mm SEC-N mm SEC-N mm SEC-N mm 1000 SLM SEC-N172 SEC-N174 SEC-N175 SEC-N176 SEC-N11WSEC-N12W1/4VCRSEC-N13SEC-N141/2VCR 2SEC-N175% 1

3 Accuracy ±1.0% S.P. : % F.S. ±0.3% F.S. : 30% F.S. SEC-N11WN12W 100% 80% 60% 40% 20% 0 20% 40% 60% 80% 100% y=ax 5 +bx 4 +cx 3 +dx 2 +ex+f 5V : 100% : 80% Variable PID1 Variable PID Variable PIDPID SEC-Z500X 3V : 60% : 40% 1V : 20% : 10% 0 1sec 2sec 3sec SiH4 Ar CO CF4 O2 Configuration Software MRMG N2N2 SiF4 SF6 NF3 C2H4 C2F6 H2 PH3 N2 Easy spec change at customer RS232C N2 MRMG SCCM MRMG-04 N SCCM SCCM Ar 110 SCCM N2 250 SCCM 5250 SCCM RS232C PC (Windows) Configuration Software Serial Converter Power supply +15, -15VDC PE-S7 CA-DP9RJ45 SC-EDH CC-Link LANRS485 2

4 SEC-N112MGM SEC-N114MGM SEC-N115MGM SEC-N116MGM SEF-N112MGM SEF-N114MGM SEF-N115MGM SEF-N116MGM SEC-N112MGRW SEC-N114MGRW SEC-N115MGR SEC-N116MGR SEF-N112MGRW SEF-N114MGRW SEF-N115MGR SEF-N116MGR SEC-N122MGM SEC-N124MGM SEC-N125MGM SEC-N126MGM SEF-N122MGM SEF-N124MGM SEF-N125MGM SEF-N126MGM SEC-N122MGRW SEC-N124MGRW SEC-N125MGR SEC-N126MGR SEF-N122MGRW SEF-N124MGRW SEF-N125MGR SEF-N126MGR N2 MR.MG SECF-N17R R01 : 10SCCM R1.5 : 17.5SCCM 01 : 30SCCM 1.5 : 55SCCM 02 : 100SCCM 2.5 : 175SCCM 03 : 300SCCM 3.5 : 550SCCM 04 : 1SLM 4.5 : 1.75SLM 05 : 3SLM 5.5 : 5.5SLM 06 : 10SLM 6.5 : 22SLM 07 : 30SLM 08 : 50SLM SEF SEF kPad MR.MG-5.5,06:100300kPad Pam 3 /s He PTFE 2 C 2% 2100% 0100% 1.0%S.P.30%F.S. 0.3%F.S.30%F.S Pam 3 /s He PTFE % 0.2% 300kPad 450kPag 1000kPag Pam 3 /s He PTFE kPad 1/4" VCR1/4" Swagelok 3 1 MR.MGSECF-N17RSEMI 2 PTFE3 1/4" SwagelokSEC-N1RW 4 3/8" SwagelokSEC-N13RSEC-N14R5 0kPag Pam 3 /s He PTFE 2 SEC-N102W SEC-N112MGM SEC-N112MGRW SEF-N112MGM SEF-N112MGRW 15V5%150mA 15V5%200mA SEC-N122MGM SEF-N122MGM SEC-N122MGRW SEC-N132MGM SEF-N122MGRW SEF-N132MGM SEC-N132MGR SEC-N142MGM SEF-N132MGR SEF-N142MGM 0.15VDC2% 1M 05VDC0% 2k RS bpsF-Net Protocol 15V5%150mA 15V5%150mA 15V5%250mA 15V5%150mA SEC-N142MGR SEF-N142MGR SEC-N172R SEF-N172R 15V5%150mA 15V5%200mA SEC-N104W SEC-N114MGM SEF-N114MGM SEC-N114MGRW SEC-N124MGM SEF-N114MGRW SEF-N124MGM SEC-N124MGRW SEC-N134MGM SEF-N124MGRW SEF-N134MGM SEC-N134MGR SEC-N144MGM SEC-N144MGR SEC-N174R SEF-N134MGR SEF-N144MGM SEF-N144MGR SEF-N174R DeviceNet Protocol ODVA DC24V 7.0VA 4.0VA 7.0VA 3

5 SEC-N132MGM SEC-N134MGM SEC-N135MGM SEC-N136MGM SEF-N132MGM SEF-N134MGM SEF-N135MGM SEF-N136MGM SEC-N132MGR SEC-N134MGR SEC-N135MGR SEC-N136MGR SEF-N132MGR SEF-N134MGR SEF-N135MGR SEF-N136MGR SEC-N142MGM SEC-N144MGM SEC-N145MGM SEC-N146MGM SEF-N142MGM SEF-N144MGM SEF-N145MGM SEF-N146MGM SEC-N142MGR SEC-N144MGR SEC-N145MGR SEC-N146MGR SEF-N142MGR SEF-N144MGR SEF-N145MGR SEF-N146MGR SEC-N172R SEC-N174R SEC-N175R SEC-N176R SEF-N172R SEF-N174R SEF-N175R SEF-N176R 09 : 100SLM 10 : 200SLM 300/500/1000SLM N2 MR.MG SECF-N17R Pam 3 /s He kPad C / O 2% 2100% 0100% 1.0%S.P.35%F.S. 0.35%F.S.35%F.S % 0.2% Pam 3 /s He 300kPad 450kPag 1000kPag Pam 3 /s He 1/2" VCR3/8" Swagelok kPad Pam 3 /s He 5% 5100% 2%F.S. 2T98Typical 1% 1% kPa(d)300/500 SLM kPa(d)1000 SLM 350kPad 350kPag Pam 3 /s He SUS316 / SUS304 PTFE 2 1/2" VCR1/2" Swagelok SEF 1 SEF SCCMSLMmL/minL/minat0101.3kPa CC-Link SEC-N105 SEC-N115MGM SEF-N115MGM SEC-N115MGR SEF-N115MGR SEC-N125MGM SEF-N125MGM SEC-N125MGR SEF-N125MGR SEC-N135MGM SEF-N135MGM SEC-N135MGR SEF-N135MGR SEC-N145MGM SEF-N145MGM SEC-N145MGR SEF-N145MGR 0.15VDC0.210VDC4.3220A2% 05VDC010VDC420mA0% CC-Link Protocol 1CC-Link Ver VDC1332VDC 7.5VA 4.5VA SEC-N175R SEF-N175R 7.5VA SEC-N106 SEC-N116MGM SEF-N116MGM SEC-N116MGR SEF-N116MGR SEC-N126MGM SEF-N126MGM SEC-N126MGR SEF-N126MGR SEC-N136MGM SEF-N136MGM SEC-N136MGR SEF-N136MGR SEC-N146MGM SEF-N146MGM 0.15VDC0.210VDC4.3220A2% 05VDC010VDC420mA0% -DP Protocol 24VDC1332VDC 7.5VA 4.5VA SEC-N146MGR SEF-N146MGR SEC-N176R SEF-N176R 7.5VA 4

6 SEC-N1 : SEF-N1 : 1 : 10 SLMN2 2 : 50 SLMN2 3 : 100 SLMN2 4 : 200 SLMN2 7 : 300 / 500 / 1000 SLMN2 2 : RS-485 F-Net Protocol 4 : DeviceNet 5 : CC-Link 6 : / M : SEC-N17 R : : SEF C : O : SEC-N13SEC-N inch T : S : SEC-N104 DeviceNet : SEC-N102WSEC-N105SEC-N106 1 : DeviceNet : "100%F.S." 3 : DeviceNet : "133%F.S." 5 : DeviceNet : " %F.S." MG 1 MR SEC-N1 1 2 MG M C T 1 MR MG-04 1SLM 4CR B N2 SECF-N17 CC-Link / SEC-N102WSEC-N104W A / 05VDC B / 010VDC C / 420mA MR.MG MR.MG 4CR 1/4" VCRSEC-N11SEC-N12 8CR 1/2" VCRSEC-N13SEC-N14SEC-N17 4IS 1/4" SwagelokR 6IS 3/8" SwagelokR 8IS 1/2" SwagelokSEC-N17 : MR.MG ex.n2 : L : 124mm 1/4" VCR:SEC-N11SEC-N12 S : 132mm 1/2" VCR:SEC-N13SEC-N14, 1/4" Swagelok:SEC-N11RSEC-N12R J : 150.4mm 1/2" VCR:SEC-N13SEC-N14, 3/8" Swagelok:SEC-N13RSEC-N14R G : 177mm 1/2" VCR:SEC-N13SEC-N14 H : 179mm 3/8" Swagelok:SEC-N13RSEC-N14R I : 203mm 1/2" VCR:SEC-N17R R : 209.4mm 1/2" Swagelok:SEC-N17R P : 159mm 1/2" VCR:SEF-N17R C : 165.5mm 1/2" Swagelok:SEF-N17R SEC-Z500X 5 N2 Ar H2 He CO2 CH4 MR.MG SEC-N112WSEC-N114WSEC-N115SEC-N116 R01 R SCCM

7 W SEC-N1 : SEF-N1 : 1 : 10 SLMN2 2 : 50 SLMN2 2 : RS-485 / F-Net Protocol 4 : DeviceNet M : R : : SEF C : O : SEC-N13SEC-N14 W 1.5inch T : S : SEC-N104 DeviceNet : SEC-N102WSEC-N105SEC-N106 1 : DeviceNet : "100%F.S." 3 : DeviceNet : "133%F.S." 5 : DeviceNet : " %F.S." SEC-N1 MG W 1 MR 1 2 MG M W C T 1 MR MG-04 1SLM 4CR B N2 MR.MG MR.MG 4CR 1/4" VCRSEC-N11SEC-N12 4IS 1/4" SwagelokRW B : 106mm 1/4" VCR:SEC-N11WSEC-N12W M : 127mm 1/4" Swagelok:SEC-N11RWSEC-N12RW : MR.MG ex.n2 : SEC-Z500X N2 Ar H2 He CO2 CH4 MR.MG SEC-N122WSEC-N124WSEC-N125SEC-N SEC-N132SEC-N134SEC-N135SEC-N SEC-N1142SEC-N144SEC-N145SEC-N SCCM 6

8 PE-S7 SC-EAH series SC-EDH series PE-S7 SC-EAH series SC-EDH series SEC-N102W D-Subminiature 9M3 SEC-N105, SEC-N106 D-Subminiature 9#4-40 UNC PC SC-EBR Converter Power Supply PE Series RS485 RJ45 DeviceNet PLC Master PLC bus line +24V Distribution DeviceNet cable Power DeviceNet & DeviceNet ODVAOpen DeviceNet Vendors Association, Inc. ODVAEDSElectronic Data Sheet ODVAODVA Conformance Testing 7

9 CC-Link PLC CC-Link Flow Direction CC-Link 10Mbps CC-Link CC-Link CC-Link FQ SLD DG DB DA DMC, 5/5-G1F3, 5-LR P20THR 52 D-Subminiature 9pin Male #4-40 UNC PROFIBUS PLC D-Subminiature 9 #4-40 UNC D-Subminiature 9pin Male #4-40 UNC PROFIBUS IEC61158 PROFIBUS DPPROFIBUS PA2 DeviceNet SEC-N102W SEC-N104W A C D H I G B E F J Flow Flow A RS-485 F DeviceNet DeviceNet B G C ZERO H ZERO D Address AF I Address 0063 E LED : J LED NET : MOD CC-Link SEC-N105 L O M ZERO STATION NO B RATE X10 X1 L RUN SD RD L ERR SEC-N106 Q R S DA DB DG SLD FG K Flow N P Flow T U K L M N O P CC-Link ZERO LED CC-Link 164 CC-Link 04 Q R S T U PROFIBUS ZERO Address LED PROFIBUS 00107D NET MOD 8

10 2-M4 4DEPTH 2-M4 5DEPTH P.C.D M6 10DEPTH H 2-M4 4DEPTH M4 4DEPTH M6 10DEPTH M4 5DEPTH D 2-M4 4DEPTH 45 P.C.D W T I H T W 1/4" VCR type 1/4" SWL type 1/2" VCR type I 3/8" SWL type 1/2"SWL type D SEC(F)-N112 SEC(F)-N CRL SEC(F)-N112W SEC(F)-N122W SEC(F)-N132 SEC(F)-N /2" VCR type 94.43/8" SWL type 1328CRS CRJ 1778CRG ISJ 1796ISH 18.51/2" VCR type 223/8" SWL type SEC(F)-N114 SEC(F)-N CRL SEC(F)-N114W SEC(F)-N124W SEC(F)-N134 SEC(F)-N /2" VCR type 94.43/8" SWL type 1328CRS CRJ 1778CRG ISJ 1796ISH 18.51/2" VCR type 223/8" SWL type SEC(F)-N115 SEC(F)-N CRL SEC(F)-N135 SEC(F)-N /2" VCR type 94.43/8" SWL type 1328CRS CRJ 1778CRG ISJ 1796ISH 18.51/2" VCR type 223/8" SWL type SEC(F)-N116 SEC(F)-N CRL SEC(F)-N136 SEC(F)-N /2" VCR type 94.43/8" SWL type 1328CRS CRJ 1778CRG ISJ 1796ISH 18.51/2" VCR type 223/8" SWL type SEC-N172R SEC-N174R SEC-N175R SEC-N176R (8CRI) 209.4(8ISR) 37.5 SEF-N172R SEF-N174R SEF-N175R SEF-N176R (8CRP) 165.6(8ISC) 37.5 mm CPU Inlet Driver/ Receiver CPU D/AA/D converter Valve driver circuit A/D converter Inlet Outlet 9

11 W A O-O- Max.10SLM F.S. 05VDCRS-485DeviceNet TM PE-S7 RoHS /6SET/OUT VDC AC100V240V 50/60Hz 30VA MAX48W192H190DmmCE EMCFCCPSERoHS/ PE 5VDC420mA 4/6 :CEEMCFCC PSERoHS PE-20 AC100240V 50/60Hz 1PE-21 30VA MAX 4PE-24 90VA MAX 6PE VA MAX PE-30A AC100240V 50/60Hz 1PE-31A 30VA MAX 4PE-34A 90VA MAX 6PE-36A 140VA MAX PE-30S :420mA AC100240V 50/60Hz 1PE-31S 30VA MAX 4PE-34S 90VA MAX 10

12 U.K. NETHERLANDS GERMANY FRANCE CHINA KOREA U.S.A. TAIWAN SINGAPORE U.S.A HORIBA Instruments Incorporated Sunnyvale Head Office (Technology Center) 430 Indio Way, Sunnyvale California PHONE: (1) FAX: (1) Austin Office 9701 Dessau Road, Suite 605 Austin Texas PHONE: (1) FAX: (1) Portland Office SW. Nimbus Avenue, Suite B11 Portland Oregon PHONE: (1) FAX: (1) Reno Office (R&D Center) 605 Spice Island Drive, #5 Sparks, Nevada PHONE: (1) FAX:(1) Albany Office Suite104, 58 Clifton Country Rd, Clifton Park New York PHONE: (1) SINGAPORE HORIBA INSTRUMENTS (SINGAPORE) Pte. Ltd. 3 Changi Business Park Vista #01-01 Akzonobel House, Singapore PHONE: (65) FAX: (65) KOREA HORIBA STEC Korea, Ltd. 110, Suntechcity, 474, Dunchon-daero Jungwon-gu, Seongnam-si, Gyeonggi-do,13229, Korea PHONE: (82) FAX: (82) TAIWAN HORIBA Taiwan, Inc 3F.,No.18,Lane 676, Zhonghua Rd., Zhubei City, Hsinchu Country 302, Taiwan PHONE: (886) FAX:(886) Tainan Office 1F., No.117, Chenggong Rd., Shanhua Dist., Tainan City 741,Taiwan PHONE: (886) FAX: (886) CHINA HORIBA (China) Trading Co., Ltd. Beijing office 12F,Metropolis Tower(XinDongFang South Tower), No.2,HaidianDong 3 Street,Haidian District,Beijing,China PHONE: (86) FAX: (86) Shanghai office Unit D,1F,Building A,Synnex International Park,1069 West Tianshan Road,Shanghai,China PHONE: (86) FAX: (86) Shanghai service center Room 303,No.84,Lane887,Zu-chong-zhi Rd.,Zhangjiang, Hi-tech,Shanghai,China PHONE: (86) FAX: (86) Chengdu office Room C1,17F,No.86,City Center People South Yiduan, Qingyang Section,Chengdu,China PHONE: (86) Xi'an office Room 411,Building A, South Fenghui Road,No 36,Xiangshu Street,Xian,China PHONE: (86) FAX: (86) Shenzhen office Room 3E,Unit3,Building5,Youpinjianzhu Estate,Longhua District,Shenzhen,China PHONE: (86) UK HORIBA UK Ltd. Northampton office Kyoto Close, Moulton Park, Northampton, NN3 6FL, England PHONE: (44) FAX: (44) FRANCE HORIBA UK Ltd. Grenoble office 2B avenue de vignate Gieres France PHONE: (33) THE NETHERLANDS HORIBA UK Ltd. Nijmegen office PHONE: (31) GERMANY HORIBA Europe GmbH Hugo-Junckers-Ring Dresden Germany PHONE: (49) 351/ Printed in Japan 1605SK23

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