SEC-Z700X_日本語版_cc2019.indd

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みいかとべ
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1 Pressure Insensitive Mass Flow Module SEC-Z700X Series

2 Sensor output (V) % 80% 100% Flow rate y=ax +bx +cx 3 +dx +ex+f Accuracy (% S.P.) % 0% F.S. Accuracy 1%F.S. S.P. Accuracy 1%S.P. 60% 80% Flow% 100% RENO, U.S.A KYOTO, JAPAN (%) (%) % 10% 0% 100% (%) 0 1

3 P regulator N Pressure Sensor Non PI SEC-Z71MGX FLOW Sensor FLOW Sensor FLOW Sensor Flow Error% R.S. Flow Error% R.S %RS(17sccm) Actual offset %RS(sccm) Signal offset %RS(sccm) Signal offset 11%RS(11sccm) Actual offset Timesec. Actual Flow Signal Flow Inlet Pressure 1.1%RS(1.1sccm) Actual offset 0.7%RS(0.7sccm) Actual offset Signal offset was "< 0.%RS" Inlet Pressurepsia Inlet Pressurepsia Flow Error% R.S Flow Error% R.S %RS(.sccm) Actual offset 38%RS(3.8sccm) Actual offset 11%RS(1.1sccm) Signal offset -%RS(-.sccm) Signal offset -1%RS(-.1sccm) Signal offset -8%RS(-8.sccm) Actual offset Timesec. Actual Flow Signal Flow Inlet Pressure 3.6%RS(0.36sccm) Actual offset 0.66%RS(0.066sccm) Actual offset Signal offset was "< 0.3%RS" Inlet Pressurepsia Inlet Pressurepsia Simple Timesec. Timesec. Actual Flow Signal Flow Inlet Pressure Actual Flow Signal Flow Inlet Pressure

4 CO Ar CF N Ar H SF6 HBr WF6 SiH O R01 R SiF SF6 H PH3 N Easy configration change at customer NF3 CH CF SEC-Z700X MRMG-0 N 100 SCCM Ar 110 SCCM BH60 SCCM SEC-Z700X MRMG-0 N 1000 SCCM N 0 SCCM SEC-Z700X RS-8 (Windows) SEC-Z700X +1, -1VDC SEC-Z700X 3

5 SEC-Z71MGX SEC-Z7MGX SEC-Z73MGX SEC-Z7MGX SEC-Z71MGX SEC-Z7MGX SEC-Z73MGX SEC-Z7MGX N 1 3 (: 100%F.S.) MRMG #R01: 10 SCCM #R1.: 17. SCCM #01: 30 SCCM #1.: SCCM #0: 100 SCCM #.: 17 SCCM #03: 300 SCCM #3.: 0 SCCM #0: 1 SLM #.: 1.7 SLM #0: 3 SLM #.:. SLM #06: 10 SLM 1.0%S.P.%F.S. 0.%F.S.%F.S. 0300kPaD #., #06: kPaD MRMG #6.: SLM #07: 30 SLM #08: 0 SLM 1/VCR 1.1 1SEMI E6-0309MRMG N 3SEMI F F.S. (D)(G) SCCMSLMmL/minL/minat kPa C / O % 100% % 0.% -0 1%F.S.0-700kPaA 0kPa 1000kPa 10 1 Pam 3 /she SUS316LCo-Ni MRMG #09: 100 SLM 1.0%S.P.3%F.S. 0.3%F.S.3%F.S. #R01#1.:.0%S.P.1.%F.S. max #0#10: 1.0%S.P.1.0%F.S. max MRMG #10: 00 SLM 00300kPaD kPaD 00300kPaD 1/VCR 1. SEC-Z71X / Z7X / Z73X / Z7X 0.1V DC% 0V DC0% 0 V DC RS-8F-Net Protocol 1V % 16mA 1V % 16mA D-Sub9TOPRJ-TOP 9.6kbps, 38.kbps, 11.kbps SEC-Z71X / Z7X / Z73X / Z7X DeviceNet TM Protocol ODVA SEC-Z7 1 MGX O T 1 3 MR.MG-0 100SCCM CR L SUC N 1 : 10 SLMN : 0 SLMN 3 : 100 SLMN : 00 SLMN SEC-Z70X : DeviceNet TM 1 : DeviceNet TM "100%F.S." 3 : DeviceNet TM "133%F.S." : DeviceNet TM "133.39%F.S." SUC * * : RS-8 / F-Net Protocol : DeviceNet TM MR.MG C : O : /"T" DeviceNet"S""T" TS CR 1/ VCR Male Type Fitting (SEC-710XSEC-70X) 8CR 1/ VCR Male Type Fitting (SEC-730XSEC-70X) 1C 1.1 C-seal, i.d (SEC-710XSEC-70X) 1W 1.1 W-seal, i.d (SEC-710XSEC-70X) 6C 1. C-seal, i.d.0.7 (SEC-730XSEC-70X) 1 L : : 1mm for 1/ VCR (SEC-710XSEC-70X) J : 10.mm for 1/ VCR (SEC-730XSEC-70X) 3 : 9mm

6 C I A E F H J B D E F G H D C G Flow Flow A B C D E F G H DeviceNet MAC ID ZERO Display Display LED DeviceNet / DeviceNet 0063 Display psia: Pa: %SET: %FLOW: I LED J LED Device Net NET MOD PC SC-EBR Converter Power Supply (PE Series) SC-EAH series SC-EDH series PE-S7

7 PLC Master PLC bus line +V Distribution Power 3 1 DeviceNet cable 1 3 6

8 Printed in Japan 1907SK3

ma_sk_3302_jp

ma_sk_3302_jp 1 4 1.1............... 4 1. CE.............................. 4 1.3................. 4 1.4........................ 4 4 3 5 3.1........................... 5 3.1.1............................. 5 3.1...........................