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1 Title プラスチック 材 料 の 微 細 加 工 技 術 と 光 デバイスへの 応 用 に 関 する 研 究 Author(s) 藤 澤, 克 也 Citation Issue Date Text Version ETD URL DOI Rights Osaka University
2 2008
3
4 LCD CCD LCD - i -
5 CCD MTF MTF CCD CCD LCD AR LCD LCD LCD - ii -
6 LED LED - iii -
7 MTF iv -
8 33 34 AR v -
9 vi -
10 AR BBP BMA CCD CCFL CGH CRT CZP EL FWHM GMA GOLF LCD LED LSF MMA MTF OLED OLF OPF PC PDP PMMA Amplitude Response 3-Benzoyl Benzophenone 2-Butenyl Methacrylate Charge Coupled Device Cold Cathode Fluorescent Lamp Computer Generated Hologram Cathode Ray Tube Circular Zone Plate Electroluminescence Full Width at Half-Maximum Grycidyl Methacrylate Grating Optical Low-Pass Filter Liquid Crystal Display Light-Emitting Diode Line-Spread Function Methyl Methacrylate Modulation Transfer Function Organic Light-Emitting Diode Optical Low-Pass Filter Optically Patterned Film Polycarbonate Plasma Display Panel Polymethyl Methacrylate - vii -
11 1982 CD CCD LCD PDP OLED 1984 CD 1) CD CD (PMMA) (PC) PMMA LCD PC PMMA PMMA PMMA PC (CR-39) (MS) CR-39 MS PMMA - 1 -
12 LCD (%) 90~91 (n D ) (nm) (%) 1.42~1.92 < 10 21~95 - (kg cm cm -1 ) ( ) 500~720 PMMA - 92~ ~20 57~58 2.2~ PC 87~ ~ ~ ~ CR-39 88~ ~ MS ~2.5 85~ PMMA PC MS CR-39 He-Ne 2, 3) 780nm (CGH) 4, 5) - 2 -
13 PMMA PC MS CR-39 (µm) (cm) 0.1 < 30 1 > < < 30 < 0.1 < <
14 - 4 -
15 CCD CCD MTF MTF CCD CCD 1 AR CCD LCD - 5 -
16 MTF MTF LCD LCD LCD LED LED LED LED LED LCD - 6 -
17 - 7 -
18 1 2 (1) (2) (1) (2) 3 CCD 5 LCD 4 6 LCD 7-8 -
19 1) Vol.57 No pp ) H. Nishihara, S. Inohara, T. Suhara, and J. Koyama: Holo-Coupler, IEEE J. Quantum Electron., Vol.QE-14, 1975, pp ) C. Kojima, K. Miyahara, K. Hasegawa, T. Otobe, and H. Ooki: In-Line Hoographic Lenses of High Numerical Aperture, Jpn. J. Appl. Phys., Vol.20 Supl.20-1, 1981, pp ) T. Fujita, H. Nishihara, and J. Koyama: Fabrication of Micro Lenses Using Electron Beam Lithography, Opt. Lett., Vol.6, 1981, pp ) G. Hatakoshi, M. Yoshimi, and K. Gotoh: Off-Axis Grating Lenses Fabricated by EB Lithography, 4th Int. Conf. on Integrated Optics and Optical Fiber Commun. (IECE, Tokyo, 1983), Technical Digest 29A
20 Chandross 2-(1- )
21 15% 1.3% Photolocking 1) 10 15% 1.2% 1,200lines/mm 2-4) 2 MMA 2 (MMA) 2- (BMA) (GMA) 5) 3- (BBP) Friedel-Crafts 6) CH 3 CH 3 CH 3 CH 2 C CH 2 C CH 2 C C O C O C O O O O R 1 x R 2 y R 3 z CH 3 CH 3 R 1 : -CH 3 methyl group R 2 : -CH 2 -CH=CH-CH 3 2-butenyl group R 3 : -CH 2 -CH=C-CH 2 -CH 2 -CH=C-CH 3 geranyl group MMA BMA GMA
22 O C O C 8.33wt.% 6.67wt.% wt.% 1.0mm µm 2.5µm RDS-2 365nm 35mW/cm 2 2 PLA-521 1Torr
23 Substrate Photoreactive layer Substrate cleaning followed by thermal dehydration at 120 for 1hr. Formation of a photoreactive layer with baking at 60 for 30min. Photomask Exposure to UV light through a photomask. Twofold modulated fine pattern Development of the fine pattern at 97 for 17hrs under vacuum. D N D N (2.1) (2.2) Da Na Db Nb Da Db D = Db (2.1) Na Nb N = Nb (2.2)
24 632.8nm He-Ne 85% 3% D D 100 (%) N N 100 (%) Exposure energy (J/cm 2 ) PMMA PC MS CR
25 CD UV % 7) Clariant AZ µm CAD XY XY 413nm 0.125mm PMMA 1.52 PMMA 1.50 PMMA ARONIX UVX
26 mm 2 0.2mm CAD UV 50µm 20µm LED 32µm 22µm
27 - 17 -
28 UV 0.125mm 300mm 0.2mm 80 60mm 2 0.1mm 50µm 0.15mm UV UV Radiator radiator Transparent Plastic plastic Optical-Patterned Optically patterned film Coater Photo-Curable Photocurable resin Resin Mold
29 - 19 -
30 1,200lines/mm Photolocking 85% 3% 100µm mm 2 0.2mm
31 1) E. A. Chandross, C. A. Pryde, W. J. Tomlison, and H. P. Weber: Photolocking-A New Technique for Fabricating Optical Waveguide Circuits, Appl. Phys. Lett., Vol.24, 1974, pp ) W. J. Tomlinson, H. P. Weber, C. A. Pryde, and E. A. Chandross: Optical Directional Couplers and Grating Couplers Using a New High Resolution Photolocking Material, Appl. Phys. Lett., Vol.26, 1975, pp ) H. Franke: Optical Recording of Refractive-Index Patterns in Doped Poly(methyl methacrylate) Films, Appl. Opt., Vol.23, 1984, pp ) W. Driemeier and A. Brockmeyer: High-Resolution Photorefractive Polymer for Optical Recording of Waveguide Gratings, Appl. Opt., Vol.25, 1986, pp ) N. Kawatsuki, R. Watanabe, T. Tokuhara, M. Uetsuki, S. Nagata, and H. Ichimura: High-Temperature Stable Photopatternable Copolymers - Synthesis, Optical-Properties, and Photopatterning Process Studies, J. Appl. Polym. Sci., Vol.53, 1994, pp ) N. Kawatsuki and M. Uetsuki: Optical Phase Gratings Made from Photorefractive Polymers, Appl. Opt., Vol.29, 1990, pp ) : (3) 46 3a-X pp
32 CCD CCD 1) 2 2-4) CCD (OLF) OLF 5) 6-12) 13, 14) OLF CCD OLF OLF 2 CCD CCD (GOLF) CCD 2 GOLF CCD CCD
33 OLF CCD (CZP ) 15) CZP CCD OLP CCD CZP
34 16) CCD X Y x (-Fx, Fx) y (-Fy, Fy) g(x, y) CCD CCD g(x, y) G(fx, fy) fx 1/X fy 1/Y G(fx, fy) X Fx/2 Y Fy/2 (-X/2, X/2) (-Y/2, Y/2) Fx Fy CCD fnx(=x/2) fny(=y/2) CCD CCD OLF
35 - 25 -
36 CCD GOLF GOLF MTF GOLF MTF GOLF CCD LSF MTF MTF GOLF CCD CCD 1 MTF x u LSF u LSF MTF 2 P0 + P P 1 η = (3.1) PA
37 P0 P+1 P PA 40 /mm P0/PA P+1/PA P-1/PA (3.1) MTF GOLF MTF
38 GOLF LSF
39 1 MTF value (arb. units) Spatial frequency (lp/mm) GOLF MTF CCD CCD CCD 4 1 GOLF CCD 500µm GOLF CCD CCD
40 4-30 -
41 GOLF GOLF SiO2 /4 TiO2 /2 SiO2 / nm GOLF CCD mm 2 GOLF 12.7µm
42 9.7µm 25 1/2 CCD mm F mm GOLF Rank-Tayer-Hobson Talystep 10µm 0.52µm 95% 3% GOLF
43 Wavelength (nm) Reflectance (%) Transmittance (%) Wavelength (nm) GOLF GOLF CCD CZP
44 MTF MTF AR 17) AR (3.2) ( N) TV AR( N) = (3.2) OLF GOLF CCD CCD 4 CCD GOLF CCD CCD g (3.3) f Λ f d = (3.3) d g Λf f d GOLF CCD CCD 12.7µm 15.99mm 12.54µm 200µm
45 GOLF CCD chip CCD chip GOLF Objective lens Lid glass Ceramic package Objective lens Lid glass Ceramic package GOLF CCD CCD CCD 4 GOLF CCD
46 GOLF CCD CCD g CCD c f CCD m (3.4) 1 Λ n 1 = (n: ) 18) (3.4) Λ m Λg CCD c f (3.4) m g/ =2/(2k+1) g/ =1/k k CCD cmax f max 3 Type A: Type B: Type C: Λ = c max = 2Λc Λf Λ f max = c max = 4Λc = Λf Λ f max = Λc max Λ 2 Λc max = Λ f max = g (3.5) Type C cmax f max Λg = Λc (3.5) m m 2 3 GOLF (3.5) GOLF CCD
47 GOLF CCD AR AR AR CZP GOLF CCD AR
48 GOLF CCD CZP CCD OLF CCD GOLF MTF MTF GOLF GOLF GOLF CCD CCD 1 CCD
49 CCD GOLF GOLF CCD MTF GOLF GOLF CCD CCD
50 1) W. S. Boyle and G. E. Smith: Charge Coupled Semiconductor Devices, Bell Syst. Tech. J., 1970, pp ) A. Nordbryhn: Sampling and Aliasing Problems with Imaging Arrays, Proc. SPIE, Vol.476, 1983, pp ) : ITE (II) ( ( 7 )) Vol pp ) : Vol pp ) : 2 Vol pp ) : CCD Vol pp ) : PAL MOS Vol.37 (1983) pp ) : Vol pp ) Y. Ogawa, Y. Nakada, and H. Yasui: Development of CCD Imaging Block for Single Chip Color Camera, IEEE Trans. Cons. Electron., Vol.CE-31, 1985, pp ) : MOS Vo pp ) J. E. Greivenkamp: Color Dependent Optical Prefilter for the Suppression of Aliasing Artifacts, Appl. Opt., Vol.29, 1990, pp ) : 2/3 CCD ( < > ) Vol pp ) M. Mino and Y. Okano: Optical Low-Pass Filter for a Single-Vidicon Color Television Camera, J. Soc. Motion Pict. Telev. Eng., Vol.81, 1972, pp
51 14) R. L. Townsend: Spatial-Frequency Filter for a Kell-Type Color Camera, Appl. Opt., Vo.11, 1972, pp ) J. O. Drewery: The Zone Plate as a Television Test Chart, J. Soc. Motion Pic. Telev. Eng., Vol.88, 1979, pp ) J. W. Goodman: Introduction to Fourier Optics (McGraw-Hill, New York, 1968). 17) : Vol pp ) : Vol.J73-C-II 1990 pp
52 3 100 CRT LCD LCD LCD 1) LCD LCD LCD LCD 2) 3) 4)
53 LCD 2 R G B LCD G B R B R G B LCD panel G B R Color filter array LCD Collimating lens Grating Screen Light source LCD panel Projection lens LCD
54 Light intensity (a) Light intensity Light intensity Light intensity Light intensity Picture elements Picture elements Picture elements Picture elements Picture elements (b) (c) (d) (e)
55 nm µm µm 1:2 (0, 0) ( 1, 1) 81.1% 58.4% 4 (4.1) θ = Sin 1 λ (4.1) g g LCD d 0 1 (4.2) = dλ (4.2) g
56 Diffraction order Diffraction order
57 Incident light Diffraction order +2 θ Grating µm 18µm 2 ISI-DS nm He-Ne
58 20µm
59 (0, 0) ( 1, 1) µm 0.51µm 20µm 18µm (0, 0) ( 1, 1) %
60 Diffraction order 20µm 18µm LCD LCD 1.1mm 0.21mm nm 0 1 (4.2) 23.9µm 26.5µm
61 - 51 -
62 - 52 -
63 LCD 2 (0, 0) ( 1, 1) 2 LCD LCD
64 1) : Vol.IE pp ) : TV Vol pp ) K. Sayanagi: Optical Noise Filter, Jpn. Soc. Appl. Phys., Vol.27, 1958, pp ) K. Knop and M. T. Gale: Diffractive Diffusers for Display Applications, SID Int. Symp. Dig. Tech. Pap., 1986, pp
65 LCD CRT CRT PDP EL LCD (CRT) (PDP) (EL) EL(EL) EL(OLED) (LCD) (PTV) 20 LCD LED LCD 20 LCD LED
66 2 LCD LCD 2 LCD LCD Prism sheets Toward LCD Diffusive sheet Light guide plate Light source Dot pattern Reflective sheet 1-3) LCD 4 5) 6-8)
67 1 LCD OPF OPF OPF LCD LCD OPF Diffusive sheet Toward LCD Optically patterned film Light source Reflective sheet Light guide plate OPF
68 LCD OPF LCD OPF LCD Radiating light Optical pattern θ θ Propagating light Light guide plate OPF
69 OPF mm 2 2mm PMMA OPF x y y OPF y x y
70 z y x
71 Luminance (arb. units) Luminance (arb. units) Viewing angle (deg) Viewing angle (deg) Luminance (arb. units) Luminance (arb. units) Viewing angle (deg) Viewing angle (deg) OPF x y
72 L OPF D L D D 50µm D 50µm 191µm
73 D (µm) L (mm) Luminance (arb. units) D (µm) L (mm) Luminance (arb. units) D
74 0.125mm PMMA mm 2 2mm PMMA GGM µm 1.52 PMMA 1.50 PMMA OPALUS BMU-3S Lumirror E60L 1 50µm µm 3µm 50µm µm 60 61µm 20µm 20µm
75 OPF BM-7 XY
76 OPF Measuring point θ φ Backlight unit OPF LCD
77 OPF LCD Luminance (arb. units) Luminance (arb. units) Viewing angle (deg) Viewing angle (deg) Luminance (arb. units) Luminance (arb. units) Viewing angle (deg) Viewing angle (deg) OPF
78 OPF D 0.2 D OPF D LCD OPF LCD 1.2 Luminance (arb. units) Width (mm) Length (mm) OPF
79 1.2 Luminance (arb. units) Width (mm) Length (mm) OPF OPF OPF % LCD OPF LCD OPF LCD LCD
80 OPF Conventional backlight unit Diffusive sheet Prism sheet Light guide plate with dot patterns Reflective sheet OPF backlight unit Diffusive sheet Light guide plate bonded to OPF Reflective sheet OPF Shape of optical pattern Total light intensity (%) Conventional backlight unit 100 OPF backlight unit Gently sloped Steeply sloped microlens microlens LCD OPF OPF OPF OPF
81 OPF OPF LCD PMMA PMMA OPF OPF OPF LCD LCD
82 1) A. Horibe, M. Izhuara, E. Nihei, and Y. Koike: Brighter Backlights Using Highly Scattered Optical-Transmission Polymer, SID Int. Symp. Dig. Tech. Pap., Vol.26, 1995, pp ) A. Tagaya, M. Ngai, Y. Koike, and K. Yokoyama: Thin Liquid-Crystal Display Backlight System with Highly Scattering Optical Transmission Polymers, Appl. Opt., Vol.40, 2001, pp ) H. Suzuki, M. Horiguchi, T. Okumura, A. Tagaya, and Y. Koike: Highly Efficient LCD Backlight Having No Optical Film, Proc. 10th Int. Display Workshop, Fukuoka, 2003, p ) K. Käläntär, S. Matsumoto, T. Onishi, and K. Takizawa: Optical Micro Deflector Based Function Light-Guide Plate for Backlight Unit, SID Int. Symp. Dig. Tech. Pap., Vol.31, 2000, pp ) K. Käläntär, S. Matsumoto, T. Katoh, and T. Mizuno: Double-Side Emmisive Backlight Unit for Transmssive LCD Using a Single Functional Light-Guide Plate, Proc. 10th Int. Display Workshops, Fukuoka, 2003, pp ) M. Shinohara, J. Takagi, M. Oba, and M. Takeuchi: Curved Prism Array for Controlling Directivity of LCD Backlight, Proc. 10th Int. Display Workshops, Fukuoka, 2003, pp ) A. Funamoto, Y. Kawabata, M. Ohira, and S. Aoyama: Prism-Sheetless High Bright Backlight System for Mobile Phone, Proc. 11th Int. Display Workshops, Niigata, 2004, pp ) A. Funamoto, M. Yoshida, K. Sakurai, M. Ohira, Y. Kawabata, and S. Aoyama: Diffusive-Sheetless Backlight System for Mobile Phone, Proc. 12th Int. Display Workshops in conjunction with Asia Display 2005, Takamatsu, 2005, pp
83 LCD LED LED LED 1-4) LCD OPF LCD OPF LED LED OPF LED LED LCD 2 LED LED OPF 1 LED OPF LED 1 LED LED LED OPF LED LED
84 LCD LCD Optically patterned film Radiating light LED Light guide plate Propagating light Optical pattern 1 LED 3 LED 1 OPF
85 OPF LED LED LED LED LED 2 OPF 34 48mm 2 0.5mm LED 11mm 3 x y y OPF LCD 56µm 72µm z y x
86 Interval between optical patterns (µm) Length (mm) Width (mm) LED XY 413nm 0.125mm PMMA mm PMMA 35 50mm 2 GGM µm
87 OPALUS BMU-3S Lumirror E60L LED NACW213 11mm 3 OPF LED 0.86mm 1.0mm LED Conventional backlight unit Thickness Component (mm) Diffusive sheet 0.1 Prism sheet 0.15 Prism sheet 0.15 Light guide plate with dot patterns 0.5 Reflective sheet 0.1 Total thickness 1.0 Slim backlight unit Component Diffusive sheet Optically patterned film (OPF) Photocurable adhesion Light guide plate Reflective sheet Total thickness Thickness (mm) µm 12µm
88 CCD BM-7 32µm 35µm LED LED LCD
89 LCD
90 1/2 (FWHM: Full Width at Half-Maximum) FWHM 48 FWHM % Luminance (arb. units) Viewing angle (deg) Luminance (arb. units) Viewing angle (deg)
91 LED OPF OPF OPF OPF 6 LCD LCD LCD
92 Toward LCD Optically patterned film with micro particles Light source Light guide film Radiating light Optical pattern Photocurable resin Micro particle Light guide film Propagating light
93 wt% LCD Run 1 Refractive index of photocurable resin Particle size (µm) 2.4 nd Mie 5) Mie Qsca n D nm nd nd 0.34 Qsca Run 1 Run 2 30µm nd Mie nd
94 Relative light intensity (arb. units) Relative Light Intensity a.u nm 438nm 438nm 559nm 559nm 681nm Scattering angle (deg) Scattering Angle degree Relative light intensity (arb. units) Relative Light Intensity a.u nm 438nm 559nm 681nm 681nm 438nm Scattering angle (deg) Scattering Angle degree nd
95 1.561 nd µm PMMA 0.5mm PMMA 0.1mm JSR 0.1mm GGM µm 80 60mm OPF 0.26mm Component Optically patterned film (OPF) Transparent film Photocurable resin with micro particles Photocurable Adhesion Light guide film Total thickness Thickness (mm) LED 0.1mm LED
96 5mm mm 2 LED NSPW500CS 1 FWHM % LCD 200cd/m 2 LED
97 Luminance (cd/m 2 ) Vertical Parallel Horizontal Perpendicular Viewing angle (deg) Angle (degree) 0.15mm 0.1mm 0.01mm R80mm 0.26mm
98 OPF backlight R=80mm UV radiator Optically patterned film Cutout LED Photocurable adhesion Lamination OPF Backlight Light guide film Coating OPF LED
99 LED LED LED LED LED LED LCD 15% LCD LED LED LCD LCD LCD 0.26mm LCD
100 1) K. Käläntär, S. Matsumoto, T. Katoh, and T. Mizuno: Double-Side Emmisive Backlight Unit for Transmssive LCD Using a Single Functional Light-Guide Plate, Proc. 10th Int. Display Workshops, Fukuoka, 2003, pp ) M. Shinohara, J. Takagi, M. Oba, and M. Takeuchi: Curved Prism Array for Controlling Directivity of LCD Backlight, Proc. 10th Int. Display Workshops, Fukuoka, 2003, pp ) A. Funamoto, Y. Kawabata, M. Ohira, and S. Aoyama: Prism-Sheetless High Bright Backlight System for Mobile Phone, Proc. 11th Int. Display Workshops, Niigata, 2004, pp ) A. Funamoto, M. Yoshida, K. Sakurai, M. Ohira, Y. Kawabata, and S. Aoyama: Diffusive-Sheetless Backlight System for Mobile Phone, Proc. 12th Int. Display Workshops in conjunction with Asia Display 2005, Takamatsu, 2005, pp ) A. Tagaya, M. Nagai, Y. Koike, and K. Yokoyama: Thin liquid-crystal display backlight system with hightly scattering optical transmission polymer, Appl. Opt., Vol.40, 2001, pp
101 85% 3% mm 2 0.2mm CCD GOLF MTF GOLF GOLF CCD CCD 1 GOLF 2 MTF LCD
102 2 LCD OPF OPF LCD OPF OPF LED OPF LED LED LED LED LED LCD 15% LCD OPF OPF 0.26mm LCD CCD LCD LCD
103 CCD LCD LCD LCD LCD LCD LED LCD OLED EL
104 - 94 -
105 1. Katsuya Fujisawa, Masao Uetsuki: Grating-type Soft-Focus Filter for Improving Picture Quality of Liquid Crystal Displays, Jpn. J. Appl. Phys., Vol.34, Part 1, No.7A, July 1995, pp Katsuya Fujisawa, Masao Uetsuki, Yasuaki Nishida: Grating Optical Low-Pass Filter, Jpn. J. Appl. Phys., Vol. 35, Part 1, No.3, March 1996, pp Katsuya Fujisawa, Ikuo Ohnishi, Yasufumi Fujiwara: Edge-Light Backlight Unit Using Optically Patterned Film, Jpn. J. Appl. Phys., Vol.46, No.1, January 2007, pp Katsuya Fujisawa, Ikuo Ohnishi, Yasufumi Fujiwara: Edge-Light Backlight Unit Using Optically Patterned Film with Plural Light-Emitting Diodes Placed on Side as Light Source, Jpn. J. Appl. Phys. Vol.46, No.38, September 2007, pp.l933-l Atsushi Nagasawa, Katsuya Fujisawa: An Ultra Slim Backlight System using Optical Patterned Film, Society for Information Display Symposium (SID 05), May
106 2. Atsushi Nagasawa, Katsuya Fujisawa: A Novel Ultra Slim Backlight System for LCD, The 6th International Conference on Intelligent Materials and System (ICIM 05), July Atsushi Nagasawa, Toshimasa Eguchi, Yasuyuki Sanai, Katsuya Fujisawa: A Novel Backlight System with the Unified Component, The 12th International Display Workshops in conjunction with Asia Display 2005 (IDW/AD 05), December Atsushi Nagasawa, Toshimasa Eguchi, Yasuyuki Sanai, Katsuya Fujisawa: A Slim and Bendable Backlight System Manufactured by a Roll-to-Roll Continuous Process, The 13th International Display Workshops (IDW 06), December a-ZB ITEJ Technical Report Vol.14 No.53 IPU September 1990 pp p-ZD
107 4. Vol.34 No pp Sen i Gakkaishi, Vol.60, No.6, 2004, pp EL pp EL pp Yuji Yoshida, Masahiro Misaki, Katsuya Fujisawa: Structural Study on One-dimensionally Aligned Polyfluorene Thin Films for Application of Polarized Organic Light-emitting Diode, SPring-8 Research Frontiers 2006, July 2007, pp
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