卒業論文.PDF
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1 SPM
2 SPM ESCA SPM AFM AFM AFM LFM LFM LFM SiN i
3 SPM SPM SPM AFM m LFM A 35 A-1 SRRz Rkr 35 A-2 39 B 41 C 45 D E F LFM G ii
4 2 ESCA X Cu Weber SPM SPM AFM SEM SEM AFM LFM 1
5 AFM SPM SPM SPM 2
6 SEM SEM D r A V Su A=0.7854D 2 V=0.7854D 2 L Su=D L (RH) 3
7 ESCA ESCA Electron Spectroscopy for Chemical Analysis ESCA 4
8 2.3 a 2.3 ) 3) 2.3 a: 2.3 : 5cm 0.25cm min ( 60 RH) Scott
9 1cm 1 1 Et (P) (L) r (I) Bogaty % 2.5 Bogaty Et Et=8 IL/r 4 P 1 2 d 6
10 G 4) G=Td 2 /8 T dyn(g 980.6cm/sec 2 ) E B E B = Td 2 /2A 2 A 5cm 1 1 SEM 1 7
11 SPM 2000 AC-AFM 1 10 SPM XY XY ( ch-spm ) 100 m 20 m 0.8 m 2.9 m 0.37N/m 20 8
12
13 SPM SPM Scanning Probe Microscope SPM Scanning Tunneling Microscope STM 1981 Binig STM STM AFM AFM SPM 5) AFM LFM AFM 3.1.(a),(b) (a)10 AFM 3.1.(b)40 AFM 10
14 AFM AFM AFM Atomic Force Microscope 20nm ( 3.2) 3.2: AFM 11
15 AFM 12
16 LFM LFM LFM Lateral Force Microscopy FFM Frictional Force Microscopy Lateral LFM AFM LFM 4 LFM LFM ( 3.3) 13
17 3.3: LFM SPM AFM LFM Albrecht SiN AFM/LFM DLC Diamond Like Carbon SiN DLC 8 14
18 SiN 3.4-a SiN ( 3.4-b) ( 3.4-c) SiN ( 3.4-d) 3.4: SiN 15
19 m : exocuticle endcuticle 16
20 ) :
21 anagen catagen telogen cm /
22 (S) 3.8% 3.9% 13.6% 4.1% 4.8% 6.4% 0.7% 14.7% 2.4% 4.3% 10.6% 8.5% 1.0% 2.2% 5.5% 8.9% 1.2% 1.9% 10 15% 3.7: 11)
23 ( 3.8) : 20
24 12) 13) 14) 15) 16) 21
25 20 m 5 AFM SPM 22
26 SPM SPM : SPM Console Login spm 2ch-SPM ma mA mA MO 15. EXIT Console Login shut OFF 16. FF 23
27 SPM SPM Scanner type Area range Wide Narrow XY servo ON /1 Scan rate / / chSPM / Scan line /1 Scan size Scan rotation 90 0,90,180,270 P-gain 24
28 I-gain 0 0 OFF Input Topography Z AFM Torsion LFM LFM 90 LFM Data acquisition Forward Reverse) L.P.F. ON/OFF 10,20,100,200,1K,2K,OFF H.P.F. ON/OFF ON 1.6Hz Spring constant Load Thickness 25
29 4.2.2 SPM : SPM 2ch-SPM ch-1 AFM ch-2 LFM Scanner type S100C Area range Wide XY servo On Scan rate 1.0sec/line Scan line 128 Scan size 20000nm Scan rotation 90 P-gain 30 I-gain 35 Input Topograp Torsion hy Data Forward Forward acquisition L..P.F. Off Off H.P.F. Off Off Spring const. 0.37N/m Load 5.0nN Thickness 0.5mm 26
30 3 X L Y M y=f(x,y) SPn SVn Rq 27
31 AFM m AFM 5.1 a b c d e f a: b: a 5.1-b 5.1-c: d: c 5.1-d 1 28
32 5.1-e: f: e 5.1-f 1, 20 m 5 m (a),(b) 29
33 20 m AFM [ m] SRRz Rkr SRq 5.2 (a): 20 m AFM (a) (f) 1 SRRz Rkr 2 1 SRRz,Rkr 3 1,2 SRRz,Rkr 30
34 5 m AFM [ m] SRRz Rkr SRq (b): 5 m AFM (a) (f) 20 m AFM SRRz,Rkr 31
35 LFM 5.3 [m V] m LFM LFM : LFM LFM mv m AFM ( 5.2 (b)) 3 32
36 6 20 m 1 5 m SRRz Rkr LFM SRRz Rkr 1 LFM LFM V N 33
37 [1] No [2] FRAGRANCE JOURNAL No.13 p.152 (1994) [3] P. 2 [4] R 1982, [5] ( [6] [7], [8] P , [9] R 1982 P.1 P.17, [10] [11] [12] [13] [14] [15] [16] [17] NV2000 P. 34
38 A A 1. SRRz Rkr 1 5 m SRRz Rkr m AFM 5 m SRRz Rkr SRRz Rkr A.1 A.1-(a)~(g) A.2 A.1 a g 35
39 A.1-(a)~(g) 20 m AFM 1.6 m A.1-(a). a,20 m AFM A.1-(b). b,20 m AFM A.1-(c). c,20 m AFM A.1-(d). d,20 m AFM A.1-(e). e,20 m AFM A.1-(f). f,20 m AFM 36
40 A.1-(g). g,20 m AFM A.1 A.1-(a)~(g) 20 m AFM a~g5 m A.2 SRRz Rkr 37
41 [nm] SRR z RKr a b c d e f g A.2 : a~g5 m a g A.2 SRRz Rkr b c Rkr g SRRz Rkr 5 m 1 SRRz Rkr 38
42 A m SRRz Rkr ( A.1(a),(b)) A.3 A.1(a): A.1(b): 39
43 [nm] SRR z RKr A.3: 3 A 1 40
44 B
45 42
46 43
47 18 44
48 C 25 ( ) 45
49
50 47 D Frequency Modulation: FM (1) (2) (3) (4) AFM
51 20 48
52 E 49
53 50
54 51
55 52
56 53
57 54
58 LFM LFM X Y LFM Torsion LFM 1 N/rad 2 V/rad 1 vs vs NV2000 ZP Z LFM LFM LFM F. Rf ZP V Y Y 55
59 Y Ys =Sin -1 (Ys/ Rf) F.1 F m LFM 2.65V LFM Rf Ys =sin -1 (Ys/Rf)=sin -1 (0.6/62.5)=0.55[degree]=0.0096[rad] 2.65V LFM LFM =V LFM / =4.82[V/degree]=276[V/rad] LFM LFM LFM 1/LFM =0.208[degree/V] 21 Rf =0.0036[rad/V] 56
60 57
61 SPM Cu Weber 2 SPM(Scanning Probe Microscope) 20 m SRq SRRz Rsk Rkr SPM(AFM) 20 AFM m AFM 2 FRAGRANCE JOURNAL 13, 152 (1994) nm 800nm 800nm 800nm m AFM m 5 2 m 1 2 ESCA(Electron Spectroscopy for Chemical Analysis) (a) 1 (b) 1 (c) 2 1 1,2 AFM 58 (d) 1
62 [18] [19] [20] [21] NV
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