37. 7, 3] 65 縺 縺 縺 ｨ
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- がんま てらわ
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1 , 3 86 ﾀ 縺 ﾀ ｨｬ ｨ ﾁ ﾁ PACS numbers: z, 73.4.Hm ( , ) (34) ｨ (35) (36) ﾁ ﾁ59 5 (37) ｨ ﾁ ﾁ59 5 (38) ｨ ﾁ ﾁ59 5 (3). 6.. 縺 ﾀ 縺 ｨ ｨ ﾁ ﾁ n ｷ3 = n= / n=5/ (38) (38) (39) ｨ ﾁ ﾁ59 5 ｨｬ ﾁ 縺 , ｨ , , ｨ 3899, , ｨ , 395 ｨ , , , ｨ : ｨ " " ﾀ79353 ｨ ｨ ｨ , /3, /5 99 / ｨ , , ｨ (H. Sto6 rmer). Department of Physics and Department of Applied Physics Columbia University, New York, NY 3, Bell Labs, Lucent Technologies Murray Hill, NJ ｨｬ , ｨ 9535 ｨ ﾁ ﾁ ( ) 587ｨ , , /5, 4/9 99 /7, / , ｨ "8539" , ｨ ｨ , "87- ｨ 9" , ｨ ｨ 59754, ｨ , ﾁ99ｨ ｨ : ﾁ ﾁ , 4545, , ｨ ｨ 9 677, ｨ 595 ｨ , ｨ ｨ ｨ , , ｨｬ 9585 ｨ , ｨ ｨｬ ｨ , 5957ｨ , ｨ 縺 ｨ , , ｨｬ ｨ ( ), , ｨ ｨ ( / 45 / K) , 9759, ｨ , 縺 ｨ 縺49 ｨｬ ｨ 59 ｨ ﾀ ﾁ9899, , # The Nobel Foundation 999 # ﾀ ｨｬ , "88659 ﾁ "
2 37. 7, 3] 65 縺 縺 縺 ｨ (94957 ﾁ58) 9 897, ｨ ｨ ( ｨｬ 895, 45779ｨ ｨｬ ) ｨｬ ｨ 縺 ｨ , ｨ (DES) , 395 ｨ ｨ 3ｨ ｨ ﾀ5775 ｨｬ ｨ ﾁ499 DES DES 縺894 Si AlGaAs GaAs AlGaAs GaAs z ｨ ｨ ｨ ｨ 5894 ｨ () /ｨ (GaAs/AlGaAs). DES GaAs 9 AlGaAs ｨ ｨ AlGaAs ｨ (+), AlGaAs () ( ｨ Si-3 罍ﾀ ) ｨ ｨ ｨ z, , ｨｬ ﾀ ｨ ( ) ｨ ｨ z, xy () , 9. 7, 3 y x 3 罍ﾀ ( ), DES (798. ) 罍ﾀ ｨ "799" , ｨ ｨ ｨ ｨ 59754, ｨ ｨ ｨｬ 9, , ｨ ｨｬ ｨ 9535 ｨ ( ) 4559 ｨ 罍ﾀ ｨｬ ｨ ; ｨ 3573 ｨ ｨ : ｨ ﾁ 罍ﾀ ｨ ﾁ58, , , ｨ ｨ , ｨ ｨ , ｨ (798. ). ﾀ , , ｨ ｨ , ｨ ｨ z ｨ , xy 罍ﾀ DES, ﾁ989 DES 罍ﾀ , ｨ , ｨ ﾁ , ｨ , ｨ ｨ 縺 ｨ , ｨ " " , ｨ , ｨ ｨ , ﾁ 縺 , ｨ ｨ, , ｨ ｨ , , "345", 罍ﾀ /ｨ (GaAs/ AlGaAs) ｨ 34544ｨ
3 [ ｨ ｨ , ｨ ｨ , ｨ , ｨ , ｨ , , ｨ ﾁ989358ｨ "5-" : ｨ , 5445 ｨ ｨ , ｨ ｨ , 5445, ｨ ｨ , , , ｨ , 45, , ｨ , ｨ , , ｨ (3 ﾀ7) ｨ ﾀ , Bell Labs, , ｨ , , ﾀ ｨ 989 GaAS 9 AlGaAs ｨ ( ), ｨ ｨ ｨ ( ｨ 59754) " ｨ 9" GaAs AlGaAs ( ｨ 4493 ｨ ｨ ｨ 5). ﾀ ｨ 9 ﾁ ﾁ , , ｨ ｨ ｨ ｨ ｨｬ ｨ 95 DES 8ｨ GaAs/AlGaAs, ﾀ7, GaAs (798. ). 65 GaAs AlGaAs ,5 33. ﾀ , ｨ GaAs AlGaAs ; ｨ , Catch- ｨｬ 89999, ｨ "85-". ( ﾀ ) AlGaAs , ｨ ｨ , ﾀ ｨ ｨ 59754, ｨ ｨ ｨ ｨ ｨ GaAs , GaAs 995 ｨ ｨ , AlGaAs ｨ ｨ ! ﾀ ( ｨ 59754) ｨ AlGaAs (798. ) ｨ , 罍ﾀ , ｨ ｨ z, ｨ , xy. ﾀ GaAs/ AlGaAs 罍ﾀ (high electron mobility transistors) 54ｨ 縺 ｨ ﾁ , ﾁ , , , ﾁ54, ﾀ ｨ ｨｬ ｨ , , ｨ ﾀ , ﾁ , GaAs/AlGaAs ｨ 罍ﾀ ! ｨ , (798. ) ｨ ｨ 縺 / , 395 ｨ Bell Labs ﾁ59537 ﾁ (798. 3) ﾀ ﾀ , 9 3 ﾀ ﾀ Bell Labs ｨ 49, ｨ 8584ｨ
4 37. 7, 3] 65 縺 縺 縺 ﾀ , 縺65347 GaAs, , K ﾀ , m ｨ ｨ GaAs/AlGaAs. ﾀ m ﾁ ﾀ m ﾁ 閨7 ﾁ9 " GaAs" GaAs , m ﾀ ｨ /5 33 (!), ｨ Bell Labs ﾀ ﾁ ﾁ ﾁ57 ( ) ｨ 89 ( ), ｨ ｨ , ｨｬ , , 98854ｨ , (798. 5). ﾀ5755 ｨｬ V V 4 95 I ｨ R ｨｬ V H , , , ｨ, ｨ ｨ , B ｨ , 395 V H I ｨ B , V H =I ｨ R H, R H / B ｨ 959 ｨ ﾁ ﾁ59 487ｨ 9 ｨ ﾁ ﾁ ｨ V H ; B I R ｷ3 V=I V V H ｨ Bell Labs, : , 379 閨58874, ｨ ﾁ ﾁ ﾁ ﾁ , ﾀ I ｨ * R H ｷ3 B en R H ｷ3 V H =I 閨 R R H I B. V , V H ｨｬ , n, 8794 ｨ ｨｬ e ｨ 9 ｨ , ｨ , 5849ｨ
5 [ V H 4 95 I R H ｨ ﾁ ﾁ ｨ ｨ , ｨ , 縺 ｨ ( ), ｨ ｨ ｨ 縺359445, , ｨ 989 ｨ R H , ｨ , R H , 45 ｨ : , ｨ , ｨ o , V H 9, , R H. 縺 R H R H ｷ3 B ne ; 345 n ｨｬ ｨ ( 83 ) 578, ｨ N ( 83 3 ), ; e ｨｬ 8794 ｨ 縺935993, 395 ﾁ ｨ 59754, , 388, ｨｬ 9585 ｨ , 395 R H ﾁ , , ｨ , ﾁ , ﾀ5858 ｨ ﾁ ﾁ , ｨ , ｨ , , ｨ ﾁ ﾁ , R H B (798. 6) ﾁ , ｨ ｨ ｨ ﾁ ﾁ ｨ ｨ 罍ﾀ ( 4 K) ( T), , , 459 4ｨ (798. 7) , 395 R H ｨｬ ｨ (!) 455 ｨｬ R H ｷ3 h= ｭie 6 9, 345 i ｨｬ , h ｨｬ ﾀ4 (R H 5;8... 縺3 679 i ｷ3 ) ｨｬｨｬｨｬｨｬｨｬｨｬｨｬｨｬｨｬｨｬｨｬｨｬｨｬｨｬ ｨ " " , 閨7 ﾁ ｨ V H, ｨｬ ｨ B ( ) V H 9 B 9, , 3574 R H 9 B ｨ , ｨ UH/mV UPP/mV p 7 Substrate Source Surface Channel n ｷ3 n ｷ3 n ｷ3 V g /V Hall Probe Drain n 6ｦ Gate Potential Probe U H U PP h=e, ｨ ﾁ ｨ ｨ ｨ ﾁ ﾁ59 5 (7 ), ｨ R, ｨ R H, ｨ , 9 55 ｨ ｨ ﾀ DES ? ｨ ? ﾁ9895 ｨ RH= ｭh=e 6 9 3,,5,,5, R, , : ｨ ﾁ ﾁ ｨ 罍ﾀ 縺 ﾁ9 8 ﾁ , (V H ) ｨ (U PP ). ﾀ (V g ), n. 667: , ｨ GaAs/AlGaAs. ﾀ5858 ｨ , , , ｨ 4ｨ R H, R.
6 37. 7, 3] 65 縺 縺 縺 , ｨ ｨ ｨ , 5849ｨ ｨ ｨ ｨ E ｷ3 ｭi 7 =6 9heB= ｭpm6 9, i ｷ3 ; ; 3;..., ｨ B; m ｨｬ 388 ｨ 59754, h ｨｬ ﾀ4. (5 ｨ ｨ ﾁ ﾁ5939, ｨ ) ｨ ｨ , ｨ ｨ ｨ 953 8ｨ DES ｨ , , ｨ ｨ ｨ ﾀ5ｨ ｨ ｨ , , ｨ 9, ｨ ｨ ﾁ ﾁ ｨ ｨ DES 3985 ｨ , 86549ｨ , ﾁ d, ｨ 縺 , d ｷ3 eb=h , 395 ｨ , , B ｨ , ｨ , ﾀ ﾁ ｨ 43574ｨ ｨ n. ﾀ , ｨ ｨ 5989 ｨ , ｨ , ﾀ ﾁ5735 d ｷ3 eb=h. ﾀ79 B ｷ3 nh=e ｨ ﾀ ｨ ｨ ｨ ｨ - 59, , ｨ 45739ｨ heb = ｭpm B ｷ3 nh= ｭe6 9 ｷ3 B = ｨ , ｨ B i ｷ3 nh= ｭei6 9, ｨ ｨ 86549ｨ , ｨ R , R H ﾁ573 R H ｷ3 B= ｭne B i, R H ｷ3 h= ｭie 6 9, i ｷ3 ; ; 3; ｨ , : R H R R H B i ｨ , ｨ 954, R H, , B R H B 573 B i. ﾀ ｨ DES, ｨ 989 ｨ "45947" 9 "537", ﾁ5939, ｨ ﾁ ｨ , ｨ ｨ (59-8ｨ 989) 9 587ｨ 縺 ｨ ｨ , ｨ ｨ , ﾁ , ｨ ﾁ9, ｨ ﾀ ｨ ｨ ｨ , , 5953ｨ , ｨ ﾀ79 ｨ R H R 589ｨ , ｨ , ｨ , ｨ ｨ ｨ , ｨ ｨ , ｨ ﾁ , , ( ｨ - 59 ｨ ). ﾀ ﾁ "37989" ｨ 949ｨ ｨ ｨ ﾁ , ( ｨ 59ｨ ｨ ) R H ｷ3 h= ｭie 6 9 ｷ3 ｭh=e6 9= ｭie f ｷ3 h=e 8794 ｨ e, i ｨｬ ｨ ｨ , ｨ ｨ (
7 [ ﾁ GaAs/AlGaAs ; ( , ﾁ595357) ｨｬ , DES ｨｬ 7539, , ｨ ﾁ , DES , ｨ 953, ｨ , 4ｨ ｨ ﾀ ｨｬ , ｨ ﾁ ﾁ59 5 (67 ) 縺 ｨ , ｨ 4 ｨ ﾀ ｨ ﾁ ﾁ ｨ (4, ), , R H B 縺 ｨ ｨ ｨ (R H ｷ3 h= ｭie 6 9, i ｷ3 ; ; 3;...), ｨ ﾁ ｨ ﾀ (i ｷ3 ) 679 B ｷ3 5 T ( ) 679 ｨ 7 659, 67574ｨ 59 ｨ , ｨ , ｨ 45ｨ n ﾀ , , (798. 9, 57) B ｷ3 5 7: 37 ﾁ , , e. 縺445 ｨ , ｨ , , ) R H, f e, ｨ ｨ 59754, e ｷ3 f = ｭiR H ｨ , ﾁ ｨ , DES ｨ ﾁ ﾁ 縺 ｨ ( Bell Labs) , GaAs/AlGaAs ｨ ｨ 97ｨ , 閨58874, Bell Labs, , ｨ ｨ n ｷ3 ; ｨ m ｷ ﾁ59537 ﾁ ｨ , , , , ｨ ｨ ｨｬ ｨ , (3) ( ). 557: R H , 9, B. 5498: R ｨ ;5 83. 縺 ｨ ,
8 37. 7, 3] 65 縺 縺 縺 , , , ｨ , ｨ , R H R, ｨ (798. 9, 498). 7, , ｨ , B 5 T , ｨ R H ｷ3 h=e ｷ3 5 縺3. 6ｨ "983579" B ｷ ( 7 83) ｨ 99 "54949". 縺 : "79!" , , 59 83ｨ ｨ ﾁ , , , , q ｷ3 f = ｭ3h=e 6 9 ｷ3 e=3. 縺359445, , 4985ｨ ｨ (399ｨ , ｨ 5) , ｨ , / ｨ , r xy (h=e ) 4 3 r xx 43 /3 /.38 mm (ko) (ko= ) FILLING FACTOR n mm /3 /4 5 5 MAGNETIC FIELD B (kg).48 K. K.65 K 4.5 K.48 K. K.65 K 4.5 K ﾀ ｨ (84588 r xy ) ｨ (84588 r xx ) , n 縺 n ｷ3 ; ; 3; 縺 n ｷ3 = ｨ , ｨ ｨ , , 閨58874, Phys. Rev. Letts, (798. ), , , ﾀ , ｨ ﾁ , 8584ｨ ｨ ｨｬ ｨ ( ) ﾀ5ｨ ｨ ｨ ﾁ ﾁ , , ｨ , ｨ , , 縺 ｨ , , 75 "597599" 7, ｨ R H ｷ3 h= ｭie 6 9, i ｷ3 ; ; 3; ｨ ｨｬ ｨｬ ｨ ﾀ ｨ ｨ ﾀ5ｨ ｨ ﾁ ﾁ5953, 99 ｨ ﾁ ﾁ5953 ｨ , ｨ ｨ , ｨ ｨ , ｨ , ｨ " ". ﾀ ｨ "3589" ｨ , ｨ , ｨ ｨ 9 ﾁ , ｨ 7994, ｨ 5ｨ ｨ ｨ , , ｨ ﾁ ﾁ ｨ ｨ , ﾁ ｨ ﾁ ﾁ , , 935ｨ ｨ 8574ｨ , 9, ｨ ,
9 [ ﾁ ｨ 53494ｨ 545ｨ ﾁ49ｨ, ｨ n ｷ3 =3 ( =q) , ｨｬ 9793 ﾁ 縺 e=3 ( ｨ 59ｨ ｨ ) ｨ ｨ ｨ 7859 ﾁ , 56987ｨ , ﾁ9 ( ), ﾁ , ｨ 縺 縺 ｨ ｨ ｨ 縺 ｨ ｨ (798. ). 縺 ｨ , 縺 ｨ "783847" 縺 , B B DES 4959 DES ｨ f f DES ( ) 4 DES (75845) DES ｨ 9 ｨ ｨｬ ｨｬ f B ｨ (ｨ 535 ｨ 59754) ｨ ｨ (798. ) , ｨ , (798. ) ｨ , ｨ ( , ), 5445 ｨ , , , ｨ B " " ｨ "3575" ( ), f ｷ3 h=e ( ). ﾀ , " " ｨｬ ﾁ ｨ ｨ : ｨ , (65548 B ｷ3 f ). ﾀ5ｨ , , "783847" , 9 ｨ ｨ 59754, 9 75, 9 978, ｨ (798. 4) ｨ ｨ ｨ ｨｬ : , 9575 ｨｬ ｨ , ｨ , , ｨ ｨ , ｨ 9 979, 577ｨ ｨ , ﾁ ? , ｨ ｨ ｨｬ ｨ ﾀ9, ｨ , ｨ ﾀ , ｨ , ｨ ﾁ ﾁ ( ﾀ )
10 37. 7, 3] 65 縺 縺 縺 ｨ ﾀ9 ｨｬ ｨ 59754, (798. ) i ｷ i ｷ3 ; 3; 4;..., 589 ｨ ｨ , ﾀ9 49 ｨ , ｨ ｨｬ ｨ ｨ , 5849ｨ ﾀ ｨ ﾀ545898ｨ ﾀ79496 ﾀ ｨ DES ｨ , n ｷ3, 3985 ｨ , ﾀ " " 4 ｨ ( ｨ ) ｨ , ｨ 5ｨ 7 8 i ｷ3, , 9, , , 353 ｨ ﾀ79496 ﾀ ｨ ｨ ( ), ｨ ｨ ｨ ｨ ｨ , n ｷ3 = , 353 ｨ ﾀ79496 ﾀ ｨ ｨ () ｨ ｨ (545855) () ｨ , ｨ ｨ () ｨ (798. 3) ｨ ｨ ｨ ｨ , ｨ 45739ｨ ｨ ｨ ｨ ﾀ9, , , ｨ ｨ ｨｬ ｨ ｨ DES, 縺 ｨ ｨ ｨ ｨ , , ｨ ｨｬ ｨ ｨ , , ｨｬ ｨ , " " ｨｬ ｨ ｨ (798. 3, ) ｨ , , (). ﾀ ｨ , 8595ｨ ｨ ｨ 59 ｨ ｨ " ", ｨ , ｨ , ｨ ｨｬ , (ｨ ) (ｨ ｨ ), 9 345, , 3575 ｨ " " ｨ , , ｨ 縺 , ｨ ｨ ﾁ ﾁ , , ﾁ ﾁ ｨ ｨｬ ﾁ , , ｨ , ｨ , ｨ , , 縺 ｨ ﾀ ｨ , , ﾁ , ｨ ｨ
11 [894 縺 ｨ , ﾁ ｨｬ , ( ﾁ ), ｨｬ ( ), (85 ﾁ ｨ ) ｨ , ｨｬ ( "755495" 38997) , ﾁ (ｨ ｨｬ ｨ , , ) , ( ) ﾁ (ｨ ) ( ), ｨ ｨ 縺 ﾁ , 縺 , ｨ , , ﾁ , ｨ , ﾁ ｨ 9 784ｨ ﾁ ( ) ﾁ , ｨ ｨ 989 ﾁ ｨ ｨ , ﾁ , ﾁ ｨ (798. 4). 5 ｨ , ﾀ ｨ ｨ ﾁ499, " ", ｨ ﾁ49ｨ ﾁ , ｨ ﾁ (9), ﾁ , ｨ (4), ﾁ , , 5849ｨ , ｨ 縺 ｨ , 395 ｨ 3ｨ ｨ , 95 ﾁ , ｨ m 7! m 7! ﾁ ｨ ﾁ ﾁ m =/3 ﾀ / (n ｷ3 =3) , ｨ ﾀ5ｨ 953 ｨ , ｨ ｨ ｨ , ｨ ｨ ｨ , ｨ 953 (798. 3) ｨ , ｨ ｨ ﾁ ﾁ ｨ , ｨ , ｨ ｨ ｨ ｨ, , 縺 ｨ , ｨ , ｨ 5ｨ ｨ 59 n ｷ3 =3, (798. 5). 縺 ｨ , 9 ｨ ﾁ / ｨ ﾀ ｨ 8 C C C C 7C C 7C ｨ ｨ ﾁ49ｨ C, ｨ C , ﾁ , C ( ), ｨ ﾁ (m ｨｬ ). C
12 37. 7, 3] 65 縺 縺 縺 e= B, n ｷ3 =3, 縺 ｨ ｨ /3 ｨ ｨ ｨ ( ｨ ) ｨｬ ｨ ﾁ ﾁ , n ｷ3 =3, ｨ ｨ e= ｨ 縺 /3, 5849ｨ , ｨ ｨ , , ｨ ｨ , 縺 , 9 7, 98-8 ﾁ ｨ ｨ ｨｬ ｨ ｨ , n ｷ3 =5, / , 935ｨ e=5, e= , , /3, , ｨ n ｷ3 =3, 4/5, 6/ n ｷ3 6ｦ =3, 6ｦ = ｨ , , n ｷ3 = , 4 / ｨ 5939 ｨ , , 5953ｨ 595 ﾁ n ｷ3 i =q ( ) 6544ｨ ｨ m ｷ3 = n ｷ3 = n ｷ3 =3, 5445, ｨ 989. ﾀ , ﾁ n ｷ3 = ｨ , 395 ｨ ｨ , , ﾀ n ｷ3 = ｨ ｨ , ｨ ｨ (798. 6). 縺 ｨ , ｨ ﾁ , ｨ n ｷ3 = n ｷ3 = n ｷ3 = 75 ｨ , ｨ ﾁ ﾁ ｨ 縺 ﾁ ｨ ｨ ｨ ｨ , ｨ ｨ , ｨ ｨ ｨ B ｷ , , n ｷ3 = ｨ ｨ ｨ B ｷ , , ｨ ｨ ｨ ｨ 99 "7495" ｨ ｨ , ｨ , , ｨ ｨ , ｨ ｨ , ｨ 縺 ｨ ｨ n ｷ3 = ｨ , 9 75, 49 ｨ B ｷ3 (798. 7) n ｷ3 =3 9 n ｷ3 = ｨ 縺445 ｨｬ ｨ , ｨ ｨ ﾁ ﾁ ｨ , , ﾁ , ｨ 9 388, 縺 ｨ ｨ , 8ｨ n ｷ3 =, ｨ , : ｨ ? ? 975, 8694 ｨ ( ) ? , ﾁ ｨ ( ﾀ9), , ｨ ｨ ｨ
13 [ , RH= ｭh=e , R R H 4/ /3 4/3 5/3 R 4 3 / 3/5 4/7 /3 /5 4/5 3/7 4/5 / , , ｨ , ｨ n ｷ3 i =q. ﾀ79 ｨ ｨ R H ｷ3 h=ne R ｨ 縺 ｨ ﾁ95, , ﾀ ｨ 9 85 ｨ ? ﾁ ｨ /5, 3/7, 4/9, 5/,... 9 /3, 3/5, 4/7, 5/9,... (9.5. n ｷ3 p= ｭp 6 9, p ｷ3, 3, 4,...), n ｷ3 =. ﾀ ｨ ｨ 989 9, ｨ , ｨ , ｨ ﾁ ﾁ ﾀ ｨ 989 ﾁ , n ｷ3 = ｨ B ｷ , B ｷ3? ｨ ｨ 縺 ｨ ｨ 595 ｨ , ｨ , n ｷ3 = /5 /5 3/7 4/9 4/7 4/ , DES GaAs/AlGaAs ｨ , n ｷ3 p= ｭp 6 9, n ｷ3 =, / /3 / , ｨ n ｷ3 =, 縺 ｨ ｨ , ｨ , 縺445 ｨ ｨ , ﾁ n ｷ3 p= ｭp 6 9, ｨ , 58997ｨ R n ｷ3 = ｨ ｨ R 989 B ｷ3, B ｷ3 n ｷ3 =, ﾁ ｨ ｨ ﾁ ﾁ ( n ｷ3 =) ｨ ｨ ｨ ｨ B ｷ ｨ 989 " " , ｨ ﾁ , 777ｨ ｨ, ﾁ ｨ ﾁ ﾁ ｨ ｨ , ｨ , ﾁ ｨ , 67 ｨ ﾁ ｨ n ｷ3 = ｨ ﾀ79 n ｷ3 = ﾁ , 5849ｨ n ｷ3 =, 49ｨ ｨ 86549ｨ ｨ , n ｷ3 =3 ｨ i ｷ ﾁ , ｨ n ｷ3 =. ﾀ ｨ , ﾀ9 49 9, ( ) 8584ｨ ﾁ , ｨ ﾁ ｨ 59754, ( ｨ ﾁ573954), , n ｷ3 = ﾁ ｨ , ｨ , ｨｬ ｨ , ? , , 67 ｨｬ ｨ ( ) (ｨ ) , ( ) ( ﾁ ) ｨ ﾁ ﾁ ｨｬ ｨ ,
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