燃焼圧センサ

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1 49 Combustion Pressure Sensor Kouji Tsukada, Masaharu Takeuchi, Sanae Tokumitsu, Yoshiteru Ohmura, Kazuyoshi Kawaguchi π 1000N N 1 F.S Abstract A new combustion pressure sensor capable of measuring the pressure in a cylinder of an automobile engine has been developed. Using the sensor output, the air-fuel ratio in the cylinder was successfully maintained in the vicinity of the lean combustion limit. The sensor has been used for controlling an advanced lean combustion engine for improvement of fuel consumption efficiency and reduction of emissions. The combustion pressure sensor contains a metal diaphragm, a force transducer made from Si, and an amplifier. The combustion pressure is converted to the uniaxial stress through the diaphragm, and then the uniaxial stress is transformed to the change in resistivity using the piezoresistive effect of Si. The force transducer is designed to utilize the piezoresistive coefficient, π 63, for sensing the stress. The sensor exhibits excellent performance, including durability and reliability. Since the fracture load of the force transducer is 1000N, the whole strength of the sensor is considered to be sufficient for the actual load, N. In addition, the sensor output linearly increases with increasing pressure; the non-linearity is estimated to be less than 1% of full scale. Consequently, the sensor is applicable to heavier vehicles and automatic transmission vehicles. Si R&D Vol. 28 No. 4 ( )

2 50 NOx 30 NOx 1250kg NOx 10 NOx 16 1 M10 Fig. 2 R&D Vol. 28 No. 4 ( )

3 MPa Measured points of combustion pressure. PZT Si PZT Requirement specification of CPS. Cut model of lean burn engine. Installation of combustion pressure sensor. R&D Vol. 28 No. 4 ( )

4 52 PZT 1kΩ MΩ PZT PZT (100) (110) (111) C π AB 2 4 C 1 600MPa C C C P (110) π 7.8 Ω cm < 100 > 45 ( cm 2 /dyne ) π V o V o π σ V i Comparison of piezoresistive effect and piezoelectric effect. Method Piezoresistive effect Piezoelectric effect Item Maximun operation Excellent temperature 300 Good 250 Conventional amplifier Charge amplifier Circuit Excellent Poor small size large size Material Excellent Single crystal Good Sinter Resistance of element Excellent Approximate 1 kiloohm Poor Several megaohm Production process Excellent Wafer size process Good Individual Temperature compensation Excellent Simple by resistor Good Complex Sensitivity Good Small Excellent Large Total evaluation Excellent Poor R&D Vol. 28 No. 4 ( )

5 53 σ V i σ 3inch 1.7mm Different types of piezoresistive devices. R&D Vol. 28 No. 4 ( )

6 54 Piezo resistance coefficient of π 63. Resistivity ρ =7.8Ω cm P type (110) Plane Li Na 3 Structure of piezoresistive device. Micrograph of bonded Si wafer. General photograph of combustion pressure sensor. R&D Vol. 28 No. 4 ( )

7 N ( 1mm0.5mm ) 150N N 0 10MPa 1 4V 05V 05V 70MPa ( 10MPa ) kHz Structure of combustion pressure sensor. Output of piezoresistive device. Output of combustion pressure sensor. R&D Vol. 28 No. 4 ( )

56 1 720 5kHz 1113 1 2ME 1), 3 :, -3(1992), 53 2) Takeuchi, M., et al. : "A Combustion Pressure Sensor Utilizing Silicon Piezoresistive Effect", SAE Tech. pap. Ser., No.930351, (1993), 8p.

4) : " ",, -890(1993), 86 5), 5 : " ",, EG93-20, CPM93-11, (1993), 67 Waveform of combustion pressure. Characteristics of combustion pressure sensor. 1. Piezoresistive device Si single crystal 1.7 1.

8 kHz ME 1), 3 :, -3(1992), 53 2) Takeuchi, M., et al. : "A Combustion Pressure Sensor Utilizing Silicon Piezoresistive Effect", SAE Tech. pap. Ser., No , (1993), 8p. 3) Sugitani, N., et al. : "Combustion Pressure Sensor for Toyota Lean Burn Engine Control", SAE Tech. pap. Ser., No , (1993), 8p. 4) : " ",, -890(1993), 86 5), 5 : " ",, EG93-20, CPM93-11, (1993), 67 Waveform of combustion pressure. Characteristics of combustion pressure sensor. 1. Piezoresistive device Si single crystal mm Fixing base block mm Force transmission block mm Force transmission hemisphere 1.5 mm diameter 2. Temperature range Operation temperature 80 to 150 Conservation temperature 40 to Load range Working range 0 to 75N Pre-load 150N Load limit 1000N 4. Sensitivity 0.48 mv/n 5. Non-linearity Less than 1 full scale 6. Creep, hysteresis Less than 1 full scale 7. Operating current 3mA 8. Dissipation power 9mW R&D100 R&D Vol. 28 No. 4 ( )

9 R&D R&D R&D R&D Vol. 28 No. 4 ( )

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