修士論文

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1 SAW 14 2 M3622

2 i SAW SAW

3 5 SAW Wedge SAW Wedge SAW ii

4 ( ) 1) 2) 3) ( ) - 1 -

5 1 1-2 SAW 4) SAW SAW 3 4 SAW 2 5 SAW 2 SAW

6 2 2 5) 128Y X LiNbO3 LiNbO3 2-1 (surface acoustic wave:saw) (interdigital transducer:idt) SAW λ λ/

7 x 2 x Lord Rayleigh 1 9% /5 ( ) LiNbO3 2-2 x1 (x3 ) xi ui u = A e i i αω υx e ω j ωt υ 3 x 1 ( i = 1 ~ 3) i (=13) υ α x3 x

8 2 α 3ω α pω = υx 3 υx 3 1 u1 F1 e pe e ω j ωt υx u = 1 α 3ω α pω F 1 = υx 1 3 υx 3 1 u1 j e e e α 3 p ω j ωt υx p =-F2/F1 F1F2 u3 u SAW 128Y X LiNbO3 µm 4µm2 IDT 2-3 SAW 2-4 LiNbO3 396 m/s SAW f υ λ υ f = λ 4µm 9.6 MHz - 5 -

9 2 2-3 SAW LiNbO 3 : [mm] t = 1 IDT IDT : [mm] : aluminum : µm : 4 µm SAW - 6 -

10 SAW (HEWLETT PACKARD IMPEDANCE/GAIN- PHASE ANALYZER 4194A) 2-5 LiNbO3 (G) 9.59 MHz ml G G G 2 SAW ml 9.59 MHz 9.59 MHz - 7 -

11 2 G [S] B G [MHz] B [S] 2-5 () G [S] B [MHz] G (a).1 ml 5-5 B [S] G [S] B [MHz] G (b).2 ml 5-5 B [S] G [S] B [MHz] G 5-5 B [S] G [S] B [MHz] (c).3 ml (d).4 ml G 5-5 B [S] 2-6 SAW ( ) - 8 -

12 2 mist Fluid SAW device IDT 15 G 15 G [S] 5 B 5 B [S] [MHz] SAW ( ) - 9 -

13 MHz 1 khz 1 msec 9.59 MHz 2-8 IDT LiNbO3 8 V-p 1 khz (1 msec) 2-8 (LDVLaser Doppler Vibrometer, Polytec OFV 51,OFV27) A f V V = 2πfA

14 2 2-6 V-p 1 khz G [nm] [m/sec] [V -p ] 2-9 [nm] [m/sec] [MHz]

15 SAW SAW 2-11 ( ) θr θ R = sin 1 V W / V R VR VW θr =23 θ R

16 (IDT) 128 Y X (MHz) ( ) IDT IDT

17 ( ) θ R (1) (5) (A) (C) ( ) υ

18 3 (A) (B) (C) (1) (2) (3) (4) (5) T c t

19 3 φ 3-4 x x ( ) z xz 2 2 φ φ + = 2 2 x z φ υ ρ σλ g λ πσ υ = g 2 2 π + ρλ λ = 2π / k λ = 2π / k

20 3 λ 2πσ υ (3.1) ρλ τ υ λ = υτ (3.1) λ υ = = τ 2πσ ρλ 3 λ 2πσ = 2 τ ρ fe fk τ = 1 f k 3 2πσ λ = (3.2) 2 ρf k fe fk f = n/ 2 k f e n 1 n = f k = f e / 2 ()

21 8πσ λ = 2 ρf e d λ κ 1 3 8πσ d = κ 2 (3.3) ρf e d fe 2/3 fe d 3-5 (3.3) κ 3-5 khz MHz MHz 5 MHz (3.3) κ = 1. MHz 3µm [µ] k k 1 M M [Hz]

22 4 SAW 4 SAW 3 2 SAW SAW IDT (SAW ) SAW SAW SAW SAW SAW SAW 2 SAW A B Normal

23 4 SAW SAW 4-1 Normal A B IDT SAW IDT SAW

24 4-2 4 SAW A B 4-3 G Q G 15 G [S] 5 B 5 B [S] [MHz] (a) A G 15 G [S] 5 B 5 B [S] [MHz] (b) B

25 4 SAW 4-1 A B G Q A 9.59 MHz 11.1 ms B 9.59 MHz 12.7 ms LDV 4-4 SAW 4 µm LDV LDV LDV µm MHz 1 khz y IDT LDV 3 mm y SAW IDT

26 A [mn] A [mn] 3 4 SAW 18 2 A θ [mm] 3 (a) A 2 A θ [mm] (b) B θ [] θ []

27 4 SAW 4-3 SAW MHz 1 khz (2 CH) (1 khz) 2 CH 9.59 MHz 2 CH 2 2 EN MODEL 24L RF POWER AMPLIFIER WAVE FACTORY HEWLETT PACKARD WF A CH1 CH1 CH2 Iwatsu DS-8812 CH2 CH1 CH

28 4 SAW VrmsI G 2 W = IV rms = GV rms 1 khz 9.59 MHz W/9.59 SAW 2 (1) (.1 ml.15 ml) SAW

29 4 SAW IDT 4-8 (a) (DOW CORNING : HIGH VACUUM GREASE) 4-8 (b)(c) SAW A [mn] A [mn] 3 (a) 18 2 A θ [mm] 3 (b) 2 A θ [mm] (c) θ [] θ []

30 4 SAW 4-8 (2) MHz 1 khz mm Normal 1.27 mm mm [ml/min] [mm]

31 (3) 4 SAW MHz 1 khz 1.27 mm MHz 9.59 MHz [ml/min] MHz [W]

32 4 SAW / (3) 4-11 (a) 4-11 (b) 4-11 (b) 2 IDT θ (a) [V -p ] (b)

33 4 SAW (4) 2 SAW (a) (b) (c) 9.59 MHz 1 khz 1.27 mm 2 23 (a).12. (b) [ml/min] [Wh] (c)

34 4 SAW (5) 5 mm MHz 1 khz 1.27 mm 4-13 [mm] mm 2.5 cm [W]

35 4 SAW (6) 4-14 (a) 1 mm He-Ne 4-14 (b) 4-14 (b) 6 W.25 msec IDT 3.3 mm IDT 4 m/s.8 µsec He-Ne 4. (a) [msec] [Wh] (b)

36 (8) 4 SAW Normal

37 (7) 4 SAW ml ml 4-15 N/m.5.4 [ml/min] : 5.4 W [N/m]

38 4 SAW 4-4 SAW 2 Normal 1.27 mm SAW ( )

39 5 SAW 5 SAW 4 2 SAW SAW 2 SAW IDT 3 2 Wedge IDT 3 2 Wedge Wedge SAW SAW 2 2 SAW IDT C D Wedge

40 5 SAW Wedge C SAW D SAW IDT IDT SAW 9.57 MHz 9.57 MHz (a) 1 mm 1 mm 1 mm mm LiNbO 3 (a) SAW 5-1 Wedge SAW

41 5 SAW (1) 5-1 C D 5-2 G Q G [S] G B [S] 5 B [MHz] (a) C G [S] G B [S] 5 B [MHz] (b) D C D G Q C 9.57 MHz. ms 81. D 9.57 MHz 11. ms

42 5 SAW (2) LDV C 5-3 x y u v D y MHz 1 khz SAW SAW x y u v A [mn] A [mn] 3 IDT θ A [mm] (a) C y θ A [mm] (b) D y θ [] θ [] 5-4 (1)

43 A [mn] A [mn] 3 2 θ 5 SAW [mm] (c) C u θ A [mm] (d) C v A 18 θ [] θ [] 5-4 (2) 5-4 (1) (a)(b) y (b).5 mm (2) (c) u - 4 -

44 5 SAW 5-4 (2) (d) v Wedge 9.57 MHz 1 khz 1.27 mm SAW LDV

45 5 SAW (1) Wedge 2 (2) 18 SAW [ml/min] [Wh]

46 5 SAW (2) 5-6 Wedge [W] [mm]

47 5 SAW (2) IDT IDT IDT IDT SAW

48 5 SAW 5-2 Wedge SAW SAW 2 2 SAW IDT E F Wedge2 Wedge_2 E F IDT IDT SAW 9.74 MHz SAW 9.74 MHz (a) 5-9 (1) Wedge2-45 -

49 5 SAW 1 mm 3 1 mm (b) SAW 5-9 (2) Wedge2-46 -

50 5 SAW (1) G Q G [S] G B [S] 5 B [MHz] (a) E G [S] G B [S] 5 B [MHz] (b) F E F G Q E 9.74 MHz 13.5 ms 1.3 F 9.74 MHz 13.4 ms

51 5 SAW (2) LDV 5-11 y u 5-12 SAW u y IDT A [mn] A θ θ [] A [mn] 3 (a) E y 18 2 A θ (b) F y θ [] 5-12 (1) EF

52 5 SAW A [mn] A θ θ [] (c) E u A [mn] 3 18 θ 2 A (d) F u θ [] 5-12 (2) EF 5-12 (1) (a)(b) (2) (c)(d) Wedge

53 5 SAW Wedge MHz 1 khz 1.4 mm (1) 5-13 Normal Wedge 2 Wedge [ml/min] [W] [W]

54 5 SAW [ml/min] Wedge [] 7 W (2) W mm Wedge2 mm [mm] [W]

55 5 SAW (3) Wedge2 5 mm µm MHz µm µm 5-16 ( )

56 5 SAW 5-3 SAW IDT 3 2 Wedge IDT 3 2 Wedge Normal 5-17 Wedge Wedge2 Wedge Normal 1 4 W Wedge

57 Wedge MHz 9.74 MHz 5 SAW [ml/min] Normal Wedge 9.59 MHz 9.59 MHz 9.57 MHz 9.57 MHz.2 [mm] [W] 5-17 () [W] 5-18 ( ) 5-3 Normal Wedge Wedge

58 SAW SAW SAW SAW IDT 3 2 Wedge IDT 3 2 Wedge2 2 3 Wedge Wedge SAW

59 6 SAW SAW SAW SAW SAW IDT IDT SAW

60 James R Friend SAW

61 1) Japan Hardcopy '99(1999) 2) () (1993) 3) (199) 4) SAW 5) US95-2pp. 1-8 (1995) 6) (1978) 7) (1983) 8) 15 (1993) 9) (1988)

62 (1), J. Friend,,, " 2 ", (2), J. Friend,,, " SAW ", (3), J. Friend,,, " SAW ",

63 IDT (1) (2) 2 Al φ.1 mm 8m Cr cm Pa CrAl - 6 -

64 (3) 9 3 ( ) (4) 6 LiNbO3 128Y-cut X XY 8 2 ( ) (5) 1 CrAl AlCr

65 Table 1 The kind of etching liquids : = 2 : 1 cc 2 17 g 5 cc

64 3 g=9.85 m/s 2 g=9.791 m/s 2 36, km ( ) 1 () 2 () m/s : : a) b) kg/m kg/m k

64 3 g=9.85 m/s 2 g=9.791 m/s 2 36, km ( ) 1 () 2 () m/s : : a) b) kg/m kg/m k 63 3 Section 3.1 g 3.1 3.1: : 64 3 g=9.85 m/s 2 g=9.791 m/s 2 36, km ( ) 1 () 2 () 3 9.8 m/s 2 3.2 3.2: : a) b) 5 15 4 1 1. 1 3 14. 1 3 kg/m 3 2 3.3 1 3 5.8 1 3 kg/m 3 3 2.65 1 3 kg/m 3 4 6 m 3.1. 65 5

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