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1 Department of Mechanical Engineering, The University of Tokyo

2

3 Department of Mechanical Engineering, The University of Tokyo

4

5 Department of Mechanical Engineering, The University of Tokyo

6

7 URL: URL: URL:

8 URL: 1.0b 60 deg. screw b 0.3b 60 deg steps URL: URL:

9 URL: URL: URL:

10 URL: URL: URL: URL:

11 URL: URL: URL: URL:

12 URL: URL: aa21150 URL: μ Acrylic plate <> Material ~8 psec Water film 1msec Co-axial electrode 1nsec URL:

13 URL: URL: http// URL: URL:

14 URL: ex (nm) 3 m (nm) URL: URL: URL:

15 URL: URL: URL:

16 URL: URL: URL: URL:

17 URL: URL: URL:

18 URL: URL: URL: URL: 5 μm 5 μm

19 URL: URL: URL: URL: Au 5 μm 40 μm 10 μm 3 μm SnO 2 /SiO 2 10 μm 10 μm Au

20 URL: URL: URL: URL:

21 URL: URL: URL: URL:

22 URL: URL: 10μm 80nm 1μm URL:

23 URL: URL: URL: URL:

24 URL: URL:

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