FY05-KOM 生産技術部 2005/4/20

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1 e-fabdoctor

2 Agenda XML

3 Worldwide Business Operations Regional Headquarters China, Suzhou, China, Yokogawa Electric China Yokogawa Electric CIS World Headquarters, Tokyo, Japan Yokogawa Electric Corporation Regional Headquarters Europe, Amersfoort, Netherlands Yokogawa Europe Regional Headquarters North America, Newnan, Georgia, USA Yokogawa Corporation of America Yokogawa Electric Korea Yokogawa Middle East, Bahrain Yokogawa America do Sul Headquarters Regional Headquarters Production Facilities Sales, Engineering and Service Centers Global IA Business Headquarter, Singapore Yokogawa Electric International Regional Headquarters ASEAN, Singapore Yokogawa Engineering Asia Yokogawa Australia 29 83

4 -1 Business Domain Industrial Automation and Control-1 CENTUM CS 3000 R3 CENTUM CS 1000 R3 ProSafe-RS DAQSTATION CX1000/2000 STARDOM FA-M3 R

5 -2 Business Domain Industrial Automation and Control-2 ADMAG AXF digital YEWFLO DPharp EJX VEGAPULS ph EXA PH 400 ZR402 GC1000 MK

6 -1 Business Domain Test and Measurement-1 VLSI TS6000H ++ FPD ST6730 MT6060 IC HS2000 XY

7 -2 Business Domain Test and Measurement-2 DL9000 DL750P PC WE7000 WT3000 TA120E TB200 M&C

8 -3 Business Domain Test and Measurement-3 AQ6319 VB8000 AE5501 CDR

9 -1 Business Domain Information Systems-1 ARTEMIS IPv6 v Internet HESTIA TTB3020

10 Business Domain Information Systems-2 Corporate Management ERP Oracle E-business suite 11i irenaissance SAP R/3 PLASMA Production Management MES Production Control System Field Instruments CIMVisionPharms CIMVisionDMS efact CIMVisionLIBRA ETS-R MaterialStream PIM-AID ehozen Exa Exaquantum PI Aspen-MIMI Lab-Aid Omegaland e-fabdoctor ERP=Enterprise Resource Planning MES=Manufacturing Execution System

11 XML XML EES EES e-fabdoctor XML

12 EES (OEE) (EES)

13 EES EES Equipment Engineering System EES

14 EES MES Scheduler ( ) RMS SECS / GEM ( ) YMS ( ) EES EES FDC APC SPC R2R EES Interface-A Interface-B FireWall Interface-C

15 SEMI Semiconductor Equipment and Materials International ( ) SEMI ( ) FPD ( ) SEMI SEMI XML SEMI SEMI SEMI

16 EES SEMI Equipment data Collection Guide ( ) E132 Authentication (Security) E134 Data Collection Management E125 Equipment Self Description E120 Common EquipmentModel Security Data Collection Protocols Metadata E121: XML Guide for Semiconductor Manufacturing EES (Interface-A)

17 EES E132 Authenticatiob and Authorization E134 Data Collection management E120 Common Equipment Model E125 Equipment Self Description I/O

18 EES EES 2000 SEMI 2002 e-fabdoctor EES (SEMI ) XML 2 / SEMI (EES ) e-fabdoctor SEMI XML e-fabdoctor

19 (e-fabdoctor ) e-fabdoctor Passport : EES Data Dictionary Editor : (XML ) e-fabdoctor EEManager : Finder EES e-fabdoctor Finder :

20 XML/SOAP DB MES

21 e-fabdoctor Passport XML ( ) SEMI XML XML 1.0 ( ) XML SEMI XML SEMI XML/SOAP ( / )

22 e-fabdoctor Passport DEMO1-001 DEMO1-001 LP1 LP1 SDS6 SDS6 XML

23 e-fabdoctor Passport DEMO1-001 LP1 SDS6

24 e-fabdoctor Passport XML/SOAP (EEManager Passport) (Passport EEManager)

25 e-fabdoctor Passport XML/SOAP (EEManager Passport) /

26 e-fabdoctor Passport XML/SOAP (Passport EEManager)

27 Data Dictionary Editor XML XML

28 e-fabdoctor EEManager ( )

29 e-fabdoctor Finder ( ) ( )

30 SEMI ( 3 ) (Interoperability) e-fabdoctor Passport Data Dictionary Editor XML SOAP SOAP Web (Tomcat)

31 XML SOA XML XML/SOAP Web Scheduler Interface-A SECS / GEM MES ( ) RMS ( ) YMS ( ) Interface-C EES EES FDC APC SPC R2R Interface-B FireWall

32

191590-21 -21 20051 2 Industrial automation and control business PAGE 16 Test and measurement business PAGE 18 New and other businesses PAGE 20 Conten

191590-21 -21 20051 2 Industrial automation and control business PAGE 16 Test and measurement business PAGE 18 New and other businesses PAGE 20 Conten New action strategies for growth 191590-21 -21 20051 2 Industrial automation and control business PAGE 16 Test and measurement business PAGE 18 New and other businesses PAGE 20 Contents YOKOGAWA Enterprise

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