001-1109PDG.pdf 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36
001-1109PDG.pdf 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 75% 125% 54 55 56 57 58 59 1mm
001-1109PDG.pdf 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 50mL 29/32 24/29 24/29 24/29 14 17 100mL 24/29 14/23 14/23 13 8 28/13 28/11 PTFE 28/11 28 5 PTFE 3
001-1109PDG.pdf 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 5.3mm 10 2 2 250mL 24/29 mm 7mL 30mL 60 5L 10 60 5 10mm 7mL 30mL
001-1109PDG.pdf 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 60 5L 5 1 5 3 5 1 5 10 5 5
001-1109PDG.pdf 152 153 154. U 155 156 157 158 159 160 4 3 4 4 6 1 2 3 4 5
001-1109PDG.pdf 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 4 6 4 O- P S 76 mm 2 7 1 184 185 186 187 188 189 5 2 7
001-1109PDG.pdf * ** A,H C 5 B,G 120 5 C PTFE D 5 E 46 100-3.5 F 18 ISO24/25 J L 4 0.5 2 K 2-1 L 6 5 M N 6 205 4 P O- O- 66.34 2.62
001-1109PDG.pdf Q O- O- 29.1 1.6 R 6 S 65 3 4 T U H 5 * 4 ** ISO2768-m 190 M4 45 M4 191 192 193 194 195 196 1 2 38 mm 3 19 mm 4 45 9
001-1109PDG.pdf 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 5 Ra 0.4 μm 6 7 19 mm M4 0.7 7.- 20 ml 1 4 5 30 L/5% 3.- C (1) (2) 1 2 3 4 ( 5) 1 9.5 5.5 4.0 6.0 n.a. (-.0+.5) (-.0+.5) (-.0+.5) (-.0+.5) 2 26 31 33 30.5 0 3 8 5 5 5 5 4 3 3 3 3 n.a. 5 0 3 3 3 3 6 (3) 20 25 25 25 25 7 n.a. n.a. n.a. 8.5 n.a. c 25 14 8.0(.1) 21 14 d 50 30 20 30 n.a. e 27.9 16.5 10.5 23.9 n.a. f 31.75(-.0+.5) 22 14 31 22 g 25.4 21 13 30 21 h n.a. n.a. n.a 2.70(.5) n.a.
001-1109PDG.pdf j n.a. n.a. n.a 6.3 n.a. k n.a. n.a. n.a 12.6 n.a. (4) r 16 22 27 28.5 0 s 46 46 46 46 n.a. t n.a. 50 50 50 50 w 10 53 53 53 53 u n.a. n.a. n.a. 45 n.a. v n.a. n.a. n.a. 60 n.a. 1 2 3 4 ISO2768-m 5 n.a. 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 5 1 5 10 5 1 5 8. 4. Qout 4 L 11
001-1109PDG.pdf 2 241 242 243 244 245 246 247 248 249 8 4. 8 * A 8 mm P3 B 8 mm 25 5 ml C 2 8 mm 100 ms 2 2 - type256-a08 Burkert GmbH D-74653 Ingelfingen D 1023 1423 2565 Gast Manufacturing Inc. Benton Harbor MI49022 10 mm 2 E 2 G814 RS Components International Corby NN17 9RS UK P2 P3 F Cv 1 8FV12LNSS Parker Hannifin plc. Barnstaple EX31 1NP UK Qout Qin
001-1109PDG.pdf 250 251 Q out Qin P0 = P0 ΔP 252 253 P0 P 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 Qout 5% 8 P2 P3 P3/P2 0.5 20mL 4 2 T 5% 10 1 4 281 282 283 284 D 1ACFM 8 13
001-1109PDG.pdf 285 286 287 288 289 290 291 292 293 294 295 296 297 298 O- D 5 9 7 10a 8 mm 5 D (mm) 0 96 2.55 ± 0.025 1 96 1.89 ± 0.025 2 400 0.914 ± 0.0127 3 400 0.711 ± 0.0127 4 400 0.533 ± 0.0127 5 400 0.343 ± 0.0127 6 400 0.254 ± 0.0127 7 201 0.254 ± 0.0127
001-1109PDG.pdf 299 300 9 15
001-1109PDG.pdf O- Ra 0.4µm 301 302 303 O- 29mm 32mm 1.8mm 10a 304 305 10b
001-1109PDG.pdf 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 Ra 0.4 µm 28.3 L 5% 5 1 5 10 5 28.3 L 28.3 L 6 7 17
001-1109PDG.pdf 341 342 343 344 345 346 347 348 10 ml 8 4 4 L Qout Qout Qin 349 P0 = ΔP =. 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 Qout 5 C 2 T 5% 10 E E 7 MOC 30 100 L 50%
001-1109PDG.pdf 372 373 374 375 376 377 378 379 380 381 382 383 D50 0.24 11.7 μm 5 0.5 6.5 μm D50 11 14 3 11 12 13 6 384 385 11 E 19
001-1109PDG.pdf 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 12 E 7 E MOC MOC 4032 70 μm 7 MOC 60 L MOC 0.14 μm 80%MOC MOC MOC 7
001-1109PDG.pdf 412 413 414 415 416 417 30 L ±5% 6 E mm a 15 12.8 ± 0.05 1* 14.3 ± 0.05 2* 4.88 ± 0.04 3* 2.185 ± 0.02 4* 1.207 ± 0.01 5* 0.608 ± 0.01 6* 0.323 ± 0.01 7* 0.206 ± 0.01 MOC* 0.070 b 14 14.625 ± 0.10 Ra 0.5-2 µm 1 ** c 0 ± 1.18 2 ** c 5.236 ± 0.736 3 ** c 8.445 ± 0.410 4 ** c 11.379 ± 0.237 5 ** c 13.176 ± 0.341 6 ** c 13.999 ± 0.071 7 ** c 14.000 ± 0.071 MOC ** c 14.429 to 14.571 * 13 ** 14 418 419 5 1 21
001-1109PDG.pdf 420 421 422 423 424 425 426 427 428 429 430 431 432 5 10 5 433 434 13 E 435 436 14 E 437
001-1109PDG.pdf 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 15 E 15 15 ml 2 7 8 4 4 L Qout Qout Qin 459 23
001-1109PDG.pdf P0 = ΔP = 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 Qout ±5% C 2 T ±5% 10 1 1 MOC C 7 D 8 E 9 5 μm FPD 7 9
001-1109PDG.pdf 493 494 495 中位 MMADGSD 7 C q = Q L/ Qout 1 1 µm % d4 = 1.7 q d3 = 3.1 q d2 = 6.8 q m5* 4 m4 3 m3 2 m2 c4 = m5 f4 = (c4/c) 100 c3 = c4 + m4 f3 = (c3/c) 100 c2 = c3 + m3 f2 = (c2/c) 100 c = c2 + m2 100 * 5 496 497 8 28.3 L D 1 1 µm % d7 = 0.4 d6 = 0.7 d5 = 1.1 d4 = 2.1 d3 = 3.3 m8 7 m7 6 m6 5 m5 4 m4 c7 = m8 f7 = (c7/c) 100 c6 = c7 + m7 f6 = (c6/c) 100 c5 = c6 + m6 f5 = (c5/c) 100 c4 = c5 + m5 f4 = (c4/c) 100 c3 = c4 + m4 f3 = (c3/c) 100 25
001-1109PDG.pdf d2 = 4.7 d1 = 5.8 d0 = 9.0 3 m3 2 m2 1 m1 0 m0 c2 = c3 + m3 f2 = (c2/c) 100 c1 = c2 + m2 f1 = (c1/c) 100 c0 = c1 + m1 f0 = (c0/c) 100 c = c0 + m0 100 498 499 500 9 E q=(60/q)x Q L/x x 1 1 µm % 501 d7 = 0.34 q 0.67 MOC m8 d6 = 0.55 q 0.60 7 m7 d5 = 0.94 q 0.53 6 m6 d4 = 1.66 q 0.47 5 m5 d3 = 2.82 q 0.50 4 m4 d2 = 4.46 q 0.52 3 m3 d1 = 8.06 q 0.54 2 m2 1 m1 c7 = m8 F7 = (c7/c) 100 c6 = c7 + m7 F6 = (c6/c) 100 c5 = c6 + m6 F5 = (c5/c) 100 c4 = c5 + m5 F4 = (c4/c) 100 c3 = c4 + m4 F3 = (c3/c) 100 c2 = c3 + m3 F2 = (c2/c) 100 c1 = c2 + m2 F1 = (c1/c) 100 c = c1 + m1 100