Fluorogard® all-PTFE High-retention Filters

FLUOROGARD

PTFE PFA Fluorogard ( ) PTFE ( ) (IPA) ATE AT3 (UCM) 1 µm 15 nm PTFE ( ) (UCM) (ATE AT3) 15 nm 2 nm (ATE ) 2 ENTEGRIS, INC.

AT ATX ATE AT3 : PTFE ( ) O- ( 1):.5.1.2.5 1. 5 1 µm ( 2) PFA E-FKM ( ) E-ETP ( ETP) Chemraz ( ) Kalrez ( ) FER ( EP) 15 2 nm.3.5.1 µm (UCM) ( ): 15 2 nm ( 2) : 4.36 m 2 4.5 m 2 1 2.2 m 2 : (.3.5.1 µm) 1.9 m 2 1 1.3 m 2 1 2.1 m 2 (15 2 nm) 2 1.8 m 2 2 2.6 m 2 2 4.4 m 2 3 2.7 m 2 (UCM) : 15 nm 1 2.8 m 2 3 5 L/min 5 5 /1 ml (.5 µm/1 ml) : <4 µg/ (UCM) <1 µg/ <1 µg/ (UCM) <3 µg/ ( ) ( ) :.58 MPa @ 25 C.58 MPa @ 25 C.58 MPa @ 25 C.44 MPa @ 25 C.44 MPa @ 25 C.44 MPa @ 25 C.5 MPa @ 18 C.5 MPa @ 18 C.5 MPa @ 15 C.34 MPa @ 25 C.34 MPa @ 25 C.34 MPa @ 25 C 18 C 18 C 15 C Flowell ( ) 6 1 C 1:.3 µm 15 nm 2 nm (UCM) ( ) 2:.5 µm 1 µm ENTEGRIS, INC. 3

AT 14 12 AT 4.5 µm 6 5 AT 2.5 µm (kpa) 1 8 6 4 2 5, 1 µm 1. µm.1 µm.2 µm.5 µm (kpa) 4 3 2 1.1 µm 5, 1 µm.2 µm 1. µm.5 µm 8 16 24 32 4 (L/min) H 2 O @ 25 C 1 2 3 4 5 6 7 8 (L/min) H 2 O @ 25 C 1 AT 1 6 AT 3 (kpa) 8 6 4 2 1. µm 5, 1 µm.5 µm.1 µm.2 µm.5 µm (kpa) 5 4 3 2 1 1. µm 5, 1 µm.5 µm.1 µm.2 µm.5 µm 1 2 3 4 5 6 (L/min) H 2 O @ 25 C 2 4 6 8 1 (L/min) H 2 O @ 25 C 4 ENTEGRIS, INC.

ATX 14 ATX 4 5 ATX 2 (kpa) 12 1 8 6 4 2.5 µm 1. µm 5, 1 µm.5 µm.1 µm.2 µm (kpa) 4 3 2 1.5 µm 1. µm 5, 1 µm.5 µm.1 µm.2 µm 8 16 24 32 4 (L/min) H 2 O @ 25 C 1 2 3 4 5 6 7 8 (L/min) H 2 O @ 25 C ATX 1 6.5 µm 5 (kpa) 4 3 2 1 1. µm 5, 1 µm.1 µm.2 µm.5 µm 1 2 3 4 5 6 (L/min) H 2 O @ 25 C ENTEGRIS, INC. 5

ATE/AT3 1 ATE 1 1 AT3 1 8 15 nm 8 6 4 2 nm.3 µm 6 4 15 nm 2 2.5 µm.1 µm 1 2 3 4 5 (L/min) H 2 O @ 25 C 1 2 3 4 5 6 (L/min) H 2 O @ 25 C ATE 2 6 15 nm 5 2 nm 4 3.3 µm 2 1.5 µm.1 µm 1 2 3 4 5 6 7 8 (L/min) H 2 O @ 25 C ATE 3 5 4 3 2 2 nm.3 µm 1.1 µm.5 µm 2 4 6 8 1 (L/min) H 2 O @ 25 C 6 ENTEGRIS, INC.

AT Ø95. mm Ø45.2 mm Ø7. mm 5 mm C B A 2. mm A B C 4 132.3 mm 115. mm 113. mm 1 262.3 mm 245. mm 243. mm 2 498.3 mm 481. mm 479. mm 3 738.3 mm 721. mm 719. mm ATX/ATE/AT3 Ø95. mm Ø45.1 mm Ø82. mm 5 mm C B A 2. mm A B C 4 127.3 mm 11. mm 18.5 mm 1 244. mm 227. mm 225. mm 2 471. mm 454. mm 452. mm ENTEGRIS, INC. 7

(P.3) AT/ATX CTF Z =.5 µm V =.1 µm G =.2 µm H =.5 µm A = 1. µm B = 5 µm C = 1 µm S = 4 1 = 1" 2 = 2" 3 = 3" T = AT P = ATX O- PE = (AT ) 1 = (ATX ) B1 = ETP (ATX ) BE = ETP (AT ) C1 = K1 = 479 T1 = EP = PFA Chemlock ( ) K = PFA ( ) = PW = * ATE/AT3 CTF 1 = 1" 2 = 2" E = ATE 3 = AT3** O- 1 = B1 = ETP C1 = (ATE ) K1 = 479 (ATE ) T1 = EP = PFA K = PFA ( ) = PW = * W = 15 nm*** X = 2 nm*** Y =.3 µm*** Z =.5 µm V =.1 µm G =.2 µm = (ATE ) U = (1" 15 nm 2 nm ) *.5 µm 1. µm ** AT3 15 nm *** () 8 ENTEGRIS, INC.

Chem-Line TM ( ) I/II 21 AT 4 (19.5 mm ( 3 4 ) ) 4 AT 1 (19.5 mm ( 3 4 ) ) (kpa) 18.5 µm 15.1 µm 12.2 µm 9.5 µm 6 1. µm 3 1 2 3 4 (L/min) H 2 O @ 25 C (kpa) 3 2 1.5 µm.1 µm.2 µm.5 µm 1. µm 1 2 3 4 5 6 (L/min) H 2 O @ 25 C ENTEGRIS, INC. 9

ATX ATX 4 (9.53 mm ( 3 8 ) ) ATX 4 (19.5 mm ( 3 4 )) 14 7 12.5 µm 6.5 µm (kpa) 1 8.1 µm 6 1. µm 4.5 µm 2.2 µm 1 2 3 4 (L/min) H 2 O @ 25 C 5 4.1 µm 3.2 µm 2 1 1. µm.5 µm 1 2 3 4 (L/min) H 2 O @ 25 C ATX 4 (12.7 mm ( 1 2 ) ) ATX 4 (25.4 mm (1 ) ) 12 6 1.5 µm 5.5 µm (kpa) 8 6 4.1 µm 1. µm (kpa) 4 3 2.5 µm.1 µm.2 µm 2.5 µm 1.2 µm 1. µm 1 2 3 4 1 2 3 4 (L/min) H 2 O @ 25 C (L/min) H 2 O @ 25 C 1 ENTEGRIS, INC.

ATX 1 (9.53 mm ( 3 8 ) ) ATX 1 (19.5 mm ( 3 4 ) ) (kpa) (kpa) 7 6 5 4 3 2 1.2 µm.1 µm.5 µm.5 µm 1. µm 1 2 3 4 5 6 (L/min) H 2 O @ 25 C 21 18 15 12 9 6 3 ATX 1 (12.7 mm ( 1 2 ) ).2 µm.1 µm.5 µm.5 µm 1. µm.2 µm.5 µm.5 µm 1 2 3 4 5 6 1 2 3 4 5 6 (L/min) H 2 O @ 25 C (L/min) H 2 O @ 25 C (kpa) 12 1 8 6 4 7 6 5 4 3 2 1.1 µm 2 1. µm.5 µm 1 2 3 4 5 6 (L/min) H 2 O @ 25 C ATX 1 (25.4 mm (1 ) ).5 µm.1 µm.2 µm 1. µm ENTEGRIS, INC. 11

ATE ATE 1 (9.53 mm ( 3 8 ) ) ATE 1 (19.5 mm ( 3 4 ) ) 21 7 18.5 µm 6.5 µm (kpa) 15 12 9 6 3.3 µm.2 µm.1 µm (kpa) 5 4 3 2 1.3 µm.1 µm.2 µm 1 2 3 4 5 6 (L/min) H 2 O @ 25 C 1 2 3 4 5 6 (L/min) H 2 O @ 25 C 21 ATE 1 (12.7 mm ( 1 2 ) ) 7 ATE 1 (25.4 mm (1 ) ) 18 6 15.5 µm 5.5 µm (kpa) 12 9.3 µm (kpa) 4 3.3 µm 6 3.2 µm.1 µm 2 1.2 µm.1 µm 1 2 3 4 5 6 (L/min) H 2 O @ 25 C 1 2 3 4 5 6 (L/min) H 2 O @ 25 C 12 ENTEGRIS, INC.

AT3 AT3 (12.7 mm ( 1 2 ) ) AT3 (25.4 mm (1 ) ) 21 21 18 18 (kpa) 15 12 9 15 nm (kpa) 15 12 9 15 nm 6 6 3 3 1 2 3 4 5 6 (L/min) H 2 O @ 25 C 1 2 3 4 5 6 (L/min) H 2 O @ 25 C AT3 (19.5 mm ( 3 4 ) ) 21 18 (kpa) 15 12 9 15 nm 6 3 1 2 3 4 5 6 (L/min) H 2 O @ 25 C ENTEGRIS, INC. 13

I II I II 36 mm ケムライン I T 型 標準ベント (T2H, T42H) C 14 mm 6 mm 61 mm 6 mm 4 M8 1.25 深さ 15 mm 25 mm Ø126 mm A B 26 mm Ø18 mm Ø122 mm Ø127 mm ATX/ATE/AT3 I T T : TH: / 19.5 mm ( 3 4")/ 12.7 mm ( 1 2") Super Type Pillar () 4H: / 25.4 mm (1")/ 12.7 mm ( 1 2") A B C 1 396 mm 335 mm 18 mm 1 42 mm 341 mm 188 mm AT I T T : TH: / 19.5 mm ( 3 4")/ 12.7 mm ( 1 2") A B C 1 412 mm 351 mm 18 mm 14 ENTEGRIS, INC.

ケムライン I L 型 標準ベント (LH) C 37 mm 9 mm 14 mm 61 mm 6 mm 25 mm 6 mm 4 M8 1.25 深さ 15 mm Ø126 mm A B 26 mm Ø18 mm Ø122 mm Ø127 mm ATX/ATE/AT3 I L L : LH: / 19.5 mm ( 3 4")/ 12.7 mm ( 1 2") A B C 1 412 mm 351 mm 9 mm AT I L L : LH: / 19.5 mm ( 3 4")/ 12.7 mm ( 1 2") A B C 1 412 mm 351 mm 9 mm ENTEGRIS, INC. 15

6 mm ケムライン I T 型 9 度ベント (3S 4S) 4 M8 1.25 深さ 2 mm 6 mm C 36 mm 58 mm 33 mm Ø126 mm A B 26 mm Ø18 mm Ø122 mm Ø127 mm ATX/ATE/AT3 I T 9 T : 3S: / 19.5 mm ( 3 4")/ 12.7 mm ( 1 2") 3 4S: / 25.4 mm (1")/ 12.7 mm ( 1 2") 3 A B C 1 399 mm 341 mm 172 mm 1 399 mm 341 mm 182 mm 16 ENTEGRIS, INC.

4 mm ケムライン I T 型チューブ 標準ベント (TT TP T3 TW TF TF6 TFW TFP TF3 TFF) 36 mm C 14 mm 4 mm 4 M8 1.25 深さ 17.5 mm 8 mm 25 mm Ø126 mm A B 26 mm Ø18 mm Ø122 mm Ø127 mm ATX/ATE/AT3 I T T : TT: TP: / 19.5 mm ( 3 4")/ 12.7 mm ( 1 2") / 19.5 mm ( 3 4")/ 12.7 mm ( 1 2") T3: / 19.5 mm ( 3 4")/ 12.7 mm ( 1 2") 3 TW: TF: / 19.5 mm ( 3 4")/ 12.7 mm ( 1 2") 2 / 19.5 mm ( 3 4")/ 12.7 mm ( 1 2") FlareLock () II A B C 1 436 mm 4 32 mm 1 45 mm 37 mm 272 mm 4 334 mm 254 mm 272 mm 1 449 mm 369 mm 268 mm 1 436 mm 363 mm 252 mm 1 436 mm 363 mm 252 mm AT I T T : TF: TF6: TFW: TFP: TF3: TFF: / 19.5 mm ( 3 4")/ 12.7 mm ( 1 2") / 19.5 mm ( 3 4")/ 12.7 mm ( 1 2") 6 / 19.5 mm ( 3 4")/ 12.7 mm ( 1 2") 2 / 19.5 mm ( 3 4")/ 12.7 mm ( 1 2") / 19.5 mm ( 3 4")/ 12.7 mm ( 1 2") 3 / 19.5 mm ( 3 4")/ 12.7 mm ( 1 2") II A B C 1 453 mm 4 327 mm 4 327 mm 254 mm 252 mm 1 453 mm 38 mm 252 mm 4 327 mm 254 mm 252 mm 1 466 mm 386 mm 272 mm 4 34 mm 26 mm 272 mm 1 466 mm 386 mm 268 mm 4 34 mm 26 mm 268 mm 1 453 mm 38 mm 252 mm 4 327 mm 254 mm 252 mm ENTEGRIS, INC. 17

ケムライン I S 型チューブ 標準ベント (ST, STW, STP, ST3, STF, SF, SF3, SF6, SFF, SFW, SFP) Ø128 mm 43 mm Ø128 mm A Ø18 mm 26 mm Ø122 mm 43 mm ATX/ATE/AT3 I S A S : ST: STW: STP: ST3: STF: / 19.5 mm ( 3 4")/ 12.7 mm ( 1 2") / 19.5 mm ( 3 4")/ 12.7 mm ( 1 2") 2 / 19.5 mm ( 3 4")/ 12.7 mm ( 1 2") / 19.5 mm ( 3 4")/ 12.7 mm ( 1 2") 3 / 19.5 mm ( 3 4")/ 12.7 mm ( 1 2") II 1 459 mm 4 343 mm 1 459 mm 4 336 mm 1 478 mm 4 362 mm 1 475 mm 4 359 mm 1 459 mm 4 343 mm AT I S A S : SF: SF3: SF6: SFF: SFW: SFP: / 19.5 mm ( 3 4")/ 12.7 mm ( 1 2") / 19.5 mm ( 3 4")/ 12.7 mm ( 1 2") 3 / 19.5 mm ( 3 4")/ 12.7 mm ( 1 2") 6 / 19.5 mm ( 3 4")/ 12.7 mm ( 1 2") II / 19.5 mm ( 3 4")/ 12.7 mm ( 1 2") 2 / 19.5 mm ( 3 4")/ 12.7 mm ( 1 2") 1 475 mm 4 349 mm 1 491 mm 4 365 mm 4 349 mm 1 475 mm 4 344 mm 1 476 mm 4 349 mm 1 495 mm 4 369 mm 18 ENTEGRIS, INC.

ケムライン II (Flaretek ( フレアテック ) フロウエル 6 シリーズ スーパー 3 タイプピラー ) B A Ø14 mm 11 mm II 6 3 / / B A A A A A A 4" 1" 4" 1" B 4" 1" 9.53 mm ( 3 8") 6.35 mm ( 1 4") 37 mm 23 mm 343 mm 12.7 mm ( 1 2") 6.35 mm ( 1 4") 37 mm 243 mm 356 mm 41 mm 228 mm 341 mm 19.5 mm ( 3 4") 6.35 mm ( 1 4") 37 mm 246 mm 359 mm 248 mm 361 mm 37 mm 237 mm 35 mm 19.5 mm ( 3 4") 12.7 mm ( 1 2") 41 mm 25 mm 363 mm 241 mm 354 mm 41 mm 236 mm 349 mm 25.4 mm (1") 6.35 mm ( 1 4") 37 mm 255 mm 368 mm 258 mm 371 mm 37 mm 27 mm 383 mm 25.4 mm (1") 12.7 mm ( 1 2") 41 mm 263 mm 376 mm 253 mm 366 mm 41 mm 267 mm 38 mm ENTEGRIS, INC. 19

(P.3) AT I CTF P Z =.5 µm V =.1 µm G =.2 µm H =.5 µm A = 1. µm S = 4 1 = 1 / TF = 19.5 mm ( 3 4") T TFP = 19.5 mm ( 3 4") T + TF3 = 19.5 mm ( 3 4") T + 3 TFF = 19.5 mm ( 3 4") T + II TFW = 19.5 mm ( 3 4") T + 2 TF6 = 19.5 mm ( 3 4") T + 6 SF = 19.5 mm ( 3 4") S SFP = 19.5 mm ( 3 4") S + SF3 = 19.5 mm ( 3 4") S + 3 SFF = 19.5 mm ( 3 4") S + II SFW = 19.5 mm ( 3 4") S + 2 SF6 = 19.5 mm ( 3 4") S + 6 LH = 19.5 mm ( 3 4") L TH = 19.5 mm ( 3 4") T ATX/ATE/AT3 I CTD AT W = 15 nm** Y =.3 µm Z =.5 µm V =.1 µm S = ATX 4 X = ATX 1 E = ATE 1 3 = AT3 1 G =.2 µm H =.5 µm A = 1. µm PW = * / ST = 19.5 mm ( 3 4") S () ST3 = 19.5 mm ( 3 4") S + 3 STF = 19.5 mm ( 3 4") S + II STW = 19.5 mm ( 3 4") S + 2 STP = 19.5 mm ( 3 4") S + T3 = 19.5 mm ( 3 4") T + 3 TF = 19.5 mm ( 3 4") T + II TH = 19.5 mm ( 3 4") T TP = 19.5 mm ( 3 4") T + TT = 19.5 mm ( 3 4") T () TW = 19.5 mm ( 3 4") T + 2 LH = 19.5 mm ( 3 4") L 3S = 19.5 mm ( 3 4") T 3 4S = 25.4 mm (1") T 3 4H = 25.4 mm (1") T *.5 µm 1. µm ** AT3 2 ENTEGRIS, INC.

ATX/ATE/AT3 II WDF Y =.3 µm Z =.5 µm V =.1 µm G =.2 µm H =.5 µm A = 1. µm STX = ATX 4 ATX = ATX 1 ATE = ATE 1 AT3 = AT3 1 PW = * 1F = / 9.53 mm ( 3 8 )/ 6.35 mm ( 1 4 ) 2F = / 12.7 mm ( 1 2 )/ 6.35 mm ( 1 4 ) F = / 19.5 mm ( 3 4")/ 6.35 mm ( 1 4 ) 4F = / 25.4 mm (1 )/ 6.35 mm ( 1 4 ) W = / 19.5 mm ( 3 4")/ 6.35 mm ( 1 4 ) 6 4W = / 25.4 mm (1 )/ 6.35 mm ( 1 4 ) 6 P3PM = / 19.5 mm ( 3 4")/ 6.35 mm ( 1 4 ) 3 4P3PM = / 25.4 mm (1 )/ 6.35 mm ( 1 4 ) 3 2P3PM = / 12.7 mm ( 1 2 )/ 6.35 mm ( 1 4 ) 3 F2FM = / 19.5 mm ( 3 4")/ 12.7 mm ( 1 2 ) 4F2FM = / 25.4 mm (1 )/ 12.7 mm ( 1 2 ) W2WM = / 19.5 mm ( 3 4")/ 12.7 mm ( 1 2 ) 6 4W2WM = / 25.4 mm (1 )/ 12.7 mm ( 1 2 ) 6 P2PM = / 19.5 mm ( 3 4")/ 12.7 mm ( 1 2 ) 3 4P2PM = / 25.4 mm (1 )/ 12.7 mm ( 1 2 ) 3 *.5 µm 1. µm ATE/AT3 II UCM WDFW W = 15 nm ACE =ATE UCM 1 3CE =AT3 UCM 1 1F = / 9.53 mm ( 3 8 )/ 6.35 mm ( 1 4 ) 2F = / 12.7 mm ( 1 2 )/ 6.35 mm ( 1 4 ) F = / 19.5 mm ( 3 4")/ 6.35 mm ( 1 4 ) 4F = / 25.4 mm (1 )/ 6.35 mm ( 1 4 ) W = / 19.5 mm ( 3 4")/ 6.35 mm ( 1 4 ) 6 4W = / 25.4 mm (1 )/ 6.35 mm ( 1 4 ) 6 P3PM = / 19.5 mm ( 3 4")/ 6.35 mm ( 1 4 ) 3 4P3PM = / 25.4 mm (1 )/ 6.35 mm ( 1 4 ) 3 2P3PM = / 12.7 mm ( 1 2 )/ 6.35 mm ( 1 4 ) 3 F2FM = / 19.5 mm ( 3 4")/ 12.7 mm ( 1 2 ) 4F2FM = / 25.4 mm (1 )/ 12.7 mm ( 1 2 ) W2WM = / 19.5 mm ( 3 4")/ 12.7 mm ( 1 2 ) 6 4W2WM = / 25.4 mm (1 )/ 12.7 mm ( 1 2 ) 6 P2PM = / 19.5 mm ( 3 4")/ 12.7 mm ( 1 2 ) 3 4P2PM = / 25.4 mm (1 )/ 12.7 mm ( 1 2 ) 3 ENTEGRIS, INC. 21

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