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MT-21J-003-B STP-301/451 3 -b 2002.3 Copyright 2002 Seiko Instruments Inc. All rights reserved. Printed in Japan.

STP-301/451 STP STP, 1

STP-301/451 STP (MSDS Material Safety Data Sheet) ( ) MSDS STP 2

STP-301/451 STP OFF STP 20kg STP (EMO) STP EMO STP EMO STP ( ) STP STP STP No. STP ( No No ) STP STP-301/451 Series STP STP 3

STP-301/451 OFF STP 4

STP-301/451 STP-301/STP-451 STP-301 STP-451 STP-301C *1 STP-451C *1 STP STP EC Machinery directive EC Electromagnetic compatibility directive EC Low voltage directive EN292-1 EN292-2 EN60204-1 EN61326 (class A) EN61000-6-2 *2 UL3101-1,1993 (Electrical Equipment for Laboratory Use; Part 1 : General Requirements) *1 *2 UL3101-1 5

STP-301/451 1) 2) VI 261-8507 1-8 TEL: (043)211-1401 ( ) FAX: (043)211-8075 275-0004 4-3-1 TEL: (047)475-3123 (VI ) (047)475-3111 ( ) (047)475-3119 ( ) FAX: (047)471-1544 VI 261-8507 1-8 TEL: (043)211-1401 ( ) FAX: (043)211-8075 6

STP-301/451 1. 2 2. 1) 2) 3. 1) 2) 3) 4) 5) 6) TMP 7) 8) 9) TMP TMP 10) 11) 12) 13) 14) 15) LCD ( WARNING ) ( ) 16) 4. 7

STP-301/451 1...1-1 1.1... 1-1 1.2... 1-1 1.3... 1-2 2...2-1 2.1 STP... 2-1 2.2 STP... 2-1 3 STP...3-1 3.1... 3-1 3.2... 3-3 3.2.1... 3-3 3.2.2... 3-4 3.2.3... 3-4 3.3 STP... 3-5 3.3.1... 3-6 3.3.2... 3-7 3.3.3... 3-8 3.3.4... 3-12 3.3.5... 3-13 3.3.6 [C ]... 3-14 4 STP...4-1 4.1... 4-1 4.1.1... 4-1 4.1.2... 4-4 4.1.3... 4-5 4.1.4... 4-6 4.2... 4-7 4.2.1... 4-7 4.2.2... 4-8 4.3... 4-9 4.4... 4-10 4.4.1 mm... 4-10 4.4.2... 4-11 5...5-1 5.1... 5-1 5.2... 5-1 5.3... 5-2 5.4... 5-2 5.5... 5-3 8

STP-301/451 5.5.1... 5-3 5.5.2... 5-3 5.5.3... 5-4 5.5.4... 5-4 5.5.5... 5-4 5.5.6... 5-4 5.6 5.1... 5-5 5.6.1... 5-5 5.6.2... 5-6 5.6.3... 5-6 5.6.4... 5-7 5.6.5... 5-7 6...6-1 6.1... 6-2 6.1.1... 6-2 6.1.2... 6-5 6.1.3... 6-5 6.1.4... 6-5 6.1.5... 6-5 6.1.6... 6-6 6.1.7... 6-6 6.2... 6-7 6.2.1... 6-7 6.2.2... 6-7 7...7-1 7.1... 7-1 7.1.1... 7-2 7.2 7.1... 7-3 7.2.1... 7-3 7.2.2... 7-4 7.3... 7-5 7.3.1 [C ]... 7-5 8...8-1 8.1 I/O TB1... 8-1 8.2 I/O TB2... 8-5 9...9-1 9.1... 9-1 10...10-1 10.1 10.1... 10-1 10.1.1 DSW-B 1 ON... 10-1 10.1.2 DSW-B 1 ON... 10-2 11 STP...11-1 9

STP-301/451 12...12-1 12.1... 12-1 12.2... 12-2 12.3... 12-3 12.4... 12-4 12.5... 12-5 13...13-1 13.1 STP... 13-1 13.2 STP... 13-2 14...14-1 14.1 STP... 14-1 14.2 STP... 14-1 15...15-1 15.1... 15-1 15.2 LCD... 15-2 15.2.1... 15-2 15.2.2 Ver.2.20 *1... 15-5 15.3... 15-7 15.4... 15-7 15.5... 15-8 16...16-1 16.1 STP... 16-1 16.2 STP... 16-2 16.3... 16-3 10

STP-301/451 3.1 3.2 3.3 3.4 3.5 3.6 3.7 3.8 4.1 4.2 4.3 4.4 4.5 4.6 4.7 4.8 5.1 7.1 8.1 8.2 9.1 10.1 11.1 16.1 16.2 16.3 16.4 16.5 16.6 STP... 3-2... 3-5... 3-7... 3-7 STP (STP )... 3-9 STP (STP )... 3-10 STP (STP )... 3-11... 3-14... 4-3... 4-4... 4-5... 4-6... 4-8... 4-9... 4-10... 4-13... 5-8... 7-6 I/O TB1... 8-3 I/O TB2... 8-6... 9-2 LCD... 10-3 STP... 11-2 STP [ ] :STP-301... 16-4 STP [ [C ]] :STP-301C... 16-5 STP... 16-6 STP... 16-7 STP... 16-8... 16-9 11

STP-301/451 3.1 3.2 3.3 4.1 5.1 5.2 6.1 6.2 6.3 8.1 8.2 8.3 8.4 15.1 15.2 15.3 15.4 15.5 16.1 16.2 16.3 16.4 16.5... 3-8... 3-9... 3-10... 4-12 I/O TB2... 5-6 I/O TB2... 5-7... 6-4... 6-4... 6-8 I/O TB1... 8-1 CR1, 3, 5, 7, 8... 8-4 CR4, 6... 8-4 I/O TB2... 8-5 1/2... 15-3 2/2... 15-4... 15-7... 15-7... 15-8 STP... 16-1 STP... 16-2... 16-3 C... 16-3... 16-3 12

STP-301/451 1 1.1 STP-301C/STP-451C Ga, Hg, In, Sn HBr MSDS Material Safety Data Sheet STP-301 STP-451 N 2 7.3 7.2 1.2 STP 12 1-1

STP-301/451 1.3 STP STP 16.4 16.6 (1) (2) (3) 3. STP 1-2

STP-301/451 (4) (5) (6) 1-3

STP-301/451 (7) (8) 200V 100V (9) 1-4

STP-301/451 2 2.1 STP 16.3 STP 2.2 STP 16.3 2-1

STP-301/451 3 STP 3.1 3.1 1, VG, ISO KF 25 41 STP KF 10 [ ] [C ] 1 : JVIA : JIS 3-1

STP-301/451 3.1 STP 3-2

STP-301/451 3.2 3.2.1 C Li Ga, Hg, In, Sn HBr STP-301, STP-451 1.1 STP 040 3095 150Gauss (15mT) 30Gauss (3mT) 500V Si 3-3

STP-301/451 3.2.2 STP STP 150mm ( 16.1, 16.2 STP STP ) 3.2.3 STP 3.3.3 STP 820N m STP SUS304 *1 A2-70 M8 *1 16mm 8 16.1 16 2 STP *1 JIS 3-4

STP-301/451 3.3 STP STP 3.2 3.2 C Li Ga, Hg, In Sn HBr STP-301, STP-451 1.1 STP STP STP STP 3-5

STP-301/451 STP 240L/min. STP STP 1) STP 2) absorption trap 3.3.1 STP 1) 2) Si STP 3-6

STP-301/451 3.3.2 STP 3.3 3.3 3.4 3.4 3-7

STP-301/451 3.3.3 STP STP STP 3.2 3)STP 2)STP 1)STP 3.1 3.1 (Nm) M8 12.0 M10 24.1 M12 42.1 STP 600N/mm 2 70 3-8

STP-301/451 1) STP 3.2 8 8 3-8 3.2 STP (a) (b) 3.5 STP (STP ) *1 JISB1051(ISO898-1) JISB1054(ISO3506) AMS6419(Aerospace Material Specification) 3-9

STP-301/451 2) STP 3.2 8 3-8 3.3 3.3 ISO160 4 ISO200250 6 ISO320 8 3.6 STP (STP ) 3-10

STP-301/451 3) STP 3.2 STP 8 3-8 (a) (b) 3.7 STP (STP ) 3-11

STP-301/451 3.3.4 STP STP STP STP STP 1STP 2 STP 3 4 240L/min. 5 STP 1/3 6 STP STP STP STP adsorption trap 3-12

STP-301/451 6.710-2 Pa 510-4 Torr 13 Pa 0.1 Torr 16.1 STP 1.3 Pa 10-2 Torr 3.3.5 STP 0.1 0.1 3-13

STP-301/451 3.3.6 [C ] N2 3.8 N2 7.3 1.710-2 Pa m 3 /sec. 10SCCM 0 0.5kgf/cm 2 3.8 3-14

4 4.1 4.1.1 4.1 STP- 301/451 (1) START LCD LEVITATION BRAKE : ***00rpm(***00rpm ) ACCEL. LCD SET : ***00rpm (***00rpm ) 10 (2) STOP NORMAL ACCEL. BRAKE 2,000rpm BRAKE (3) RESET FAILURE FAILURE 3 9. (4) MANUAL/REMOTE ON REMOTE ON REMOTE 4-1

STP- 301/451 (5) SELECT LCD LCD 5. 10. 6. 15. LEVITATION ACCEL. 3 15 (6) LCD STP 5. 9. 10. STP 6. 15 (7) ACCEL. LED (8) NORMAL LED (9) BRAKE LED (10) POWER LED (11) FAILURE LED LCD a) 70 b) 110 c) d) e) STP f) 6. 15. (12) REMOTE LED 4-2

STP- 301/451 (7) (8) (9) (6) (5) (10) (11) (12) (4) (1) (2) (3) 4.1 4-3

STP- 301/451 4.1.2 4.2 (13) AC POWER CON1 (14) MAIN POWER OFF (15) P.CONNECTOR CON2 STP (16) STP (17) I/O TB1 (18) I/O TB2 (17), (18) 8. (19) F1 250V, 10A (20) F2 250V, 10A I/O TB1 4.2 4-4

STP- 301/451 4.1.3 4.3 (21) VRI 10. (22) DSW-B 4.3 (21) (22) 10 4.3 4-5

STP- 301/451 4.1.4 4.4 (23) (23) 4.4 4-6

STP- 301/451 4.2 4.2.1 040 3095 10 4-7

STP- 301/451 4.2.2 4.5 5cm 1.8cm 15cm STP 150mm 16 3 STP 4.5 4-8

STP- 301/451 4.3 EIA 4.5 16 3 STP 4.6 4-9

STP- 301/451 4.4 4.4.1 mm ( ) ( ) *1 ) ) ) 4.3(L20m) L20m : 4mm 2 6.5(L20m) L20m : 10mm 2 24.5 1.5mm 2 3 76.5 17 STP-301/451 Series 40 8.1( 8.8(1, 2, ) 4.7 4-10

STP- 301/451 4.4.2 OFF 1) STP 0.1 0.1 4-11

STP- 301/451 2) STP STP STP STP STP P.CONNECTOR CON2 STP No. No. 9. STP STP-301/451 Series 3) STP AC POWER CON1 4.1 4.8 4.1 CON1 No. L N AC POWER 1 AC200240V10% 200V AC100120V10% 100V 2 50/60Hz PE L PE N 1kV 4-12

STP- 301/451 4.8 4-13

STP-301/451 5 STP STP OFF STP 5.1 STP 1) 2) 3) 4) STP 5) STP STP-301/451 Series 6) STP 9. 7) 9. 5.2 3 3 10 FAILURE LCD OVERLOAD 5-1

STP-301/451 5.3 STP STP 5.4 STP STP STP STP 5-2

STP-301/451 5.5 5.1 MANUAL/REMOTE ON REMOTE 5.5.1 1) ON POWER 2) LCD LEVITATION 5.5.2 1) START ACCEL. LCD 500rpm ACCEL : ***00rpm 2) ACCEL. NORMAL LCD NORMAL: ***00rpm LCD LEVITATION BRAKE : ***00rpm LEVITATION BRAKE : ***00rpm SELECT 5-3

STP-301/451 5.5.3 1) STOP NORMAL ACCEL. BRAKE 500rpm BRAKE 2) 500rpm BRAKE LCD 5.5.4 START LCD LEVITATION BRAKE : ***00rpm 5.5.5 ACCEL.,NORMAL,BRAKE OFF POWER ACCEL., NORMAL, BRAKE OFF OFF 5.5.6 BRAKE RESET FAILURE 6. 15. 5-4

STP-301/451 5.6 5.1 8. MANUAL/REMOTE ON REMOTE 5.6.1 1) ON POWER 2) LCD LEVITATION 5-5

STP-301/451 5.6.2 3 5.1 I/O TB2 1 1) (2)(3) (1)(4) 2) (4)(5) 0.3 ON (4)(5) 5 (1)(4) 2 (2)(3) (1)(5) (1)(5) 3 (3)(5) AC25V DC1248 DC (3) (5) (3)(5) 3) AC25250V LCD 5.6.3 5.6.2 LCD 5-6

STP-301/451 5.6.4 ACCEL.,NORMAL,BRAKE OFF POWER ACCEL., NORMAL, BRAKE OFF OFF 5.6.5 BRAKE 5.2 FAILURE 15 5.2 I/O TB2 1 (2)(3) (6) (1) 0.3 2 (6)(3) AV25V DC12 48V 0.3 DC (3)(6) 2) AC25250V 5-7

STP-301/451 ON P021* Ver.*.** SELF TEST TEST COMPLETE LEVITATION *1 LEVITATION BRAKE: ***00rpm RATING: 48000rpm *2 PUMP TEMP: ** SELECT LEVITATION ACCEL: ***00rpm *1 NORMAL: 48000rpm *1 BRAKE: ***00rpm *1 *1 SELECTRATING:48000rpm PUMP TEMP:** *2 10. 5.1 5-8

STP-301/451 6 STP FAILURE LCD 6.3 LCD & SELECT SELECT POWER FAILURE & SELECT DISTURBANCE & 6.2 15. 6-1

STP-301/451 6.1 6.1.1 170V200V 85V100V 1) 25,000rpm 2 STP POWER FAILURE LCD POWER FAILURE I/O TB1 ALARM OUT (10)(9)(10)(11) 20,000rpm LCD 17,000rpm FAILURELCD 2 STP 2) 17,000rpm 25,000rpm 0.02 0.14 POWER FAILURE LCD POWER FAILURE I/O TB1 ALARM OUT (10)(9)(10)(11) 20,000rpm 20,000rpm LCD 17,000rpm FAILURELCD 6-2

STP-301/451 3) 17,000rpm 1) START 2) STP 6.1 6.2 6-3

STP-301/451 6.1 LCD LED (I/O TB1) FAILURE 20,000rpm POWER FAILURE 20,000rpm POWER FAILURE 17,000rpm 17,000rpm ON OFF 6.2 START 2 25,000rpm 2 0.02 25,000rpm 0.14 6-4

STP-301/451 6.1.2 STP FAILURE LCD DISTURBANCE STP STP 6.1.3 STP STP FAILURE LCD DISTURBANCE 6.1.4 10 10 FAILURELCD OVERLOAD 6.1.5 110 FAILURELCD PUMP OVERTEMP 6-5

STP-301/451 6.1.6 70 FAILURE LCD CONTROLLER OT 6.1.7 51,400rpm OFF FAILURE LCD OVERSPEED DRIVER RA 6-6

STP-301/451 6.2 6.2.1 STP 6.2.2 BRAKE RESET FAILURE START BRAKE 5.6.5 FAILURE 5.6.2 OFF FAILURE OFF ON 15. 6-7

STP-301/451 6.3 LED LCD ( 6.1.1 ) 2 FAILURE POWER POWER FAILURE 17,000rpm FAILURE DISTURBANCE STP STP 100m0-P FAILURE DISTURBANCE FAILURE OVERLOAD 110 FAILURE PUMP OVERTEMP 70 FAILURE CONTROLLER OT 51,400rpm FAILURE OVERSPEED DRIVER RA OFF 6-8

STP-301/451 7 7.1 STP 7.2 7.1 120 110 7-1

STP-301/451 7.1.1 7.1 7.1 7-2

STP-301/451 7.2 7.1 7.2.1 8-M8 *1 16mm 4 16.1 162 STP 7.1 PT *1 (Rc)1/4 8 2L/min 525 2.910 5 Pa(3kgf/cm 2 ) STP STP STP *1 : JIS 7-3

STP-301/451 7.2.2 8-M8 *1 16mm 4 16.1 16.2 STP 4 3.3.3 TB1 I/O TB1 STP 8. I/O TB1 AC. POWER IN (1)(2) *1 JIS 7-4

STP-301/451 7.3 MSDS Material Safety Data Sheet C Li Ga, Hg, In, Sn HBr 1.1 STP-301 STP-451 7.2 7.1 7.3.1 [C ] 1) N2 3.3.6 2) 1.710-2 Pa m 3 /sec.10sccm 0 4.810 4 Pa(0.5kgf/cm 2 ) 7-5

STP-301/451 7.1 7-6

STP-301/451 8 8.1 I/O TB1 8.1 8.1 M3.5 *1 N.O N.C COM IN, OUT (1)(4) 8.1 I/O TB1 (1) AC. POWER N1 IN L1 (2) STP (3) (5) FAN N.O OUT (4) STP AC. POWER (1) (2) STP 7.2.2 (6) (7) POWER N.O OUT (8) (9) (11) N.O N.C ALARM OUT COM (10) (10)(9) (10)(11) 20,000rpm *1 :JIS 8-1

STP-301/451 (12) BRAKE (14) N.O OUT (13) (15) (17) N.O ACC N.O OUT NORM OUT N.C COM ( 16) (18) STP STP 20,000rpm STP STP (16)(13) (16)(15) STP STP (19) REMOTE N.O OUT (20) STP MANUAL / REMOTE ON 20,000rpm (1) (3) (5) (7) (9) (11) (13) (15) (17) (19) (2) (4) (6) (8) (10) (12) (14) (16) (18) (20) TB1 8-2

STP-301/451 8.1 I/O TB1 8-3

STP-301/451 8.1 CR1, 3, 5, 7, 8 8.2 8.2 CR1, 3, 5, 7, 8 COS=0.4 COS=1 L/R=7ms AC250V 10A AC250V 5A DC 30V 10A DC 30V 5A 10A AC380V DC125V 10A AC 2,500VA AC 1,250VA DC 300W DC 220W DC5V 10mA 8.1 CR4, 6 8.3 8.3 CR4, 6 COS=0.4 COS=1 L/R=7ms AC250V 8A AC250V 6A DC30V 8A DC 30V 4A 8A AC380V DC125V 8A AC 2,000VA AC 1,500VA DC 240W DC 120W DC5V 100mA 8-4

STP-301/451 8.2 I/O TB2 8.4 8.2 5.6.2 M4 *1 COM IN OUT (1) (2) +12V OUT 0V OUT (3) (5) COMMON IN START IN (3) (4) COMMON IN STOP IN (3) (6) COMMON IN RESET IN 8.4 I/O TB2 DC12V 3 1) (2)(3)(1)(4) (4)(5) 0.3 ON 5 2) (2)(3) (1)(5) 3) (3)(5) AC25V DC2448V DC + (3) (5) 1) 1) (1)(4) 2) 2) (1)(5) 3) 3) (3)(5) 1) 1) 2) (1)(6) 0.3 FAILURE 2) 2) 1) FAILURE 3) 3) (3)(6) AC25V DC24 48V 0.3 FAILURE DC + (3) (6) 3)AC25 250V *1 : JIS 8-5

STP-301/451 I/O TB2 F1F4 8.2 I/O TB2 8-6

STP-301/451 9 STP RESET STP 9.1 1) 2) ON 3) RESET 3 LCD TUNING! 4) TUNING! RESET 5) 1 LCD TUNING COMPLETE 3) LCD RESET 9-1

STP-301/451 LCD ON P021* ver.*.** SELF TEST TEST COMPLETE LEVITATION RESET 3 RATIGN:48000rpm PUMP TEMP:** TUNING! TUNING COMPLETE 9.1 9-2

STP-301/451 10 25,000rpm48,000rpm 500rpm 48,000rpm 10.1 10.1 DSW-B 1 ON DSW-B 1 OFF 48,000rpm DSW-B 4.3 10.1.1 DSW-B 1 ON 1) DSW-B 1 ON LCD SET= ***00rpm VR1 2) VR1 LCD SET= ***00rpm ***00rpm VR1 3) LCD SET= ***00rpm START LCD SET= ***00rpm START 4) SELECT LCD RATING: ***00rpm LCD SET= ***rpm SELECT 2) 3) 5) 10-1

STP-301/451 10.1.2 DSW-B 1 ON 1) DSW-B 1 ON 2) ON LCD RATING: ***00rpm 48,000rpm 3) SELECT 3 LCD SET= ***00rpm VR1 4) VR1 LCD SET= ***00rpm ***00rpm VR1 5) LCD SET= ***00rpm START LCD SET= ***00rpm START 6) SELECT 1 LCD RATING: ***00rpm LCD SET= ***rpm SELECT 2) 3) 7) 10-2

STP-301/451 LCD DSW-B 1 ON VR1 SET = ***00rpm START RATING: **000rpm PUMP TEMP: ** LEVITATION * 1 SELECT *1 LEVITATION ACCEL: ***00rpm NORMAL: ***00rpm BRAKE: ***00rpm DSW-B 1 OFF 48,000rpm 10.1 LCD 10-3

STP-301/451 11 STP 11.1 STP-301/451 1) 2) 3) STP 3 2 11-1

STP-301/451 11.1 STP 11-2

STP-301/451 12 OFF OFF 12.1 ON 4.4 1 12-1

STP-301/451 12.2 STP 4.1.2 F1, F2: 250V, 10A I/O TB1 (1) (2) (3) (4) 8.1 2 16.5 16.5 12-2

STP-301/451 12.3 MSDS Material Safety Data Sheet 3 1 12.5 12-3

STP-301/451 12.4 STP STP STP ( ) ( ) 1 2 )1 5 STP 2 ( ) 5 (2 ) )1 LCD )2 12-4

STP-301/451 12.5 MSDS Material Safety Data Sheet (MSDS Material Safety Data Sheet) FAX 12-5

STP-301/451 13 13.1 STP STP 1) STP 2) N2 3) 4) 5) STP 6) 55 25 13-1

STP-301/451 13.2 STP STP 1) STP 2) 55 25 13-2

STP-301/451 14 14.1 STP STP STP STP STP MSDS Material Safety Data Sheet 14.2 STP STP 14-1

STP-301/451 15 STP FAX OFF 15.1 BRAKE LCD 15.2 LCD RESET FAILURE START BRAKE LCD 15.2 LCD 5.6.5 FAILURE 5.6.2 OFF FAILURE OFF ON 15-1

STP-301/451 15.2 LCD 15.2.1 FAILURE LCD LCD & SELECT SELECT DISTURBANCE & SELECT POWER FAILURE & SELECT 15-2

STP-301/451 15.1 1/2 LCD CABLE STP DISCONNECT STP CONTROLLER OT 1) 1) 40 2) 2) DISTURBANCE 1) STP 1) 2) 2) 100m0 P 1) 1) 2) 2) 3) 3) DRIVER ERROR1 DRIVER ERROR6 DRIVER HF DRIVER OC DRIVER OV DRIVER RA 49,50053,000rpm DRIVER UV 15-3

STP-301/451 15.2 2/2 LCD OVERLOAD 1) 1) 6.710-2 Pa 510-4 Torr 2) 2) 13Pa 0.1Torr 3) 3) 4) 4) 240L/min. OVERSPEED (51,400rpm ) POWER FAILURE 1) 1) 2) 2) 3) 3) 4) 4) 100120V10%(100V ) 200240V 10%(200V ) PUMP OVERTEMP 1) 1) 120 2) 2) 3) 3) 4) 4) RAM ERROR THERMAL ERROR STP STP TEST ERROR TUNING ERROR1 TUNING ERROR5 15-4

STP-301/451 15.2.2 Ver.2.20 *1 *1 LCD 8 1 LCD SELECT 3 LCD LCD SELECT 3 20 SELECT LCD LEVITATION SELECT RUN: 1,500hrs RUN: 1,500hrs POWER FAILURE 1 SELECT POWER FAILURE 1 PUMP OVERTEMP 8 SELECT SELECT PUMP OVERTEMP 2 SELECT SELECT LEVITATION 15-5

STP-301/451 ON LCD LCD ***** ver. *. ** SELF TEST TEST COMPLETE LEVITATION 15-6

STP-301/451 15.3 FAILURE LCD 15.2 LCD 15.3 1 POWER 100120V10%(100V ) 200240V 10%(200V ) 2 100120V10% OFF (100V 200V ) 15.4 FAILURE LCD 15.2 LCD 15.4 1 ACCEL. LCD LCD ( ) LEVITATION BRAKE ***00rpm SELECT MANUAL/REMOTE MANUAL/REMOTE F14 ( ) 15-7

STP-301/451 15.5 FAILURE LCD 15.2 LCD 15.5 1 15.2.2 2 240L/min. H2H2O H2H2O 15-8

STP-301/451 16 16.1 STP 16.1 STP STP-301 STP-451 ICF152/VG100/ISO100 ICF203/VG150/ISO160 KF25 N2 L/s 300 480 He L/s 280 460 *2 H2 L/s 300 460 N2 >10 8 He 510 5 H2 210 4 10-8 10-10 :ICF Pa (Torr) 6.510-6 (510-8 ) :VG/ISO 10-7 10-9 :ICF 6.510-6 (510-8 ) :VG/ISO Pa(Torr) 6.710-2 (510-4 ) : Pa(Torr) 13 (0.1) : rpm 25,00048,000 min 3 min 3 m(0 P) < 0.01 (48,000rpm ) db < 50 (48,000rpm ) < 120 L/min 240 kg 11 12 mm 180230 180200 040 2555 *1: ICF JVIA VG,KF JIS *2 : 48,000rpm 16-1

STP-301/451 16.2 STP 16.2 STP ACV 10012010% 100V 20024010% 200V VA 550 VA 150 Hz 50/602 A 7.5 (AIC; Amper Interupting Capacity) 1000A (AC240V, 50/60Hz) DC ACV 3162 Hz 420800 040 2555 kg 7 mm W209.5H132.5D315 START STOP RESET SELECT MANUAL/REMOTE ACCEL NORMAL BRAKE POWER FAILURE LED LED LED LED LED REMOTE LED LCD 16 AC POWER CON1 3 P.CONNECTOR CON2 45 I/O TB1 20 I/O TB2 6 STP 100m0-P STP 110 2 25,000rpm 2 25,000rpm 0.020.14 51,400rpm 70 16-2

STP-301/451 16.3 16.3 STP 1 1 STP *1 1 *1 1 1 1 STP 1 250V, 10A 2 F1 F2 1 *1 3m 16.4 C C 16.3 1 KF *2 10 1 KF *2 10 1 KF *2 10 *2 JIS 16.5 F1 F2 MF60-NR10 10A, 250V 10A, 250V 6.3530mm 16-3

STP-301/451 STP-301 STP-451 *1:JIS *2:JVIA 16.1 STP [ ] :STP-301 16-4

STP-301/451 STP-301 STP-451 *1:JIS *2:JVIA 16.2 STP [ [C ]] :STP-301C 16-5

STP-301/451 16.3 STP 16-6

STP-301/451 SEIKO SEIKI ROTATION 16.4 STP 16-7

STP-301/451 16-8 16.5 STP

STP-301/451 AIR COOLING UNIT VOLTS AC V SEIKO SEIKI MADE IN JAPAN 16-9

m cm mm inch 1 100 1.0010 39.4 0.01 1 10.0 0.394 110 0.10 1 39.410 25.410 2.54 25.4 1 g kg lb 1 1.0010 2.2010 110 1 2.20 454 0.454 1 Pa Torr kgf/cm 2 1 7.5010 1.0210 133 1 1.3610 9.8110 736 1

FAX FAX VI VI VI 275-0004 4-3-1 TEL 047-472-4599 FAX 047-471-1544 FAX TEL: FAX: : STP M V M/C No.: LCD No. F ( )

: VI 261-8507 1-8 TEL: (043)211-1401 ( ) FAX: (043)211-8075 : 275-0004 4-3-1 TEL: (047)475-3123 (VI ) (047)475-3111 ( ) (047)475-3119 ( ) FAX: (047)471-1544 Supplier: Seiko Instruments Inc. 1-8 Nakase, Mihama-ku, Chiba-shi, Chiba 261-8507 JAPAN Telephone: national 043-211-1401 (VI Sales Sec., Direct) intern. + 81-43-211-1401 Facsimile: national 043-211-8075 intern. + 81-43-211-8075 Supplier: Seiko Instruments USA 1130 Ringwood Court San Jose, CA 95131 U.S.A. Telephone: national 408-922-5932 intern. +1-408-922-5932 Facsimile: national 408-922-1959 intern. +1-408-922-1959 Supplier: Seiko Instruments Belgium S.A Av. De Messidor 202 1180 Bruxelles, Belgium Telephone: national 02-346-6274 intern. + 32-2-346-6274 Facsimile: national 02-347-5268 intern. + 32-2-347-5268