封面(JP)

4881 Murietta Street. hino,. 9.11.2 Printed in Taiwan MS-01-R1-JP

IR MOTOR STG S series MS series MMS series

S series S-series 4 1 S-PM-4/ 2 2 8 2 2 S-P-X2/4 8 2 8 00 14 2 S-P-X2/4/ 8 2 10 1490 01 02

S series S-PM series S PM-4 PM-. 4. 2. Mr Mp. 4. 1.2 0.04 1 2.4 4.2.. 4..4.. 1. 0.0 1 2 2 4 2 1 19 0. 0. 1.4 2.1 MRW 2 0. 0.9 1. 2.2 MRW 2.1. 4. 9.2 9.2 My 0 04 4

S series 1 T X/2 X/2 1 P1 P1 x 1 M x 1 x M x 1.. 9 4.8 4 9.8 PM4 PM 2 2 4 2 1 19 9 1 9 1 P2 P2 x 2 M x 4 < mm PM4 P1 1 P2 4. 22 4. 22 2 1 < mm < mm PM.. 8 0 0

S series S-PX series 2 2 S P-X2 P-X4 1.8. 14.4 8. 2.2.2.8.2 Mr 2.1 2.9.9.. 1.2 2.4.2 4.2.8 1. MRW 2 MRW 2.1 8.1.4 1. Mp 4. 0.8 4 4 8. 1. 2 8 00 14 2 8 00 14 90 2 90 90 80 10 10 8 90 0. 0.8 191 41 41 My 0 08 0 9

S series T P1 P1 x 1 X/2 X/2 0 0 x 0 0 4. 4. 42 1 0 x 2 0 4. 1 1 14. P2 P2 x 2 P-X2 P-X4 2 8 00 14 90 2 90 90 80 10 2 4 1 2 2 2 8 00 14 10 8 90 4 1 2 0 P-X2 90 P-X4 10 P1 1 P2 9 21 9 21 2 4 4 09

S series S-PX series 2 2 S P-X2 P-X4 P-X Mr.8 22 4 1 14.2 1. 4.1 1.44.8 41.4.8 1.2 28.4 8. 2.8 1. 1. 14.4 42. 49..4 4.1 2 8 10 1490 2 8 10 1490 8 10 1490 9 9 9 8 111 1 81 9 2 99 0. 1 1.. 8. 1. 1.2 2.9 4 8.8 1. 1.. 24.2 9.4 14.2.1.9 24.8 WR21/1M 1 9.9. 1 Mp WR21/1M WR21/1M 2 2 19.8. 0 0 My 19.8. 8 8 11 92. 1.

S series T X/2 X/2 P1 P1 x 1 0 x 0 14 4 0 9 0 x 0 24 8 P-X2 2 8 10 9 9 9 8 111 2 1 19 P-X 8 10 1490 2 99 1 19 2 1490 1 2 2 P2 P2 x 2. 92. P-X4 8 10 1490 81 9 1 19 2 2 P-X2 8 P-X4 14. P1 1 P2. 2.. 4.. 2 P-X 1 2 4 1 2 4 1 14

MS series -series P-series 1 -series 2 -series P-series 4-4 -series P-series 4 4-1 4-84 -11 4- - 2-11 2- PX8 PX PX4 PX4 PX2 PM PM4 0 0 0 00 0 00 10 10 0 0 0 10 0 0 1 1

MS series -series P-series 190 1 4 0 0 2 4 4 MS-2-/11 2 0.0 MS-PM4 2 0.0 MS-P-X4 2 0.0 90 9 110 8 90 114 0 0 0.04 1 24 0.04 290 4 0 19 48 0 MS--/11 2 0.0 MS-PM 2 0.0 MS-P-X 2 0.0 0 890 11 49 84 9 8 0.04 10 0.04 1 MS-4-/1 0 4 0 2 0.0 MS-P-X2 1 4 00 2 0.0 MS-P-X8 4 4 2 0.0 0 9 1 8 90 10 0.04 8 90 114 0.04 1 1 0.04 2 4 1 4 0 0 0 MS-4-84/4 2 0.0 MS-P-X4 2 0.0 0 80 9 90 10 0.04 90 9 110 0 0.04

MS series -series MS-2- MS--11 MS P 2- MS P -11 0 00 00,,0 94.2 242.1 8.9.4 00 0 0 0 0 0 8, 00 11,, 1, 14, 0. 1 28 0 1 2 4 42.8 8. 0 0. 1 1. 2 2. 2.9..4 2. 1. 1.9 14. 8.9 8..8.4 8.1 4.4 4.1 0.9 4.4 0 8 00 11 1, 14, 0 4 0 1 2 4.4 MS-2-11 MS-4- MS P 2-11 229 0 MS P 4-02. 0 0, 890,, 11, 10 0, 1490, 1. 14. 88.8. 2. 0 0. 1 1. 2 2. 0, 8, 00, 11,, 1, 14 8.4 29.8 14. 1.8 9. 8.9 8. 11. 2.1. 4.8 4.4 4.1 2.8 1.08 0 0 8, 00 11,, 1, 14 1. 9. 4.8 8.8..9 9. 0.8 8.9 0 0 890 11, 10 0, 1490 1 MS-- MS-4-1 MS P - 429. 00 0 0 0 0 0 10 0 0 MS P 4-1 94.2, 0, 0, 890, 11. 4 14 21 0 0 0 0. 1 1. 2 2.. 4 4. 8 29.8 8.9 1 9..9 1.2 2. 11.4.4. 0. 2.9 1.8 1.1 4.9 1. 0.4. 1.24.89 0 0, 890,, 11, 10, 0..8.8 14. 1490, 1 19

MS series -series -series MS-4-84 MS MS-4-4 P 4-84 8. 0.1.2 14.4 29.8. 9.1 4. 1.1..1 1..8 1.9 8.9 1. 900 0 00 00 00 0 0 0 0 0 0 0.2 0.4 0. 0.8 1 1.2 1.4 1. 1.8 0 0. 1 1. 2 2.., 4, 848 4 14 2-2-11 214 214 2 4-14 21 4 2 10 MS P 4-4.2 281.2.8 1. 2.4 4..8 91.9 224 1. 1.9 114. 28. 8 14. 1.9 10 00 0 00 0 0 0 0 0.2 0.4 0. 0.8 1 1.2 10 10 00 0 00 0 0 0 0 0. 1 1. 2 2. 4 90 214 9-11 4-9 29 214 2 90 90 219 4-1 219 29 90 0 0 4-84 0 0 0 4-4 0 2 2 0 21 22

MS series MS-2- MS-2-11 10 42 0 0 8 M x M x 1 (1) 0 10 0 1 1 Ø. Ø11 x 1 1 1 2 190 1 1 x Ø. Ø11 1 8 2 10 1 1 1 10 1 1 21 M x Ø. Ø11 x 1 1 14 4 1 2 2 M x x Ø. Ø11 1 8 214 244 0 0 8 00 11 1 14 0 0 8 00 11 1 14 190 4 0 0 90 9 110 0 190 4 0 0 90 9 110 0 1 2 4 00 8 90 10 1 2 4 00 8 90 10 4 4 4 4 4 4 4 4 4 4 4 8 11 1 14 1 4 8 11 1 14 1 9. 11. 1.8 1.1.2 22. 24.4 2. 28. 14... 2.9 2.2... 9.9 4.1.2 14.8. 19.9 22. 2..2 2.. 1..1 2. 2..9 4. 8.1 41. 4. 48.8 2 24

MS series MS-- MS--11 290 1 0 1 1 1 0 0 290 0 0 x 0 M x Ø. Ø11 1 2 0 0 0 0 0 M x 190 1 Ø. Ø11 1 x 1 8 2 290 290 M x M x 1 1 2 22 x Ø. Ø11 1 4 4 1 1 2 2 x Ø. Ø11 1 8 2 244 0 8 00 11 1 14 0 0 8 00 11 1 14 0 0 290 4 0 0 890 11 10 0 290 4 0 0 890 11 10 1 2 4 00 8 90 10 1 2 4 00 8 90 10 4 4 4 4 4 4 4 4 4 4 8 11 1 14 1 19 8 11 14 1 19 14.1 1..4. 22. 24.8 2 29.1 1.2 4.2 22.2.4 28. 2.2 8. 41. 4 48.2 1..4 2. 2.2 29.1 2 4.9.8. 4. 4. 2. 2. 1 4. 8. 41.9 4. 49.2 2.9. 2

MS series MS-4- MS-4-1 2 2 0 0 0 0 1 0 0 0 0 1 M x M x 28 2 0 0 0 0 M x 2 0 0 0 0 M x 29 22 14 8 14 14 1 x 1 28 29 2 2 248 19 2 Ø. Ø11 1 x Ø. Ø11 1 1 x Ø. Ø11 1 1 x Ø. Ø11 1 0 0 890 11 10 0 1490 1 0 0 890 11 10 0 1490 1 0 4 0 0 9 1 0 4 0 0 9 1 1 2 4 00 8 90 10 1 2 4 00 8 90 10 9 1 1 1 19 9 1 1 1 19.4 21. 24.8 28 1.2 4.4..8 44 4.2 2. 28.2 2..2 41. 4.2 0..2 9. 4.2 2.2 2.1 29. 2.. 8.9 42.1 4. 48. 1. 29. 4.2 8. 4.2 4. 2.2. 1.2. 0.2 2 28

MS series MS-4-84 MS-4-4 4 4 0 0 0 0 0 0 0 0 0 0 0 0 M x M x 8 1 14 198 2 4 28 1 Ø. Ø11 x 1 1 Ø. Ø11 x 1 4 48 (42) 1 248 0 0 (4) 0 x 0 0 M x Ø. Ø11 1 14 0 229 1 0 288 0 0 0 x 0 M x 0 Ø. Ø11 1 4 2 29 4 848 92 1190 14 14 12 14 4 848 92 1190 14 14 12 14 2 4 0 0 80 9 90 10 2 4 0 0 80 9 90 10 10 0 490 90 00 8 9 11 10 0 4 90 00 8 9 11 1 2 49 2 4 14 1 8 1 2 49 2 4 14 1 8 8 9 11 14 1 8 9 11 14 1 2.8 1.8.8 9.8 4.8 4.8 1.8.8 9.8.8 41 4 1 1 1 81 2.9.9.9 44.9 48.9 2.9.9 0.9 4.9 8.9 42 4 2 2 2 82 8 29

MS series P-series MS-PM4 MS-PX4 MS PM4. 4. 4. 1.2 0.04 1 0. 1 0 0 1 2 4 0 0 0 890 11 MS PX4 2.2.2.8.2 8. 1. 1.4 1.4 0 0 0 0 1 2 4 0 0 0 890 11 MS-PM MS-PX4 MS PM. 2.1 4..4.. 1. 0.0 1 0. 1 0 0 1 2 4 0 0 0 890 11 MS PX4.8 41.4.8 1.2 28.4 8. 2.8 2. 2. 1 0 0 0 0 1 2 4 0 0 0 890 MS-PX2 MS-PX MS PX2 1.8. 14.4 8. 4. 0.8 1 1 1 0 0 1 2 4 0 0 0 890 11 MS PX 1. 1. 14.4 42. 49..4 4.1.4.4 1 1 1 0 0 0 0 1 2 4 90 8 90 1 2

MS series P-series MS-PM4 MS-PX8 9 M x MS PX8 19 1.9.4 1..8 1..4 4.1 4.1 0 0 10 0 0 0 0 0. 1 1. 2 2.. 90, 8 90 0, 1190 1, 14 10 11 9 4 4 Ø4. Ø84 1 x 1 29 21 11 0 0 19 49 P-series 1 2 1 4 4 2..2.8 PM 11 28 MS-PM 1 M x 2 4 PX 0 11 4 (1.) 1. (1.) 1. 9 29 11 21 Ø4. Ø84 1 x 1 2 (1.). PX (1.). 9 4 0 19 1 4 2...9 0 49 1 2 4

MS series MS-PX2 MS-PX4 1 0 2 M x 8 42 8 M x 8 10 11 1 x 1 1 1 Ø. Ø11 10 11 X Ø. Ø11 1 1 1 0 2 M x 8 10 8 8 Ø. Ø11 1 x 1 1 1 10 11.. 42 X M x 8 Ø. Ø11 1 1 0 0 0 890 11 10 0 1490 0 0 0 890 11 10 0 1490 1 4 00 8 90 10 1 1 4 0 0 90 9 110 0 1 2 4 00 8 90 10 1 2 4 00 8 90 10 4 9 1 1 1 4 9 1 1 1 8.2.2.2 14.2 1.2.2.2 22.2 24.2 2.2 8... 14. 1... 22. 24. 2. 9 11 1 1 19 21 2.4 9.4 11.4 1.4 1.4.4 19.4 21.4 2.4.4

MS series MS-PX4 MS-PX 1 0 0 1 M x 8 0 2 0 0 1 Mx 8 4 10 Ø. Ø11 1 x 1 1 0 0 M x 8 4 4 10 Ø. Ø11 1 x 1 2 0 0 0 Mx 8 Ø. Ø11 1 x 1 Ø11 1 x 1 4 Ø. 0 0 0 890 11 10 0 1490 0 0 890 11 10 0 1490 1 1 4 4 8 90 114 1 24 48 0 84 9 8 1 1 2 4 00 8 90 10 1 2 4 00 8 90 10 9 1 1 1 9 1 1 1 19 1.. 24.4 28.1 1.8. 9.2 42.9 4. 14.2.9 21.. 29 2..4.1 4.8 4. 1. 19.4 2.1 2.8. 4.2.9 41. 4..8 1..2 2.9 2. 1. 8. 42.4 4.1 8

MS series MMS series MS-PX8 MMS-series 0 0 28 0 0 1 Mx 8 4 10 Ø. Ø11 1 x 1 0 28 0 0 0 Mx 8 4 1 x Ø. Ø11 1 0 0 890 11 10 0 1490 1 4 4 8 90 114 1 1 2 4 00 8 90 10 9 1 1 1 19 14.9. 22. 2 29..4.1.8 44. 48.2 1.4.1.8 24. 28.2 1.9. 9. 4 4. 9

MMS series MMS-2- MMS-2-0 x 0 MS P. 1 2.9..4 2-94.2 242.1 28 1. 1.9 14. 0 90 0 0 0 0 0 0. 1 1. 2 2. 4.. 1 x Ø 11 M - H 8 Ø8 x 90, 1 (14) G Ø. Ø11. 0. 1 MMS-4-. 8 MS P 4-8. 484.2 2.9. 2.. 14 0 1. 1.9 0..1 0 1 1 1 0 0 0 0 0. 1 1. 2 2.. 4 4 G 148 8. M x 1. 0. (.) 2.9. 4 12 22 0 0 41.8 2. 0 0 4 4.9.1.9 41 42

MMS series Multi-axis stage MMS-4-0 x 0 48. 0 (.).. Mx8 1 G 1 Ø. Ø11. 0. 1. 8 () G 228. M x. 4 12 22 2 42 0 0 0 0 4 4 9 11. 4..4. 8 8.9. 9.8 4 44

IR MOTOR STG MS 10 4 R M I - J MS H- 1,2,,4,,,,8,9m =, =1 =119, = =9, =8 =119, =82 J J 4x 4x x2(44x2) 4 4

4 48 IR MOTOR STG

49 0 IR MOTOR STG

IR MOTOR STG 1