Keysight Technologies CMOS (RTN) RTS noise measurement using the B1500A' s WGFMU Module Application Note
Random Telegraph Noise, RTN MOS-FET RTN 22 nm CMOS RTN CMOS CMOS RTN RTN - IV RTN B1530A Waveform Generator/Fast Measurement Unit, WGFMU B1500A B1500ARTN WGFMU WGFMU 0.1 mv(rms) 1 / 200M / (DC) 16 MHz400 WGFMU RTN WGFMU RTN WGFMURTN RTNWGFMU
03 Keysight CMOS (RTN) - Application Note CMOSRTN CMOS (RTN) CMOS 1 SN MOS-FET RTN Vdd Id RTN MOS-FET RTN (Vth) 2 Vth 1 Row bus 1 CMOS RTN q Vth = (1) L W Cox q L W Cox MOS-FET Vth s RTN RTN B1500A WGFMU RTN Ef Ec Ef B1530A 0.1 mvrms 1 / 200M/ DC 16 MHz 400 WGFMUMHz 1 Hz RTN 2 RTN
04 Keysight CMOS (RTN) - Application Note B1530A B1500A WGFMU RSU(Remote Sense Unit) RSU WGFMU 12 RSU 2 RSU MOS-FET RTN3 B1500A 5 WGFMU 10 RSU B1500A WGFMU RSU RSU B1530A RTN 4 WGFMU RTN 3 B1530A WGFMU RTN 5 WGFMU WGFMU (ALWG) I/V 4 RTNNMOS-FET 50 WGFMU V 50 Ω Output PGU A I/V WGFMU RSU Fast I/V V Fast I/V 5 WGFMU
05 Keysight CMOS (RTN) - Application Note B1530A Output Range +/- 3 V +/- 5 V 0 V 10 V 10 V 0 V 0.1 mv(rms) 1 +/- 10 ma +/- 1 ma +/- 100 A +/- 10 A +/- 1 A 0.014 % 2 0.2 % 3 5 ns10 ns 1 s 10 ns 10 ns to 20 ms10 ns 400 4 RTN WGFMU RTN Ton Toff RTN 6 WGFMU RSU WGFMU DUT Noise density (A 2 /(Hz) 10-14 10-17 10-20 Measurement range 10 ma 1 ma 100 µa 1 µa 10 µa 10-23 1 1k 1M Frequency (Hz) 6 Power Spectrum Distribution PSD RTN RTN RTN RTN 1. 100 ns 1 ms 2. 5 % 3. 0 V 4.
06 Keysight CMOS (RTN) - Application Note 7 RTN Standard deviation (A) 10-6 10-9 Measurement range 10 ma 1 ma 100 µa 10 µa RTN 1 f max = (2) 2 Tinterval 10-9 10-6 10-3 Averaging time (sec) 7 1 µa fmax RTN Tinterval RTN 1. B1530A WGFMU 3 db 25 pf. WGFMU Measurement range Bandwidth ( 3 db) 10 ma ~16 MHz 1 ma ~8 MHz 100 A ~2.4 MHz 10 A ~600 khz 1 A ~80 khz RTN RTN RTN RTN
07 Keysight CMOS (RTN) - Application Note RTN RTN 8RTN 0.44 m 0.24 m NMOS-FET RTN Time domain x10-7 5.6 x10-6 x10-6 1.26 4.23 5.54 5.48 5.42 5.36 5.3 0.11 0.12 0.13 0.14 0.15 0.16 Time (s) Histogram 1000 800 600 400 1.252 1.244 1.236 1.228 1.22 0.11 0.12 0.13 0.14 0.15 0.16 Time (s) 2000 1600 1200 800 4.218 4.206 4.194 4.182 4.17 0.11 0.12 0.13 0.14 0.15 0.16 Time (s) 2000 1600 1200 800 200 0 x10-7 400 0 x10-6 400 0 x10-6 5.3 5.36 5.42 5.48 5.54 5.6 1.23 1.236 1.242 1.248 1.254 1.26 4.17 4.182 4.194 4.206 4.218 4.23 Vg = 0.45 V Vg = 0.5 V Vg = 0.6 V 8 RTN
08 Keysight CMOS (RTN) - Application Note RTN 9 RTN RTN CMOS RTN WGFMU B1500A RTNRTN 9RTN
09 Keysight CMOS (RTN) - Application Note mykeysight www.keysight.co.jp/find/mykeysight www.axiestandard.org AXIe AdvancedTCA Extensions for Instrumentation and Test AdvancedTCA Keysight AXIe www.lxistandard.org LXI Keysight LXI www.pxisa.org PXI PCI extensions for Instrumentation PC www.keysight.com/go/quality Keysight Technologies, Inc. DEKRA Certified ISO 9001:2008 Quality Management System www.keysight.co.jp/find/channelpartners (B1500-11) 192-8550 9-1 9 00-18 00 TEL 0120-421-345 (042-656-7832) FAX 0120-421-678 (042-656-7840) Email contact_japan@keysight.com www.keysight.co.jp Keysight Technologies, 2009-2014 Published in Japan, July 31, 2014, Rev.2 5990-3705JAJP 0000-00DEP www.keysight.co.jp