Physics and Chemistry of Atmospheric Plasmas CHANG Jen-Shih author s e-mail: changj@mcmaster.ca
a b ab cv cv s
x x y y x y μ μ μ m n xymn n n
abcde f μ μ μ
abcandde
ab cde
aicpbccpccavityd MPT Ar Brawn&Kunc Model
Ar
ICP
ab Glow Discharge Phenomena, Handbook of Corona DischargeProcesses, et al.
Proc. ESA-IEJ Symp. on Electrostatics, in Japanese in Japanese Resource Conversion and Environmental Technologies in Metallurigical Industries Physics and Technology of Low-Temperature Plasma