CD X Axis [mm] Y Axis [mm] - -
Magnification: 150k
(0, -30mm) 26 nm 24 nm 1 26 nm 26 nm (30mm, 0) Center (0, -30mm) 48 nm (0, 30mm) 48 nm 48 nm 48 nm 48 nm
E-beam resist Resist image Silicon mold Dose condition Measurement area including 10 10 holes ZEP520A 350 C/cm 2 D : 19.9 nm 3 : 1.6 nm New-CAR 100 C/cm 2 D : 22.8 nm 3 : 2.5 nm D: diameter 116 nm 36 nm