Keysight Technologies B1500A
DCIV ACIVIV IV - 1.
03 Keysight IV - Product Overview B1530A B1500A WGFMU WGFMU ALWG1 WGFMU 200 M/s 16 MHzALWG 10 ns45 MHz WGFMU WGFMU WGFMU ALWG I/V B1500A IV FETI d V g I d V d SOI silicon on insulatorfet LEDPDL-I-V High-k FET I d V g C-t CV OFET RTN S-M-S stress-measure-stress NBTI/PBTI HCI MTJTDDB
04 Keysight IV - Product Overview WGFMU 2WGFMURSU WGFMU ALWGRSURSU WGFMUPGIV2 PG50 IVPG IV51 A 10 ma PGU I/V I/V I WGFMU I/V V 2. WGFMU WGFMU5 3 WGFMU RSU DUT WGFMU WGFMU B1500A
05 Keysight IV - Product Overview DC T (a) T IV (b) B1500A I/V WGFMU (c) I/V (d) WGFMU 3. WGFMUIV
06 Keysight IV - Product Overview ALWG WGFMU ALWG10 ns 10,000 ns 10 ns 2,048WGFMU 512 1012 ACWGFMU 4 WGFMU3 V5 V10 V 0 V 0 V 10 V 3 V 96 V160 V WGFMU512 5 10 12 V 5 V 10 V 0 V 0 V 10 V 10 ns 10,000 s 2,048 4. ALWG 1 0 1 2 2 3 511 (a) 0 1 2 1 1 2 1 2 (b) (a) 5.
07 Keysight IV - Product Overview ALWG 1 AC 50 ns WGFMU WGFMUALWG RSU 1 10 %90 % 20 V 5 V 0.3 % 0 1 V 0 5 V 0 10 V PG 30 ns 30 ns 25 pf I/V 10 ma 80 ns 80 ns 80 ns 25 pf 1 M 1 ma 250 ns 250 ns 250 ns 100 A 600 ns 600 ns 1.5 s 10 A 2 s 4.5 s 7 s 1 A 6 s 35 s 75 s 25 pf 1. WGFMU PG 170 ns 25 pf I/V 10 ma 180 ns 25 pf 1 k 1 ma 500 ns 25 pf 10 k 100 A 1.6 s 25 pf 100 k 10 A 14.5 s 25 pf 1 M 1 A 115 s 25 pf 10 M 2. 0.3 %0 V 5 V
08 Keysight IV - Product Overview WGFMUALWGWGFMU WGFMU1 A 10 A 100 A 1 ma 10 ma 5 WGFMU 0.014 %0.2 %WGFMU A/D ADC148ADC WGFMU5 ns10 ns 10,000 s10 ns 1400 WGFMU 10 ns 20 ms10 ns 6 5 ns s (a) 5 ns (b) 6.
09 Keysight IV - Product Overview WGFMU WGFMU17 WGFMU 1 WGFMU (a) (b) 1 A 1 ma (c) (d) 7. WGFMU
10 Keysight IV - Product Overview WGFMUWGFMU WGFMU Microsoft Visual Studio.Net C C++ C# Visual Basic Microsoft Visual Basic for Application VBA TransEra HTBasic for Windows Keysight VEE National InstrumentsLabVIEW B1530A User s Guide B1530-90001 WGFMU EasyEXPERT 2 EasyEXPERT DCNBTI/PBTI IdI d V g ACNBTI/PBTI IdI d V g 8 1 1 8. EasyEXPERT
11 Keysight IV - Product Overview RTN NBTI/PBTI DC AC Id RTN PC B1500A WGFMU B1530A B1530-90001 B1530A Sample Program Learning Kit User's Guide B1500-90503 WGFMU 9 EdgeTop Base Edge2 2 9.
12 Keysight IV - Product Overview B1500A B1500AWGFMU B1500ASMU MFCMUSMU 200 V/1 A SMUSMU 0.5 V/100 aa SMUMFCMU1 khz 5 MHz SMUSMU CMUSCUU 100 V DCWGFMU B1500A B1500A HV-SPGU 40 V50 ns B1500A 5989-2785JAJP B1500A 10.B1500A
13 Keysight IV - Product Overview WGFMUWGFMU IV 1 IV IV IV IV High-k MOS FET SMUDC 11 IV FPD OTFTTFT IVSOI Silicon On InsulatorLCD CG Crystal Grade TFTTFTIV DC IV MIS FET p-s (a) (b) DCIV IdVd 11. DC High-kFET IdVd
14 Keysight IV - Product Overview IV WGFMU IV 12WGFMU IVWGFMU TIV 3WGFMU 0.3 % s 10 ma 100 ns 1 ma 250 ns 100 A 1 s 10 A 10 s 1 A 80 s 3. (a) WGFMU IV (c) IdVd 12. WGFMU IdVd
15 Keysight IV - Product Overview IV 310 ma100 ns 110 mai/v80 ns 1 1 s 200 ns 800 ns6 800 ns3 A 1 ma 250 ns 250 ns400 ns 1 ma500 na WGFMU1 s1 A IVLDLEDPD I-L-V13 WGFMU AWLG RAM RRAM RAM PRAMRAM MRAMNVM 14WGFMUALWG I/V 13.L-I-V
16 Keysight IV - Product Overview (a) WGFMU (b) 14. WGFMU (a) WGFMU (b) 15.
17 Keysight IV - Product Overview 1 15 High-kMOS FET DC I d V g I d V g 16 16I d V g WGFMU WGFMU17 90 % 10 % 16.High-kMOS FET IdVg 17.
18 Keysight IV - Product Overview 4 WGFMU 3 db trs 2 BW3 db 3 tritrstrm WGFMU10 ma416 MHz 2322 nswgfmu 160 ns 1 % 10 10 ma1 % 1.6 s SSD MLC MLC Vth18 3 db 10 ma 16 MHz 1 ma 8 MHz 100 A 2.4 MHz 10 A 600 khz 1 A 80 khz 4.
19 Keysight IV - Product Overview Vth P&V18 P&V (a) P&V (b) P&VVth (c) P&V Vth 18.Vth P&V 19Vth P&V VthP&V Vth WGFMU 1 sa 20 WGFMU AN B1500-12 1 s IV Characterization of Flash Memory Cells using the B1530A 5990-3636EN
20 Keysight IV - Product Overview WGFMU 117 17 WGFMU 1C-t WGFMUsC-t 4 5 CV 5 6 Q CV C-t C-t MEMS micro electro mechanical systems 1: Vth Id[ A] 2: Vth [ s] (a) WGFMU (b) 19.Vth 20. WGFMUI d 500 ns
21 Keysight IV - Product Overview 7 I c 7C(t) 8 WGFMU5 ns 8 9 tni cn n t 21C-t Cp Cs Rs Cp104 pf Cs 100 pf Rs 1 M 10 s V step 50 mvt edge 1 s Cp5 A10 A 100 ns 21bCp Cp Cs10 s WGFMU LCR
22 Keysight IV - Product Overview C-t 10 V step T edge s (a) (b) 21.C-t 4WGFMU10 A 600 khz23 4 s 11
23 Keysight IV - Product Overview 2210 AWGFMU WGFMU 12 I meas WGFMUIcI offset I offset 13 t 100 mv100 pf 1 na 1 ms 10 % A 0.01 % s 0.1 % 0.2 % 22.10 A
24 Keysight IV - Product Overview 23 WGFMU CH1 WGFMU CH2 s (a) WGFMU (b) 23. 0 V 14 I c t 12I offset 15 1.2 na 0.1 % 1 ms 22 WGFMUC-tms
25 Keysight IV - Product Overview I offset 15 Q 16 I c C dv/dtv/s dv/dt WGFMUWGFMUI/V WGFMU MOSCV 24 WGFMU CH1 WGFMU CH2 (a) WGFMU (b) 24. WGFMU CV
26 Keysight IV - Product Overview 25 WGFMU CH1 WGFMU CH2 (a) WGFMU (b) 25.CV 100 pf0 V4 V1,000 10 A 10 s 400 V/s40 na 17 18 19 I cf IcrI offset I gleak 26 a 26(b) A/DADC INLWGFMU INL 0.02 %
27 Keysight IV - Product Overview 1RSU 1 % F 1 2 s s (a) (b) D/ADAC 26. DACINL 27MOS FET CV Vg4 V4 V1,000 10 A 10 s WGFMU 1,000 CV 10 ms LCR F F 1,001/10 ms (a) MOS FETCV (b) 27.CV
28 Keysight IV - Product Overview OFET 28OTFT A (a) OFET (b) 28. WGFMU1400 WGFMU RTN 2 22 nm RTN RTNSRAM SRAMICCPU central processor unit SRAM 0 1 SRAM29RTN SRAM (a) SRAMMOS FET RTN (b) RTNSRAM 29. RTNSRAM
29 Keysight IV - Product Overview RTN CMOS RTN RTN 30 30. RTN CMOS B1500A WGFMU 0.1 mv rms 1 Sa/s 200 MSa/s DC 16 MHz1 400B1500A WGFMURTN 1 Hz MHz RTNDUT - RTNRTN31B1500A WGFMU WGFMU
30 Keysight IV - Product Overview RTN RTN WGFMURSU DUT - 6 RTN RTN Hz 31. - RTN RTN DUT
31 Keysight IV - Product Overview - RTN RTNMOS FET 32 RTN 0.44 m0.24 m4 nm NMOS FET RTN RTN s s s 32.RTN RTNCNT NWT 33CNT/NWT
32 Keysight IV - Product Overview RTN WGFMURTNRTN 34 B1500A WGFMU RTN 33.CNTRTN 34. RTN
33 Keysight IV - Product Overview WGFMU TDDB 35 WGFMU 1 2 (a) (b) 35.
34 Keysight IV - Product Overview WGFMU ALWG10 ns 10,000 s IV S-M-S stress-measure-stress S-M-SNBTIPBTI HCI TDDB NBTIPBTI 1 s WGFMU WGFMU ALWG I/V Id IV WGFMU S-M-S36WGFMUS-M-S 1 s/ (a) ID (b) (c) (d) 36. WGFMUNBTI/PBTI
35 Keysight IV - Product Overview DCNBTI AC AC DCNBTI 37DC AC ACDC WGFMUAC AC50 % 1 MHz ACNBTI PGUSMU &38 DC DC AC AC 50 % 25 % (a) DCNBTIACNBTI (b) ACDCNBTI 37.ACDC AC NBTI
36 Keysight IV - Product Overview WGFMUWGFMU & WGFMUHCI39 MRAMMTJTDDB S-M-S WGFMU NBTIB1500-10 Ultra- Fast 1 s NBTI Characterization Using the Keysight B1500A's WGFMU Module 5989-9963EN AC AC (a) ACNBTI (b) WGFMU ACNBTI 38. WGFMUNBTI AC
37 Keysight IV - Product Overview (a) MTJ (b) MTJ TDDB-- 39.TDDB--
38 Keysight IV - Product Overview B1500A WGFMU WGFMU WGFMU Keysight B1500AKeysight 4155/56 SMUSMU B1500A WGFMUSMU B1500A
39 Keysight IV - Product Overview mykeysight www.keysight.co.jp/find/mykeysight www.keysight.com/go/quality Keysight Technologies, Inc. DEKRA Certified ISO 9001:2008 Quality Management System www.keysight.co.jp/find/channelpartners B1500A-1 Keysight Technologies, 2014-2015 Published in Japan, July 15, 2015 5990-4567JAJP 0000-00DEP www.keysight.co.jp