untitled

2 2, N2, r, CO2 PFM Series 2 lphabet Index

PFM7 Series PFM5 Series PFM Series OK 4.5 2 2 2 SET SET SET e-con 24 L/min.2.25.525.52.5 525 225 CO2 PFM7 PFM725 PFM75 PFM7 PFM5 PFM525 PFM55 PFM5 PFM

PFM Series 6 4 各流量レンジ, 25, 5, L/min とも同じ大きさです 67 軽量 55g PFM7 PFM7 ワンタッチ管継手付 流量調整弁なしの場合 従来機種PF27 29g 圧 力 セ ン サ 4 小型 68 圧 力 制 御 従来機種PF27 L/min との比較 配管スペース削減 流 量 セ ン サ 直管部 が不要のため 狭い場所での取付が可能 従来機種の場合 配管径の8倍の直管部を設ける必要があります 88 直管部 24.6 従来機種PF27 L/min にø6ワンタッチ管継手を取付けた状態での比較 配管バリエーション 流 量 調 整 な し 2 S 2 S S 2 2 S 2 2 S 2 静 電 気 対 策 2 測 長 カ ウ ン タ 取付方法 背面取付 ブラケット lphabet Index 流 量 調 整 付 S S S 省 配 線 フ ィ ー ル ド バ ス シ ス テ ム めねじ Rc /8, /4 NPT /8, /4 G /8, /4 ストレート方向 背面方向 ワンタッチ管継手 ø4, ø6, ø8, ø/4 ストレート方向 背面方向 位 置 検 出 ス イ ッ チ パネルマウント Dレール 通し穴取付 25

NRNL/min NR265RH NL/min L/min,.L/min,.L/min P.25 P.246 2 IDF IDU F R IR MD FD PFM P.25 N2rCO2 rco2 P.256 26

999999L ON OFF ON OFF 27 lphabet Index

2

2 P.2427 PFM7 Series P.22 P.222 P.22 P.22 P.22 P.224 PFM5 Series PFM7, PFM5 Series PFM Series P.22 P.24 P.25 P.25 P.25 P.26 P.244 P.245 P.245 P.245 P.246 P.247 P.2 P.2 P.249 P.25 P.25 P.25 P.254 rco2 P.256 P.257 lphabet Index 29

S 2 S 2 S 2 S 2 S 2 S 2 S 2 S 2 2 PFM7 Series 2 N N2 F F2 C4 C6 C8 N7 7 PFM7 C4.25L/min 25.5252.5L/min 5 525L/min 25L/min CO2 S Rc/8 Rc/4 NPT/8 NPT/4 G/8 G/4 ø45/2" ø6 ø85/6" ø/4" 25 5 L P.254 M P.22254 2 P.22 P.22 N M SI 2 L/min L 2SI NPN2 B PNP2 C NPN-5V D NPN4-2m E PNP-5V F PNP4-2m G NPN H PNP C4, C6, C8, N7, 2, N, N2, F, F2 L L S 22

2 D ZS--J ZS--M ZS--MS ZS R 2 4 5 2 4 5 V R S T D F2G/4D ZS--JS X69 X694 X7 rco2 P.254256 B B 2m Z ZS--D 2 S 2m W 2m ZS--F ZS--D 2 S 2m 22 2 PFM7 Series lphabet Index

PFM7 Series PFM7 PFM725 PFM75 PFM7 N2rCO2 JIS B892-..2.6.2ISO857-..2.6.2 N2r.2L/min.525L/min 5L/min 2L/min CO2.25L/min.52.5L/min 25L/min 25L/min 2 N2r CO2 N2r CO2.2.5L/min.25.2L/min.5L/min 5.2L/min.L/min.L/Pulse.526.L/min.5.L/min 26.L/min.L/min.L/min.L/Pulse 52.5L/min 26.2L/min 52.5L/min 26.2L/min.L/min.L/Pulse 25L/min 252L/min 5L/min 52L/min.L/min L/Pulse L/minCFM -2 Lft - F.S. 5F.S. F.S. F.S. 5F.S..5MPa 2F.S.55 5F.S.5 kpa75kpa 7kPa75kPa MPa 999999L 4 NPNPNP 8m DC28VNPN NPNV8m PNP.5V8m s5ms.5s2s NPNPNP.5s9 5V 5 k 42m 65 6 ms 7 2/ /s ON2ON DC24V 55m IP4 5 5 6 585R.H. CV 5MDC5V L/min.L/min9.99L/min L/min.L/min99.9L/min 2PFM7.L/min.L/minPFM7.L/minL/min CFM PFM7.L/minPFM7L/min NR NR2atm65R.H. NL/minatm SIL/minL 4 OFF25 524559.5 5.5s9ms 6 222

2 PFM7 Series Rc /8 2 Rc /4 N NPT /8 N2 NPT /4 F F2 G/8 G/4 C4 ø4 5/2" 95g 25g 55g 5g 5g 65g 5g 65g 95g 45g 75g 5g LCPPBTHNBRFKMuSUS4 C6 ø6 C8 ø8 5/6" N7 ø/4" CO2V2m 5V 5 2 L/min PFM7--C/E 5 PFM725--C/E 252.5 4 [V] PFM75--C/E 525 [m] PFM7--C/E 5 CO2 42m L/min PFM7--D/F PFM725--D/F PFM75--D/F PFM7--D/F 5 252.5 525 5 CO2 NPN2 PFM7 DC DC24V 2 DC PNP2 PFM7B DC DC24V 2 DC NPN PFM7C NPN PFM7D DC DC DC DC24V PNP PFM7E PNP PFM7F DC24V DC NPN PFM7G DC DC DC24V PNP PFM7H DC DC24V DC NPN2 PFM7 NPN PFM7C/PFM7D NPN PFM7G PNP2 PFM7B PNP PFM7E/PFM7F PNP PFM7H 2PFM7 DC DC 2PFM7B V 5msec 5msec V 5msec 5msec 22 lphabet Index

PFM7-C4/C6/C8/N7 mm ø45/2" ø6 ø85/6" ø/4" 64.2 64.6 68 64.6 PFM7-C4L/C6L/C8L/N7L mm ø45/2" ø6 ø85/6" ø/4".. 2. DC 2 DC 2 2 DC 2 DC 88 68.2 4.2 4 2.4.2 4 4.2 2.4 28 8 22.6 5 28 8 22.6 5 22 4.8 9.4 224 PFM7 Series

PFM7-N/N2/F PFM7-NL/N2L/FL 7 7 2 Rc/8/4 NPT/8/4 G/8 DC DC 2 2.4 4.2 4.2 88 7 DC DC 2 2 Rc/8/4 NPT/8/4 G/8 68 4.2 4.2 2.4 28 8 22.6 5 8 28 8 22.6 5 225 2 PFM7 Series lphabet Index

PFM7 Series PFM7-F2 78 DC 2 DC 4 4.2 2.2 2 G/4 2.4 28 PFM7-F2L 88 DC 2 DC 7 4 8 22.6 5 4.2.2 2 G/4 2 2.4 68 28 8 226 22.6 5

PFM7S-C4/C6/C8/N7 mm ø45/2" ø6 ø85/6" ø/4" 92.2 92.6 96 92.6 PFM7S-C4L/C6L/C8L/N8L mm ø45/2" ø6 ø85/6" ø/4".. 2. 58 88 DC DC 2 2.2 4.2 4 68 5.5Max.58.5 2.4 DC DC 2 2 58 76 5.5Max.58.5 4.2.2 4 2.4 28 2 8 2.6 5 22.6 5 28 8 227 2 PFM7 Series lphabet Index

PFM7 Series PFM7S-N/N2/F 98 76 58 PFM7S-NL/N2L/FL 88 58 7 DC 2 DC 4 4.2.2 5.5Max.58.5 2 Rc/8/4 NPT/8/4 G/8 2.4 28 2 8 2.6 5 DC 2 DC 4 4.2.2 5.5Max.58.5 7 2.4 2 Rc/8/4 NPT/8/4 G/8 68 28 8 228 22.6 5

PFM7S-F2 PFM7S-F2L 2 2 2 DC DC G/4 88 58 5.5Max.58.5 68 2.4 7 4 4.2.2 2 G/4 2 DC DC 2 6 76 58 2.4 5.5Max.58.5.2 4 4.2 28 2 8 2.6 5 28 8 22.6 5 229 2 PFM7 Series lphabet Index

PFM7 Series 29.9 28 58 mm ø45/2"64.2 ø6 64.6 ø85/6"68 ø/4 64.6 29.9 28 78 mm ø45/2"92.2 ø6 92.6 ø85/6"96 ø/4 92.6 42.5.2 42.5 76.2 5.5Max.58.5 88 58 9 78 42.5.2 42.5.2 5.5Max.58.5 29.9 28 29.9 28 94 94 24.5 54.5 24.5 74.5 4 4R 4R 4 4R 4R 4R 4R.2mm RR 2.2mm RR

n4.4 4 52.4 4 26 24 28 76 4.4 6 4.2.2 5.5Max.58.5 4 6 28 4 26 4.4 D F2G/4D D WG26.5mm.mm PVC ø.5 5 2 6.5 2 22 5 2 5 ZS--D 2 2 PFM7 Series lphabet Index

2 PFM5 Series 2 N N2 F F2 C4 C6 C8 N7 5 PFM5 C4.25L/min 25.5252.5L/min 5 525L/min 25L/min CO2 Rc/8 Rc/4 NPT/8 NPT/4 G/8 G/4 ø45/2" ø6 ø85/6" ø/4" S 25 5 L P.254 2 N -5V 4-2m PFM PFM P.2254 2 P.2 P.2 C4, C6, C8, N7, 2, N, N2, F, F2 L L S 22

2 D ZS--J ZS--M ZS--MS ZS R 2 4 5 2 4 5 V 2m R S T D F2G/4D Z ZS--D ZS--JS B B 2m 2m X69 X694 P.254255 W 2m ZS--F ZS--D 2 2 PFM5 Series lphabet Index

PFM5 Series PFM5 PFM525 PFM55 PFM5 N2r CO2 2atm65R.H. N2rCO2 JIS B892-..2.6.2ISO857-..2.6.2.2L/min.25L/min.525L/min.52.5L/min 5L/min 25L/min 2L/min 25L/min F.S. 5F.S..5MPa kpa75kpa 7kPa75kPa MPa 5msecssP.25 5 DC24V 5m IP4 5 2F.S.55 5F.S.5 5V k 42m 65 ON 6 CV F.S. 585R.H. 5MDC5V 24

2 PFM5 Series Rc /8 2 Rc /4 N NPT /8 N2 NPT /4 F F2 G/8 G/4 C4 ø4 5/2" 95g 25g 55g 5g 5g 65g 5g 65g 95g 45g 75g 5g LCPPBTHNBRFKMuSUS4 C6 ø6 C8 ø8 5/6" N7 ø/4" [V] 5 CO24.57V.28m 5V L/min PFM5-- 5 PFM525-- 252.5 PFM55-- 525 PFM5-- 5 CO2 PFM5 DC DC DC24V [m] 2 4 42m L/min PFM5--2 5 PFM525--2 252.5 PFM55--2 525 PFM5--2 5 CO2 lphabet Index 25

PFM5-C4/C6/C8/N7 mm ø45/2" ø6 ø85/6" ø/4" 64.2 64.6 68 64.6 PFM5-C4L/C6L/C8L/N7L mm ø45/2" ø6 ø85/6" ø/4".. 2. DC 2 DC 2 2 DC 2 DC 68.2 4.2 4 2.4.2 4 4.2 2.4 FLOW SENSOR POWER FLOW 88 FLOW SENSOR POWER FLOW 28 8 22.6 5 28 8 22.6 5 22 4.8 9.4 26 PFM5 Series

PFM5-N/N2/F PFM5-NL/N2L/FL 2 Rc/8/4 NPT/8/4 G/8 DC DC 2 2.4 4.2 4.2 7 DC DC 2 2 Rc/8/4 NPT/8/4 G/8 68 4.2 4.2 2.4 7 7 FLOW SENSOR POWER FLOW 88 FLOW SENSOR POWER FLOW 28 8 22.6 5 28 8 22.6 5 8 27 2 PFM5 Series lphabet Index

PFM5 Series PFM5-F2 78 2 FLOW SENSOR POWER FLOW DC 2 DC.2 4 4.2 2 G/4 2.4 28 8 22.6 5 PFM5-F2L 88 FLOW SENSOR POWER FLOW DC 2 DC.2 7 4 4.2 2 G/4 2 2.4 68 28 8 28 22.6 5

PFM5S-C4/C6/C8/N7 mm ø45/2" ø6 ø85/6" ø/4" 92.2 92.6 96 92.6 PFM5S-C4L/C6L/C8L/N8L mm ø45/2" ø6 ø85/6" ø/4".. 2. DC DC 2 2 DC DC 2 2 5.5Max.58.5 4.2.2 4 2.4 58 76 FLOW SENSOR POWER FLOW.2 4.2 4 68 5.5Max.58.5 2.4 58 88 FLOW SENSOR POWER FLOW 28 2 8 2.6 5 22.6 5 28 8 29 2 PFM5 Series lphabet Index

PFM5 Series PFM5S-N/N2/F 98 76 58 7 FLOW SENSOR POWER FLOW DC 2 DC.2 4 4.2 5.5Max.58.5 2 Rc/8/4 NPT/8/4 G/8 2.4 28 2 8 2.6 5 PFM5S-NL/N2L/FL 88 58 FLOW SENSOR POWER FLOW DC 2 DC.2 4 4.2 5.5Max.58.5 7 2.4 2 Rc/8/4 NPT/8/4 G/8 68 28 8 24 22.6 5

PFM5S-F2 PFM5S-F2L 2 2 2 DC DC G/4 5.5Max.58.5 68 2.4 7 4 4.2.2 2 G/4 2 DC DC 2.4 5.5Max.58.5.2 4 4.2 2 6 76 58 FLOW SENSOR POWER FLOW 88 58 FLOW SENSOR POWER FLOW 28 2 8 2.6 5 28 8 22.6 5 24 2 PFM5 Series lphabet Index

PFM5 Series 29.9 28 58 FLOW SENSOR POWER FLOW mm ø45/2"64.2 ø6 64.6 ø85/6"68 ø/4 64.6 29.9 28 78 FLOW SENSOR POWER FLOW mm ø45/2"92.2 ø6 92.6 ø85/6"96 ø/4 92.6 42.5.2 42.5 76.2 5.5Max.58.5 88 58 9 78 29.9 28 FLOW SENSOR POWER FLOW 29.9 28 FLOW SENSOR POWER 42.5.2 42.5.2 5.5Max.58.5 FLOW 94 94 24.5 54.5 24.5 74.5 4 4R 4R 4 4R 4R 4R 4R.2mm RR 242.2mm RR

2 PFM5 Series 4 26 6 28 FLOW SENSOR POWER FLOW 4 26 76 24 28 FLOW SENSOR POWER FLOW 4.4 4.4 6 4 4 5.5Max.58.5.2.2 D n4.4 FLOW SENSOR POWER FLOW FLOW SENSOR POWER FLOW FLOW SENSOR POWER FLOW ZS--D 2 6.5 22 5 5 2 25 52.4 4 WG26.5mm.mm PVC ø.5 PFM D F2G/4D lphabet Index 24

PFM7/PFM5 Series.5MPa PFM7, 5/L/min.5 PFM725, 525/25L/min. kpa..25.2.5..5 kpa.8.6.4.2 2 4 6 8 L/min 5 5 2 25 L/min PFM75, 55/5L/min 4 PFM7, 5/L/min 4 2 kpa 2 kpa 8 6 4 2 5 2 4 5 L/min 2 4 6 8 L/min PFM7, 5/L/min 5.75MPa.MPa PFM725, 525/25L/min.75MPa.MPa L/min 5.MPa L/min 2.MPa 5 5 5 5 PFM75, 55/5L/min L/min 6.75MPa.MPa 4.MPa 2 PFM7, 5/L/min L/min 2.75MPa.MPa 8 6 4 2.MPa 5 5 5 5 244

2 S 2 LED Ra Ru Rh Rd Ra Ru Rh Rd Flow b a!!5!2!!6!7!4 q w w qoire uy! o t Rh RuRd RaMEMS arh RuRd b RuRd RuRd Ra O O O ss'y B O O 2 4 5 6 7 8 9 2 4 5 6 7 FKM HNBR SUS4 PBT LCP FKM SUS4 PBT HNBR PBT HNBR HNBR PFM7 PFM5 ON 2ON 2 / LED ON/OFF ON/OFF 245 2 PFM7/PFM5 Series lphabet Index

y i o i o u q e w i o r t o i o i o i 2m ss'y ss'y No. ZS--D ZS--F ZS--PL ZS--P2L ZS--N ZS--25N ZS--5N ZS--N ZS--NL ZS--25NL ZS--5NL ZS--NL ZS--C4 ZS--C6 ZS--C8 ZS--N7 ZS-- ZS--N ZS--F ZS--2 ZS--N2 ZS--F2 L/min 25L/min 5L/min L/min L/min 25L/min 5L/min L/min ø45/2" ø6 ø85/6" ø/4" Rc/8 NPT/8 G/8 Rc/4 NPT/4 G/4 2 4 5 6 7 8 9 246 PFM7/PFM5 Series

PFM Series ZS-28- ZS-28-B ZS-28-C- ZS-27-C ZS-27-D M5L2 M8L2 M8L2 2 PFM M 2 4 5 NPN2-5V NPN24-2m NPN2 PNP2-5V PNP24-2m PNP2 SI 2 M 2 L/min L 2 M5L M5L M8L M8L L ZS-28- F e-con ZS-28-C- E B D L N PFM5S--- PFM5S--2- RoHS 247 lphabet Index

PFM Series PFM N2r.2L/min.525L/min 5L/min 2L/min CO2.25L/min.52.5L/min 25L/min 25L/min N2r.2.5L/min.526.L/min 52.5L/min 25L/min CO2.25.2L/min.5.L/min 26.2L/min 252L/min N2r.5L/min 26.L/min 52.5L/min 5L/min CO2 5.2L/min.L/min 26.2L/min 52L/min 2.L/min.L/Pulse.L/min.L/Pulse.L/min.L/Pulse.L/min L/Pulse 4 L/minCFM -2 Lft - 999999L DC24V 5m PFMDC5V M PFMDC42m 25 5 NPNPNP2 8mDCVNPN V8m NPNPNP s5ms/.5s/2s.f.s..f.s. DC5VL/min kf.s. DC42mL/min 6DC24V5 F.S. 6.5F.S.digit /272//sec ON2ON LOWmsecLOW.4V IP4 56 585R.H. CV 5MDC5V.5F.S.25 5P4P PBT g85g CO2/ 2L/min.L/min.5L/min L/min.L/min5.L/min L/min.L/min SIL/minL 4OFF25 524559.5 SI L/minL 5 6 CO2V2m DC5V 5 V DC42m 2 m4.2l/min.525l/min 5L/min 2L/min CO2 L/min 5 252.5 525 5 2

DC DC24V 2 DC DC DC24V 2 DC DC DC24V 2 DC DC 2 DC DC24V PFM NPN:2 :5V PFM PNP:2 :5V PFM NPN:2 :42m PFM4 PNP:2 :42m PFM2 NPN:2 PFM5 PNP:2 DC DC24V 2 DC DC 2 DC DC24V PFM PFM PFM2 2 DC 5msec V 5msec 5msec V 5msec DC 2 PFM PFM4 PFM5 249 PFM Series lphabet Index

PFM Series LCD 4 ON ON/OFF 2 2ON SET ON/OFF 25

.5 4 2M.5 2. 8.2.2.5.6 4 26.5 2.5 4 4.2 5 46 22 5 7.2 ZS-28-C- 42.4 4.5 24 4.5 24 7.2 8.75.56 P 2 4 DC N.C. DC 5V42m 25 PFM Series lphabet Index

PFM Series 2.4 n.5n.4.4 4R2 24 4R2 2.4 24 n.5n 4R2 RR2 ZS-28- DC 5 4 2 2 DC 2 22.2mm 2.58mm.2mm PVC ø4. 252

rco2 CO2 /2 N2 ONOFF ONOFF.5.5 2 ON-OFF ONON OFF 2 msgnd PFM7PFM7 PFM7.L/min PFM7 L/min PFM7.L/min PFM7.L/min 5 8m 2 8m OFF Er4 OFF OFF OFF 25 7%F.S. PFM Series 25 lphabet Index

PFM7/PFM5 Series q Order Made X69, X694 PFM 7 5 7 7 PFM 5-C4/C6/C8/N7--X69.2 X69 X69 X694 7 PFM -C4/C6/C8/N7--X694 5.2 P.22 22 4 4.2 4 4.2 2.4 B 2 2 B 2.4 C4 ø45/2" C6 ø6 C8 ø85/6" N7 ø/4.. 2. B 8. 8. 8. 7 PFM -/2--X69 5.2 7 PFM -/2--X694 5.2 4 4.2 4 4.2 C B 2 2 B C 2.4 2.4 B C Rc/8/4 NPT/8/4 G/8 7 G/4 7 5 2 254

PFM S-C4/C6/C8/N7--X69 PFM S-C4/C6/C8/N7--X694 PFM S-/2--X69 PFM S-/2--X694 2.4 5.5Max58.5 B 2 4.2 4.2 2.4 5.5Max58.5 2 B 4.2 4.2 ø45/2" ø6 ø85/6" ø/4.. 2. B 8. 8. 8. ø45/2" ø6 ø85/6" ø/4.. 2. B 6. 6. 7 6. Rc/8/4 NPT/8/4 G/8 G/4 7 B 5 C 7 2 Rc/8/4 NPT/8/4 G/8 G/4 7 B 9 4 C 7 2 2.4 5.5Max58.5 B 2 4.2 4.2 C 2.4 5.5Max58.5 2 B 4.2 4.2 C 7 5 7 5 7 5 7 5 PFM7/PFM5 Series w Order Made 255 lphabet Index

PFM7/PFM5 Series e Order Made rco2 2 PFM 7 X7 7 X7 rco2928982764 PFM7 r 92 9 8 7 6 92 9 8 7 6 92 9 8 7 6 92 9 8 7 6 8 2 4 8 2 4 8 2 4 8 2 4.27.L/min.525.L/min.52.L/min.5.L/min.4.L/min 2L/min 29L/min 28L/min.27.4L/min.526.L/min.52.L/min.52.5L/min.42.L/min 25L/min 295L/min 284L/min PFM725 PFM75 PFM7 CO2 Vmax Imax 7.4L/min 26.L/min 2.L/min 52.5L/min 42.L/min 5L/min 95L/min 84L/min.8V 5.V 4.2V 5.V 4.2V 5.V 4.6V 4.2V 5.2m 2.m 6.8m 2.m 6.8m 2.m.4m 6.8m 5V V 5 Vmax 42m m 2 Imax 4 P.22 22 256

q w e 49m/s 2 r 49N t y u q w e r t y u MSDS i o 2 SMCM-- PFM Seriesq q wul e EEPROM 6 2 V 2V 2VV 5. UL58 2 Vrms42.4V q8 w 2UL2UL585 2Vrms42.4V 2 257 lphabet Index

q w e P 4.8mm5mm r.nm q w98m/s 2 49m/s 2 e r CE t y u SMCM-- PFM Seriesw q w e etc. r t y 258

SMCM-- PFM Seriese q w 2 F.S. 2 e r q w e r OFF q w ejis B 892-..2.6.22 q OFF w OFF OFFS IDF IDU F R IR MD FD PFM 259 lphabet Index

PFM Seriesr SMCM-- CO2.2L/min.5L/minL/min 2L/min L/min 25L/min 5L/min L/min PFM7 PFM5.2L/min.2L/min L/min 5L/min.5L/min 5.2L/min.5L/min 5.2L/min PFM725 PFM525.5L/min.5L/min 25L/min 2.5L/min 26.L/min.L/min 26.L/min.L/min PFM75 PFM55 L/min L/min 5L/min 25L/min 52.5L/min 26.2L/min 52.5L/min 26.2L/min PFM7 PFM5 2L/min 2L/min L/min 5L/min 5L/min 52L/min 5L/min 52L/min PFM5PFM 26

PFMV Series kpa -6-58 55 L/min (NR).76 ø.-6kpa 2%F.S. 4.4mm L/min(NR) - -2 - -.5.5 2 5ms 5kPa RoHS New 5 5 PFMV 55F 5F 5F PFMV5 Series PFMV Series 26 lphabet Index

4.4mm mm mm g g PFMV5 Series PFMV Series L/min..5.... -.5.5 -.. -.. PFMV55 PFMV5 PFMV5 PFMV55F PFMV5F PFMV5F.75.V.V KJL4-M5 65mm 65mm 262

SET SET SET 2 2 2 4.5 OK CO2 L/min PFM7 PFM725 PFM75 PFM7 PFM5 PFM525 PFM55 PFM5.2.25.525.52.5 525 225 PFM CT.S-6B 26 lphabet Index

PFMV Series P2 P 5. ø.6 5. 4.5 ø.5 4.5 4..5 ø.4 4..5 ø.6 ø.5. 2.5 2. L/min ø.. 2.5 2. L/min ø.4.5 ø.2.5 ø... ø.2 ø.. 8 6 4 2 P2kPa.5 P2kPa ø..5. 5 5 2 25 ø.pkpa P26kPa.7.8L/min PFMV5- ø.pkpa P22kPa.7.8L/min PFMV5- P P2 P P2 264

PFMV5 Series PFMV5 5..5L/min..L/min..L/min.5.5L/min..L/min..L/min 5 5F F F N 5V L L L22 2 4 5 L2M5L 2 L2M25L 2 L2M5L 2 L2M45L 2 L2M55L 2 ZS-6- ZS-6-2 ZS-6- ZS-6-4 ZS-6-5 RoHS 265 lphabet Index

PFMV5 Series kpa 4 25 5 6 PFMV55 PFMV5 PFMV5 PFMV55F PFMV5F PFMV5F N2 JIS B 892-..2.6.22ISO857-..2.6.2.5 L/min L/min L/min.5.5 L/min 2 L/min 2 5F.S. 2F.S. 2F.S.kPa 5F.S.7kPa 2F.S.55 5F.S.5 7kPakPa kpa4kpa 5kPa 5Vk 5ms9 DC224V 6m IP4 5 5 6 585R.H. 585R.H. CV 5MDC5V M5.8.5Nm PPSSiuSUS6C64 ø2.6.5mm 2 2m g 2.kPa65RHNR 2V5VV F.S.4V-5V 4kPa 5 6 L/min 2 k DC DC DC224V WG26.58mm.88mm PVC 2.6 266

PFMV5 Series IDF IDU F R IR MD FD PFMV KQ2 mm 4 M5.8 KQ2H4-M5 KQ2S4-M5 KQ2L4-M5 M mm 4 M-5N-4 M5.8 6 M-5N-6 q w e r t y e w q KJ mm KJH4-M5 4 M5.8 KJS4-M5 KJL4-M5 C64 2 SUS6 4 PPS 5 GE4F 6 Si, u Rh RuRd RaMEMS arh RuRd bru Rd RuRd Ra Ru Rh Rd Ra a Flow Ru Rh Rd Ra b lphabet Index 267

PFMV5 Series PFMV55-5. 4.5 PFMV5-5. 4.5 PFMV5-5. 4.5 V 4..5. 2.5 2..5 V 4..5. 2.5 2..5 V 4..5. 2.5 2..5....5..5..5.2.25..5.4.45.5 L/min.5...2..4.5.6.7.8.9. L/min.5...6.9.2.5.8 2. 2.4 2.7. L/min PFMV55F- PFMV5F- PFMV5F- 5. 5. 5. 4.5 4.5 4.5 V 4..5. 2.5 2..5 V 4..5. 2.5 2..5 V 4..5. 2.5 2..5....5.5.4..2....2..4.5 L/min.5..8.6.4.2..2.4.6.8. L/min.5. 2.4.8.2.6..6.2.8 2.4. L/min PFMV55F- PFMV5F- PFMV5F-..7. kpa.25.2.5..5 7kPa 5kPa kpa kpa kpa.6.5.4..2. 7kPa 5kPa kpa kpa kpa 2.5 2..5..5 7kPa 5kPa kpa kpa....2..4.5 L/min...2.4.6.8. L/min...5..5 2. 2.5. L/min 268

PFMV5- PFMV5F-.8 4.4 2.4 5.2 5 4 7. 2M5.8 24.5 4n5 24n5 24 4 24.5 24 4 5 2 25.7 9. 2 2 L 2 2 9. L PFMV5-PFMV5F- L PFMV5 Series 269 lphabet Index

PFMV Series PFMV5 ZS-28- ZS-28-B ZS-28-C ZS-27-C ZS-27-D M5L2 M8L2 M8L2 2 PFMV M 2 M5L M5L M8L M8L L ZS-28- PFMVPFMV5 G e-con ZS-28-C E B D L 2 N PFMV5F-- 2 4 5 NPN2-5V NPN24-2m NPN2 PNP2-5V PNP24-2m PNP2 SI 2 M 2 V L/min RoHS 27

2 4 5 4 PFMV.5.V.75.V.7V"LLL"5.V"HHH".75.V.V V L/minCFHft /h DC224V 5m 2msms/5ms/.5s/s.F.S..F.S..5F.S.digit /272//s ON2ON LOW5msLOW.4V IP4 56 585R.H. CV 5MDC5V.5F.S.25 5P4PP.275 PBT g85g NPNPNP2 8mDCVNPN V8m DC5V k DC42m 6DC24V5 F.S..s9 SIVL/min 2 9 4P.272 5 PFMV55.5L/min.25.525L/min.25.525L/min.L/min PFMV5 L/min.5.5L/min.5.5L/min PFMV5 L/min.5.5L/min.5.5L/min PFMV55F.5.5L/min.525.525L/min.525.525L/min.L/min PFMV5F L/min.5.5L/min.5.5L/min PFMV5F L/min.5.5L/min.5.5L/min.L/min.L/min PFMV5 PFMV Series 27 lphabet Index

PFMV Series DC5V DC42m 5 2 V. 5. m4. 5. PFMV5 PFMV5-5. 4.5 PFMV PFMV5 P.268 V 4..5. q 2.5 w 2. q.5 e e. Q PFMV5-.L/min q.l/minpfmv5-2.5v q wpfmv52f.s.8mv w ef.s..9l/min eq PFMV5 5F.S..5...6.9.2.5.8 2. 2.4 2.7. L/min 272

4 LCD ON ON/OFF 2ON 2 SET ON/OFF DC 2 DC DC 2 DC DC 2 DC DC 2 DC PFMV NPN:2 :5V PFMV PNP:2 :5V PFMV NPN:2 :42m PFMV4 PNP:2 :42m PFMV2 NPN:2 PFMV5 PNP:2 DC 2 DC DC 2 DC DC2 24V DC2 24V DC2 24V DC2 24V DC2 24V DC2 24V PFMV5 PFMV Series 27 lphabet Index

.5 4 2M.5 2. 8.2.2.5.6 4 26.5 2.5 4 4.2 5 46 22 5 7.2 ZS-28-C 42.4 4.5 24 4.5 24 7.2 8.75.56 P 2 4 DC N.C. DC 5V PFMV Series 274

PFMV5 PFMV Series 2.4 24 n.5n.4 4R2.4 4R2 2 24.4 n.5n ZS-28- DC 5 4 2 2 DC 2 22 4R2 RR2.2mm 2.58mm.2mm PVC ø4. lphabet Index 275

ONOFF ONOFF V.V.7VLLL5.VHHH 2ms ms 5ms.5s s ON-OFF.5.5V.5.5V OFF PFMV55/5/5.. PFMV55F/5F/5F...2V..2V Er4 PFM55.V 2 F.S. ON OFF Q ON ON-OFF ON OFF ON OFF Q.5.5ON.5ON ON PFMV Series 2tm, 65R.H.NR 276

q w e r MSDS t y u 2 SMC M-- PFMV5 Seriesq e P.264 r t52 q wul V 2V 2VV 5. UL58 2 Vrms42.4V q8 w 2UL2UL585 2Vrms42.4V 2 q w e.2.2nm.5nm r t y 49N u 277 lphabet Index

PFMV5 Seriesw q w e r t CE y u i i o q w e etc. r..5nm SMC M-- 278

q w e q w e r OFF PFMV5 Seriese q w ejis B 892-..2.6.2:2ISO857-..2.6.2: 2 SMC M-- 279 lphabet Index

PFMV5 Seriesr SMC M-- L/min L/min.5L/min.5L/min L/min L/min PFMV55 PFMV5 PFMV5 PFMV55F PFMV5F PFMV5F 28

q 49m/s 2 w e q w e r t y 2 PFMV Seriest q wul V 2V 2VV 5. UL58 2 Vrms42.4V q8 w 2UL2UL585 2Vrms42.4V 2 e EEPROM 6 2 q q w e etc. r SMC M-- 28 lphabet Index

PFMV Seriesy q w98m/s 2 49m/s 2 e r CE t y u t y q w q w e r OFF q OFF w OFF OFFS SMC M-- 282

PFMV Seriesu.7V LLL HHH 5.V 5.2V SMC M-- L/min L/min L/min L/min.5L/min.5L/min.525L/min.525L/min.5L/min.5L/min.5L/min L/min.5L/min.5L/min L/min.525L/min.525L/min.5L/min.5L/min.5L/min L/min.5L/min.5L/min L/min.5L/min.5L/min.525L/min.525L/min.5L/min.5L/min.5L/min L/min.5L/min.5L/min L/min PFMV5PFMV PFMV55 PFMV5 PFMV5 PFMV55F PFMV5F PFMV5F.25L/min.25L/min.5L/min.5L/min 28 lphabet Index