-FF/-M Series -FF 3m % P.2 0.3m -M 0.3m.% 1mg/m 3 NR 0.8ppm P. 0.01m M -MD -MH 0.01m.% 0.30.01m.% 0.1mg/m 3 NR 0.08ppm P.1 P.23 0.01m -ME -MF 0.01m.% 0.01mg/m 3 NR 0.008ppm 0.004mg/m 3 NR 0.0032ppm P.30 P. P.44 P.45 INOUT P.4 1
-FF Series -FF2C22C P.44 -FF2C l/minnr 300 1 8 1 4 kg 0.38 -FF4C 750 1 4 3 8 0.55 -FF8C 00 3 8 1 2 0. -FF11C 20 1 2 3 4 1.4 0.7MPa P.5 -FF22C 00 3 4 1 2.1 -FFB 000 1 1 2 4.2 -FF75B 100 1 2 2.5 1.0MPa 0.05MPa 1.5MPa 50 3m.1MPa -FF2C22C -FF2C22C, -FFB, 75B 2 -FF2C -FF4C -FF8C -FF11C -FF22C -FFB -FF75B -M-BM1 -M-BM2 -M-BM3 -M-BM4 -M-BM5 -BM5 -BM57 -FFB, 75B SMC M-03-3 0.MPa 5m 3 /minnr q w -FFB m 3 /min(nr) -FF75B -FFB -FF22C -FF11C -FF8C -FF4C -FF2C 2
-FF Series -FF2C-FF22C FF 22C 2C 2.2kW 4C 3.7kW 8C 7.5kW 11C 11kW 22C 22kW F H 1.MPa R INOUT T 01 02 03 04 0 1/8 1/4 3/8 1/2 3/4 1 Rc F G 1 N NPT 1 ISO117-1 2C 4C 8C 11C 22C 1/4 3 3 B 2 2 F O H1.MPa 1.MPa RINOUT T 0.1MPa 3
-FF Series FFB, 75B FF B B 75B kw 75kW R T INOUT 14 Rc F G N NPT B 75B 1 1 1 2 2 2 B 1 1 1/4-FFB, 3/8-FF75B 2 P.45 4
-FF Series -FF2C -FF11C -FF75B -FF4C -FF22C -FF8C -FFB 5
-FF2C-FF22C, -FFB -FF75B P.45 P.78 1O1 4 -FF2C -FF-EL2B -FF-EL2B-F -FF4C -FF-EL4B -FF-EL4B-F -FF8C -FF-EL8B -FF-EL8B-F -FF11C -FF-EL11B -FF-EL11B-F -FF22C -FF-EL22B -FF-EL22B-F -FFB -FF-ELB -FF75B -FF-EL75B F F 2 3 1 -FF75B OUT IN q r w e FF Series
W X IN OUT -FF2C-FF22C T M øv IN OUT U D I L T K C H R S P Q O F E B N mm -FF2C -FF4C -FF8C -FF11C -FF22C 8 172 4 225 25 1/8, 1/4 1/4, 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 B 14 18 24 C 113 145 1 0 D 3 7 0 122 E F 3 7 0 122 G H 173 10 222 24 278 I 5 80 0 0 24 28 31 33 K 5 8 8 T 7 U 7 L 12 12 14 18 18 M 7 V 12 N 35 40 50 55 5 O 54 80 88 2 P 70 80 5 111 12 Q 2 28 34 50 0 R 4.5 5 5 S 1. 2 2.3 3.2 3.2 W 24 27 32 3 X 1/4 2- G 7 FF Series
-FF Series -FFB 10 13 12 180 7 4.5 T 55 11 10 0 85 334 311 253 40 32 2-1, 1 1/2 1/4 -FF75B 18 2 1 18 24 T 42 3 2 13 184 1 IN OUT 30 C () (452) 348 44 2-1 1/2, 2 8 28 44 3/8
-M Series 0.3 m -M0C550C P.44 -M0C -M250C -M350C -M450C -M550C -M50 -M850 l/minnr 300 750 00 20 00 000 100 1 8 1 4 1 4 3 8 3 8 1 2 1 2 3 4 3 4 1 1 1 2 1 2 2 kg 0.38 0.55 0. 1.4 2.1 4.2.5 0.7MPa P.12P.13 1 30mg/m 3 NR 1.0MPa 0.05MPa 1.5MPa 50 0.3m. Max.1mg/mNR0.8ppm 3 1.1MPa -M0C550C -M50, 850 2 -M0C -M250C -M350C -M450C -M550C -M50 -M850 -M-BM1 -M-BM2 -M-BM3 -M-BM4 -M-BM5 -BM5 -BM57 SMCM-03-3
-M Series -M0C-M550C M 550C 0C 250C 350C 450C 550C 2.2kW 3.7kW 7.5kW 11kW 22kW Rc F G 1 N NPT 1 ISO117-1 0C 250C 350C 450C 550C 01 02 1/8 1/4 03 3/8 04 1/2 0 3/4 1 B 2 2 F H 1.MPa R INOUT T 1/4 3 3 F O H1.MPa 1.MPa RINOUT T 0.1MPa
-M Series -M50, 850 M 50 50 kw 850 75kW Rc F G N NPT 50 850 14 1 1 1 2 2 B 1 1 R INOUT T 2 1/4-FFB, 3/8-FF75B 2 P.45 11
-M Series -M0C -M450C -M850 -M250C -M550C -M350C -M50 12
-M0CM550C, M50 -M850 0.MPa 5m 3 /minnr q w -M50 P.45 P.14 1O1 4 -M0C -M-EL0 -M-EL0-F -M250C -M-EL250 -M-EL250-F -M350C -M-EL350 -M-EL350-F -M450C -M-EL450 -M-EL450-F -M550C -M-EL550 -M-EL550-F -M50 -M-EL50 -M850 -M-EL850 F F 2 3 1 -M850 OUT IN q r w e -M850 -M50 -M550C -M450C -M350C -M250C -M0C m 3 /min(nr) 13 -M Series
W X IN OUT -M0CM550C T M øv IN OUT U D I L T K C H R S P Q O F E B N mm 8 172 4 225 25 1/8, 1/4 1/4, 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 B 14 18 24 C 113 145 1 0 D 3 7 0 122 E F 3 7 0 122 G H 173 10 222 24 278 I 5 80 0 0 24 28 31 33 K 5 8 8 T 7 U 7 L 12 12 14 18 18 M 7 V 12 N 35 40 50 55 5 O 54 80 88 2 P 70 80 5 111 12 Q 2 28 34 50 0 R 4.5 5 5 S 1. 2 2.3 3.2 3.2 W 24 27 32 3 X -M0C -M250C -M350C -M450C -M550C 1/4 G 2-14 -M Series
-M Series -M50 12 180 7 4.5 T 10 13 55 10 0 85 334 311 253 40 32 11 2-1, 1 1/2 1/4 -M850 18 2 1 18 24 13 T 42 3 2 184 1 IN OUT 30 C () (452) 348 44 2-1 1/2, 2 28 3/8 44
-MD Series 0.01m -MD0C550C P.44 -MD0C -MD250C -MD350C -MD450C -MD550C -MD50 l/minnr 0 500 00 00 00 000 kg 0.38 -MD850 100 1 8 1 4 1 4 3 8 3 8 1 2 1 2 3 4 3 4 1 1 1 2 1 2 2 0.7MPa P.1P.18 1 30mg/m 3 NR 0.55 0. 1.4 2.1 4.2.5 1.0MPa 0.05MPa 1.5MPa 50 0.01m. Max.0.1mg/mNR 3 1 0.01mg/mNR0.008ppm 3 21 0.1MPa -MD0C -MD250C -MD350C -MD450C -MD550C -MD50 -MD850 -M-BM1 -M-BM2 -M-BM3 -M-BM4 -M-BM5 -BM5 -BM57 2 -MD0C550C -MD50, 850 SMCM-03-3 1
-MD Series -MD0C-MD550C MD 550C 0C 250C 350C 450C 550C Rc F G 1 N NPT 1 ISO117-1 0C 250C 350C 450C 550C 01 02 1/8 1/4 03 3/8 04 1/2 0 3/4 1 B 2 2 F H 1.MPa R INOUT T 1/4 3 3 F O H1.MPa 1.MPa RINOUT T 0.1MPa 17
-MD Series -MD50, 850 MD 50 50 850 Rc F G N NPT R INOUT T 2 1/4-FFB, 3/8-FF75B 2 14 50 850 1 1 1 2 2 B 1 1 P.45 0.MPa 5m 3 /minnr q w -MD50 m 3 /min(nr) -MD850 -MD50 -MD550C -MD450C -MD350C -MD250C -MD0C 18
-MD Series -MD0C -MD450C -MD850 -MD250C -MD550C -MD350C -MD50 1
P.45 P.2122 -MD0C-MD550C, -MD50 -MD850 1O1 4 -MD0C -MD-EL0 -MD-EL0-F -MD250C -MD-EL250 -MD-EL250-F -MD350C -MD-EL350 -MD-EL350-F -MD450C -MD-EL450 -MD-EL450-F -MD550C -MD-EL550 -MD-EL550-F -MD50 -MD-EL50 -MD850 -MD-EL850 F F 2 3 1 -MD850 OUT IN q r w e -MD Series
W X IN OUT -MD0CMD550C T M øv IN OUT U D I L T K C H R S P Q O F E B N mm 8 172 4 225 25 1/8, 1/4 1/4, 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 B 14 18 24 C 113 145 1 0 D 3 7 0 122 E F 3 7 0 122 G H 173 10 222 24 278 I 5 80 0 0 24 28 31 33 K 5 8 8 T 7 U 7 L 12 12 14 18 18 M 7 V 12 N 35 40 50 55 5 O 54 80 88 2 P 70 80 5 111 12 Q 2 28 34 50 0 R 4.5 5 5 S 1. 2 2.3 3.2 3.2 W 24 27 32 3 X -MD0C -MD250C -MD350C -MD450C -MD550C 1/4 G 2-21 -MD Series
-MD Series -MD50 180 7 T 55 10 0 85 311 12 4.5 10 13 334 11 253 40 32 2-1, 1 1/2 1/4 -MD850 18 2 1 18 24 13 T 28 44 (452) 348 44 42 3 2 184 1 IN OUT 30 C () 2-1 1/2, 2 22 3/8
-MH Series 0.01m -M -MD -MH0C550C P.44 -MH0C -MH250C -MH350C -MH450C -MH550C -MH50 l/minnr 0 500 00 00 00 000 kg 0.38 -MH850 100 1 8 1 4 1 4 3 8 3 8 1 2 1 2 3 4 3 4 1 1 1 2 1 2 2 0.7MPa P.2 1 30mg/m 3 NR 0.55 0. 1.4 2.1 4.2.5 1.0MPa 0.05MPa 1.5MPa 50 0.01m. Max.0.1mg/mNR 3 1 0.01mg/mNR0.008ppm 3.1MPa -MH0C -MH250C -MH350C -MH450C -MH550C -MH50 -MH850 -M-BM1 -M-BM2 -M-BM3 -M-BM4 -M-BM5 -BM5 -BM57 2 -MH0C550C -MH50, 850 0.MPa 5m 3 /minnr q w -MH50 m 3 /min(nr) -MH850 -MH50 -MH550C -MH450C -MH350C -MH250C -MH0C SMCM-03-3 23
-MH Series -MH0C-MH550C MH 550C 0C 250C 350C 450C 550C Rc F G 1 N NPT 1 ISO117-1 0C 250C 350C 450C 550C 01 02 1/8 1/4 03 3/8 04 1/2 0 3/4 1 B 2 F H 1.MPa R INOUT T 1/4 3 3 2 F O H1.MPa 1.MPa RINOUT T 0.1MPa 24
-MH Series -MH50, 850 MH 50 50 850 14 Rc F G N NPT 50 850 1 1 1 2 2 R T 2 INOUT 1/4-FFB, 3/8-FF75B 2 B 1 1 P.45 25
-MH Series -MH0C -MH450C -MH850 -MH250C -MH550C -MH350C -MH50 2
P.45 P.282 -MH0C-MH550C, -MH50 -MH850 1O1 4 -MH0C -MH-EL0 -MH-EL0-F -MH250C -MH-EL250 -MH-EL250-F -MH350C -MH-EL350 -MH-EL350-F -MH450C -MH-EL450 -MH-EL450-F -MH550C -MH-EL550 -MH-EL550-F -MH50 -MH-EL50 -MH850 -MH-EL850 F F 2 3 1 -MH850 OUT IN q r w e 27 -MH Series
W X IN OUT -MH0C-MH550C T M øv IN OUT U D I L T K C H R S P Q O F E B N mm 8 172 4 225 25 1/8, 1/4 1/4, 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 B 14 18 24 C 113 145 1 0 D 3 7 0 122 E F 3 7 0 122 G H 173 10 222 24 278 I 5 80 0 0 24 28 31 33 K 5 8 8 T 7 U 7 L 12 12 14 18 18 M 7 V 12 N 35 40 50 55 5 O 54 80 88 2 P 70 80 5 111 12 Q 2 28 34 50 0 R 4.5 5 5 S 1. 2 2.3 3.2 3.2 W 24 27 32 3 X -MH0C -MH250C -MH350C -MH450C -MH550C 1/4 G 28 -MH Series
-MH Series -MH50 12 180 7 4.5 T 55 11 10 0 85 334 311 253 40 32 10 13 1/4 18 2 1 18 24 42 3 2 184 2-1, 1 1/2 -MH850 13 T 1 IN OUT 30 C () (452) 348 44 2-1 1/2, 2 28 3/8 44 2
-ME Series -ME0C -ME250C -ME350C -ME450C -ME550C -ME50 l/minnr 0 500 00 00 00 000 kg 0.3 -ME850 100 1 8 1 4 1 4 3 8 3 8 1 2 1 2 3 4 3 4 1 1 1 2 1 2 2 0.7MPa P.33 0.48 0.8 1.3 2.0 4.2.5 M -ME0C550C P.44 1.0MPa 0.05MPa 1.5MPa 50 0.01m. 0.3m0/ft 3 35/lNR Max0.01mg/mNR 3 0.008ppm q w 0.1MPa 2 2 -ME0C -ME250C -ME350C -ME450C -ME550C -ME50 -ME850 -M-BM1 -M-BM2 -M-BM3 -M-BM4 -M-BM5 -BM5 -BM57 -ME0C350C -ME450C, 550C SMCM-03-3 -ME50, 850 30
-ME Series -ME0C-ME550C ME 550C 0C 250C 350C 450C 550C F H 1.MPa R INOUT Rc F G 1 N NPT 1 ISO117-1 B 2 2 0C 250C 350C 450C 550C 01 02 1/8 1/4 03 3/8 04 1/2 0 3/4 1 F O H1.MPa 1.MPa RINOUT 31
-ME Series -ME50, -ME850 ME 50 50 850 Rc F G N NPT R INOUT 1 14 1 1 2 2 50 850 B P.45 32
-ME Series -ME0C -ME450C -ME50 -ME250C -ME550C -ME850 -ME350C -ME850 0.MPa 5m 3 /minnr q w -ME50 m 3 /min(nr) -ME50 -ME550C -ME450C -ME350C -ME250C -ME0C 33
P.45 P.353 1O1 4 -ME0C -ME-EL0 -ME-EL0-F -ME250C -ME-EL250 -ME-EL250-F -ME350C -ME-EL350 -ME-EL350-F -ME450C -ME-EL450 -ME-EL450-F -ME550C -ME-EL550 -ME-EL550-F -ME50 -ME-EL50 -ME850 -ME-EL850 F F -ME0CME550C -ME50, -ME850 2 3 1 -ME850 r e w q IN OUT 34 -ME Series
O B S R T P Q F E M øw I V D N L U K G C E R Q P D T L M U N øw V K C I D H G B O F OUT IN OUT IN -ME0C-ME350C mm -ME0C -ME250C -ME350C 83 3 132 1/8, 1/4 1/4, 3/8 3/8, 1/2 B 14 18 C 54 73 8 D 3 7 0 E 7.5 5 5 F 3 7 0 G -ME0C -ME250C -ME350C 1/8, 1/4 1/4, 3/8 3/8, 1/2 I 8.5 121 0 N 5 80 24 28 K 5 8 8 U 7 V 7 L 12 12 14 M 7 -ME0C -ME250C -ME350C 1/8, 1/4 1/4, 3/8 3/8, 1/2 W 12 O 35 40 50 P 70 80 5 Q 2 28 34 R 54 80 S 4.5 5 5 T 1. 2 2.3 mm -ME450C -ME550C 1 187 1/2, 3/4 3/4, 1 B 24 C 5 130 D 122 E 3 3 F 122 G H 3 44 -ME450C -ME550C 1/2, 3/4 3/4, 1 I 172 N 0 0 31 33 K U V L 18 18 M -ME450C -ME550C 1/2, 3/4 3/4, 1 W O 55 5 P 111 12 Q 50 0 R 88 2 T 3.2 3.2 -ME450C, -ME550C 35 -ME Series
-ME50, -ME850 21 403 -ME50 -ME850 B 32 42 C 17 235 D 10 2 E F 10 2 G H I 314 40 40 30 K L 24 M 11 13 N 0 180 O 85 1 P 180 2 Q 7 1 R 13 184 S 4.5 1 2 1 2 1 11 2 mm 2-3 -ME Series
-MF Series -MF0C550C P.44 -MF0C -MF250C -MF350C -MF450C -MF550C -MF50 l/minnr 0 500 00 00 00 000 kg -MF850 100 1 8 1 4 1 4 3 8 3 8 1 2 1 2 3 4 3 4 1 1 1 2 1 2 2 0.3 0.7MPa P.40P.3 0.48 0.8 1.3 2.0 4.2.5 1.0MPa 0.05MPa 1.5MPa 50 0.01m. 0.3m0/ft35/lNR 3 ME Max 0.004mg/mNR0.0032ppm 3 ME q w 0.1MPa2 -MF0C350C -MF450C, 550C -MF0C -MF250C -MF350C -MF450C -MF550C -MF50 -MF850 -M-BM1 -M-BM2 -M-BM3 -M-BM4 -M-BM5 -BM5 -BM57 2 SMCM-03-3 -MF50, 850
-MF Series -MF0C-MF550C MF 550C 0C 250C 350C 450C 550C Rc F G 1 N NPT 1 ISO117-1 F H 1.MPa R INOUT B 2 2 0C 250C 350C 450C 550C 01 02 1/8 1/4 03 3/8 04 1/2 0 3/4 1 F O H1.MPa 1.MPa RINOUT 38
-MF Series -MF50, -MF850 MF 50 50 850 14 Rc F G N NPT 50 850 1 1 1 2 2 R INOUT B P.45 0.MPa 5m 3 /minnr q w -MF50 m 3 /min(nr) -MF850 -MF50 -MF550C -MF450C -MF350C -MF250C -MF0C 3
-MF Series -MF0C -MF450C -MF850 -MF250C -MF550C -MF350C -MF50 40
-MF0C-MF550C -MF50, -MF850 P.4243 1O1 4 -MF0C -MF-EL0 -MF-EL0-F -MF250C -MF-EL250 -MF-EL250-F -MF350C -MF-EL350 -MF-EL350-F -MF450C -MF-EL450 -MF-EL450-F -MF550C -MF-EL550 -MF-EL550-F -MF50 -MF-EL50 -MF850 -MF-EL850 F F r e w q IN OUT 1 2 3 -MF850 P.45 41 -MF Series
OUT IN O B S R T P Q F E M øw I V D N L U K G C E R Q P D T L M U N øw V K C I D H G B O F OUT IN -MF0C-MF350C mm -MF0C -MF250C -MF350C 83 3 132 1/8, 1/4 1/4, 3/8 3/8, 1/2 B 14 18 C 54 73 8 D 3 7 0 E 7.5 5 5 F 3 7 0 G -MF0C -MF250C -MF350C 1/8, 1/4 1/4, 3/8 3/8, 1/2 I 8.5 121 0 N 5 80 24 28 K 5 8 8 U 7 V 7 L 12 12 14 M 7 -MF0C -MF250C -MF350C 1/8, 1/4 1/4, 3/8 3/8, 1/2 W 12 O 35 40 50 P 70 80 5 Q 2 28 34 R 54 80 S 4.5 5 5 T 1. 2 2.3 -MF450C, -MF550C mm -MF450C -MF550C 1 187 1/2, 3/4 3/4, 1 B 24 C 5 130 D 122 E 3 3 F 122 G H 3 44 -MF450C -MF550C 1/2, 3/4 3/4, 1 I 172 N 0 0 31 33 K U V L 18 18 M -MF450C -MF550C 1/2, 3/4 3/4, 1 W O 55 5 P 111 12 Q 50 0 R 88 2 T 3.2 3.2 42 -MF Series
-MF50, -MF850 21 403 -MF50 -MF850 B 32 42 C 17 235 D 10 2 E F 10 2 G H I 314 40 40 30 K L 24 M 11 13 N 0 180 O 85 1 P 180 2 Q 7 1 R 13 184 S 4.5 1 2 1 2 1 11 2 mm 2-43 -MF Series
-FF2C22C, -M0C550C -Y0TY00T -M /-FF Series 2 3 21 -MH250C-B 1 -ME250C 1 -Y300 1 8 -Y300 -MH250C-B 1 -ME250C 1 -MF250C-B 1 -Y300 2 -Y300 -Y300 240 10 172 -ME250C 10 172 -ME250C -MF250CB -MH250CB -MH250CB 1/4 1/4 23 D IN, OUT 1 2 C B X X-X Y0 Y400 X -Y0 -Y300 -Y400 -Y500 -Y00 B C D 3 4 5 5 35.5 47 57 1 75.5 18.5 2 31 33 41 48 5 5 75 8 FF2C, M0C FF4C, M250C FF8C, M350C FF11C, M450C FF22C, M550C 44 HNBR -Y0 Y0P-01S -Y300 Y300P-00S -Y400 Y400P-00S -Y500 Y500P-00S -Y00 Y00P-00S
-FF-C/-M-C FFM -FF2C22C, -M, -MD, -MH M C 550C 0C 250C 350C 450C 550C F H Rc F G N NPT 1.MPa -M-C0C- -M-C250C- -M-C350C- -M-C450C- -M-C550C- -FF2C, -M0C, -MD0C, -MH0C -FF4C, -M250C, -MD250C, -MH250C -FF8C, -M350C, -MD350C, -MH350C -FF11C, -M450C, -MD450C, -MH450C -FF22C, -M550C, -MD550C, -MH550C -FFB, 75B FF C B B 75B Rc F G N NPT 45
-FF-C/-M-C -M, -MD, -MH M MD MH C 50 850 50 Rc F G N NPT -ME, -MF0C550C ME C 550C 0C 250C 350C 450C 550C F H 1.MPa FH -ME-C0C- -ME-C250C- -ME-C350C- -ME-C450C- -ME-C550C- -ME0C, -MF0C -ME250C, -MF250C -ME350C, -MF350C -ME450C, -MF450C -ME550C, -MF550C -ME, -MF50, 850 ME MF C 50 850 50 4
-FF-C/-M-C -FF, -M, -MD, -MH -FF2C22C, -FFB, -M0C550C, -M50 B -M-C0C550C -FF75B, -M850 2 44 35 2 1/4 FF 2C 4C 8C 11C 22C B M, MD, MH 0C 250C 350C 450C 550C 50 mm 1 B 3 142 7 0 181 5 122 248 10 3/8 47
-FF-C/-M-C -ME, -MF -ME0C550C, -MF0C550C B -ME, -MF 0 250 350 450 550 0 70 0 4 130 mm B 3 7 0 122 -ME50, 850, -MF50, 850 B -ME, -MF 50 850 225 31 mm B 10 1 48
-M/-FF Seriesq SMCM-03-3 q w e q 0.1MPa w -FF-M e-ff,-m-me,-mf -FF,-M r 1/8 7 1/4 1214 3/8 2224 1/2 2830 3/4 2830 1 338 4850 1 2 4850 1/ Nm 1 2 4
-M/-FF Seriesw SMCM-03-3 q q Best Pneumatics No.t P.23 w -M w e 1.52 r 2 3 2 1 qinout -FF2C22C,B,75B,-M0C550C,50,850 e IN OUT e 50
-M/-FF Seriese SMCM-03-3 q w e q 1. 2. 3. w q O a-ff2c22c,b,75b,-m0c550c,50,850 0.1MPa2 [ T] b-me a c-mf ab w 51