IMPACT® フォトケミカル向けPOU 用フィルター

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1 IMPACT POU

2 POU Impact ( ) POU ( ) Connectology ( ) IntelliGen ( ) 8G Duo UPE ( ) RFID / UPE UPE PTFE PFA nm 2 ENTEGRIS, INC.

3 * 8G 2 V2 8G 8G-L UPE nm 6 1 nm Duo 5 1 nm PCM ( UPE) 1 nm nm 2 V2 UPE UPE 3 nm 1 µm 2-Duo ( ) : UPE nm : 6 2 V2 PCM UPE 2 nm.5 µm Plus V2 Plus V2 UPE 3 nm 1 µm Plus-Duo : nm ( ) : UPE Plus nm Plus PCM UPE 2 nm.5 µm SR-LHVD PTFE 2 nm 1 µm Mini Mini UPE 5 nm.1 µm HV * UPE PTFE.5 1. µm 3D ENTEGRIS, INC. 3

4 3 nm UPE UPE Duo 2 UPE 2 1 nm 8G Duo RFID AFS 4 ENTEGRIS, INC.

5 8G / 8G-L : UPEDuo (UPE / PCM) 8G UPE 12 cm 2 / Duo 8 cm 2 PCM 13 cm 2 8G-L / Duo 16 cm 2 HDPE UPE 24 cm 2 PCM 26 cm 2 O- Kalrez ( ) (OF ) : C : :* :* : ( 2 **) 8G 8G-L C 4 C 55 ml 11 ml PGMEA PGME NMP MMP PGMEA PGME MMPECA 4 mm / 3 mm Flowell ( ) 6 (OF ) 5 mm / 3 mm 6 (OF ) 6 mm / 4 mm 6 (OF ) 6.35 mm / 3.95 mm 6 (OF ) 6.35 mm / 4.35 mm 6 (OF/OM ) 6.35 mm / 3.95 mm (OF ) 6.35 mm / 4.35 mm (OF/OM ) * ** 2 2 V2 [kpa] G UPE 8G-L 3 nm 1 nm 8G-L 5 nm 3 nm 5 nm [kpa] G Duo 8G 5 nm Duo 8G-L 1 nm Duo 8G 1 nm Duo 5 8G-L 1 nm [ml/sec] 2 C 5 8G 1 nm 8G-L 1 nm [ml/sec] 2 C ENTEGRIS, INC. 5

6 8G/8G-L : 8G 8G-L : 8G : 8G-L 73 mm 65 mm 49 mm 88 mm 136 mm 8G 127. mm 45. mm 79. mm 35. mm 172 mm 138 mm 122 mm 94 mm 59.5 mm * 8G 8G-L A2 C 1 S = UPE D = Duo N = M = PCM K = 3 nm F = 5 nm T = 1 nm X = 2 nm = L = 82.5 mm = M = M- 1 mm 1 = 1 / O- = (OM ) K = (OF ) * 6 ENTEGRIS, INC.

7 2 V2 : UPEDuo (UPE / ) PCM 8 cm 2 PCM 135 cm 2 Duo 8 cm 2 HDPE O- (OF ) : C : :* : * : ( 2 ) 55 ml C 4 C PGMEA PGME NMP MMP 85 cm 2 PGMEA PGME MMPECA NMP 4 mm / 3 mm 6 (OF ) 5 mm / 3 mm 6 (OF ) 6 mm / 4 mm 6 (OF ) 6.35 mm / 3.95 mm 6 (OF ) 6.35 mm / 4.35 mm 6 (OF/OM ) 6.35 mm / 3.95 mm (OF ) 6.35 mm / 4.35 mm (OF/OM ) * ENTEGRIS, INC. 7

8 [kpa] [kpa] V2 UPE 3 nm 5 nm 1 nm [ml/sec] 2 C 2 V2 1 nm 2 nm 5 nm [ml/sec] 2 C [kpa] Duo 5 nm 1 nm 3 nm [ml/sec] 2 C 2 2 V mm mm 79. mm 35. mm 45. mm 172 mm 138 mm 122 mm 94 mm 59.5 mm 82.5 mm 1 mm 8 ENTEGRIS, INC.

9 2 2 V mm mm 35. mm 63. mm 157 mm 128 mm 122 mm 94 mm 59.5 mm 82.5 mm 1 mm 2 RFID 23. mm 51.5 mm 25.8 mm 2 Ø3.3 mm 5. mm 94. mm 11. mm 12. mm 97.6 mm mm mm 25.8 mm 2. mm 4. mm 2 Ø3.3 mm 2. mm 59.5 mm 97.7 mm 54.6 mm 94.6 mm 19. mm 9.5 mm 18.5 mm ENTEGRIS, INC. 9

10 * 2 V2 A2 2 1 A = UPE () S = UPE D = Duo (PE / ) M = PCM N = K = 3 nm F = 5 nm T = 1 nm X = 2 nm Y = 3 nm Z =.5 µm V =.1 µm G =.2 µm = L = = M = M- ** 1 = 1 / O- = (OM ) K = (OF ) ** M- 3 nm UPE 2 ( 8G 2 V2 ) 2 RFID A2MX222K1 A2MX2221 A2MX222KT A2MX222ET A2MX222T A2MX4441A A2MX5551A A2MX6661A A2MP222K1 A2MP222KT A2MP2221 A2MP222T A2RX5551 A2RX mm / 3.95 mm 6 O- (OM ) mm / 3.95 mm 6 O- (OF ) mm / 4.35 mm 6 O- (OM ) mm / 4.35 mm 6 EPDM O- (OM ) mm / 4.35 mm 6 O- (OF ) 2 4 mm / 3 mm 6 O- (OF ) 2 5 mm / 3 mm 6 O- (OF ) 2 6 mm / 4 mm 6 O- (OF ) mm / 3.95 mm O- (OM ) mm / 4.35 mm O- (OM ) mm / 3.95 mm O- (OF ) mm / 4.35 mm O- (OF ) 2 RFID 5 mm / 3 mm 6 O- (OF ) 2 RFID 6 mm / 4 mm 6 O- (OF ) * 1 ENTEGRIS, INC.

11 Plus V2 Plus Duo SR LHVD Plus V2 Plus Duo SR LHVD : UPEPCM UPE / PTFE 1 nm 85 cm 2 6 cm 2 13 cm 2 1 nm 2 nm 14 cm 2.5 µm PCM 13 cm 2 2 nm PCM 14 cm 2 12 cm 2 HDPE O- (OF ) : C C : :* :* C C 4 C 3 C 55 cc 45 cc PGMEA PGME NMP MMP PGMEA PGME MMPECA NMP : ( ST ) 1 4 Flaretek () * PFA NMP GBL EGMEA MMP ENTEGRIS, INC. 11

12 Plus V2 UPE SR LHVD 2 5 [kpa] nm 5 nm 1 nm [kpa] nm [ml/sec] 2 C [ml/sec] 2 C Plus V2 UPE 6.5 µm 4.2 µm [kpa] 2.1 µm [ml/sec] 2 C 2 Plus Duo [kpa] nm 3 nm [ml/sec] 2 C 12 ENTEGRIS, INC.

13 PLUS V2 PLUS DUO SR LHVD 95.5 mm 82.5 mm 19. mm 9. mm 71. mm 35.8 mm 21. mm 21. mm 71.9 mm ST PLUS V2 PLUS DUO SR LHVD ( ) 52.4 mm 19. mm 76. mm 4. mm 14. mm 19. mm 6. mm 115. mm ENTEGRIS, INC. 13

14 * Plus V2 AP 2 1 A = UPE S = UPE D = Duo N = M = PCM K = 3 nm F = 5 nm T = 1 nm X = 2 nm Z =.5 µm V =.1 µm G =.2 µm M = M- ** = 1 = 1 / O- = (OM ) K = (OF ) * ** M- 3 nm UPE ST DZUM 44 C1 DZUM 44 E1 ST ST O- SR LHVD AT F = TX = 2 nm FZ =.5 um FV =.1 um FG =.2 um O- 1 = (OM ) K1 = *** (OF ) ***.5 µm 14 ENTEGRIS, INC.

15 Mini : UPE 25 cm 2 HDPE O- () : C : :* :* 15 ml C 4 C PGMEA PGME NMP MMP PGMEA PGME MMPECA NMP : Mini ( Mini ASF) * Mini nm [kpa] µm 55.6 mm.25.1 µm 5 1 [ml/sec] 2 C Ø56.9 mm ** Mini AM 2 K 1 1 = 1 / A = UPE S = UPE F = 5 nm T = 1 nm X = 2 nm Z =.5 µm V =.1 µm 72.9 mm : Mini 2 V2 ** ENTEGRIS, INC. 15

16 HV : UPE PTFE 34 cm 2 HDPE O- : C : C 4 C HV 2- ( ST2 ) / 6.35 mm 9.53 mm 12.7 mm mm 9.53 mm 12.7 mm 6 mm / 6.35 mm mm 4 mm 6 4 HV.5 µm UPE 91. mm [kpa] µm UPE 1. µm PTFE 15.5 mm [ml/sec] 2 C HV Ø89.7 mm ATAALKM1 HV PTFE 1. µm O- (OF ) Ø159.9 mm AWAALKM1 HV UPE 1. µm O- (OF ) AWAHLKM1 HV UPE.5 µm O- (OF ) 16 ENTEGRIS, INC.

17 (Entegris Terms and Conditions of Sale) Legal Notices Teflon Kalrez E. I. du Pont de Nemours and Company TEL (3) FAX (3) TEL (6) FAX (6) TEL (92) FAX (92) Entegris, Inc. All rights reserved ENT-415JPN

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