ロボット0611.indd
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1
2 INDEX
3 3 RO-UW3 RC RC-234
4 4 5
5 7 COVER CLOSE COVER LOCK PLACEMENT UNLOAD LOAD EMO EMO 6
6 RZ MTBF MTBF = 8 9
7 J.PAT. No RR717L1521-3A6 RR716L1523-3A6 RR713L1522-3A3 RR713L1521-3A3 L1522-3A3 RR716L1523-3A6 RR717L1521-3A6 R 1 R622 R733 R mm 200g R mm Z mm R sec sec 1.6 sec R kg RR717L1521-3A6 RR716L1523-3A
8 RR700L RR700L RR700L1522-3A3 J.PAT. No RR701L RR701L RR701L RR700L L L L L L L L L L R 1 R408 R462 R532 R590 R mm 200g R mm Z mm R 2 R sec sec sec kg RR701L L L L L L L R 1 R373 R427 R512 R mm 200g R mm Z mm R sec sec R 2 sec kg
9 R R Z R LONG ARM sec/550mm 2.4sec/180 SHORT ARM sec/450mm 2.0sec/ sec/20mm 14 15
10 RR352L RR452L RR352L L L L L S R R Z R kg mm mmsecsec sec 1 R568 R518 R650 R600 R700 R mm g RR452L L L L S S R R Z R kg mm mmsecsec sec 1 R568 R518 R650 R600 R mm 200g
11 19 mm sec RA210-C12 300mm Si kg R 2 RA210-C12 18 mm sec RA310-C12 RA RA mm Si 300,200mm Si 125,150,200mm Si mm kg R RA310-C12
12 21 FORS-300 sec RV201-F05 SEMI FOUP 15 sec kg R R 20 mm sec RA ,150, 200mm Si kg R RA RA
13 23 RE RE mm 0.02 mm mm 2 7 sec kg 1 RE RE RE mm 0.01 mm mm 6 6 sec kg 1 RE
14 25 24
15 WAFER SORTER POWER PRESENCE PLACEMENT LOAD MANUAL MODE UNLOAD ERROR CLAMP/UNCLAMP DOCK/UNDOCK COVER LOCK COVER CLOSE PLACEMENT LOAD UNLOAD AUTO MANUAL PRESENCE PLACEMENT PRESENCE LOAD CLAMP/UNCLAMP PLACEMENT UNLOAD ERROR DOCK/UNDOCK AUTO PRESENCE MANUAL PLACEMENT PRESENCE PLACEMENT LOAD UNLOAD ERROR CLAMP/UNCLAMP DOCK/UNDOCK LOAD UNLOAD OPERATOR ACCESS PUSH STOP Mainte. RUN WAFER SORTER MAINTENANCE DC24V 232C IN AIR 232C OUT EMO EMO PORT 1 PORT 2 PORT 1 PORT
16 28 29
17 RE mm 200mm SMIF-Pod 0.01 mm sec 1 kg
18 液晶ガラス基板搬送機 カセットステーション クラス RRG-80 外形寸法 搭載ロボット 3465 φ18 00 EMERGENCY OFF MODE SWITCH AUTO TEACHING EQ-20 EQ-20 EQ-20 EQ EMERGENCY OFF EMERGENCY OFF 特 長 第五世代大型基板に対応したローダ アンローダ装置です 1. ロボット RR420 を搭載し 小さな旋回半径でロングリーチを実現しました 2. 高剛性 CFRP エンドエフェクタに カセットとの干渉を避けて基板のたわみを抑える特殊形状 特許出願中 を採用し FLOOR TO TOP 2200 RR420 PASS LINE 1100 RRG-80 FLOOR TO SIGNAL TOWER t0.5 基板の搬送にも対応可能です また 基板ずれを検知するためのセンサも装備しています 3. 精密ラック ピニオン方式の走行軸の採用により 10m 以上の高速長距離搬送が可能です 4. 各ステージ毎に分割可能な構造とし AGV MGV へ対応 RGV やストッカへの対応も容易です EMERGENCY OFF EMERGENCY OFF 5. カセット位置決め機構に カセット底面からの発塵を抑えるため フローティング機構を採用しました 6. アルミプロファイルを多用することにより FFU イオナイザなど豊富なオプションに容易に対応でき 狭い場所への設置や 設置後の分解 再組立が可能な構造です 7. 装置の側面もしくは内側からの保守を可能にし AGV の移動範囲や ストッカ内からの保守作業の必要をなくし 保守作業 5120 での安全性が向上しました 1100X1250mm より小さい基板に対しては RRG にて対応します 詳しくはもよりの FA センターまでお問合せください 550 X 650mm 680X 880mm 730X 920mm 等 EMERGENCY OFF EMERGENCY OFF 改良型エフェクタでt0.5mmガラス基板搬送を実現 GLASS PICK UP ガラスたわみ Glass Pitch ガラス支持点 608 液晶ガラス基板搬送機 GLASS ガラス支持点 472 特殊形状によってたわみが軽減され 搬送が可能となりました 32 33
19 c 303FN-3720 z 303FN FN-4640 x 303FN-1677 v 3A-FN FN-1196 A B FN z 313FN-4640 C A B C FN-1196 FN- - x 303FN-1677 A B A-FN C c v 303FN A-FN21054 A B A B RA RA FN
20 RORZE ROBOTECH INC. RORZE SYSTEMS CORPORATION RORZE TECHNOLOGY CONSULTANTS (SIP) CO.,LTD. RORZE TECHNOLOGY, INC. RORZE AUTOMATION, INC. RORZE TECHNOLOGY SINGAPORE PTE. LTD. RORZE TECHNOLOGY, INC. 1F., No.12, Industry East Road.,, Science-based Industrial Park, Hsinchu, Taiwan, R.O.C. Telephone Facsimile RORZE AUTOMATION, INC McCandless Drive, Milpitas, CA 95035, U.S.A. Telephone Facsimile RORZE SYSTEMS CORPORATION 919 Korim-Dong, Yongin-City, Kyunggi-Do, , Korea Telephone Facsimile RORZE ROBOTECH INC. Nomura-Haiphong Industrial Zone Km13 Road No.5 Anduong District, Haiphong City, Vietnam Telephone Facsimile RORZE TECHNOLOGY SINGAPORE PTE. LTD. 627A, Aljunied Road, #10-11, Biztech Centre Singapore Telephone Facsimile RORZE TECHNOLOGY CONSULTANTS (SIP) CO.,LTD. Room C1711, No.360, Hengtong Road, Shanghai , China SHI
2004 3 1963 1 2 4 2004 MISUMI It s about TIME QCT 8 12 CSR 14 16 17 6 18 19 24 39 40
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HOLUX Wireless GPS Logger M-241User s Manual Holux Wireless GPS Logger M-241 Mar 2008 Rev.11-19 日 本 語 ユーザーガイド へミスフィア 211-0015 神 奈 川 県 川 崎 市 中 原 区 北 谷 町 16-3 ソニア 北 谷 町 ビル2 階 Tel. 044-223-7071 Fax. 044-223-7072