03_委託テーマ発表資料（その２）（p.89-p.134).pdf
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1 89 MEMS 2 /
2 90 3 Beyond-CMOS CNT CNT CNT NEC 4 NEDO (80 NEDO Nature Nanotechnology NEDO (8 22 CNT CNT NEDOPJ CNT NEDO M
3 3 5 Nature Nanotechnology 3, (2008) 6 9
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5 9 (!!! '!!! &!!! )*+!"# $%& )*+!"#,-./02!"# %!!! $!!! #!!! "!!!! 6000 CNT-AFM-Tip 0 Nanotubes as nanoprobes in scanning probe microscopy Hongjie Dai, Jason H. Hafner, Andrew G. Rinzler, Daniel T. Colbert, Richard E. Smalley Nature 384, (4 Nov 996) 998 Nature 93
6 Nanotube Nanotweezers 2000 Science Rotational Actuators Based on CNT 2 Nature 424, 408(2003) 94
7 CNT Science 998 Nature 4 Nature 384, Science 998 Nature AFM Nature 424, 408(2003) Nature 43, 284(2004) 2000 Science 95
8 CNT 5 6 CNT 96
9 7 8 CNT 97
10 µm 98
11 ITRS) (Emerging Research Devices) 2 P0 P5 P3 P32 22 CNT CNT.0x0 9 SWNTs Height : 00 µm Width : 200 µm ~200 SWNTs Height : 70 nm Width : 40 nm 99
12 CNT-Suspended Wafer 23 CNT 24 CNT Sheet CNT Si 00
13 25 CNT CNT Si Si CNT CNT 26 3CNT CNT 3CNT 0
14 27 3CNT 3CNT 3CNT 28 02
15 29 CNT 30 CNT SWNT 03
16 3 CNT Lee, S. W et al. A Three-Terminal Carbon Nanorelay. Nano Lett. 4, 2023 (2004) ON/OFF CNT F 2 3 y ( x) = (3Lx! x ) 6EI 04
17 Velocity of Sound 33 E " = Velocity of Sound! Doubly clamped beam t E f =.03 2 L! Single clamped beam t E f = L! " = E!!"#$%& )*+,-.///0 '((( ' /:;(( 34 05
18 35 40 x 30 µm
19 37 MEMS CNT Si CNT MEMS 07
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22 3 CO 2 YAG CO 2 Si YAG µm Siµm 4 (b) (a) NA (b) CO 2 0
23 5 X300mm Y300mm Z2mm X700mm/sec Y700mm/sec Z00mm/sec FCPA CCD Nd:YVO 4 λ / 2 FCPA 4 Nd:YVO 4 CO 2 (6) 6 Si
24 Si 7 8 (a) (b) SEM 3mm 20 mm NA 2
25 MEMS 9 MEMS MEMS MEMS # #2 #3 # : 0 µ 3
26 µ µ µ µ MEMS 2 ITO 4
27 MEMS 3 #2 : 4 Si NA NA Si Si? 5
28 Si 5 (MPa) 5µJ 5µm 5µJ 5µm µm (ns) 6 Glass/ Si mm Si : 200ns 3-layer300mm/sec : 0ns 2-layer700mm/sec Si 6
29 #3 7 Si µm NA Si Si CO 2 laser Si50ns 8 Glass/ Si µm Nd:YVO 4 : 48ns 3mJ00mm/sec defocus range 070mm with 5mm pitch Si 2MPa Si 7
30 Si00ns 9 Glass/ Si µm Nd:YVO 4 : 95ns 3mJ00mm/sec defocus range 070mm with 5mm pitch Si Si 3MPa Si + 20 Glass/ Si µm Nd:YVO 4 : 48ns 3mJ00mm/sec defocus range 070mm with 5mm pitch Si CO 2 : 38W90mm/secspot size mmφ Single scannning.6mpa 8
31 MEMS 2 Glass/Si : 200ns 5mJ00mm/secNA0.8 defocus range 070mm with 5mm pitch Si 22 9
32 23 Menu# Menu#2 Menu#3 scanning µm Laser High NA Objective Lens scanning One Laser High NA Objective Lens The Other Laser scanning High NA Objective Lens µm+co 2 Laser scanning High NA Objective Lens Glass Si Internal transformation Si Internal transformation Glass Internal transformation Si Glass Internal transformation Glass (300µm) Si (300µm) Si glass Internal Transformation Glass/ Si µm glass Si Internal Transformation 4 MPa 4 MPa 5MPa MEMS 24 e.g. Nd:YVO 4 (.06µm, 5ns) + - e.g. SHG of Nd:YVO 4 (532µm, 0ns) SiYb (.06µm, 200ns) + - e.g. SiYb (.06µm, 200ns) +CO 2 (0.6µm, CW)
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