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2M5-24 SM311 SM332 3 4 e30mm 5 e30mm

[2M5-24] 0-5 -10-15 -20-150-125-100-75-50 -25 0 25 50 75 100 125 150 0-5 -10-15 -20-150-125-100-75-50 -25 0 25 50 75 100 125 150 0-5 -10-15 -20-150-125-100-75-50 -25 0 25 50 75 100 125 150 0-5 -10-15 -20-150-125-100-75-50 -25 0 25 50 75 100 125 150 0-5 -10-15 -20-150-125-100-75-50 -25 0 25 50 75 100 125 150 0-5 -10-15 -20-150-125-100-75-50 -25 0 25 50 75 100 125 150 µ 300 250 200 150 100 50 30min 90min e = R t e < R t R t < e 60min 120min 0 0 50 100 150 200 250 300 350 400 0-1 -2-3 -4-5 -6-7 -150-100 -50 0 50 100 150 v c mm 7 0.5m m (1) (2) (3) 1) 2002 (2002) 471 2) MICRODEVICE MEMS (2004) 106 3) 6 2004 (2004) 505 4 4 2003 (2003) 262

2M5-25 SM3-26 (DP)(DPG)DPG 1) DPG 2) DPG DP 3) DP DPG, DP DPG DP DP DP 2) DP DP th=80 2 2 DP SD#200 DP DP DP SS400 30 DP 2 DP DP DP Fig.1 Schematic drawing of DPG apparatus Fig.2 An example of image processing of DP surface for calculating grinding distance

[2M5-25] Table 1 Experimental conditions (a) Photograph of pellets surface (a) Photograph of pellet surface (b) Grinding profile and grinding distance on pellet surface (c) Correlation of grinding distance on pellet surface and grinding profile Fig.3 Grinding result by one pellet DP DP 3 DP DP 3 R DP DP DP 2 DP 1 2 DP 4 4 (b) Grinding profile and grinding distance on pellets surface (c) Correlation of grinding distance on pellets surface and grinding profile Fig.4 Grinding result by two pellets DP DP 3 (1) DP (2) DP (3) DP 1) 465200210 2) 401199259 3) 442200330

2M5-26 SM F (X nv ) X F c η(x ϕ ) F ( X nv ) = ϕ X + F c η( X ) µ µ

[2M5-26] 3. (a) (b)(c) 4 3 4 4) 4. FFT 5 (a)(b) (c) 4000Hz 8000Hz 5 1) 2) 3) 1) 1997 p122 123125 2) (1982) p39 3) 2005 (2005) p31 4) 667 (2000) 1115

2M5-27 MUSIC 1)2) MUSIC X 50mm 500mm Table 1 Experimental conditions Distance between sensors [mm] 100200300400 Distance [mm] 50010001500 Frequency of source [Hz] 10050010002000 Y X Z Loudspeaker 5001500mm 100400mm Microphone array Fig.1 Experimental apparatus 500mm 1000Hz X ε x Y ε y ( x y = ε + ε ) 100mm200mm 100mm Location of source Fig.2 Comparison of error of true sound source location and identified location (Distance: 500mm, Frequency of source: 1000Hz) Location of source Scanning area based on true location X-axis:±500mm, Y-axis:±200mm Scanning area based on true location X-axis:±500mm, Y-axis:±200mm Fig.3 Comparison of error of true sound source location and identified location (Distance between sensors: 400mm, Frequency of source: 1000Hz)

[2M5-27] 500mm 400mm 2500Hz 500mm 400mm 1000Hz 50mm 500mm 400mm Scanning area based on true location X-axis:±200mm (in 2000Hz) ±500mm (others) Location of source Fig.4 Comparison of error of true sound source location and identified location (Distance between sensors:400mm, Distance:500mm) Fig.5 Result of frequency analysis on ring tone of cellular phone Fig.6 Relationship between true sound source location and identified location when cellular phone as sound source was used (Distance between sensors:400mm, Distance:500mm) Scanning area based on true location X-axis:±200mm, Y-axis:±200mm Scanning area based on true location X-axis:±150mm, Y-axis:±150mm Fig.7 Relationship between true sound source location and identified location when cellular phone and loudspeaker as sound sources were used (Distance between sensors:400mm, Distance:500mm) 1) 2) 3) 4) 5) 2 1) 2 3 200429 2) 4 200515

2M5-28 (SM3-37) Test piece L L=123mm Fig.1 Experimental set-up configuration Fig.2 Test result of effect on test piece movement Area in photograph Digital camera

[2M5-28] Compressre load cell Fig.3 Bending fatigue tester 30mm Anvil O Area in measurement Area in photograph 1 30mm 26mm Fig.4 Set point of displacement sensor Table 1 Measurement result of movement at unit of µm -130-42 -60-132 -86-4 Fig.5 Comparison the results of the examination and ANSYS (a)ansys (b)test result when rigid movement was canceled by thrust bearing (c-1)test result without compensation when rigid movement was applied (c-2)test result with compensation when rigid movement was applied

2M5-29,. 50 11.3 11.3 15 27 2 5 27 2 5 5 2 2 6 7 6 1000

[2M5-29] 6 0.007 100 5 0.001,.,.,X 80mm,Y. µ µ 11.3 1 1995 26 28 2 15 3 15 4 1997 5 14

2M5-30 ANSYS (SM3-25) 1. 3 CAD 3 CAD CAE CAE CAE ANSYS 3 CAD 1995 3 CAD (1) CAE CAE CAE ANSYS Help ANSYS ANSYS () 2. 1 ANSYS CAE 1 CAE ( ) 2 ANSYS 3 () WP( ANSYS )( 1 ) (2) 4 4 5 5 6 8 1ANSYS 1.1 CAE 1.2 CAE 1.3 ANSYS 1.4 2ANSYS 2.1 ANSYS 2.2 GUI(Graphical User Interface) 3 4 5ANSYS 5.1 5.2 6 6.1 6.2 6.3 7 8 9 9.1 A CAD 6 78 1 6 8 ANSYS ( ) 9 9 6 9 3. 6 8 6 8 6 (Transient Dynamic Analysis) () (t t )

[2M5-30] 2 ANSYS 2 () 7 (Modal Analysis)( ) ANSYS 8 (Frequency Response Analysis) () (FFT) ANSYS FFT FFT 4. 9 9 ANSYS 1 CAE 3 ([blade]) ( 3 1.0 [mm]) (creep-feed) (3) 3 1/2 1/8 3 CAE 4 ANSYS 4 ANSYS 5. 1 1 1 2ANSYS 2 2 CAE 3 3 (1) CAD/CAE (2002) (2) JSME Computational Mechanics Handbook(1998) (3) (2004) 3 ANSYS

2M5-31 () 14 3 1137570 SM3-68 1

[2M5-31] () LED 2