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17 Fraunhofer Gesellchaft 1949 58 9
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MEMS 2004 10 100 MEMS MEMS SIGSpecial Interest Groups 13
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MEMS RF-MEMS MEMS MEMS MEMS 25
MEMS RF-MEMS MEMS MEMS MEMS MEMS RF-MEMS MEMS MEMS MEMS 26
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EU NEXUS NEXUS EuropeanCommission 1998 10 ( ) ( ) 120 5 81
THENEXUS ProductTechnologyRoadmapForMicroSystems 5 58 15 ( ) 2010 70 2050 90 ( ) ( ) / 82
(9.11 ) ID ( ) ( ) THENEXUS ProductTechnologyRoadmapForMicroSystems THENEXUS ProductTechnology Roadmap For MicroSystems ( ) 83
2008 1 180g 140g 42V 12 42 2008 2012 3 1 42 42 30 84
(Mass Air Flow) MEMS MEMS RF MEMS 30 MEMS ( ) 85
THENEXUS ProductTechnologyRoadmapforMicrosystems ( ) 86
87 THENEXUS ProductTechnologyRoadmapforMicrosystems N
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2002 263 2010 872 100
37 2025 35.4 101
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DVD 103
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MEMS MEMS MEMS 105
MEMS 106
MEMS MEMS MEMS MEMS ~ ~ BI MEMS MEMS MEMS 16 MEMS 107