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90 3 Beyond-CMOS CNT CNT CNT NEC 4 NEDO (80 NEDO 2008.05 Nature Nanotechnology NEDO (8 22 CNT CNT NEDOPJ CNT NEDO M
3 5 Nature Nanotechnology 3, 289-294 (2008) 6 9
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9 (!!! '!!! &!!! )*+!"# $%& )*+!"#,-./02!"# %!!! $!!! #!!! "!!!! 6000 CNT-AFM-Tip 0 Nanotubes as nanoprobes in scanning probe microscopy Hongjie Dai, Jason H. Hafner, Andrew G. Rinzler, Daniel T. Colbert, Richard E. Smalley Nature 384, 47-50 (4 Nov 996) 998 Nature 93
Nanotube Nanotweezers 2000 Science Rotational Actuators Based on CNT 2 Nature 424, 408(2003) 94
CNT- 3 2000 Science 998 Nature 4 Nature 384, 47-50 2000 Science 998 Nature AFM Nature 424, 408(2003) Nature 43, 284(2004) 2000 Science 95
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3 CNT Lee, S. W et al. A Three-Terminal Carbon Nanorelay. Nano Lett. 4, 2023 (2004) ON/OFF 0 7 32 CNT F 2 3 y ( x) = (3Lx! x ) 6EI 04
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23 Menu# Menu#2 Menu#3 scanning µm Laser High NA Objective Lens scanning One Laser High NA Objective Lens The Other Laser scanning High NA Objective Lens µm+co 2 Laser scanning High NA Objective Lens Glass Si Internal transformation Si Internal transformation Glass Internal transformation Si Glass Internal transformation Glass (300µm) Si (300µm) Si glass Internal Transformation Glass/ Si 300-300µm glass Si Internal Transformation 4 MPa 4 MPa 5MPa MEMS 24 e.g. Nd:YVO 4 (.06µm, 5ns) + - e.g. SHG of Nd:YVO 4 (532µm, 0ns) SiYb (.06µm, 200ns) + - e.g. SiYb (.06µm, 200ns) +CO 2 (0.6µm, CW) + - 20
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