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1 54

2 a... b.... c d e f h. Y... i j k. Y l

3 A A A A B B

4

5 - Mathematica 5

6 - Mico Electo Mechanical Systems MEMS Si c a b - 6

7 x - z x z, sin cos.. tan

8 8

9 - af - k - l , Y,, Y cos sin R. sin cos R cos sin. sin cos cos sin R sin cos. 9

10 - a. Y - - x z, cos sin a. a. x - z, cos sin sin cos a. a.4 sin, cos sin cos, a.5 a.6 a.7 a.8 ~

11 ~ R sin cos a.9 sin cos x z sin cos x z,, sin cos a. a. a. a. a.4 a.5 a.a.4sin a.a.5 cos sin, cos sin a.6 cos a.7 tan a.8 sincos tan a.8a.8,.5.7

12 a a. a.9a.be b. o o Y - - a- b. b. x z b. b.4, a-,

13 sin cos cos sin.6.5 b b.8.7 b b..9 b b b.5.9 cos m m. b cos. b cos. b cos.4 b cos.5 b

14 c. o Y x z, a, c. c. c. c.4 sin cos cos sin c.5 c.6 c.5c.6 m cos m c.7 4

15 5 cos.8 c cos.9 c cos. c cos. c c.5 sin sec. c d x, z.. d d Y o

16 , a, d. d.4, x sin cos d.5 d.6 sin cos d.7 d.8 d.7 cos d.8 sin m cos m d.9 cos d. cos d. cos d. cos d. csc sin d.4 6

17 e. o o Y -5 -, -5 e. e. e. e.4 cos sin sin cos e.5 e.6 e.7e.8 sin cos cos sin sin cos e.7 e.8 e.7e.8 a 7

18 m e.9 e. t m e. e., e. e., e. f. A A A A A B 4 B B B B A B -6 f J A,A,B,B,,, 4 Y A A, A, A B B, B, B Y 8

19 A AA B BB -6 A B A,A,B,B. A A A A A A JA { } A A A A f. { } f. A A A A JA { } JA JA JA f. A A JA f.4 A A A JA f.5 A A JA f.6 JA B JB JB { } JB JB JB f.7 4 B B JB f B B JB f.9 4 JA JB JB JA R JB 4 B B cos A A sin A A 4 f. 9

20 4 4 cos sin A A A A B B JB. f f.f. sin ] [ sin 4 s s s A A B. f 4 A A s. f 4 4 A A B s.4 f A A A A A A s cos ] [ cos 4 4 c c c A m.6 f 4 A A c.7 f 4 c.8 f A A A A A A c.9 f tan ] [ tan t t A A t A A A A t. f A A t. f 4 t. f af. c d

21 -. Y -7, -8-7 Y -8, b ~

22 ~ R y R sin cos sin cos cos.8, x y z sin Y Y Y Y cos Y sin cos sin x y z sin Y Y Y Y cos Y sin cos.9. sin Y Y sin.5.9. cos sin Y.6.. sin sin Y tan be

23 .. h. Y -, Y-,, -9, - -9 Y - - h. h. h. - x y z cos cos sin sin sin cos sin sin cos cos h.4 h.5 h.6 h.7 h.8 h.9

24 4... h h h h.7h., sin cos m m. h cos.4 h cos. h cos.6 h

25 5 cos.7 h h.8h.9, h.h., cos m.8 h cos.9 h cos. h cos. h cos. h. h.4 h i. -, Y- -, -

26 - Y - - i. i. i. - x y z i.4 i.5 i.6 i.5i.6i.8i.9 sin i.7 i.8 i.9 tan i. sec sin sin y i. 6

27 i., j. -, Y- -, -4 - Y -4 - j. j. j.,, - x y z sin cos sin cos cos j.4 j.5 j.6 7

28 j j j... j j j j.5j.6j.8j.9 sin tan. j j.4j.6j.7j.9 sin tan.4 j.5 j

29 k. Y -Y- Y -5,-6-5 Y -6 - k. k. k.,, - x y z sin cos sin cos cos cos sin k.4 k.5 k.6 k.7 k.8 k.9 9

30 ... k k k j.7j. j.7j. sin. k cos m.4 k cos.5 k cos.6 k cos.7 k cos.8 k.9 k. k

31 k.4 sec cos sin k. k. -4 l. -, Y--Y -7, -8, -9-7 Y -8-9, l. l.

32 .4. l l cos sin ~ R.5 l Y.6 l ~ ] sin cos cos, cos cos sin, sin [ ~ R Y l l l x y z,, sin cos cos cos cos sin sin Y... l l l x y z,, sin cos cos cos cos sin sin Y.5.4. l l l l.l. sin.6 l l.l.5

33 sec cos l. 7 l.l.l.5l.7 cos sin cos sin l.8 sin cos sin cos l.9. R sin cos l. cos l. l. cos l. -5 c d h, k f i x

34 4 4- Mathematica. ~ ~ [s].[s] t t t. [s]al ~ 4-4- [s]. [s] t. [m/s^] 9.8 A [m].6 B [m]. [adian] [adian/s] [adian/s^] sin t cos t sin t [m/s^]. [m/s^]. sin t sin t cos t cos t sin t 4

35 sin t... sin t sin t sin t cos t cos t cos t sin t sin t sin t 4- a. ~ 4-4- ~ ~ 5

36 b. ~ 4-4 A c. ~ A ~ 4-6 C, 6

37 d. ~ 4-7 A ~ 4-8 C, e. e f. ~ 4-9 7

38 . ~ ~ ~ 4- ~ h.,y, ~ 4-4,Y, A 8

39 ~ 4-5,Y, A i. ~ 4-6 j. ~ 4-7 9

40 ~ 4-8 ~ 4-9 k.y ~ 4- Y ~ 4- Y A 4

41 ~ 4- Y l. 4- ~ ~ ~ 4-6 ~ 4-4 bdh d x 4-7 4

42 4-7 d bcd 4- h k 4-5 bd 4- C A B 4-4 bdh 4

43 5- a.8a.9 [S ] [] 5-5- [%] ~ [%] n t e a cos t 5. t t - e n A B cos t e n A B Sin t 5. - e - n t -n - n t A Bcos t e t A B sin t e A B cos t =[s] aa 96 a lo a T 4

44 ,, au 5-5- :m 5- e. 5 [m] [m] e. 5 [m] [m] 44

45 , [] [%] e. 5 [m] [m] e. 5 [m] [m] 45

46 5-5 [m] 5-6 % au aa [m] 5-.[m] 5-46

47 [%] 5- [%] [adian/s].4 [deee] e.[adian/s] 5- [%] e 5-5- [adian/s] 5- [adian/s] 5- [adian/s] 5-4 [adian/s][%] 5- [adian/s] 5- [%] 5- [adian/s] 47

48 5- [%] [%] [adian/s] [%][adian/s] 5- [adian/s] 5- [adian/s]

49 6 6-, 6-6-, [ m] [m] PitchAnle Rate Acceleation Senso PC Calculation Attitude Senso Anle Anula Velocity Pitch Anle Rate 6-49

50 6- MMA76Q Micostain M-G A- A- Keyence NR- [Hz] pitch [s]. 5 [m] [m]e.4 [m],. [m]i 5

51 e. 5 [m] [m] 6-4 e. 5 [m] [m] 6-5 i. 4 [m]. [m] 5

52 6-6 i. 4 [m]. [m] Pitch [deee] [deee] 6-7 % Pitch

53 [adian/s] [adian/s] e 6-8 6% [adian/s]..[adian/s] 6-9 [%] 5 [adian/s] [%] 6-9 5

54 7,,, 54

55 55

56 56

57 HP //5 esin Wave Maazine 4 MayMEMS MicoStone HP 9// 4IT //8 5 MicoStain HP 6 feescale HP 7 Kistin Gӧtz-Neumann 5P.7,76 57

58 A- M-G 58

59 A- MMA76Q 59

60 Micostain M-G Pitch Anle RatePitch 9 8 Pitch 7 9 A- Pitch -9 Pitch 9 A- Pitch Pitch A- Pitch A- 6

61 - Pitch -9 Pitch 8-9 Pitch -9 Anle Pitch -9 Pitch 7 9Pitch 6

62 sin / [adian] cos [adian] cos cos cos sincostan e pitch cos A- sin -9 A- cos cos A- tan sin,cos tan A- sin Pitch A- cos Pitch A- tan Pitch 6

63 4 A4-5 5 A4- A4- A4- Kistin Gӧtz-Neumann P.76 A4- m/ 6m/ 84m/ m/ m/ m/ 6m/ Kistin Gӧtz-Neumann P.7 A4-, [S ] 6

64 [] A4.A4.6, A4- ai A sin t A A4. A cos t A A4. t t A t A sin A4. A 9 T A4.4 A4.5 A4.6 A4- T A4- A4- % [S ] [%] A4- %[S ] [%] 64

65 A4-4 [ S ] i. 5 [m] [m] [] A4-5 %[] [%] A4-6 %[] [%] A4-7 [ ] i. 5 [m] [m] A4- A4-5 di A4- A4-6 65

66 A B4- A4- d i A4- T 66

67 B4- A4-8 d. 4 [m] [m] A4-9 i. 5 [m] [m] A4-8 d. 4 [m] [m] A4-9 i. 5 [m] [m] A4-8 A4-9 67

31 33

31 33 17 3 31 33 36 38 42 45 47 50 52 54 57 60 74 80 82 88 89 92 98 101 104 106 94 1 252 37 1 2 2 1 252 38 1 15 3 16 6 24 17 2 10 252 29 15 21 20 15 4 15 467,555 14 11 25 15 1 6 15 5 ( ) 41 2 634 640 1 5 252

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