Keysight Technologies Keysight Technologies B

Transcription

1 Keysight Technologies B1500A

2 Keysight Technologies Keysight Technologies B Printed in Malaysia Published by: Keysight Technologies, Inc Fountaingrove Parkway Santa Rosa, CA USA Keysight Keysight Keysight Keysight FAR DFARS DFARS (Declaration of Conformity) Search Keysight Technologies

3 COMPLIANCE WITH GERMAN NOISE REQUIREMENTS This is to declare that this product is in conformance with the German Regulation on Noise Declaration for Machines (Lärmangabe nach der Maschinenlärminformation-Verordnung -3.GSGV Deutschland). Herstellerbescheinigung GERÄUSCHEMISSION Lpa < 70 db am Arbeitsplatz normaler Betrieb nach DIN T. 19 Manufacturer s Declaration ACOUSTIC NOISE EMISSION Lpa < 70dB operator position normal operation per ISO 7779 NOTE This ISM device complies with Canadian ICES-001. Cet appareil ISM est conforme à la norme NMB-001 du Canada. South Korean Class A EMC declaration This equipment is Class A suitable for professional use and is for use in electromagnetic environments outside of the home.

4 Keysight Technologies CD-ROM NOTE INDOOR USE IEC INSTALLATION CATEGORIY II INSTALLATION CATEGORIY I POLLUTION DEGREE 2 CAT I IEC I WARNING Interlock Force Guard Sense Interlock ±42 V

5 Interlock Safety Class I AC International Electrotechnical Commission (IEC)

6 AC WARNING CAUTION

7 CAT I IEC I CE CE CSA C-Tick Radio Communication Act 1992 EMC ICES/NMB-001 ISM ICES-001 Cet appareil ISM est conforme à la norme NMB-001 du Canada. Industrial Scientific and Medical Group 1 Class A CISPER 11 EMC RoHS 6 MCV HM RoHS MCV EFUP Environmental Friendly Use Period 40 CFB PET

8 Circuit Common IEC Keysight

9 SMU DC SMU Force Guard Sense Circuit Common Force Guard Sense Force Sense 1 Force Sense Guard Guard Circuit Common SMU Guard Force Circuit Common Sense Guard

10 Keysight B1500A High/Force/Guard/Sense HPSMU ±200 Vdc MPSMU/HRSMU ±100 Vdc 3 Interlock High/Force/Guard/Sense Stop Measurement High Voltage Interlock SMU

11 High Voltage Shock Hazard Keysight B1500A can force dangerous voltages (±200 V for HPSMU and ±100 V for MPSMU/HRSMU) at the High, Force, Sense, and Guard terminals. To prevent electric shock hazard, the following safety precautions must be observed during the use of Keysight B1500A. Use a three-conductor AC power cable to appliance coupler (inlet) and the instrument to an electric ground (safety ground). Prepare shielding box which covers interface to a device under test and equipped with interlock circuit that opens when the door is opened. Before performing measurement, connect the interlock circuit to the Interlock terminal of this instrument. Confirm periodically that the interlock function works normally. Before touching the connections of the High/Force/Sense/Guard terminal, turn the instrument off and discharge any capacitors of the measurement path. If you do not turn the instrument off, complete all of the following items, regardless of any instrument s settings. Terminate measurement by pressing the Stop key, confirm that the Measurement status indicator is not lit. Confirm that the High Voltage indicator is not lit. Open the shielding box access door (open the Interlock terminal). Discharge any capacitors if the capacitance is connected to an SMU. Warn workers in the vicinity of the instrument about hazardous conditions.

12 Gefahr durch Hochspannung Von den Geräten Keysight B1500A können Spannungen an den Anschlüssen High, Force, Sense und Guard von bis zu 200 V ausgehen. Um elektrischem Schlag vorzubeugen, ist bei der Benützung der Geräte Keysight B1500A folgendes zu beachten. Verwenden Sie ein dreiphasiges AC-Stromkabel für die Gerätsteckvorrichtung (Eingang) und schließen Sie das Instrument an eine Erdung an (Sicherheitserdung). Bereiten Sie das Abschirmungsgehäuse vor, dass die Oberfläche eines zu testenden Geräts abdeckt und mit einem Verriegelungsstromkreis ausgestattet ist, der bei geöffneter Tür unterbrochen wird. Vor der Messung verbinden Sie den Verriegelungsstromkreis mit dem Interlock-Anschluss dieses Instruments. Prüfen Sie in regelmäßigen Abständen, dass die Verriegelungsfunktion ordnungsgemäß funktioniert. Bevor Sie die Verbindungen zu den Anschlüssen High, Force, Sense und Guard berühren, schalten Sie das Instrument aus und entladen alle Kondensatoren des Messwegs. Wenn Sie das Instrument nicht ausschalten, führen Sie, unabhängig von den Instrumenteinstellungen, alle folgenden Schritte durch. Beenden Sie die Messung, indem Sie auf die Taste Stop drücken. Stellen Sie sicher, dass die Statusanzeige Measurement nicht leuchtet. Stellen Sie sicher, dass die Anzeige High Voltage nicht leuchtet. Öffnen Sie die Tür des Abschirmungsgehäuses (öffnen des Interlock-Anschlusses). Entladen Sie alle Kondensatoren, wenn die Kapazität mit einer SMU verbunden ist. Warnen Sie Mitarbeiter in der Umgebung des Instruments vor den Gefahren.

13 Danger de choc dû à une haute tension Une tension dangereuse (max. ± pour HPSMU; 200 Vdc, max. ± pour MPSMU/ HRSMU; 100 Vdc) émanant du dispositif Keysight B1500A peut être sortie aux bornes High, Force, Sense et Guard. Les précautions suivantes doivent être obserées contre commotion électrique accidentelle. Utilisez un câble d alimentation CA à trois conducteurs vers le coupleur secteur (entrée) et branchez l instrument sur une mise électrique à la terre (prise de terre de sécurité). Préparez le boîtier de protection qui couvre l interface avec le dispositif à tester et équipez-le d un circuit de sécurité qui s ouvre lors de l ouverture d une porte. Avant de procéder aux mesures, connectez le circuit de sécurité à la borne Interlock de l instrument. Vérifiez régulièrement le bon fonctionnement de la fonction de sécurité. Avant de toucher les connexions des bornes High, Force, Sense et Guard, mettez l instrument hors tension et déchargez tout condensateur du chemin de mesure. Si vous ne mettez pas l instrument hors tension, effectuez «toutes» les opérations ci-dessous, quels que soient les paramètres de l instrument. Terminez les mesures en appuyant sur la touche Stop ; vérifiez que l indicateur d état Measurement est éteint. Vérifiez que le témoin High Voltage est éteint. Ouvrez la trappe d accès au boîtier de protection (ouvrez la borne Interlock). Déchargez les éventuels condensateurs si la capacité est connectée à une unité SMU. Informez les personnes travaillant à proximité de l instrument des conditions.

14 WEEE 2002/96/EC WEEE 2002/96/EC : WEEE 1 LCD LCD LCD

15 Keysight B1500A Microsoft Windows Keysight B1500A Windows Keysight EasyEXPERT Keysight B1500A Keysight EasyEXPERT Windows Keysight EasyEXPERT Windows Keysight Technologies Windows Keysight Technologies B1500A B1500A

16 Keysight (RSI) RSI ISO 9241 European Community Display Screen Equipment Keysight RSI RSI RSI RSI

17 腱

18 Keysight Technologies B1500A Keysight B1500A Keysight B1500A Keysight B1500A Keysight B1500A Keysight B1500A NOTE NOTE

19 1. B1500A B1500A B1500A EasyEXPERT Test Result Editor Keysight EasyEXPERT GNDU SMU HPSMU - SMU MPSMU - SMU MCSMU - SMU HRSMU - SMU MFCMU - CMU Keysight B1500A 15

20 HVSPGU WGFMU Windows GPIB B (B1500A-A5F) ASU SCUU/GSWU GNDU MCSMU GNDU DUT SMU DUT MCSMU DUT MFCMU DUT Keysight B1500A 15

21 SPGU WGFMU EasyEXPERT Keysight B1500A 15

22 Keysight B1500A 15

23 1

24 Keysight B1500A Keysight B1500A USB USB Keysight B1500A Keysight EasyEXPERT B1500A EasyEXPERT NOTE (p. 3-7) Keysight B1500 User 1-2 Keysight B1500A 15

25 B1500A B1500A NOTE NOTE NOTE B1500A Start EasyEXPERT All Programs > Start EasyEXPERT Start EasyEXPERT EasyEXPERT B1500A EasyEXPERT Start EasyEXPERT EasyEXPERT File > Exit Start EasyEXPERT Option > Auto Start of EasyEXPERT NOTE EasyEXPERT Windows Keysight Connection Expert Instrument I/O on this PC USB0 USB0 USB0 + B1500A(USB0::2391::1::0001::0::INSTR) + agb1500a + UsbDevice1 agb1500a UsbDevice1 B1500A(USB0::...::INSTR) Add VISA Alias Connectivity Guide Connection Expert Help Keysight B1500A

26 B1500A B1500A 1. Keysight B1500A AC 2. USB USB B1500A 3. Standby Windows Windows Windows Start EasyEXPERT EasyEXPERT B1500A Standby Windows Keysight B1500A 1-4 Keysight B1500A 15

27 B1500A NOTE Keysight B1500A Stop 7 Touch Panel Off Standby B1500A B1500A LCD Off LCD LED LED +, -, Set, Cancel Set Set Cancel Keysight B1500A Keysight EasyEXPERT Keysight EasyEXPERT USB USB USB Windows B1500A B1500A B1500A 30 Keysight B1500A

28 EasyEXPERT EasyEXPERT 1. Start EasyEXPERT EasyEXPERT NOTE B1500A 2. 1 (p. 1-10) (p. 1-12) (p. 1-14) 3. 1 Figure (p. 1-7) 4. 2 Figure 1-3 (p. 1-9) 1-6 Keysight B1500A 15

29 EasyEXPERT 1 Figure 1-1 Yes OK (p. 1-10) (p. 1-12) (p. 1-14) No, I want to start a new session. Next Figure 1-2 (p. 1-8) No, I want to manage Workspaces. Next Figure 1-3 (p. 1-9) Figure NOTE Work on the same setups and data next time EasyEXPERT EasyEXPERT File > Close Workspace Keysight B1500A

30 EasyEXPERT Figure 1-2 Prev 1. Public Allow other users to access this workspace 2. Public Allow other users to access this workspace 3. OK (p. 1-10) (p. 1-12) (p. 1-14) Figure Keysight B1500A 15

31 EasyEXPERT Figure 1-3 test Private 1. Your Workspaces 2. test Continue (p. 1-10) (p. 1-12) (p. 1-14) Manage Workspaces Keysight EasyEXPERT Figure 1-3 NOTE Choose the same Workspace in the next time EasyEXPERT EasyEXPERT File > Close Workspace Keysight B1500A

32 1. EasyEXPERT Tracer Test Figure 1-4 I/V Trace 2. Table 1-1 Add 3. Table Table 1-2 USB Table 1-1 Stop I/V Trace Unit V Name I Name Mode a Function SMU1 V1 I1 V VAR1 SMU2 V2 I2 V CONST a. I IPULSE V VPULSE Table 1-2 I/V Trace Y I1 LIN X V1 LIN 1-10 Keysight B1500A 15

33 Table 1-3 I/V Trace VAR1 CONST Mode LIN-SGL Unit SMU2 Start 0 V Source 0 V Stop 1 V Compliance 5 ma Step 10 mv NOS 101 Interlacing 1 Compliance 5 ma Pwr Comp. OFF Meas. Time 2 us Dual Polarity ON Step Time 500 us Figure 1-4 I/V Trace Keysight B1500A

34 Figure 1-5 Figure 1-5 EasyEXPERT 1. EasyEXPERT Application Test 2. Category CMOS Library 3. Library Id-Vg Select Figure Test Parameters a. VgStart 0 V VgStep 0.2 V b. VsubsStep -1.0 V 1-12 Keysight B1500A 15

35 USB (p. 1-16) NOTE Figure 1-6 EasyEXPERT 200 Keysight B1500A

36 I/V Sweep 1. EasyEXPERT Classic Test 2. I/V Sweep Select Figure 1-7 I/V Sweep Channel Setup 3. Channel Setup Table Measurement Setup Table Display Setup Table 1-6 USB Figure 1-7 I/V Sweep Channel Setup 1-14 Keysight B1500A 15

37 (p. 1-16) Table 1-4 I/V Sweep Channel Setup Unit V Name I Name Mode a Function SMU1 V1 I1 V VAR1 SMU2 V2 I2 V CONST a. I IPULSE V VPULSE COM- MON Table 1-5 I/V Sweep Measurement Setup VAR1 Timing Constants Unit SMU1 Hold 0 s Unit SMU2 Name V1 Delay 0 s V Name V2 Direction Single I Name I2 Linear/Log LINEAR Mode V Start 0 V Source 0 V Stop 1 V Compliance 100 ma Step 10 mv No of Step 101 Compliance 100 ma Pwr Comp OFF Sweep CONTINUE AT ANY status Table 1-6 I/V Sweep Display Setup Name Sharing Scale Min Max X V1 (None) Linear 0 V 1 V Y1 I1 (None) Linear -1 pa 1 pa Keysight B1500A

38 1. Single Data Display Data Display (p. 1-14) Figure 1-8 Figure Auto Record ON Test Result Editor Test Result Editor (p. 1-17) Figure 1-8 Data Display 1-16 Keysight B1500A 15

39 Test Result Editor Test Result Editor GUI Save Delete Save Delete Save EasyEXPERT Delete Results > Filter > Show Deleted Data Flags Important! Valid # Questionable? Remarks Remarks OK Test Result Editor Keysight B1500A

40 Data Display View Marker Cursor Line X-Y Graph Plot Figure 1-9 Tangent Regression Interrupt Gradient Figure Keysight B1500A 15

41 2

42 Keysight B1500A NOTE NOTE Keysight B1500A Keysight EasyEXPERT EasyEXPERT (DUT) <program folder>\agilent\b1500\easyexpert\utilities\ sleep.exe <program folder>\agilent\b1500\easyexpert\415xc\conversion\ 4155/4156 <program folder>\agilent\b1500\easyexpert\ic-cap Support\MDM\ MDM IC-CAP <program folder> <system drive> EasyEXPERT Windows 7 64 bit <system drive>:\program Files (x86) Windows 7 32 bit Vista XP <system drive>:\program Files Keysight EasyEXPERT 2-2 Keysight B1500A 15

43 Keysight B1500A DC/AC DC DC AC 1 Keysight B1500A Windows LCD GPIB Keysight DC Keysight FLEX B1500A Keysight 4155/4156/ E5260/E5270 Keysight B1500A

44 Keysight B1500A (GNDU) 10 Keysight EasyEXPERT EasyEXPERT Windows GUI 15 LCD HDD DVD USB/LAN/GP-IB USB USB HRSMU 1 aa Keysight E5288A ASU HPSMU 2 MPSMU 1 aa Keysight E5288A ASU B1511B MPSMU ASU B1511A MPSMU MCSMU 1 MFCMU 1 Keysight N1301A-100 SCUU HVSPGU 1 B1500A 1 5 SPGU SPGU 2 Keysight 16440A (B1500A-A04) 16445A WGFMU RSU 1 B1500A 1 5 WGFMU WGFMU Keysight B1500A 15

45 WGFMU Keysight B1530A User s Guide Keysight 16440A SMU/PGU (B1500A-A04) DUT SPGU SMU Keysight 16445A 2 Keysight 16442B (B1500A-A5F) SMU Kelvin 3 Kelvin 6 SPGU MFCMU BNC 6 GNDU 1 Intlk 1 2 PTFE Keysight 16445A Keysight 16440A (B1500A-A04) B1500A 2 Keysight E5288A ASU aa 1 pa AUX HRSMU/MPSMU (B1511B) Keysight N1255A MCSMU 2 MCSMU MCSMU 2 Keysight N1301A-100 SCUU SMU CMU SCUU CMU 2 HRSMU/MPSMU DUT Keysight N1301A-200 GSWU SCUU CMU high CMU low DUT Keysight B1500A

46 Keysight EasyEXPERT Keysight EasyEXPERT Keysight B1500 Windows EasyEXPERT GUI LCD EasyEXPERT Keysight B2200A/B2201A Keysight E5250A/E5252A CSV/XML EMF/BMP/GIF/PNG Keysight EasyEXPERT (Application Test) (Classic Test) (Tracer Test) (Quick Test) Application Test CMOS CNT FET BJT TFT 200 DUT DUT (My Favorite Setup) 2-6 Keysight B1500A 15

47 Classic Test Keysight 4155C/4156C (My Favorite Setup) I/V Sweep Multi Channel I/V Sweep I/V List Sweep I/V-t Sampling C-V Sweep SPGU Control Switching Matrix Control Direct Control Direct Control B1500A GPIB Tracer Test Quick Test I-V 1 Tracer Test I-V GUI MCSMU I-V My Favorite Setup Keysight B1500A

48 Keysight B1500A Standby LED NOTE B1500A 2-8 Keysight B1500A 15

49 2. HDD HDD DVD LED 3. LCD LCD Off LCD LED LCD Set Set Cancel 4. USB USB 2 USB Windows LCD 15 TFT XGA Windows Keysight EasyEXPERT Touch Panel Off Microchip TSHARC Control Panel Microchip TSHARC Control Panel 6. Stop 7. High Voltage LED 8. Measurement LED Keysight B1500A

50 9. Keysight EasyEXPERT 10. Keysight EasyEXPERT DVD-R DR1 DVD-ROM 12. Touch Panel Off EasyEXPERT LED Keysight B1500A 15

51 Keysight B1500A WARNING WARNING High/Force/Sense/Guard (HPSMU ± 200 V MPSMU/HRSMU ± 100 V) 3 DUT 1 High/Force/Sense/ Guard Stop Measurement High Voltage Interlock Keysight B1500A

52 a 14 E D D D D D D C B A LED LED LED Standby OFF LED LED Standby ON 3. AC 2-12 Keysight B1500A 15

53 4. GPIB GPIB Keysight 82350B PCI Keysight 82357A/B USB/GPIB National Instrument GPIB-USB-HS GPIB USB/GPIB GPIB GPIB B1500A (p. 2-17) Circuit Common ( ) ( ) WARNING CAUTION Circuit Common Circuit Common 7. Zero Check CAUTION Zero Check 8. GNDU 0 V 9. LAN RJ USB Keysight B1500A

54 USB 2 USB Windows Ext Trig BNC 12. Digital I/O DSUB 25 Keysight 16445A 13. Interlock SMU ± 42 V 16442B (B1500A-A5F) (p. 3-31) EasyEXPERT Configuration Main Frame Interlock Open/Close WARNING Interlock Force Guard Sense 14. VGA LCD B1500A 14a A. GNDU/ADC AD 2-14 Keysight B1500A 15

55 B. SPGU SPGU Output 1 Output 2 SPGU Ref Out/Sync Out SPGU Ref In/Sync In Ref In/Sync In SPGU Ref Out/Sync Out Trig Out SPGU CAUTION Ref Out/In Sync Out/In Trig Out EasyEXPERT SPGU PG PG1 PG2 SPGU Output 1 Output 2 SPGU Output PGU SPGU C. WGFMU WGFMU Ch 1 Ch 2 WGFMU Sync Out WGFMU Sync In Sync In WGFMU Sync Out Trig Out WGFMU CAUTION Sync Out/In Trig Out WGFMU RSU Keysight B1530A User s Guide D. SMU SMU 2 Force Sense Keysight B1500A

56 HRSMU SMU MPSMU B1511B SMU D-sub To ASU ASU EasyEXPERT SMU SMU SMU1 SMU SMU SMU SMU CAUTION SMU ASU ASU ASU (p. 3-17) E. CMU MFCMU 4 4 Lcur Lpot Hpot Hcur DUT Hcur Hpot Lcur Lpot 4 CAUTION MFCMU ± 25 V 2-16 Keysight B1500A 15

57 Keysight B1500A GNDU - HPSMU - SMU MPSMU - SMU MCSMU - SMU HRSMU - SMU MFCMU - CMU HVSPGU - WGFMU - Keysight EasyEXPERT Keysight EasyEXPERT GPIB WGFMU Keysight B1530A User s Guide GNDU - Keysight B1500A (GNDU) GNDU 0V ±4.2 A HPSMU SMU GNDU Figure 2-1 Figure 2-1 GNDU 0 V GNDU Force Common Keysight B1500A

58 SMU SMU DC SMU Figure 2-2 SMU HPSMU MPSMU HRSMU MCSMU NOTE Figure 2-2 GPIB SMU CMM SMU Common + A - V + - SMU Force SMU SMU Keysight EasyEXPERT 2-18 Keysight B1500A 15

59 HPSMU - SMU SMU (HPSMU) 4 ±200 V ±1 A 20 W 2 V 1 na Table 2-1 Table 2-4 Figure 2-3 HPSMU Current (ma) Voltage (V) Keysight B1500A

60 Table 2-1 HPSMU 2 V 0 V 2 V 100 V ±1000 ma 20 V 0 V 20 V 1 mv ±1000 ma 40 V 0 V 40 V 2 mv ±500 ma 100 V 0 V 100 V 5 mv ±125 ma 200 V 0 V 200 V 10 mv ±50 ma Table 2-2 HPSMU 1 na 0 I 1.15 na 50 fa ±200 V 10 na 0 I 11.5 na 500 fa ±200 V 100 na 0 I 115 na 5 pa ±200 V 1 A 0 I 1.15 A 50 pa ±200 V 10 A 0 I 11.5 A 500 pa ±200 V 100 A 0 I 115 A 5 na ±200 V 1 ma 0 I 1.15 ma 50 na ±200 V 10 ma 0 I 11.5 ma 500 na ±200 V 100 ma 0 I 50 ma 5 A ±200 V 50 ma < I 115 ma 5 A ±100 V 1 A 0 I 50 ma 50 A ±200 V 50 ma < I 125 ma 50 A ±100 V 125 ma < I 500 ma 50 A ±40 V 500 ma < I 1 A 50 A ±20 V 2-20 Keysight B1500A 15

61 Table 2-3 HPSMU ADC ADC 2 V 0 V 2.2 V 100 V 2 V 20 V 0 V 22 V 1 mv 20 V 40 V 0 V 44 V 2 mv 40 V 100 V 0 V 110 V 5 mv 100 V 200 V 0 V 200 V 10 mv 200 V Table 2-4 HPSMU a ADC ADC 1 na 0 I 1.15 na 50 fa 10 fa 10 na 0 I 11.5 na 500 fa 10 fa 100 na 0 I 115 na 5 pa 100 fa 1 A 0 I 1.15 A 50 pa 1 pa 10 A 0 I 11.5 A 500 pa 10 pa 100 A 0 I 115 A 5 na 100 pa 1 ma 0 I 1.15 ma 50 na 1 na 10 ma 0 I 11.5 ma 500 na 10 na 100 ma 0 I 115 ma 5 A 100 na 1 A 0 I 1 A 50 A 1 A a. Keysight B1500A

62 MPSMU - SMU SMU (MPSMU) ±100 V ±100 ma 2 W 0.5 V 1 na E5288A ASU 1 pa Table 2-5 Table 2-8 Figure 2-4 MPSMU Current (ma) Voltage (V) NOTE E5288A (ASU) B1511B MPSMU ASU B1511A MPSMU 2-22 Keysight B1500A 15

63 Table 2-5 MPSMU 0.5 V 0 V 0.5 V 25 V ±100 ma 2 V 0 V 2 V 100 V ±100 ma 5 V 0 V 5 V 250 V ±100 ma 20 V 0 V 20 V 1 mv ±100 ma 40 V 0 V 20 V 2 mv ±100 ma 20 < V 40 V 2 mv ±50 ma 100 V 0 V 20 V 5 mv ±100 ma 20 < V 40 V 5 mv ±50 ma 40 < V 100 V 5 mv ±20 ma Table 2-6 MPSMU 1 pa a 0 I 1.15 pa 1 fa ±100 V 10 pa a 0 I 11.5 pa 5 fa ±100 V 100 pa a 0 I 115 pa 5 fa ±100 V 1 na 0 I 1.15 na 50 fa ±100 V 10 na 0 I 11.5 na 500 fa ±100 V 100 na 0 I 115 na 5 pa ±100 V 1 A 0 I 1.15 A 50 pa ±100 V 10 A 0 I 11.5 A 500 pa ±100 V 100 A 0 I 115 A 5 na ±100 V 1 ma 0 I 1.15 ma 50 na ±100 V 10 ma 0 I 11.5 ma 500 na ±100 V 100 ma 0 I 20 ma 5 A ±100 V 20 ma < I 50 ma 5 A ±40 V 50 ma < I 100 ma 5 A ±20 V a. B1511B MPSMU ASU Keysight B1500A

64 Table 2-7 MPSMU ADC ADC a 0.5 V 0 V 0.55 V 25 V 0.5 V 2 V 0 V 2.2 V 100 V 2 V 5 V 0 V 5.5 V 250 V 5 V 20 V 0 V 22 V 1 mv 20 V 40 V 0 V 44 V 2 mv 40 V 100 V 0 V 100 V 5 mv 100 V Table 2-8 MPSMU 1 pa b a ADC ADC 0 I 1.15 pa 100 aa 100 aa 10 pa b 0 I 11.5 pa 1 fa 400 aa 100 pa b 0 I 115 pa 5 fa 500 aa 1 na 0 I 1.15 na 50 fa 10 fa 10 na 0 I 11.5 na 500 fa 10 fa 100 na 0 I 115 na 5 pa 100 fa 1 A 0 I 1.15 A 50 pa 1 pa 10 A 0 I 11.5 A 500 pa 10 pa 100 A 0 I 115 A 5 na 100 pa 1 ma 0 I 1.15 ma 50 na 1 na 10 ma 0 I 11.5 ma 500 na 10 na 100 ma 0 I 100 ma 5 A 100 na a. b. B1511B MPSMU ASU 2-24 Keysight B1500A 15

65 NOTE NOTE ASU ASU SMU ASU SMU ASU ASU (p. 3-17) Keysight EasyEXPERT 1 pa ASU 1 pa 1 pa 1 pa 1 pa B1500A 1 pa B1500A Keysight B1500A

66 MCSMU - SMU SMU (MCSMU) 4 ± 1 A ± 0.1 A DC ± 30 V 30 W 3 W DC 0.2 V 10 A 10 s Table Figure 2-5 MCSMU Current (A) 1 Pulse mode only Voltage (V) Pulse mode only Keysight B1500A 15

67 Table 2-9 MCSMU 0.2 V 0 V 0.2 V 200 nv 100 ma ± 0.2 V 2 V 0 V 2 V 2 V 1A a ± 2 V 20 V 0 V 20 V 20 V ± 20 V 40 V 0 V 30 V 40 V ± 30 V a. Table 2-10 MCSMU 10 A 0 I 11.5 A 10 pa ± 30 V ± 10 A 100 A 0 I 115 A 100 pa ± 100 A 1 ma 0 I 1.15 ma 1 na ± 1 ma 10 ma 0 I 11.5 ma 10 na ± 10 ma 100 ma 0 I 100 ma 0 I 115 ma a 100 na ± 100 ma 1 A b 0 I 1 A 1 A ± 50 ma a. b. 100 ms 5% Keysight B1500A

68 HRSMU - SMU SMU (HRSMU) ±100 V ±100 ma 2 W 0.5 V 10 pa E5288A ASU 1 pa Table 2-5 Table 2-8 Figure 2-6 HRSMU Current (ma) Voltage (V) Keysight B1500A 15

69 Table 2-11 HRSMU 0.5 V 0 V 0.5 V 25 V ±100 ma 2 V 0 V 2 V 100 V ±100 ma 5 V 0 V 5 V 250 V ±100 ma 20 V 0 V 20 V 1 mv ±100 ma 40 V 0 V 20 V 2 mv ±100 ma 20 < V 40 V 2 mv ±50 ma 100 V 0 V 20 V 5 mv ±100 ma 20 < V 40 V 5 mv ±50 ma 40 < V 100 V 5 mv ±20 ma Table 2-12 HRSMU 1 pa a 0 I 1.15 pa 1 fa ±100 V 10 pa 0 I 11.5 pa 5 fa ±100 V 100 pa 0 I 115 pa 5 fa ±100 V 1 na 0 I 1.15 na 50 fa ±100 V 10 na 0 I 11.5 na 500 fa ±100 V 100 na 0 I 115 na 5 pa ±100 V 1 A 0 I 1.15 A 50 pa ±100 V 10 A 0 I 11.5 A 500 pa ±100 V 100 A 0 I 115 A 5 na ±100 V 1 ma 0 I 1.15 ma 50 na ±100 V 10 ma 0 I 11.5 ma 500 na ±100 V 100 ma 0 I 20 ma 5 A ±100 V 20 ma < I 50 ma 5 A ±40 V 50 ma < I 100 ma 5 A ±20 V a. ASU Keysight B1500A

70 Table 2-13 HRSMU ADC ADC a 0.5 V 0 V 0.55 V 25 V 0.5 V 2 V 0 V 2.2 V 100 V 2 V 5 V 0 V 5.5 V 250 V 5 V 20 V 0 V 22 V 1 mv 20 V 40 V 0 V 44 V 2 mv 40 V 100 V 0 V 100 V 5 mv 100 V Table 2-14 HRSMU a ADC ADC 1 pa b 0 I 1.15 pa 100 aa 100 aa 10 pa 0 I 11.5 pa 1 fa 1 fa / 400 aa b 100 pa 0 I 115 pa 5 fa 2 fa / 500 aa b 1 na 0 I 1.15 na 50 fa 10 fa 10 na 0 I 11.5 na 500 fa 10 fa 100 na 0 I 115 na 5 pa 100 fa 1 A 0 I 1.15 A 50 pa 1 pa 10 A 0 I 11.5 A 500 pa 10 pa 100 A 0 I 115 A 5 na 100 pa 1 ma 0 I 1.15 ma 50 na 1 na 10 ma 0 I 11.5 ma 500 na 10 na 100 ma 0 I 100 ma 5 A 100 na a. b. ASU 2-30 Keysight B1500A 15

71 NOTE NOTE ASU ASU SMU ASU SMU ASU ASU (p. 3-17) Keysight EasyEXPERT 1 pa ASU 1 pa 1 pa 1 pa 1 pa B1500A 1 pa B1500A Keysight B1500A

72 MFCMU - CMU MFCMU MFCMU Cp-G 1 Table 2-15 AC 1 khz 5 MHz 1 mhz 1 khz 10 mhz 10 khz 0.1 Hz 100 khz 1 Hz 1 MHz 5 MHz AC 10 mvrms 250 mvrms 1 mv DC 0 ± 25 V MFCMU DC 0 ± 100 V SMU SCUU SMU CMU Table 2-16? Figure 2-7 Z Z = 1 / (2 f C) f (Hz) C (F) 2-32 Keysight B1500A 15

73 Table R G S Z Z Y S Y S Cp F Cp F Cp F Cp F Cs F Cs F Cs F Lp H Lp H Lp H Lp H Ls H Ls H Ls H 2 X B S G S D Q Rp Rs D Q G S D Q Rp Rs D Q Keysight B1500A

74 Table 2-16 Z 1 khz f 200 khz 200 khz < f 2 MHz 2 MHz < f 5 MHz 0 Z < Z < Z < 1 k k Z < 3 k 1 k 1 k 1 k 3 k Z < 10 k 3 k 3 k 3 k 10 k Z < 30 k 10 k 10 k 30 k Z < 100 k 30 k 30 k 100 k Z < 300 k 100 k 300 k Z 300 k Figure 2-7 Impedance Z? 10 T 1 T 100 G 10 G 1 G 100 M 10 M 1 M 100 k 10 k 1 k m 10 m 1 m n 10 n 50 range 300 k range 1 khz 10 khz 100 khz 1 MHz 5 MHz Frequency f 3 k range 100 af 1 ff 10 ff 100 ff 1 pf 10 pf 100 pf 1 nf 10 nf 100 nf 1 F 10 F 100 F 1 mf 10 mf 100 mf 1 F 2-34 Keysight B1500A 15

75 HVSPGU - (HPSPGU) ± 40 V ± 20 V 50 1 mv SPGU PG ALWG PG ALWG PG 3 2 DC 20 ns 10 s 10 ns 10 ns -10 ns 2.5 ns 10 ns > 8 s 0-20 ns 2.5 ns 10 ns > 8 s 8 ns 400 ms 2 ns 8 ns > 8 s Figure 2-8 SPGU 50 Pulse switch Output 1 50 Pulse switch Output 2 PG 2-level or 3-level or ALWG PG 2-level or 3-level or ALWG Keysight B1500A

76 WGFMU - (WGFMU) (RSU) ns 1 A 10 A 100 A 1 ma 10 ma PG Fast IV DC PG ALWG (VFVM) -5 V 5 V -2.5 V 2.5 V ns Fast IV ALWG (VFIM VFVM) 0-10 V 0 10 V -5 V 5 V VFVM 130 ns 10 V 105 ns 5 V DC DC (VFIM VFVM) 0-10 V 0 10 V -5 V 5 V Figure 2-9 WGFMU ALWG PG mode 50 V Ch1 RSU output ALWG PG mode 50 V Ch2 RSU output Fast IV mode A V Fast IV mode A V 2-36 Keysight B1500A 15

77 3

78 Keysight B1500A Keysight B1500A GPIB GPIB (p. 3-10) B1500A/EasyEXPERT GPIB (p. 3-11) WARNING WARNING 2 CAUTION 3-2 Keysight B1500A 15

79 WARNING High/Force/Sense/Guard (HPSMU ± 200 V MPSMU/HRSMU ± 100 V) 3 DUT 1 High/Force/Sense/ Guard Stop Measurement High Voltage Interlock Keysight B1500A

80 50/60 Hz V (±10 %) AC 900 VA 5 C 40 C : 20 % 70 % RH 0 2,000 m -20 C 60 C : 10 % 90 % RH 0 4,600 m 3-4 Keysight B1500A 15

81 WARNING (p. 4-49) WARNING NOTE 3 AC AC AC AC 100 Vac 240 Vac Keysight B1500A

82 Option 900 Option 901 Option 902 Option 903 Plug: BS 1363/A, 250 V, 10 A PN: Plug: AS/NZS 3112, 250 V, 10 A PN: Plug: IEC , 250 V, 10 A PN: Plug: NEMA 5-15P, 125 V, 10 A PN: Option 904 Option 906 Option 912 Option 917 Plug: NEMA 6-15P, 250 V, 10 A PN: Plug: SEV 1011, 250 V, 10 A PN: Plug: SB D1, 250 V, 10 A PN: Plug: IS 1293 and IS 6538, 250 V, 10 A PN: Option 918 Option 919 Option 920 Option 921 Plug: JIS C 8303, 125 V, 12 A PN: Plug: Israel SI 32, 250 V, 10 A PN: Plug: IRAM 2073, 250 V, 10 A PN: Plug: CEI 23-16, 250 V, 10 A PN: Option 922 Option 923 Option 927 Option 930 Plug: GB 1002 figure 3, 250 V, 10 A PN: Plug: SANS 164-1, 250 V, 10 A PN: Plug: NEMA WD-6, 250 V, 10 A PN: Plug: NBR 14136, 250 V, 10 A PN: Option 931 Option 932 Plug: CNS , 125 V, 10 A PN: Plug: CS 0017, 250 V, 10 A PN: Keysight B1500A 15

83 1. (p. 3-7) 2. AC (p. 3-8) 3. (p. 3-4) (p. 1-1) Windows Windows (p. 3-9) GPIB GPIB (p. 3-10) B1500A/EasyEXPERT GPIB (p. 3-11) Keysight B1500A

84 Table Standby 2. Circuit Common 3. Keysight 16444A-001 USB 16444A-002 USB USB 4. AC 5. Standby Keysight EasyEXPERT 6. Windows a. (Japanese) (English) b A-001 USB US c. (End User License Agreement) d. LAN NOTE Windows Windows 3-8 Keysight B1500A 15

85 Table 3-1 Keysight B1500 User keysightonly Administrator Windows Windows All Programs > Control Auto Logon Control Auto Logon Enable Auto Logon Disable Auto Logon NOTE Keysight B1500 User Keysight B1500A

86 GPIB GPIB 17 GPIB 1. EasyEXPERT EasyEXPERT a. EasyEXPERT File Exit b. Start EasyEXPERT [x] 2. All Programs > Keysight IO Libraries Suite > Keysight Connection Expert Keysight Connection Expert 3. Instrument I/O on this PC GPIB0 Change Properties... Keysight PCI GPIB Interface - GPIB0 4. GPIB Address 5. Auto-discover instruments connected to this interface 6. Keysight PCI GPIB Interface - GPIB0 OK 7. Reboot Required Reboot Now NOTE GPIB Keysight 82350B PCI Keysight 82357A/B USB/GPIB National Instrument GPIB-USB-HS GPIB USB/GPIB GPIB GPIB 3-10 Keysight B1500A 15

87 Keysight B1500A/EasyEXPERT GPIB 1. EasyEXPERT EasyEXPERT a. EasyEXPERT File Exit b. Start EasyEXPERT [x] 2. All Programs > Keysight IO Libraries Suite > Keysight Connection Expert Keysight Connection Expert 3. Instrument I/O on this PC GPIB0 Change Properties... Keysight PCI GPIB Interface - GPIB0 4. GPIB Address System Controller 6. Auto-discover instruments connected to this interface Keysight Connection Expert GPIB GPIB 7. Keysight PCI GPIB Interface - GPIB0 OK 8. Reboot Required Reboot Now NOTE 4 5 GPIB Address 21 System Controller 8 Keysight B1500A

88 16442B (B1500A-A5F) ASU SCUU/GSWU GNDU MCSMU WARNING WARNING High/Force/Sense/Guard HPSMU ± 200 V MPSMU/HRSMU ± 100 V WARNING ± 42 V Interlock ± 42 V 16442A/B p Interlock CAUTION CAUTION GNDU 4.2 A GNDU Keysight 16493L GNDU 16494A 1 A GNDU Keysight 16494A Guard Circuit Common SMU 3-12 Keysight B1500A 15

89 16442B (B1500A-A5F) Keysight 16442B (B1500A-A5F) 16442B 16442B 16442B (B1500A-A5F) B B1500A 16442B (B1500A-A5F) Table 3-2 NOTE Force DC Sense Force Force Sense Force Sense Keysight B1500A

90 Table B (B1500A-A5F) 16442B B1500A Keysight 16493J 3 m / 1.5 m Intlk Interlock Keysight 16493L GNDU 3 m / 1.5 m GNDU GNDU Keysight 16493K 3 m / 1.5 m 16442B 3 Keysight 16494A 3 m / 1.5 m SMU1 SMU Force SMU2 Sense SMU3 SMU Force SMU4 Sense SMU5 SMU Force SMU6 Sense SMU1 SMU Force SMU2 SMU Force SMU3 SMU Force SMU4 SMU Force SMU5 SMU Force SMU6 SMU Force Keysight 16493P SPGU 3 m / 1.5 m PGU1 SPGU Output 1 PGU2 Output 2 Keysight N1300A CMU a 3 m / 1.5 m PGU1 CMU Hcur/Hpot PGU2 Lcur/Lpot a B (B1500A-A5F) Hcur Hpot Lcur Lpot 16442B BNC Keysight Hcur Hpot Lcur Lpot 16442B PGU1 PGU2 VSU1 VSU2 VMU1 VMU2 Hcur Hpot Lcur Lpot CMU 3-14 Keysight B1500A 15

91 Table Interlock 002 Keysight Installation Guide 16495H/J Triax/BNC Table 3-4 DUT (p. 3-29) NOTE Table 3-3 Force DC Sense Force Force Sense Force Sense 16495F 16495F-001 Triax (f-f) 12 GNDU (f-f) 1 Interlock (f) F-002 Triax (f) 12 GNDU (f) 1 Interlock (f) G 16495G-001 Triax (f-f) 24 GNDU (f-f) 1 Interlock (f) G-002 Triax (f) 24 GNDU (f) 1 Interlock (f) H 16495H-001 Triax (f-f) 6 Coax (f-f) 6 GNDU (f-f) 1 Interlock (f) H-002 Triax (f) 6 Coax (f) 6 GNDU (f) 1 Interlock (f) J 16495J-001 Triax (f-f) 8 Coax (f-f) 4 GNDU (f-f) 1 Interlock (f) J-002 Triax (f) 8 Coax (f) 4 GNDU (f) 1 Interlock (f) K 16495K-001 Keysight B1500A

92 Table 3-4 B1500A Keysight 16493J 3 m / 1.5 m Intlk Interlock Keysight 16493L GNDU 3 m / 1.5 m GNDU GNDU Keysight 16493K a 3 m / 1.5 m Force 16495F H SMU Sense 16495J Keysight 16494A 3 m / 1.5 m 16495H J 1 8 Keysight 16493P SPGU 3 m / 1.5 m 16495H J 9 12 Keysight N1300A CMU b 3 m / 1.5 m 16495H J 9 12 SMU Force SPGU Output 1 Output 2 Hcur/Hpot CMU Lcur/Lpot a. Keysight E5250A Keysight 4142B DC Keysight 16494B b. 4 Hcur Hpot Lcur Lpot BNC Keysight DUT Hcur Hpot Lcur Lpot DUT Hcur Hpot Lcur Lpot Figure 3-21 CMU 3-16 Keysight B1500A 15

93 ASU Keysight E5288A (ASU) B1500A ASU SMU (aa) ASU ASU NOTE Figure 3-1 ASU DUT ASU 132 mm 88.5 mm 50 mm ASU 16495K Shielding box CMU Return DUT interface CMU Return 16495K ASU ASU To B1500A/CMU Prober Keysight 16495K Keysight 16493M ASU Keysight N1300A CMU Keysight 16048D/E Keysight N1254A-108 BNC Keysight B1500A

94 16495K 16495K DUT Keysight Installation Guide 16495K ASU 1. ASU ASU Keysight N1254A M D-sub N1300A CMU 16048D/E BNC 16495K ASU 3. ASU D-sub D-sub ASU Force ASU CMU-cur/AUX In Figure 3-2 MFCMU N1300A CMU Keysight 4284A/E4980A LCR Keysight 16048D/E MFCMU/4284A/E4980A CMU-cur/AUX In BNC CMU-pot BNC K 5. DUT ASU ASU Sense B1500A 1. B1500A 2. ASU D-sub SMU D-sub 3. ASU SMU Force 3-18 Keysight B1500A 15

95 NOTE MFCMU/4284A/ E4980A AUX ASU SMU ASU SMU Keysight EasyEXPERT MFCMU 4284A/E4980A Figure 3-2 Figure 3-3 ASU ASU 2 #1 #2 2 ASU a. ASU Force b. c. 3. MFCMU N1300A CMU 4284A/E4980A 16048D/E 4. ASU #1 CMU-pot Hp 5. ASU #1 CMU-cur/AUX In Hc 5 6 ASU #1 6. ASU #1 Force SMU #1 Force 7. ASU #2 CMU-pot Lp 8. ASU #2 CMU-cur/AUX In Lc 8 9 ASU #2 9. ASU #2 Force SMU #2 Force 10. ASU ASU #1 CMU Return ASU #2 CMU Return Keysight B1500A

96 NOTE ASU ASU Figure 3-2 ASU ASU #1 To CMU To SMU Hc Hp Force D-sub CMU-cur/AUX In CMU-pot Force From SMU Force/CMU/AUX Sense CMU Return/AUX Common To DUT ASU #2 To CMU To SMU Lc Lp Force D-sub CMU-cur/AUX In CMU-pot Force From SMU CMU Return/AUX Common Force/CMU/AUX Sense To DUT Figure / 8 AUX CMU-cur/AUX In b / c SMU Force 6 / 9 SMU Force Shorting bar 3-20 Keysight B1500A 15

97 AUX MFCMU/4284A/E4980A ASU CMU-cur/AUX In BNC BNC SCUU/GSWU Keysight N1301A-100 SMU CMU (SCUU) DUT (CMU SMU) Keysight N1301A-200 (GSWU) CMU high/low SCUU SMU GSWU NOTE Figure 3-4 GSWU SCUU DUT SCUU 148 mm 75 mm 70 mm GSWU 33.2 mm 41.5 mm 32.8 mm GSWU 16495K Shielding box GSWU Wire from CMU Guard DUT interface To B1500A/ SCUU Prober Keysight 16495K Keysight N1301A-201/202 GSWU (GSWU ) Keysight N1301A-102 SCUU (SCUU ) Keysight B1500A

98 Keysight N1301A-110 (SCUU ) BNC DUT Keysight Installation Guide GSWU 16495K 16495K 1. GSWU DUT (DUT interface) (Guard) GSWU 2 2. B1500A Figure 3-5 SCUU/GSWU To CMU (slot N) Hc Hp Lc Lp SCUU Force1/CMUH Sense1 Guard To SMU (slot N-1) To SMU (slot N-2) Force1 Sense1 Force2 Sense2 Sense2 Force2/CMUL DUT Guard GSWU 3-22 Keysight B1500A 15

99 SCUU/GSWU 1 NOTE SCUU B1500A 1. B1500A N MFCMU N-1 N-2 2 SMU SCUU N 3 10 BNC 2. GSWU 3. GSWU (Keysight N1301A-201/202) 16495K SCUU-GSWU K 5. SCUU Force1/CMUH Force2/CMUL DUT Sense1 Sense2 Figure GSWU GSWU 2 7. CMUH DUT (Guard) 8. CMUL DUT (Guard) SCUU SCUU Keysight B1500A

100 SCUU/GSWU 2 NOTE SCUU 1. SCUU (Keysight N1301A-102) SCUU SCUU BNC SCUU 16495K 2. SCUU SCUU Keysight N1301A SCUU B1500A MFCMU N SMU 2 N-1 N-2 N 3 10 BNC 4. GSWU 5. GSWU (Keysight N1301A-201/202) SCUU-GSWU SCUU 16495K K 7. SCUU Force1/CMUH Force2/CMUL DUT Sense1 Sense2 Figure GSWU GSWU 2 9. CMUH DUT (Guard) 10. CMUL DUT (Guard) SCUU SCUU 3-24 Keysight B1500A 15

101 GNDU GNDU GNDU N1254A-100 GNDU-Kelvin B1500A 1. GNDU B1500A GNDU Circuit Common 2. B1500A 3. GNDU 廻 B1500A GNDU Force/Sense Force 16493L GNDU Sense 16494A Figure 3-6 GNDU-Kelvin Connector handle GNDU Banana jack Force Sense Figure 3-7 GNDU-Kelvin GNDU Sense Common Force Force Sense Keysight B1500A

102 MCSMU MCSMU N1255A Input MCSMU 2 GNDU SMU 1 6 Output High1 High2 Low 6 Input Output Figure 3-10 Figure 3-8 Figure 3-9 N1255A MCSMU 16494A MCSMU 1 1 N1255A GNDU N1254A-100 GNDU-Kelvin L GNDU A 1 Figure 3-8 N1255A B1500A N1255A Connection Box MCSMU MCSMU GNDU Force Sense Force Sense N1254A-100 Force Sense 16494A 16494A 16494A 16494A 16493L 16494A Force MCSMU1 Sense Force MCSMU2 Sense Force GNDU/SMU Sense Force High1 Sense Force High2 Sense Force Low Sense DUT NOTE Input Output GNDU MP/HP/HRSMU 100 ma 16494A 2 Input/Output IEC II III IV 3-26 Keysight B1500A 15

103 Figure 3-9 N1255A N1255A Connection Box High Force Low MCSMU1 High Sense Low High Force Low MCSMU2 High Sense Low Force GNDU/SMU Sense SW1 SW2 SW3 50 Ω 100 Ω SW4 SW5 Force Sense Force Sense Force Sense High1 High2 Low SW1 High1 Kelvin/Non-Kelvin SW2 High2 Kelvin/Non-Kelvin SW3 Low Kelvin/Non-Kelvin SW4 High2 Force 0 /100 SW5 High2-Low (Force) 50 /Open NOTE NOTE SW2 SW4 SW4 High2 Force 0 /100 High2 Sense SW2 Kelvin SW4 0 SW4 100 SW2 Non-Kelvin SW1/SW2/SW3 Sense N1255A Force-Sense Non-Kelvin Force-Sense Kelvin Non-Kelvin Sense Force Sense Output Sense Keysight B1500A

104 NOTE Figure 3-10 MCSMU MCSMU Output High DUT N1255A Input Output Input Panel MCSMU 1 ±40 V Max Force Sense Input MCSMU 2 ±40 V Max Force Sense GNDU/SMU ±200 V Max Force Sense Circuit Common High Force/ Sense Low Force/ Sense Circuit Common High Force/ Sense Low Force/ Sense Circuit Common Force/ Sense Guard Use N1254A-100 GNDU Adapter to connect GNDU. Circuit Common Circuit Common High Force High Sense Force Sense Low Force Low Sense Guard Guard Output Panel Low ±200 V Max Sense Force Output High 2 High 1 ±240 V Max ±240 V Max Sense Force Sense Force Force/ Sense Circuit Common Force/ Sense Circuit Common Force/ Sense Circuit Common Open the Sense terminal if the switch is set to Non-Kelvin. Circuit Common Circuit Common Low Sense Low Force High Sense High Force Circuit Common Circuit Common 3-28 Keysight B1500A 15

105 Keysight B1500A 1. Table Table 3-6 Keysight 16493K (p. 3-31) 4. GNDU DUT (p. 3-34) SMU DUT (p. 3-35) MFCMU DUT (p. 3-42) DUT WARNING Table 3-5 Keysight N1254A LED (V F 2.1 I F =10 ma) (24 AWG, 600 V, 150 C) Keysight B1500A

106 5.1 Keysight GNDU DUT SMU DUT MFCMU DUT BNC Table 3-6 (mm) (mm) M3 x 0.5 BNC (mm) (mm) Keysight B1500A 15

107 CAUTION Figure 3-11 Interlock Figure 3-11 Interlock switch LED Connector side Wiring side WARNING Interlock SMU Force Sense Guard Keysight B1500A

108 1. Figure 3-13 Figure LED Figure Interlock 1-2 ( 1-3 ) Figure Interlock 4-5 ( 4-6 ) LED Figure 3-11 Keysight B1500A Interlock ± 42 V ± 42 V ± 42 V LED Figure 3-12 LED ( ) Cathode (-) Anode (+) 5.6 Units: mm 3-32 Keysight B1500A 15

109 Figure 3-13 (N1254A-402) Switch off NC NO COM 14 Units: mm Figure 3-14 ( ) Switch off Switch on Units: mm Keysight B1500A

110 GNDU DUT GNDU DUT Table 3-7 Table 3-7 GNDU Keysight DUT Sense Force Sense Force DUT AWG 22 Keysight DUT Force Sense Force DUT GNDU Common Force Sense to DUT Common Force Sense to DUT Insulator Plate Triaxial connector Coaxial cable Insulator Plate Triaxial connector Wire CAUTION GNDU Keysight 16493L GNDU GNDU GNDU 1 A 3-34 Keysight B1500A 15

111 SMU DUT SMU DUT Table 3-8 WARNING Force Guard Sense HPSMU ± 200 V MPSMU/HRSMU ± 100 V CAUTION NOTE SMU Keysight (Conductive Layer) (Center Conductor) Insulator (clear) Figure 3-15 Figure 3-15 Cover here using sleeve Insulator (black) min 2 mm Center conductor (for Force/Sense signal) Outer conductor (for Guard signal) Insulator (clear) Conductive layer (black) approx. 10 to 15 mm WARNING Keysight B1500A

112 Table 3-8 SMU Keysight DUT ASU SCUU Figure 3-16 Figure 3-18 Sense Force DUT 1.5 m Keysight Force ASU SCUU Figure 3-17 Figure 3-19 Common Guard Force Common Guard Force to DUT Triaxial connector Common Guard Sense Coaxial cable to DUT Triaxial connector Common Guard Sense Coaxial cable Wire Insulator Plate Insulator Plate NOTE Force Guard 3-36 Keysight B1500A 15

113 Figure 3-16 ASU CMH or Force Guard Wire Coaxial cable ASU #1 Common to DUT 1 or DUT 1 high terminal Sense ASU #2 CMU Return Guard CMU Return CML or Force Sense Common to DUT 2 or DUT 1 low terminal Guard ASU 2 ASU 16495K ASU DUT SMU Table TP Sense High Low ASU#1 CMU Return ASU#2 CMU Return 4TP CMH CML CMU Return DUT1 high DUT1 low Keysight B1500A

114 Figure 3-17 ASU Guard Wire ASU #1 CMH or Force Sense Common Wire Coaxial cable to DUT 1 or DUT 1 high terminal CMU Return Guard CMU Return to DUT 2 or DUT 1 low terminal CML or Force ASU #2 Common Sense Guard ASU 2 ASU 16495K ASU DUT SMU Table 3-8 Sense 4 4TP Sense Force High Low ASU#1 CMU Return ASU#2 CMU Return 4TP CMH CML CMU Return DUT1 high DUT1 low 3-38 Keysight B1500A 15

115 Figure 3-18 SCUU Guard Force 1 or CMH to GSWU Common Guard Sense 1 to DUT 1 or DUT 1 high terminal Insulator Plate Guard Force 2 or CML to GSWU Triaxial connector Common Guard Sense 2 Wire to DUT 2 or DUT 1 low terminal Coaxial cable SCUU DUT SCUU GSWU 16495K SMU Table 3-8 MFCMU Sense High Low CMH CML DUT GSWU Keysight B1500A

116 Figure 3-19 SCUU Guard Force 1 or CMH to GSWU Common Guard to DUT 1 or DUT 1 high terminal to GSWU Insulator Plate Sense 1 Guard Force 2 or CML to DUT 2 or DUT 1 low terminal Coaxial cable Wire Common Guard Triaxial connector Sense 2 SCUU DUT SCUU GSWU 16495K SMU Table 3-8 Sense MFCMU Sense Force High Low CMH CML DUT GSWU 3-40 Keysight B1500A 15

117 MCSMU DUT MCSMU DUT Figure 3-20 MCSMU N1255A MCSMU (p. 3-26) MCSMU N1255A Input N1255A Output MCSMU 16494A Figure 3-20 MCSMU High Force High Force From N1255A Output High Sense Insulator Plate Low Force Common High Sense Low Force To DUT High terminal From N1255A Output Low Sense Common Low Sense To DUT Low terminal Coaxial cable Triaxial connector Wire High Force/High Sense/Low Force/Low Sense DUT SMU DUT (p. 3-35) Common High Force Low Force High Sense Low Sense Keysight B1500A

118 MFCMU DUT MFCMU DUT Figure 3-21 SCUU MFCMU MFCMU Keysight N1300A-001/002 CMU CMU Figure 3-21 MFCMU Hcur Guard Hpot Wire Insulator Plate Guard Lpot Lcur to DUT 1 high terminal to DUT 1 low terminal BNC connector Coaxial cable Hcur/Hpot/Lcur/Lpot DUT Hcur/Hpot/Lcur/Lpot 50 Keysight Keysight B1500A 15

119 DUT Keysight 16442B (B1500A-A5F) DUT DUT Stop NOTE Force Sense Force Sense Sense Force Force dc Keysight B1500A

120 1. Stop 2. DUT Keysight 16442B (B1500A-A5F) 3. DUT ± 42 V ± 42 V WARNING WARNING CAUTION WARNING Stop High Voltage DUT DUT DUT 3-44 Keysight B1500A 15

121 1 SMU(±200V= 1A Max) 2 3 (Selected) Force Sense Force Sense Force Sense Guard Guard Guard Guard Guard Guard Drain Gate Substrate Source 2 DUT Keysight B1500A

122 1. Force 2. Guard Center conductor Outer conductor Coaxial cable Probing needle Connector plate Contact pad WARNING 3-46 Keysight B1500A 15

123 WARNING DUT DUT DUT WARNING Guard Guard Force CAUTION Guard Circuit Common DUT Guard Force Force Guard A Buffer Guard Force DUT Keysight B1500A

124 DUT Force Sense DUT 1. Force Guard Sense Force Sense DUT Sense Force Sense Force Center conductor Outer conductor Probing needle Coaxial cable Contact pad Connector plate Contact pad WARNING 3-48 Keysight B1500A 15

125 WARNING DUT DUT DUT r F1 R DUT r F2 R DUT r S1 r S2 RDUT RDUT r F1 r F2 r F1 r S1 r S2 r F2 V V V (a) non-kelvin connection (b) Kelvin connection Force Sense Sense Sense Sense 10 Force Sense Force Keysight B1500A

126 Keysight B2200A/B2201A/E5250A Keysight B1500A DUT B1500A DUT Keysight EasyEXPERT (p. 3-51) NOTE ± 1 % ± 0.5 pf 1 khz 5 MHz 1000 pf 16494A/B/C 16494A/B/C (p. 3-51) 3-50 Keysight B1500A 15

127 Figure 3-22 MFCMU : 1 khz 5 MHz : Cp-G MFCMU ( ) BNC (Keysight ) Hc-Hp Lc-Lp MFCMU Keysight N1300A CMU Hc-Hp Lc-Lp BNC-T (Keysight ) Hc-Hp Lc-Lp CMU Hc-Hp Input 13 (B2200A/B2201A) AUX INPUT CV1 (E5250A) Lc-Lp Input 14 (B2200A/B2201A) AUX INPUT CV2 (E5250A) Keysight 16494A Keysight B2220A B2200A/B2201A Keysight 16494B/C Keysight DUT Figure 3-22 Keysight B1500A

128 Figure 3-22 C1 (DATA04) C2H (DATA05) C2L (DATA06) C3H (DATA07) C3L (DATA08) CxH MFCMU Hc-Hp CxL Lc-Lp Keysight B2220A C3x C3x C2x C3x C2x C3x (p. 3-53) Figure 3-22 B1500A/MFCMU Perform open calibration at this plane. Short calibration is optional. N1300A + BNC-T adapters C2H, C3H, DATA05, DATA07: for CMH path C2L, C3L, DATA06, DATA08: for CML path Low High to CML to CMH Case 1. Probe card interface 16494A/C (C1, DATA04, fixed) Case 2. Connector plate B2220A (C2H, DATA05, need update) (C2L, DATA06, need update) Case 1 is not available for E5250A. Probe card etc. (C3H, DATA07, need update) (C3L, DATA08, need update) B2200A with B2210A or B2201A with B2211A or E5250A with E5252A 16494A/B (C1, DATA04, fixed) B2210A outputs or B2211A outputs or E5252A outputs 16495F/G Extended triaxial cables with connector plate (C2H, DATA05, need update) (C2L, DATA06, need update) Extended coaxial cables and positioners (C3H, DATA07, need update) (C3L, DATA08, need update) 3-52 Keysight B1500A 15

129 Configuration Switching Matrix Extended Configuration User Compensation Data File 1. C:\temp\c_data.txt B2200A/B2201A # # Compensation data file for B2210A/Cable connection/3m triax cable # # # MB Mother Board # MH Matrix Path High # ML Matrix Path Low # C1 Triax Cable # C2H Probe card I/F or User Triax cable High # C2L Probe card I/F or User Triax cable Low # C3H Probe card or User Coax cable High # C3L Probe card or User Coax cable Low # format version 1.0 B2210A CABLE # # R[Ohm] L[H] C[F] # MB e e e-11 MH e e e-10 ML e e e-10 C e e e-10 C2H e e e-11 C2L e e e-11 C3H e e e-10 C3L e e e B2210A B2211A 16 DUT Keysight B2220A PCIF CABLE C2H C3L Table 3-9 NOTE EasyEXPERT B2200A/B2201A Table 3-11 Keysight B1500A

130 E5250A # E5250A C Compensation coefficient data table # # CAUTION : Do not add or delete "REVISION" line and "DATAxx" line. # Change the value for R,L,C of DATA05,06,07 or 08. # REVISION A # R [ohm] L [H] C [F] DATA E E E-12 # Frame Path 1 DATA E E E-12 # Frame Path 2 DATA E E E-12 # Card Path High DATA E E E-12 # Card Path Low DATA E E E-12 # Triax Cable [/m] DATA E E E-12 # User Triax Cbl H [/m] DATA E E E-12 # User Triax Cbl L [/m] DATA E E E-12 # User Coax Cbl H [/m] DATA E E E-12 # User Coax Cbl L [/m] DATA E E E-12 # Stray Capacitance # END of Data DATA05 DATA08 Table 3-9 Table 3-9 C2H (DATA05) C2L (DATA06) C3H (DATA07) C3L (DATA08) R L C Figure 3-22 C2H (DATA05) C2L (DATA06) R L C Keysight B2220A R L C Figure 3-22 C3H (DATA07) C3L (DATA08) R L C Keysight B2220A 3-54 Keysight B1500A 15

131 2. MFCMU C2H (DATA05) C2L (DATA06) C3H (DATA07) C3L (DATA08) R L C (p. 3-56) R L C (1 m) R ( ) L (H) C (F) C2H (DATA05) C2L (DATA06) C3H (DATA07) C3L (DATA08) 3. 1 C2H (DATA05) C2L (DATA06) C3H (DATA07) C3L (DATA08) R L C 2 4. C:\temp\my_env_1.txt Extended Configuration User Compensation Data File CMU Keysight EasyEXPERT Keysight B1500A

132 1. (DUT) (Fmeas) MFCMU 2. MFCMU 3. Table 3-10 Figure 3-23 MFCMU 4. Figure 3-22 C3H (DATA07) MFCMU R L C 5. C3L (DATA08) MFCMU R L C 6. Table 3-10 a. C2H (DATA05) MFCMU R L C b. C2L (DATA06) MFCMU R L C R L C R 1 khz 5 MHz A-B L SERIES C PARALLEL A-C a. R L C b. B-F A-E L GROUND B-D A-C L Figure 3-23 GUARD (C) GROUND (E) GROUND (F) GUARD (D) Insulator FORCE or SENSE (A) Triaxial Cable FORCE or SENSE (B) 3-56 Keysight B1500A 15

133 Table 3-11 B2200A/B2201A DUT c <path>\b2210a\pcif\triax\3m.data B2210A 16494A-002 B2220A C3H C3L <path>\b2210a\pcif\triax\4m.data 16494A-005 <path>\b2210a\pcif\kelvin\3m.data 16494C-002 <path>\b2210a\pcif\kelvin\4m.data 16494C-005 <path>\b2210a\cable\triax\1_5m.data 16494A F/G C2H C2L <path>\b2210a\cable\triax\3m.data 16494A-002 C3H C3L <path>\b2210a\cable\triax\4m.data 16494A-005 <path>\b2210a\cable\kelvin\1_5m.data 16494B-001 <path>\b2210a\cable\kelvin\3m.data 16494B-002 <path>\b2210a\cable\kelvin\4m.data 16494C-005 <path>\b2211a\pcif\triax\3m.data B2211A 16494A-002 B2220A C3H C3L <path>\b2211a\pcif\triax\4m.data 16494A-005 <path>\b2211a\pcif\kelvin\3m.data 16494C-002 <path>\b2211a\pcif\kelvin\4m.data 16494C-005 <path>\b2211a\cable\triax\1_5m.data 16494A F/G C2H C2L <path>\b2211a\cable\triax\3m.data 16494A-002 C3H C3L <path>\b2211a\cable\triax\4m.data 16494A-005 <path>\b2211a\cable\kelvin\1_5m.data 16494B-001 <path>\b2211a\cable\kelvin\3m.data 16494B-002 <path>\b2211a\cable\kelvin\4m.data 16494C-005 a. <path>: \Program Files\Agilent\B1500\EasyEXPERT\B220xA\ccdata b. DUT c. B2220A 16495F/G Keysight B1500A

134 self-test self calibration diagnosis Keysight EasyEXPERT WARNING Interlock Open/Close High Voltage LED ±42 V 1 1 Keysight EasyEXPERT 3-58 Keysight B1500A 15

135 SPGU WGFMU Table 3-12 Table 3-12 SPGU SPGU 1 SPGU WGFMU HPSMU HPSMU 1 HPSMU 2 MPSMU 2 CMU HPSMU 5 6 MPSMU 7 CMU : : : : : : : : : : 1 : : : : : : : : : : : : B1514A Medium Current SMU (MCSMU) B1520A Multi Frequency CMU B1511A Medium Power SMU (MPSMU) B1511B Medium Power SMU (MPSMU) B1517A High Resolution SMU (HRSMU) B1510A High Power SMU (HPSMU) B1530A WGFMU B1525A High Voltage SPGU 0 GNDU/ADC Keysight B1500A