Keysight Technologies 2014, 2016 Keysight Technologies B Printed in Malaysia Published by: Keysight Technologie

Transcription

1 Keysight Technologies B1506A

2 Keysight Technologies 2014, 2016 Keysight Technologies B Printed in Malaysia Published by: Keysight Technologies International Japan G.K. 9-1, Takakura-cho, Hachioji-shi, Tokyo Japan Keysight Keysight Keysight Keysight FAR DFARS DFARS (Declaration of Conformity) Search Keysight Technologies

3 COMPLIANCE WITH GERMAN NOISE REQUIREMENTS This is to declare that this product is in conformance with the German Regulation on Noise Declaration for Machines (Lärmangabe nach der Maschinenlärminformation-Verordnung -3.GSGV Deutschland). Herstellerbescheinigung GERÄUSCHEMISSION Lpa < 70 db am Arbeitsplatz normaler Betrieb nach DIN T. 19 Manufacturer s Declaration ACOUSTIC NOISE EMISSION Lpa < 70dB operator position normal operation per ISO 7779 South Korean Class A EMC declaration This equipment is Class A suitable for professional use and is for use in electromagnetic environments outside of the home.

4 WARNING High Voltage LETHAL VOLTAGE on CONTACT ±3000 V dc/pulse ±500 V

5 English Deutsch French Japanese Korean Simplified Chinese Traditional Chinese Symptoms Symptome Symptômes Cardiac arrest Herz-Kreislauf-Stillsta Arestation nd cardiopulmonaire Abnormal cardiac Arrhythmia Arythmie rhythm Respiratory failure (difficult or absent breathing) Respiratorischer Mißerfolg Échec respiratoire Muscle pain and contractions Seizures (heart beat stopped) Numbness and tingling Muskelschmerz und Douleur du muscle / / / / Zusammenziehungen et contractions Herzlähmung Paralysie cardiaque Eine Taubheit / Un engourdissement / / / / Stachel / Une épine Unconsciousness Bewusstlosigkeit Évanouissement Entrance and exit wound burns Eine elektrische Schockspur Une trace du choc électrique

6 CPR CPR D R AED 3. C (1 100 ) AHA Hands-Only CPR : ams/cpr-week_ucm_427219_subhomepage.jsp AED A B 30 2 D AED AED AED: Automated External Defibrillator CPR: Cardio Pulmonary Resuscitation AHA: American Heart Association, Inc.

7 AHA CPR & Emergency Cardiovascular Care (ECC) ( p) AHA Hands-only CPR ( Save a Life ( ams/cpr-week_ucm_427219_subhomepage.jsp) AHA CPR Translated Website ( nslated-websites_ucm_303149_subhomepage.jsp) Deutsch ( Japanese ( available as of March, 2012)) Chain of Survival ( al_ucm_307516_article.jsp) ECC Guidelines Highlights 2010 English ( Japanese ( Deutsch ( hts_d/guidelines2010-highlights_d.pdf) International ILCOR ( ILCOR CoSTR 2010 Consensus ( Europe ERC ( ERC Guidelines 2010 ( Local language translation ( America AHA ( AHA Guidelines 2010 (

8 Keysight Technologies CD-ROM NOTE WARNING INDOOR USE IEC INSTALLATION CATEGORIY II INSTALLATION CATEGORIY I POLLUTION DEGREE 2 CAT I IEC I Interlock High Force Guard Sense Interlock ±42 V Interlock

9 WARNING Safety Class I AC International Electrotechnical Commission (IEC)

10 AC

11 CAT I IEC I CE CE CSA RCM Radio Communication Act 1992 EMC ICES/NMB-001 ISM ICES-001 Cet appareil ISM est conforme à la norme NMB-001 du Canada. Industrial Scientific and Medical Group 1 Class A CISPER 11 EMC RoHS 6 MCV HM RoHS MCV EFUP Environmental Friendly Use Period 40 CFB PET WARNING CAUTION

12 Circuit Common IEC Keysight SMU DC SMU Force Guard Sense Circuit Common Force Guard Sense Force Sense 1 Force Sense

13 Guard Guard Circuit Common SMU Guard Force Circuit Common Sense Guard 1.E-06 Capacitance (F) 1.E-07 1.E-08 C=0.1 μf Safety Area Q=45 μc 1.E Voltage (V) (Based on standards IEC and IEC ) 0.1 F 45 C HVSMU 10 nf 10

14 Keysight B1506A High Force Guard Sense HVSMU ±3000 Vdc MPSMU ±100 Vdc Keysight B1506A 3 Interlock High Force Guard Sense Stop Measurement High Voltage Interlock SMU

15 High Voltage Shock Hazard Keysight B1506A can force dangerous voltages (±3000 Vdc for HVSMU and ±100 Vdc for MPSMU) at the High, Force, Guard, and Sense terminals. To prevent electric shock hazard, the following safety precautions must be observed during the use of Keysight B1506A. Connect the instrument to an electrical ground (safety ground) by using three-conductor AC power cable. Before performing measurement, connect the interlock circuit to the Interlock terminal of this instrument. Confirm periodically that the interlock function works normally. Before touching the connections of the High, Force, Guard, and Sense terminals, turn the instrument off and discharge any capacitors of the measurement path. If you do not turn the instrument off, complete all of the following items, regardless of any instrument settings. Terminate measurement by pressing the Stop key, confirm that the Measurement status indicator is not lit. Confirm that the High Voltage indicator is not lit. Open the Interlock terminal. Discharge any capacitors if the capacitance is connected to an SMU. Warn workers in the vicinity of the instrument about hazardous conditions.

16 Gefahr durch Hochspannung Von den Geräten Keysight B1506A können Spannungen an den Anschlüssen High, Force, Guard und Sense von bis zu 3000 V ausgehen. Um elektrischem Schlag vorzubeugen, ist bei der Benützung der Geräte Keysight B1506A folgendes zu beachten. Verwenden Sie ein dreiphasiges AC-Stromkabel für die Gerätsteckvorrichtung (Eingang) und schließen Sie das Instrument an eine Erdung an (Sicherheitserdung). Vor der Messung verbinden Sie den Verriegelungsstromkreis mit dem Interlock-Anschluss dieses Instruments. Prüfen Sie in regelmäßigen Abständen, dass die Verriegelungsfunktion ordnungsgemäß funktioniert. Bevor Sie die Verbindungen zu den Anschlüssen High, Force, Guard und Sense berühren, schalten Sie das Instrument aus und entladen alle Kondensatoren des Messwegs. Wenn Sie das Instrument nicht ausschalten, führen Sie, unabhängig von den Instrumenteinstellungen, alle folgenden Schritte durch. Beenden Sie die Messung, indem Sie auf die Taste Stop drücken. Stellen Sie sicher, dass die Statusanzeige Measurement nicht leuchtet. Stellen Sie sicher, dass die Anzeige High Voltage nicht leuchtet. Öffnen des Interlock-Anschlusses. Entladen Sie alle Kondensatoren, wenn die Kapazität mit einer SMU verbunden ist. Warnen Sie Mitarbeiter in der Umgebung des Instruments vor den Gefahren.

17 Danger de choc dû à une haute tension Une tension dangereuse (max. ± pour HVSMU; 3000 Vdc, max. ± pour MPSMU; 100 Vdc) émanant du dispositif Keysight B1506A peut être sortie aux bornes High, Force, Guard et Sense. Les précautions suivantes doivent être obserées contre commotion électrique accidentelle. Utilisez un câble d alimentation CA à trois conducteurs vers le coupleur secteur (entrée) et branchez l instrument sur une mise électrique à la terre (prise de terre de sécurité). Avant de procéder aux mesures, connectez le circuit de sécurité à la borne Interlock de l instrument. Vérifiez régulièrement le bon fonctionnement de la fonction de sécurité. Avant de toucher les connexions des bornes High, Force, Guard et Sense, mettez l instrument hors tension et déchargez tout condensateur du chemin de mesure. Si vous ne mettez pas l instrument hors tension, effectuez «toutes» les opérations ci-dessous, quels que soient les paramètres de l instrument. Terminez les mesures en appuyant sur la touche Stop ; vérifiez que l indicateur d état Measurement est éteint. Vérifiez que le témoin High Voltage est éteint. Ouvrez la borne Interlock. Déchargez les éventuels condensateurs si la capacité est connectée à une unité SMU. Informez les personnes travaillant à proximité de l instrument des conditions.

18 WEEE 2002/96/EC WEEE 2002/96/EC : WEEE 1 LCD LCD LCD

19 Keysight B1506A Microsoft Windows B1506A Windows Keysight Easy Test Navigator Keysight B1506A Keysight Easy Test Navigator Windows Easy Test Navigator Windows Keysight Technologies Windows Keysight Technologies B1506A B1506A

20 Keysight (RSI) RSI ISO 9241 European Community Display Screen Equipment Keysight RSI RSI RSI RSI

21 腱

22 Keysight Technologies B1506A GUI Keysight Easy Test Navigator NOTE NOTE B1506A

23 Easy Test Navigator EasyEXPERT GNDU SMU MPSMU - SMU HVSMU - SMU MCSMU - SMU HCSMU - SMU UHCU MFCMU - CMU Keysight B1506A 3

24 Windows GPIB Keysight B1506A 3

25 I/V GUI Keysight B1506A 3

26 GUI Automatic Data Save I/V GUI Automatic Data Save GUI Automatic Data Save GUI Keysight B1506A 3

27 Automatic Data Save GUI Automatic Data Save GUI GUI DUT GUI Module Configuration Keysight B1506A 3

28 Keysight B1506A 3

29 1

30 Keysight B1506A 1-2 Keysight B1506A 3

31 Keysight B1506A IV 3 FET 3 kv 1500 A -50 C +250 C na IV CV B1506A DUT B1506A 1500 A Keysight B1506A 3 1-3

32 Keysight B1506A B1506A-H20 20 A/3 kv IV B1506A-H A/3 kv IV B1506A-H A/3 kv IV B1506A-H21 20 A/3 kv IV/CV/Gate Charge B1506A-H A/3 kv IV/CV/Gate Charge B1506A-H A/3 kv IV/CV/Gate Charge Table LCD HDD DVD USB LAN GPIB GPIO (p. 1-26) HVSMU 1 HCSMU B1506A-H20/H21 1 MCSMU B1506A-H20 1 H21 2 H50/H70 3 H51/H71 4 MFCMU B1506A-H21/H51/H71 1 MPSMU 1 GNDU 1 B1506A Windows LCD USB USB B1506A (p. 1-20) Easy Test Navigator EasyEXPERT 1-4 Keysight B1506A 3

33 DUT DUT 3 B1506A-H21/H51/H71 DUT MFCMU HVSMU MPSMU HCSMU UHCU B1506A-H50/H51/H70/H71 MCSMU 2 UHCU B1506A-H50/H A B1506A-H70/H A DUT B1506A-T01 intest Corporation NOTE Keysight B1506A 3 1-5

34 Standby LED NOTE 2. HDD HDD DVD LED 1-6 Keysight B1506A 3

35 3. LCD LCD Off LCD LED LCD Set Set Cancel 4. USB USB 2 USB Windows LCD 15 TFT XGA Windows B1506A Touch Panel Off Microchip TSHARC Control Panel Microchip TSHARC Control Panel 6. Stop 7. High Voltage LED 8. Measurement LED 9. B1506A 10. Keysight B1506A 3 1-7

36 B1506A DVD-R 12. Touch Panel Off B1506A LED Keysight B1506A 3

37 WARNING WARNING High Force Sense Guard HVSMU ± 3000 Vdc MPSMU ± 100 Vdc 3 Interlock Interlock High High Force High Sense Guard Stop High Voltage Interlock Keysight B1506A 3 1-9

38 B1506A-H51/H F D D D D C B A LED LED LED Standby OFF LED LED Standby ON 3. AC 1-10 Keysight B1506A 3

39 4. GPIB GPIB Keysight 82350B PCI Keysight 82357A/B USB/GPIB National Instrument GPIB-USB-HS GPIB USB/GPIB GPIB GPIB 5. VGA LCD 6. A F 7. Circuit Common ( ) ( ) WARNING CAUTION Circuit Common Circuit Common 8. Zero Check CAUTION Zero Check 9. GNDU 0 V 10. LAN RJ45 Keysight B1506A

40 11. USB USB 2 USB Windows Ext Trig BNC 13. Digital I/O 14. Interlock ± 42 V EasyEXPERT Configuration Main Frame Interlock Open/Close WARNING High Force Sense Guard A. GNDU/ADC GNDU AD B. MPSMU MPSMU Force Sense C. MFCMU B1506A-H21/H51/H71 MFCMU 4 4 Lcur Lpot Hpot Hcur 1-12 Keysight B1506A 3

41 CAUTION MFCMU ± 25 V MFCMU D. MCSMU MCSMU Force Sense E. HCSMU B1506A-H20/H21 HCSMU Force Sense F. HVSMU HVSMU Force B1506A-H F E D D C B A Keysight B1506A

42 DUT (p. 1-16) 2. DUT intest Corporation ±42 V 1-14 Keysight B1506A 3

43 WARNING WARNING High, High Force, High Sense, Guard 5. intest Corporation 6. DUT -50 C 250 C 7. AC Power LED Power LED B1506A IV IV LED B1506A CV LED 8. LED Interlock High Voltage WARNING LED ± 3000 Vdc 9. intest Corporation 10. intest Corporation Keysight B1506A

44 WARNING WARNING Stop High Voltage DUT DUT DUT CAUTION NOTE NOTE High High Force High Sense Guard 3 Base/Gate Collector/Drain Emitter/Source Guard Base/Gate Collector/Drain Emitter/Source AUX Force AUX Sense Base/Gate ±100 V Max High 1 High Force 2 Collector/Drain ±3 kv Max Sense 3 Guard Force AUX ±30 V Max 6 Sense High Low Low 4 Force Sense ±100 V Max Emitter/Source 5 Low 1-16 Keysight B1506A 3

45 DUT 1. Base/Gate High Low High DUT Low DUT 2. Collector/Drain High Force Sense DUT Force Sense DUT 3. Collector/Drain Guard Collector/Drain High Collector/Drain High DUT 4. Emitter/Source Low Force Sense DUT Force Sense DUT 5. Chassis 6. AUX High Force Sense Low Force Sense AUX SMU3 (MCSMU) High Force Sense DUT high Low Force Sense DUT low Force Sense DUT Keysight B1506A

46 WARNING (p. 2-10) AC Keysight B1506A 3

47 HVSMU HCSMU B1506A-H20/H21 MCSMU MPSMU GNDU 6. CMU B1506A-H21/H51/H71 MFCMU CMU 7. Digital I/O Digital I/O Digital I/O 8. WARNING 9. Interlock Interlock WARNING Interlock High Force Sense Guard 10. intest Corporation Keysight B1506A

48 Keysight B1506A LCD Windows Easy Test Navigator EasyEXPERT Easy Test Navigator Easy Test Navigator 3 4 I/V B1506A-H21/H51/H71 B1506A-H21/H51/H71 B1506A-H21/H51/H71 HDD 1-20 Keysight B1506A 3

49 EasyEXPERT EasyEXPERT Keysight B1500 Keysight EasyEXPERT CSV/XML EMF/BMP/GIF/PNG EasyEXPERT Application Test Classic Test Tracer Test Quick Test NOTE EasyEXPERT DUT Keysight Technologies Keysight EasyEXPERT EasyEXPERT for PC Keysight B1506A

50 Windows PC EasyEXPERT 4155/4156 Keysight 4155/4156 MES DAT EasyEXPERT <program folder>\agilent\b1500\easyexpert\415xc\conversion\ MDM EasyEXPERT XTR ZTR Keysight IC-CAP MDM <program folder>\agilent\b1500\easyexpert\ic-cap Support\MDM\ <program folder>\agilent\b1500\easyexpert\utilities\ Cascade Microtech Summit 12K S300 SUSS MicroTec PA200 PA300 Vector Semiconductor VX-2000 VX-3000 sleep.exe EasyEXPERT <program folder>\agilent\b1500\easyexpert\utilities\ NOTE <program folder> <system drive> B1506A Windows 7 64 bit <system drive>:\program Files (x86) Windows 7 32 bit Vista XP <system drive>:\program Files 1-22 Keysight B1506A 3

51 Keysight B1506A Table CMU 1 Digital I/O B1506A-H21/H51/H71 B1506A-H21/H51/H cm mm mm mm mm USB 1 Keysight B1506A

52 USB Product Reference CD-ROM 1 Table A B A-001 USB 16444A-002 USB 16444A G Digital I/O 16493G m 16493G m N1300A CMU N1300A-001 N1300A m 3.0 m N1254A N1254A A 1-24 Keysight B1506A 3

53 Table 1-3 Keysight B1506A Table 1-3 B1506A-H20 B1506A-H50 B1506A-H70 B1506A-H21 B1506A-H51 B1506A-H71 20 A 3 kv 500 A 3 kv 1500 A 3 kv 20 A 3 kv C-V 500 A 3 kv C-V 1500 A 3 kv C-V B1506A-T01 B1506A-A6J B1506A-UK6 ANSI Z B1506A-ABA B1506A-ABJ B1506A-DR1 DVD-R DVD-ROM Keysight B1506A

54 Keysight B1506A GNDU - MPSMU - SMU HVSMU - SMU MCSMU - SMU HCSMU - SMU UHCU - MFCMU - CMU EasyEXPERT Keysight EasyEXPERT GPIB GNDU - GNDU 0V ±4.2 A MPSMU HVSMU HCSMU MCSMU UHCU GNDU Low 0 V Figure 1-1 Figure 1-1 GNDU 0 V GNDU Force Common 1-26 Keysight B1506A 3

55 SMU SMU DC SMU Figure 1-2 MPSMU HCSMU MCSMU HVSMU NOTE Figure 1-2 GPIB SMU CMM SMU Common + A - V + - SMU Force SMU SMU Keysight EasyEXPERT Keysight B1506A

56 MPSMU - SMU SMU (MPSMU) ±100 V ±100 ma 2 W 0.5 V 1 na Table Figure 1-3 MPSMU Current (ma) Voltage (V) Keysight B1506A 3

57 Table 1-4 MPSMU 0.5 V 0 V 0.5 V 25 V ±100 ma 2 V 0 V 2 V 100 V ±100 ma 5 V 0 V 5 V 250 V ±100 ma 20 V 0 V 20 V 1 mv ±100 ma 40 V 0 V 20 V 2 mv ±100 ma 20 < V 40 V 2 mv ±50 ma 100 V 0 V 20 V 5 mv ±100 ma 20 < V 40 V 5 mv ±50 ma 40 < V 100 V 5 mv ±20 ma Table 1-5 MPSMU 1 na 0 I 1.15 na 50 fa ±100 V 10 na 0 I 11.5 na 500 fa ±100 V 100 na 0 I 115 na 5 pa ±100 V 1 A 0 I 1.15 A 50 pa ±100 V 10 A 0 I 11.5 A 500 pa ±100 V 100 A 0 I 115 A 5 na ±100 V 1 ma 0 I 1.15 ma 50 na ±100 V 10 ma 0 I 11.5 ma 500 na ±100 V 100 ma 0 I 20 ma 5 A ±100 V 20 ma < I 50 ma 5 A ±40 V 50 ma < I 100 ma 5 A ±20 V Keysight B1506A

58 Table 1-6 MPSMU ADC ADC 0.5 V 0 V 0.55 V 25 V 0.5 V 2 V 0 V 2.2 V 100 V 2 V 5 V 0 V 5.5 V 250 V 5 V 20 V 0 V 22 V 1 mv 20 V 40 V 0 V 44 V 2 mv 40 V 100 V 0 V 100 V 5 mv 100 V Table 1-7 MPSMU a ADC ADC 1 na 0 I 1.15 na 50 fa 10 fa 10 na 0 I 11.5 na 500 fa 10 fa 100 na 0 I 115 na 5 pa 100 fa 1 A 0 I 1.15 A 50 pa 1 pa 10 A 0 I 11.5 A 500 pa 10 pa 100 A 0 I 115 A 5 na 100 pa 1 ma 0 I 1.15 ma 50 na 1 na 10 ma 0 I 11.5 ma 500 na 10 na 100 ma 0 I 100 ma 5 A 100 na a Keysight B1506A 3

59 HVSMU - SMU SMU (HVSMU) 3000 V 4 ma V -4 ma 1500 V 8 ma V -8 ma 12 W 200 V 1 na Table CAUTION HVSMU Force Guard Circuit Common SMU Figure 1-4 HVSMU Current (ma) Voltage (V) -4-8 Keysight B1506A

60 Table 1-8 HVSMU Imax 200 V 0 V 200 V 200 V 8 ma 500 V 0 V 500 V 500 V 8 ma 1500 V 0 V 1500 V 1.5 mv 8 ma 3000 V 0 V 3000 V 3 mv 4 ma Table 1-9 HVSMU Vmax 1 na a 0 I 1.15 na 10 fa 3000 V 10 na 0 I 11.5 na 100 fa 3000 V 100 na 0 I 115 na 100 fa 3000 V 1 A 0 I 1.15 A 1 pa 3000 V 10 A 0 I 11.5 A 10 pa 3000 V 100 A 0 I 115 A 100 pa 3000 V 1 ma 0 I 1.15 ma 1 na 3000 V 10 ma 0 I 8 ma 10 na 1500 V 0 I ma 3000 V a. DC 1-32 Keysight B1506A 3

61 MCSMU - SMU SMU (MCSMU) ± 1 A ± 0.1 A DC ± 30 V 30 W 3 W DC 0.2 V 10 A 10 s Table Figure 1-5 MCSMU Current (A) 1 Pulse mode only Voltage (V) Pulse mode only -1 Keysight B1506A

62 Table 1-10 MCSMU 0.2 V 0 V 0.2 V 200 nv 100 ma ± 0.2 V 2 V 0 V 2 V 2 V 1A a ± 2 V 20 V 0 V 20 V 20 V ± 20 V 40 V 0 V 30 V 40 V ± 30 V a. Table 1-11 MCSMU 10 A 0 I 11.5 A 10 pa ± 30 V ± 10 A 100 A 0 I 115 A 100 pa ± 100 A 1 ma 0 I 1.15 ma 1 na ± 1 ma 10 ma 0 I 11.5 ma 10 na ± 10 ma 100 ma 0 I 100 ma 0 I 115 ma a 100 na ± 100 ma 1 A b 0 I 1 A 1 A ± 50 ma a. b. 100 ms 5% 1-34 Keysight B1506A 3

63 HCSMU - SMU SMU (HCSMU) HCSMU 20 A B1506A-H21 ± 20 A ± 1 A DC ± 40 V ± 1 A ± 20 V > ± 1 A 40 W 0.2 V 10 A 50 s Table NOTE HCSMU Low Force Low Sense Circuit Common Figure 1-6 HCSMU Current (A) Pulse mode only Voltage (V) Pulse mode only -20 Keysight B1506A

64 Table 1-12 HCSMU 0.2 V 0 V 0.2 V 200 nv ± 20 A / ± 40 A ± 0.2 V 2 V 0 V 2 V 2 V ± 20 A / ± 40 A ± 2 V 20 V 0 V 20 V 20 V ± 20 A / ± 40 A ± 20 V 40 V 0 V 40 V 40 V ± 1 A / ± 2 A ± 40 V Table 1-13 HCSMU 10 A 0 I 11.5 A 10 pa ± 40 V ± 10 A 100 A 0 I 115 A 100 pa ± 40 V ± 100 A 1 ma 0 I 1.15 ma 1 na ± 40 V ± 1 ma 10 ma 0 I 11.5 ma 10 na ± 40 V ± 10 ma 100 ma 0 I 115 ma 100 na ± 40 V ± 100 ma 1 A 0 I 1.15 A a 1 A ± 40 V ± 1 A 20 A 0 I 20 A 20 A ± 20 V ± 100 ma a. DC 1 A 1-36 Keysight B1506A 3

65 UHCU - UHCU UHCU 500 A B1506A-H A B1506A-H71 UHCU ± 500 A B1506A-H51 ± 1500 A B1506A-H71 ± 60 V 7.5 kw 500 A 22.5 kw 2000 A 10 s 0.4 % 500 A 0.1 % 2000 A Table Figure 1-7 UHCU Current (A) Voltage (V) Keysight B1506A

66 Table 1-14 UHCU 100 V 0 V 60 V a 0 V 60 V 200 V 100 V ± 500 A ± 1500 A b a. 0 V b. B1506A-H71 Table 1-15 UHCU 500 A 0 I 500 A a 0 I 500 A 1 ma 500 A ± 63 V b 2000 A c 0 I 1500 A 0 I 1500 A 4 ma 2 ma a. 0 A b. c. B1506A-H71 0 A 1-38 Keysight B1506A 3

67 MFCMU - CMU MFCMU MFCMU Cp-G Table 1-16 AC 1 khz 5 MHz 1 mhz 1 khz 10 mhz 10 khz 0.1 Hz 100 khz 1 Hz 1 MHz 5 MHz AC 10 mvrms 250 mvrms 1 mv DC 0 ± 25 V MFCMU DC 0 ± 3000 V HVSMU T Table 1-17 Figure 1-8 Z Z = 1 / (2 f C) f (Hz) C (F) Keysight B1506A

68 Table R G S Z Z Y S Y S Cp F Cp F Cp F Cp F Cs F Cs F Cs F Lp H Lp H Lp H Lp H Ls H Ls H Ls H 2 X B S G S D Q Rp Rs D Q G S D Q Rp Rs D Q 1-40 Keysight B1506A 3

69 Table 1-17 Z 1 khz f 200 khz 200 khz < f 2 MHz 2 MHz < f 5 MHz 0 Z < Z < Z < 1 k k Z < 3 k 1 k 1 k 1 k 3 k Z < 10 k 3 k 3 k 3 k 10 k Z < 30 k 10 k 10 k 30 k Z < 100 k 30 k 30 k 100 k Z < 300 k 100 k 300 k Z 300 k Figure 1-8 Impedance Z 10 T 1 T 100 G 10 G 1 G 100 M 10 M 1 M 100 k 10 k 1 k m 10 m 1 m n 10 n 50 range 300 k range 1 khz 10 khz 100 khz 1 MHz 5 MHz Frequency f 3 k range 100 af 1 ff 10 ff 100 ff 1 pf 10 pf 100 pf 1 nf 10 nf 100 nf 1 F 10 F 100 F 1 mf 10 mf 100 mf 1 F Keysight B1506A

70 1-42 Keysight B1506A 3

71 2

72 Keysight B1506A WARNING WARNING CAUTION Keysight B1506A 3

73 WARNING High Force Guard Sense HVSMU ± 3000 Vdc MPSMU ± 100 Vdc 3 Interlock Interlock High Force Guard Sense Stop High Voltage Interlock Keysight B1506A 3 2-3

74 50/60 Hz 100/240 V (±10 %) AC 900 VA B1506A-H20/H VA B1506A-H50/H51/H70/H VA +5 C 40 C +5 C 30 C +20 C 30 C 20 % 70 % RH 20 % 50 % RH +20 C 0 2,000 m -20 C 60 C 2-4 Keysight B1506A 3

75 10 % 90 % RH 0 4,600 m WARNING 420 mm (W) 575 mm (D) 330 mm (H) 420 mm (W) 575 mm (D) 360 mm (H) WARNING 3 NOTE AC IEC 320 AC AC 100 Vac 240 Vac Keysight B1506A 3 2-5

76 Option 900 Option 901 Option 902 Option 903 Plug: BS 1363/A, 250 V, 10 A PN: Option 904 Plug: AS/NZS 3112, 250 V, 10 A PN: Option 906 Plug: IEC , 250 V, 10 A PN: Option 912 Plug: NEMA 5-15P, 125 V, 10 A PN: Option 917 Plug: NEMA 6-15P, 250 V, 10 A PN: Option 918 Plug: SEV 1011, 250 V, 10 A PN: Option 919 Plug: SB D1, 250 V, 10 A PN: Option 920 Plug: IS 1293 and IS 6538, 250 V, 10 A PN: Option 921 Plug: JIS C 8303, 125 V, 12 A PN: Option 922 Plug: Israel SI 32, 250 V, 10 A PN: Option 923 Plug: IRAM 2073, 250 V, 10 A PN: Option 927 Plug: CEI 23-16, 250 V, 10 A PN: Option 930 Plug: GB 1002 figure 3, 250 V, 10 A PN: Option 931 Plug: SANS 164-1, 250 V, 10 A PN: Option 932 Plug: NEMA WD-6, 250 V, 10 A PN: Plug: NBR 14136, 250 V, 10 A PN: Plug: CNS , 125 V, 10 A PN: Plug: CS 0017, 250 V, 10 A PN: Keysight B1506A 3

77 Windows GPIB (p. 2-4) Keysight B1506A 3 2-7

78 1. 2. Standby 3. Circuit Common 4. USB USB USB 5. AC 6. Standby 7. Windows a. Japanese English b. USB US c. End User License Agreement d. LAN NOTE Windows Windows Table Keysight B1506A 3

79 Table 2-1 Keysight B1500 User KeysightOnly Administrator Keysight B1506A 3 2-9

80 WARNING Figure 2-1 B1506A Table Digital I/O 2. B1506A-H21/H51/H71 CMU 3. Figure 2-1 B1506A CMU cable for H21/H51/H71 System cable Digital I/O cable 2-10 Keysight B1506A 3

81 Table 2-2 B1506A-H20 Digital I/O Digital I/O Digital I/O (System cable) MPSMU SMU1 Gate Control SMU2 HCSMU SMU3 HVSMU SMU4 Force (1F) 1F 1F Force SMU1 Sense (1S) 1S 1S Sense Force (2F) 2F 2F Force SMU2 Sense (2S) 2S 2S Sense Force (3F) 3F 3F Force SMU3 Sense (3S) 3S 3S Sense Force (4F) 4F 4F Force SMU4 GNDU GNDU GNDU GNDU Interlock Interlock Keysight B1506A

82 Table 2-3 B1506A-H21 Digital I/O Digital I/O Digital I/O CMU MFCMU Lcur (LC) LC Lcur MFCMU Lpot (LP) LP Lpot Hcur (HC) HC Hcur Hpot (HP) HP Hpot (System cable) MPSMU SMU1 Gate Control SMU2 AUX SMU3 HCSMU SMU4 HVSMU SMU5 Force (1F) 1F 1F Force SMU1 Sense (1S) 1S 1S Sense Force (2F) 2F 2F Force SMU2 Sense (2S) 2S 2S Sense Force (3F) 3F 3F Force SMU3 Sense (3S) 3S 3S Sense Force (4F) 4F 4F Force SMU4 Sense (4S) 4S 4S Sense Force (5F) 5F 5F Force SMU5 GNDU GNDU GNDU GNDU Interlock Interlock 2-12 Keysight B1506A 3

83 Table 2-4 B1506A-H50/H70 Digital I/O Digital I/O Digital I/O (System cable) MPSMU SMU1 Gate Control SMU2 V Control SMU3 I Control SMU4 HVSMU SMU5 Force (1F) 1F 1F Force SMU1 Sense (1S) 1S 1S Sense Force (2F) 2F 2F Force SMU2 Sense (2S) 2S 2S Sense Force (3F) 3F 3F Force SMU3 Sense (3S) 3S 3S Sense Force (4F) 4F 4F Force SMU4 Sense (4S) 4S 4S Sense Force (5F) 5F 5F Force SMU5 GNDU GNDU GNDU GNDU Interlock Interlock Keysight B1506A

84 Table 2-5 B1506A-H51/H71 Digital I/O Digital I/O Digital I/O CMU MFCMU Lcur (LC) LC Lcur MFCMU Lpot (LP) LP Lpot Hcur (HC) HC Hcur Hpot (HP) HP Hpot (System cable) MPSMU SMU1 Gate Control SMU2 AUX SMU3 V Control SMU4 I Control SMU5 HVSMU SMU6 Force (1F) 1F 1F Force SMU1 Sense (1S) 1S 1S Sense Force (2F) 2F 2F Force SMU2 Sense (2S) 2S 2S Sense Force (3F) 3F 3F Force SMU3 Sense (3S) 3S 3S Sense Force (4F) 4F 4F Force SMU4 Sense (4S) 4S 4S Sense Force (5F) 5F 5F Force SMU5 Sense (5S) 5S 5S Sense Force (6F) 6F 6F Force SMU6 GNDU GNDU GNDU GNDU Interlock Interlock 2-14 Keysight B1506A 3

85 (p. 2-10) AC 3. AC 4. ON 5. Standby Easy Test Navigator 6. I/V Measurement I/V 7. Configuration > Module Module Configuration 8. Module Configuration diagnosis Windows Windows All Programs > Control Auto Logon Control Auto Logon Enable Auto Logon Disable Auto Logon NOTE Keysight B1500 User Keysight B1506A

86 GPIB GPIB 17 GPIB 1. Easy Test Navigator Exit Easy Test Navigator Exit 2. EasyEXPERT EasyEXPERT a. EasyEXPERT File Exit b. Start EasyEXPERT [x] 3. All Programs > Keysight IO Libraries Suite > Keysight Connection Expert Keysight Connection Expert 4. Instrument I/O on this PC GPIB0 Change Properties... Keysight PCI GPIB Interface - GPIB0 5. GPIB Address 6. Auto-discover instruments connected to this interface 7. Keysight PCI GPIB Interface - GPIB0 OK 8. Reboot Required Reboot Now NOTE GPIB Keysight 82350B PCI Keysight 82357A/B USB/GPIB National Instrument GPIB-USB-HS GPIB USB/GPIB GPIB GPIB 2-16 Keysight B1506A 3

87 GPIB 1. Easy Test Navigator Exit Easy Test Navigator Exit 2. EasyEXPERT EasyEXPERT a. EasyEXPERT File Exit b. Start EasyEXPERT [x] 3. All Programs > Keysight IO Libraries Suite > Keysight Connection Expert Keysight Connection Expert 4. Instrument I/O on this PC GPIB0 Change Properties... Keysight PCI GPIB Interface - GPIB0 5. GPIB Address System Controller 7. Auto-discover instruments connected to this interface Keysight Connection Expert GPIB GPIB 8. Keysight PCI GPIB Interface - GPIB0 OK 9. Reboot Required Reboot Now NOTE 5 6 GPIB Address 21 System Controller 9 Keysight B1506A

88 DUT B1506A 3 DUT intest Corporation WARNING WARNING Stop High Voltage DUT DUT DUT 2-18 Keysight B1506A 3

89 3 3 3 DUT 1. Base/Gate Collector/Drain Emitter/Source 2. DUT 3. DUT Socket module Test fixture WARNING CAUTION CAUTION NOTE 3000 V 500 A 39 A DC 0 C +100 C Keysight B1506A

90 Tektronix 370B/371B 1 DUT DUT 4. Test fixture Socket module Collector/Drain Force Base/Gate Force and Sense Emitter/Source Force Collector/Drain Sense Not connected Emitter/Source Sense WARNING CAUTION CAUTION 3000 V Collector/Drain/Emitter/Source Force 500 A 39 A DC 40 A 2 A DC +5 C +40 C 2-20 Keysight B1506A 3

91 B1506A-H21/H51/H71 Figure 2-2 Table Figure Table m m 6 6 Keysight B1506A

92 T10 T15 9 mm 2.0sq 5.5sq Figure 2-3 CAUTION 0 C +100 C 1. T15 2. WARNING 200 V 1 mm 3000 V 6 mm T10 5. WARNING 500 A Collector/Drain Force Emitter/Source Force Keysight B1506A 3

93 9 mm T15 Blank module wiring side view: Chassis Emitter/Source Low Sense Force Low High High Socket board Sense AUX Force Guard Sense Force Collector/Drain Base/Gate T10 Figure 2-3 Keysight B1506A

94 3 B1506A-H21/H51/H71 3 CAUTION 3 DUT 3 DUT 3 = Vr/Ir Vr Ir Vr Ir 1 ms Socket for current control device B1506A-F14 Gate Charge Measurement Adapter Inline Package External DUT Slide switch (Inline Package position) Socket for DUT Shorting bar Gate Force Collector/Drain Sense Attach shorting bar for Inline Package. Remove it for External DUT. Studs for load resistor Top ±3 kv Max 1 Gate 2 Collector/Drain 3 Emitter/Source Sense Force Emitter/Source To External DUT ±3 kv Max Side 1. Base/Gate Collector/Drain Emitter/Source AUX Force 2-24 Keysight B1506A 3

95 2. Sense 3. Inline Package 4. load resistor 5. DUT 6. WARNING NOTE NOTE AUX Sense DUT Socket for current control device B1506A-F14 Gate Charge Measurement Adapter Inline Package External DUT Slide switch (External DUT position) External DUT External DUT Studs for load resistor ±3 kv Max 1 Gate 2 Collector/Drain 3 Emitter/Source Emitter Collector Base Low Base High Space for External DUT on the silicon plate: 180 mm x 180 mm Keysight B1506A

96 DUT 3 DUT 3 = Vr/Ir Vr Ir Vr Ir 1 ms 1. DUT 2. Base/Gate Collector/Drain Emitter/Source AUX Force 3. Sense 4. External DUT 5. load resistor 6. External DUT DUT 170 mm (W) 170 mm (D) 130 mm (H) DUT 7. DUT Force Sense DUT 8. Collector/Drain Force External DUT Gate High Open Attach shorting bar for Inline Package. Remove it for External DUT. Emitter Collector Low Sense Force Emitter/Source To External DUT ±3 kv Max Gate Low is internally connected to Emitter/Source Sense. Collector/Drain Sense Base Low Base High Base Low is internally connected to Emitter Keysight B1506A 3

97 WARNING WARNING NOTE NOTE AUX Sense Gate/Base Emitter/Source Cable assembly DUT Test fixture Thermocouple Thermal plate Blank silicon plate DUT Thermal Plate K Thermocouple intest Corporation DUT 3 Keysight B1506A

98 1. DUT 2. DUT 330 mm (W) 170 mm (D) 130 mm (H) DUT 3. DUT Force Sense DUT 4. Base/Gate ±100 V Max Force Collector/Drain ±3 kv Max Sense Guard Force AUX ±30 V Max Sense External DUT High High High Emitter Collector Low Low Low Force Sense ±100 V Max Emitter/Source Base Low Base High Base Low is internally connected to Emitter. WARNING WARNING WARNING CAUTION Guard High Force High Sense DUT High High Force High Sense Guard Circuit Common 2-28 Keysight B1506A 3

99 N1254A-524 B1506A (p. 2-30) Figure m 5 DUT Table 2-8 Table 2-7 Low Low Sense CAUTION Figure 2-4 N1254A-524 B1506A Test Fixture Base/Gate Collector/Drain Emitter/Source High Low High Force Low Force High Sense Low Sense Guard Chassis High Force High Sense Gate Low Sense Low Force N1254A-524 Prober System Cable Gate DUT Drain Source Table 2-7 N1254A-524 High Force Collector/Drain High Force 3000 V 39 A dc Low Force Emitter/Source Low Force 200 V 500 A pulse a Keysight B1506A

100 High Sense HV Collector/Drain High Sense 3000 V 1 A dc Low Sense BNC(f) Emitter/Source Low Sense 200 V 20 A pulse Base/Gate Low Gate BNC(f) Base/Gate High 200 V a. 1 ms 0.4 % Table 2-8 N1254A-524 Low Force Low Sense High Force High Sense Gate DUT N1254A-523 BNC(m) N1254A-503 N1254A-523 HV N1254A-505 BNC(m) N1254A-503 DUT low DUT high DUT drive CAUTION High Force High Sense Circuit Common M5 2 N1254A Keysight B1506A 3

101 Collector/Drain Emitter/Source Base/Gate Figure m B1506A 16493J WARNING Keysight B1506A

102 B1506A 2 (p. 2-27) 1. K Thermocouple 2. DUT (p. 2-27) 1. DUT Thermal Plate 4. DUT 160 mm (W) 160 mm (D) 100 mm (H) DUT 5. (p. 2-27) DUT (p. 2-25) 6. (p. 2-32) 7. Thermal Plate 8. intest Corporation DUT 2-32 Keysight B1506A 3

103 B1506A-T01 Thermal test enclosure Fixture cover Enclosure cover Left side wire Interlock switch under the wire head Thermal test enclosure Right side wire Interlock switch under the wire head Test fixture 1. K Thermocouple 2. 隙 3. Enclosure cover 4. DUT 260 mm (W) 180 mm (D) 120 mm (H) DUT 5. (p. 2-27) DUT DUT 6. Thermocouple 隙 2 Keysight B1506A

104 7. 隙 Purge Air Inlet purge air 8. Left side wire Interlock switch 9. Right side wire Interlock switch 10. intest Corporation WARNING WARNING CAUTION CAUTION CAUTION -50 C +250 C To Slit Purge Air Inlet 2-34 Keysight B1506A 3

105 self-test self calibration diagnosis NOTE Interlock Open/Close High Voltage LED ± 42 V 1 1 Keysight B1506A

106 HDD HDD HDD HDD 揃 WARNING 2-36 Keysight B1506A 3

107 3

108 Keysight B1506A Keysight Easy Test Navigator I/V NOTE Easy Test Navigator Windows Keysight Connection Expert Instrument I/O on this PC USB0 USB0 USB0 + B1500A(USB0::2391::1::0001::0::INSTR) + agb1500a + UsbDevice1 agb1500a UsbDevice1 B1500A(USB0::...::INSTR) Add VISA Alias Connectivity Guide Connection Expert Help NOTE GUI の 情報については 第 4 章を さ 1. B1506A-H21/H51/H Keysight B1506A 3

109 NOTE B1506A-H20/H50/H70 Figure 3-1 Keysight B1506A 3 3-3

110 WARNING WARNING Stop High Voltage DUT DUT DUT Step 1. DUT 3 (p. 2-19) (p. 2-20) (p. 2-21) (p. 2-24) (p. 2-27) NOTE (p. 3-51) Step 2. Step 3. NOTE 1. DUT DUT 3-4 Keysight B1506A 3

111 2. Capacitance Measurement Figure Start Calibration... Step 4. NOTE 1. DUT 2. Gate Charge Measurement Figure Start Calibration... Keysight B1506A 3 3-5

112 NOTE MOSFET Step 1. Datasheet Characterization Figure 3-1 Step 2. DUT ETN DS 1. Device Type DUT MOSFET 2. New Datasheet Step Keysight B1506A 3

113 Identification Part Number Sample ID Description Operator Measurement Instrument DUT DUT DUT Step 4. DUT Maximum Ratings Characteristics Parameters Characteristics Graphs Symbol Parameter Test Condition Value Close Close Keysight B1506A 3 3-7

114 Note Step 5. Characteristics Parameters Symbol Parameter 3-8 Keysight B1506A 3

115 Test Conditions Min. Close Act. Max. Min. Max. Note NOTE Duplicate 3. Keysight B1506A 3 3-9

116 Step 6. Characteristics Graphs Characteristics Parameters 3. X Y 4. X Y Step 7. Start Measurement 3-10 Keysight B1506A 3

117 Connection 1. DUT 2. DUT DUT OK I/V (p. 4-14) Stop Measurement Characteristics Parameters Act. Characteristics Graphs Keysight B1506A

118 Step 8. I/V Connection 1. DUT DUT OK (p. 4-14) Step 9. ETN DS ETN DS 3-12 Keysight B1506A 3

119 I/V I/V I/V Figure 3-2 I/V Keysight B1506A

120 I/V WARNING WARNING Stop High Voltage DUT DUT DUT Step 1. DUT 3 (p. 2-19) (p. 2-20) (p. 2-21) (p. 2-27) Step 2. DUT DUT DUT Collector/Drain Emitter/Source NOTE (p. 3-51) 3-14 Keysight B1506A 3

121 I/V NOTE MOSFET ID-VDS Step 1. I/V Measurement I/V Figure 3-2 Step 2. Setup DUT Device Type MOSFET Device Type MOSFET ID-VDS Table 3-1 (p. 3-23) Setup Keysight B1506A

122 I/V Step 3. Setup Gate/Base Voltage Pulse Step MOSFET Step Mode Step Mode LinearSingle ListSingle Start Stop List List ListSingle List 3-16 Keysight B1506A 3

123 I/V Details Setup (p. 4-60) Step 4. Setup Setup Drain/Collector Voltage Pulse Sweep MOSFET Sweep Mode LinearSingle LogSingle LinearDouble Start Stop Start Stop Start Stop Keysight B1506A

124 I/V LogDouble Start Stop Start Stop Start Stop Voltage Compliance Details Setup (p. 4-60) Step 5. Setup General settings Auto Period Pulse Period Auto Period 3-18 Keysight B1506A 3

125 I/V Step 6. Connections Connections Connections Base/Gate Resistor NOTE MCSMU MOSFET ID-VDS MCSCU Collector/Drain Resistor Keysight B1506A

126 I/V NOTE HVSMU MOSFET ID-VDS UHCU 0 Step 7. Start Measurement Repeat Measurement Stop Measurement Step 8. Characteristics Characteristics I/V Characteristics ID-VDS 3-20 Keysight B1506A 3

127 I/V (p. 3-57) I/V Step 1. Characteristics Characteristics Step 2. Oscilloscope View Oscilloscope View Step 3. (p. 3-15) I/V Step 4. Characteristics Step 5. Start Measurement Repeat Measurement Stop Measurement Keysight B1506A

128 I/V Step Keysight B1506A 3

129 I/V Table 3-1 MOSFET ID-VDS ID-VDS ID-VGS VGS(th) RDS-ID VDS-VGS RDS-VGS IDSS IGSS IS-VSD ID-VGS - RDS - -ID VDS-VGS RDS - -VGS -VDS -VGS - IGBT IC-VCE IC-VCE IC-VGE VGE(th) VCE-VGE VCE(sat) ICES IGES IF-VF IC-VGE - VCE-VGE VCE(sat) - -IC -VCE -VGE Diode IF-VF - IR-VR - Keysight B1506A

130 I/V Generic2T Conduction Generic Isolation 3-24 Keysight B1506A 3

131 B1506A-H21/H51/H71 Figure 3-3 Keysight B1506A

132 WARNING WARNING Stop High Voltage DUT DUT DUT Step 1. DUT 3 (p. 2-19) (p. 2-20) (p. 2-21) (p. 2-27) Step 2. NOTE (p. 3-51) 3-26 Keysight B1506A 3

133 NOTE MOSFET Ciss Coss Crss Step 1. Capacitance Measurement Figure 3-3 Step 2. Setup DUT Device Type MOSFET Device Type MOSFET Ciss Coss Crss (p. 3-30) Setup Keysight B1506A

134 Step 3. Setup General settings Frequency Details Setup (p. 4-96) Step 4. Setup Base/Gate Voltage Bias Bias Step 5. Setup Collector/Drain Voltage Sweep Start Stop Sweep Mode LinearSingle LogSingle LinearDouble LogDouble Details 3-28 Keysight B1506A 3

135 Setup (p. 4-96) Step 6. Start Calibration... Select Calibration Data... Step 7. DUT Start Measurement Stop Measurement NOTE DUT Collector/Drain Emitter/Source Step 8. Characteristics Characteristics Characteristics Ciss Coss Crss Keysight B1506A

136 (p. 3-57) Table 3-2 MOSFET Ciss Ciss - Vds Coss Crss Ciss, Coss, Crss Cgs Cds Cgd Cgs, Cds, Cgd Rg Cox Coss - Vds Crss - Vds Ciss Coss Crss Cgs - - Vds Cds - - Vds Cgd - - Vds Cgs Cds Cgd Rg - Vgs Cox - Vgs IGBT Cies Cies - Vce Coes Cres Cies, Coes, Cres Cge Cce Cgc Cge, Cce, Cgc Rg Coes - Vce Cres - Vce Cies Coes Cres Cge - - Vce Cce - - Vce Cgc - - Vce Cge Cce Cgc Rg - Vge 3-30 Keysight B1506A 3

137 Diode CT Generic Sweep Voltage Between Terminal 2-3 Sweep Voltage Between Terminal 1-3 Cp-G Vce/Vds Cs-Rs Vbe/Vgs Keysight B1506A

138 B1506A-H21/H51/H71 Figure Keysight B1506A 3

139 WARNING WARNING stop High Voltage DUT DUT DUT Step 1. (p. 2-24) Step 2. NOTE (p. 3-51) Keysight B1506A

140 Step 1. Gate Charge Measurement Figure 3-4 Step 2. Condition Drain DUT Vds(off) DUT Id(on) DUT (Current Load) DUT (Current Load) Vds(off) DUT Id(on) Gate DUT Vgs(off) DUT Vgs(on) DUT 3-34 Keysight B1506A 3

141 Ig Current Load Drain Id(on) LoadVgs(off) - LoadVgs(on) - Step 3. Start Calibration... Select Calibration Data... Step 4. DUT Start Measurement Keysight B1506A

142 Stop Measurement Step 5. Gate Charge Characteristics Step Keysight B1506A 3

143 JESD24-2 (Derived) Vgs-Qg (H.C.) Vgs-Qg (H.V.) JESD24-2 (H.C.) JESD24-2 (H.C.) Vds-Qg (H.C.) Vds-Qg (H.V.) Drain Vds(off) Ig(on) Drain Ig(on) Drain Vds(off) Vgs-Qg(H.C.) JEDEC Standard JESD24-2 Vgs-Qg(H.V.) JEDEC Standard JESD24-2 Vgs-Qg(H.C.) Vgs-Qg(H.V.) (Line) (Dot) (Line & Dot) Keysight B1506A

144 DUT Vgs(th) Vgs(th) JESD24-2(Derived) JESD24-2(H.C.) JESD24-2(H.V) JESD24-2(Derived) Derived JESD24-2(H.C.) High Current JESD24-2(H.V) High Voltage Vgs(pl) 3-38 Keysight B1506A 3

145 Qgs Qgd Qg(th) Qg(on) C1 C2 S1 S2 - JEDEC Standard JESD24-2 S 1 - JEDEC Standard JESD24-2 S 3 - Vgs(off) Vgs(th) - Vgs(off) Vgs(on) Qgs/{Vgs(pl) Vgs(off)} JEDEC Standard JESD24-2 S 1 {Qgs(on) Qgs Qgd}/{Vgs(on) Vgs(pl)} JEDEC Standard JESD24-2 S 2 JEDEC Standard JESD24-2 S 1 JEDEC Standard JESD24-2 S 2 (p. 3-57) Keysight B1506A

146 B1506A-H21/H51/H71 2 I/V 3-40 Keysight B1506A 3

147 Figure 3-5 Keysight B1506A

148 Step 1. DUT I/V MOSFET ID-VDS RDS-ID VDS-VGS RDS-VGS IGBT IC-VCE VCE(sat) VCE-VGE MOSFET Rg Ciss, Coss, Crss Coss Crss IGBT Rg Cies, Coes, Cres Coes Cres 3-42 Keysight B1506A 3

149 Step 2. Power Loss Calculation Figure 3-5 Step 3. Conditions Inductive Resistive Step 4. Inputs DUT Device Type MOSFET Step 5. DUT Keysight B1506A

150 1. I/V a. Output Characteristics Output Characteristics b. Output Characteristics Load Measurement Data I/V 2. Rg a. Gate Resistance Gate Resistance b. Gate Resistance Load Measurement Data Rg Rg 3. Ciss, Coss, Crss 3-44 Keysight B1506A 3

151 a. Capacitance Capacitance b. Capacitance Load Measurement Data Ciss, Coss, Crss Ciss, Coss, Crss 4. a. Gate Charge Gate Charge b. Gate Charge Load Measurement Data (p. 3-49) Keysight B1506A

152 Drive Conditions Device Parameters Step 6. Drive Condition Sweep Device Parameters Sweep 1. Drive Conditions Switching Frequency Sweep 2. Value Start Stop 3-46 Keysight B1506A 3

153 Sweep Mode Number of Step Log ) Linear Step Drive Conditions Drive Conditions 2. Switching Frequency Rg(ext) Irms, D Step.4 Irms D 0 1 Irms = Id D 1/2 Irms D Step 8. Start Step 9. Keysight B1506A

154 Index Conduction Loss Coss (or Coes) Loss Switching Loss Driving Loss Total Loss Results (p ) X Conduction Loss Output Capacitance Loss Switching Loss Driving Loss X Y 3-48 Keysight B1506A 3

155 Table 3-3 MOSFET I/V ID-VDS, RDS-ID, RDS-VGS, VDS-VGS Rds(on) a Rg Rg b Crss Qsw c Vgs(on), Vgs(off), Id, Vds Qg(on), Qg(off), Qsw, Vgs(pl) a. Vgs(on) b. Vgs(off) c. Vgs(off) Vds(off) Keysight B1506A

156 Table 3-4 IGBT I/V IC-VCE, VCE(sat), VCE-VGE Vce(sat) a Rg Rg b Cres Qsw c Vge(on), Vge(off), Ic, Vce Qg(on), Qg(off), Qsw, Vge(pl) a. Vge(on) b. Vge(off) c. Vge(off) Vce(off) 3-50 Keysight B1506A 3

157 DUT NOTE DUT B1506A Step 1. DUT 3 (p. 2-19) (p. 2-20) (p. 2-21) (p. 2-27) (p. 2-32) (p. 2-32) Step 2. DUT DUT Keysight B1506A

158 Figure 3-6 Step 1. Thermal Monitor/Control Figure 3-6 Step 2. Configuration Thermometer B1506A B1506A Thermometer Reading Time Span Channel 1 K Thermocouple 3-52 Keysight B1506A 3

159 Channel 2 K Thermocouple 2 Step 3. a. B1506A 1 25 C 1 C 5 b. B1506A 1 30 C 1 C 5 c. 1. Insert Control Keysight B1506A

160 2. Thermo-Trigger a. 2 Channel1 Channel1 Channel1 Channel2 Channel1_2 ThermoStream Air ThermoStream DUT B1506A 1 B1506A 2 B1506A 1 B1506A 2 (Channel 1 - Channel 2) ) DUT 3-54 Keysight B1506A 3

161 b. Center Radius Delay c. Delay Action TRIGGER TRIGGER TRIGGER NOP END 3. Duplicate Thermo-Trigger 4. 2 Center 30 C Step 4. Step 5. Start Keysight B1506A

162 Step 6. Start Step C 1 C Step 8. Step C 1 C 3-56 Keysight B1506A 3

163 Step 1. Keysight B1506A

164 Step 2. (Line) (Dot) (Line & Dot) Step 3. X Y X Y 3-58 Keysight B1506A 3

165 2 X Y X Y I/V I/V Keysight B1506A

166 Step 1. I/V Step 2. A MARKER(A): A X A Y 3-60 Keysight B1506A 3

167 Step 3. MARKER(B): B MARKER(B): ( ) B X B X - A X Y (B-A) Keysight B1506A

168 Step 1. I/V Step 2. MARKER: X Y 3-62 Keysight B1506A 3

169 4 GUI

170 Keysight Easy Test Navigator Keysight Easy Test Navigator I/V NOTE 1. B1506A-H21/H51/H Keysight B1506A 3

171 Keysight Easy Test Navigator LCD B1506A Windows Datasheet Characterization I/V Measurement Capacitance Measurement Gate Charge Measurement Power Loss Calculation (p. 4-5) I/V I/V (p. 4-58) B1506A-H21/H51/H71 (p. 4-94) B1506A-H21/H51/H71 (p ) B1506A-H21/H51/H71 (p ) Keysight B1506A 3 4-3

172 Thermal Monitor/Control Minimize Exit (p ) EasyEXPERT Easy Test Navigator 4-4 Keysight B1506A 3

173 I/V MOSFET IGBT BJT Diode Component ETN DS (p. 4-41) ETN DS (p. 4-56) NOTE B1506A-H20/H50/H70 Keysight B1506A 3 4-5

174 GUI GUI Figure 4-1 GUI 3 a b 1 c d 2 1. (p. 4-7 ) a. Identification (p. 4-7 ) b. Maximum Ratings (p ) c. Characteristics Parameters (p ) d. Characteristics Graphs (p ) 4-6 Keysight B1506A 3

175 2. Automatic Data Save (p ) ETN DS ETN DS 3. (p ) (p ) (p. 4-31) (p. 4-38) Identification (p. 4-7 ) Maximum Ratings (p ) Characteristics Parameters (p ) Characteristics Graphs (p ) Identification DUT DUT Identification Figure 4-2 c d ef Identification a b h g Keysight B1506A 3 4-7

176 a. Device Type MOSFET MOSFET MOSFET (p. 4-41) IGBT IGBT IGBT (p. 4-46) BJT BJT BJT (p. 4-51) Diode Diode (p. 4-54) Component NOTE ETN DS Device Type b. New Datasheet Data Type ETN DS Maximum Ratings Characteristics Parameters Characteristics Graphs 4-8 Keysight B1506A 3

177 c. Part Number DUT ETN DS d. Sample ID DUT ETN DS e. Description DUT ETN DS f. Operator ETN DS g. Measurement Instrument ETN DS h. System Picture Import Picture Open Picture Clear Picture Keysight B1506A 3 4-9

178 Maximum Ratings DUT Maximum Ratings Figure 4-3 Maximum Ratings a b c d e f a. Symbol b. Parameter c. Test Condition Close d. Value Close e. Unit f. Note 4-10 Keysight B1506A 3

179 ETN DS Characteristics Parameters Characteristics Parameters Figure 4-4 Characteristics Parameters a b c d e f g h i j a. b. 3 (p. 4-14) Keysight B1506A

180 c. Symbol d. Parameter e. Test Conditions Close f. Min. g. Act. Min. Max. h. Max. i. Unit j. Note ETN DS Characteristics Graphs 4-12 Keysight B1506A 3

181 Characteristics Graphs Figure 4-5 b Characteristics Graphs c a d e a. b. 3 (p. 4-14) c. d. Keysight B1506A

182 Line Dot Line & Dot X Y Linear PositiveLog NegativeLog e. X Y 1. I/V 4-14 Keysight B1506A 3

183 a. 1. Characteristics Parameters 2. Characteristics Graphs b. 1. Characteristics Parameters 2. Characteristics Graphs c. 1. Characteristics Parameters 2. Characteristics Graphs a. 1. Characteristics Parameters 2. Characteristics Graphs b. 1. Characteristics Parameters 2. Characteristics Graphs c. 1. Characteristics Parameters 2. Characteristics Graphs Keysight B1506A

184 Automatic Data Save ETN DS Automatic Data Save Data folder Recent data Figure 4-6 Automatic Data Save Device ID Comment Data DUT ID 10 ID ID ID ETN DS ETN DS ID Device ID ID ETN DS ETN DS Comment ETN DS ETN DS ETN DS ETN DS 4-16 Keysight B1506A 3

185 Data folder Recent data ETN DS ETN DS Browse (p. 4-38) 10 ETN DS ETN DS 10 more... Open Data File ETN DS Keysight B1506A

186 Figure File Open Save Print Exit Open File ETN DS XPS PDF I/V Edit Cut Copy Paste On-screen keyboard 4-18 Keysight B1506A 3

187 Measurement NOTE Start without data cleared Start with data cleared Stop Measurement Start Options Measurement Measurement Start Start Options Measurement > Stop Stop Start Without data cleared With data cleared Setup All Check/ Uncheck 3 Keysight B1506A

188 Setup Characteristics Parameters Characteristics Graphs I/V ETN DS Add Maximum Rating Add Characteristics Parameter Maximum Rating Properties (p. 4-32) Maximum Ratings Open Data Characteristics Parameter Properties (p. 4-32) Characteristics Parameters 4-20 Keysight B1506A 3

189 Add Characteristics Graph Import Duplicate Move Up Move Down Open Data Characteristics Graph Properties (p. 4-35) Characteristics Graphs Characteristics Parameters Characteristics Graphs Characteristics Parameters Characteristics Graphs Keysight B1506A

190 Properties Edit Setup Maximum Ratings Maximum Rating Properties (p. 4-32) Characteristics Parameters Characteristics Parameter Properties (p. 4-32) Characteristics Graphs Characteristics Graph Properties (p. 4-35) Characteristics Parameters Characteristics Graphs I/V Recycle ETN DS Delete Characteristics Parameters Characteristics Graphs 4-22 Keysight B1506A 3

191 View Page Up Page Down Go to Palette Keysight B1506A

192 Figure 4-8 File ETN DS File (p. 4-38) New Open... Open File ETN DS Save Save As... Save Data File XPS XML Paper Specification.xps.txt Print... XPS XPS Microsoft XPS Document Writer PDF Writer/Printer PDF Change Device ID... ETN DS ID 4-24 Keysight B1506A 3

193 Report... Recent Setup Files Exit Change Device ID ETN DS ID Change Device ID (p. 4-91) Datasheet Reporter (p. 4-37) ETN DS Characteristics Parameters.txt ETN DS Device ID ETN DS Characteristics Parameters 10 ETN DS ETN DS Edit View Edit Cut Copy Paste On-screen keyboard... View Go to Palette Page Page Up Down Keysight B1506A

194 Main Window Color Settings... Main Window Fullscreen Color Setting Color Setting (p. 4-31) Measurement Measurement Start with data cleared Start without data cleared Stop Measurement Measurement Stop Measurement Stop 4-26 Keysight B1506A 3

195 Options Stop if an actual value is out of range Characteristics Parameters (Act.) (Min.) (Max.) Setup Setup Check All Uncheck All Setup Characteristics Parameters Characteristics Graphs Add I/V ETN DS Maximum Rating Maximum Rating Properties (p. 4-32) Maximum Ratings Characteristics Parameter Keysight B1506A

196 Open Data Characteristics Parameter Properties (p. 4-32) Characteristics Parameters Characteristics Graph Import Open Data Characteristics Graph Properties (p. 4-35) Characteristics Graphs Characteristics Parameters Characteristics Graphs I/V Setup > Import Open Data Keysight B1506A 3

197 Duplicate Move Up Move Down Properties Edit Setup Characteristics Parameters Characteristics Graphs Setup > Duplicate Maximum Ratings Maximum Rating Properties (p. 4-32) Characteristics Parameters Characteristics Parameter Properties (p. 4-32) Characteristics Graphs Characteristics Graph Properties (p. 4-35) Characteristics Parameters Characteristics Graphs I/V Keysight B1506A

198 Recycle Delete ETN DS Characteristics Parameters Characteristics Graphs Configuration Help Configuration Module... Module Configuration Module Configuration (p ) Help About... (p. 4-37) 4-30 Keysight B1506A 3

199 Change Device ID ETN DS ID File > Change Device ID... Device ID Add... Remove Execute Close ID ETN DS ETN DS ID Color Setting Window Background Graph Background Graph Axis Graph Grid Graph Text Trace View > Color Settings... Apply Keysight B1506A

200 Reset OK Cancel Maximum Rating Properties Maximum Ratings Parameter Maximum Ratings Symbol Parameter Value (Point) (Range) Unit Note Test Conditions Maximum Ratings Test Conditions Text Parameter Range Text Parameter Range OK Cancel Characteristics Parameter Properties Characteristics Parameters Parameter Characteristics Parameters Data File 4-32 Keysight B1506A 3

201 Test Conditions OK Cancel Symbol Parameter Domain, Value Minimum, Maximum Act. Value Domain (p. 4-34) Min. Max. Minimum Maximum (p. 4-34) Unit Note Characteristics Parameters Test Conditions Symbol Parameter Value Unit Rating Symbol Maximum Rating Setup, Gain, Offset Setup Gain Offset (p. 4-34) (Insert) (Delete) (Up) (Down) Keysight B1506A

202 Value Domain. Act. Value Domain Value Act. Characteristics Parameters Act. Act. = Data Gain + Offset Data Gain Offset Data Value Gain Value Gain Offset Gain Offset Domain Minimum Maximum. Characteristics Parameters Min./Max. Setup Minimum/Maximum Setup A Gain/Offset Setup Gain/Offset A = Minimum Gain + Offset Maximum Gain + Offset Setup Gain Offset. Setup Test Conditions Value Setup A Gain/Offset Setup Gain/Offset A = Value Gain + Offset 4-34 Keysight B1506A 3

203 Characteristics Graph Properties Characteristics Graphs Data Data File X, Y X-Y X Y (p. 4-36) Data Aliases (Key) (Value) ID-VDS VGS = x V Key VGS Value Vg Vg = x V Graph OK Cancel Data Aliases (Insert) (Delete) (Up) (Down) Key/Value Title Axes Axes (p. 4-36) Scope Scope (p. 4-36) Keysight B1506A

204 X Y. X-Y X X Y Y X-Y X Y = Data Gain + Offset Data Gain Offset Data X Y Gain X Y Gain Offset Gain Offset Axes. X X Y Y Description Unit X Y Description Scope. X Y Scale (Linear) (PositiveLog) (NegativeLog) Setup Scale Range: Minimum Maximum 4-36 Keysight B1506A 3

205 Setup Minimum/Maximum Setup A Gain/Offset Setup Gain/Offset A = Minimum Gain + Offset Maximum Gain + Offset Range: Rating Symbol Minimum/Maximum Maximum Rating Datasheet Reporter Datasheet Reporter ETN DS Characteristics Parameters (.txt) Add... Please select the file to open ETN DS Datasheet Reporter Remove Datasheet Reporter ETN DS Execute Please select the file to save Datasheet Reporter ETN DS Close Datasheet Reporter ETN DS Device ID ETN DS Characteristics Parameters URL Help > About... Keysight B1506A

206 Table 4-1 ETN DS ID File *.pda-ds.zip C:\Users\<user name>\ Documents\Keysight\Seri esb150x\powerdevicean alyzer\datasheet\datasto re ID *.txt File I/V I/V I/V *.pda-iv.txt C:\Users\<user name>\ Documents\Keysight\Seri esb150x\powerdevicean alyzer\iv\datastore 4-38 Keysight B1506A 3

207 *.pda-cap.txt C:\Users\<user name>\ Documents\Keysight\ SeriesB150x\PowerDevic eanalyzer\devicecapacit ance\datastore *.pda-qg.txt C:\Users\<user name>\ Documents\Keysight\ SeriesB150x\PowerDevic eanalyzer\gatecharge\d atastore XPS XPS a *.xps a. XPS XML Paper Specification Windows ETN DS ETN DS <DeviceID>_<TEMP>_<TIME>.pda-ds.zip <DeviceID>: ID <TEMP>: <TIME>: Device-1_@Ch1=30degC_Ch2=30degC_ _ pda-ds.zip 1. <TEMP> (p. Keysight B1506A

208 <thermometer>: Ch1 Ch2 Air DUT B1506A Channel 1 B1506A Channel 2 DUT 2. <TIME> Windows 1: _ : _ _PM 3. () 2 Device-1_@Ch1=30degC_Ch2=30degC_ _ (3).pda-ds.zip 4-40 Keysight B1506A 3

209 Table 4-2 MOSFET MOSFET Maximum Ratings Parameter Symbol Drain to Source Voltage Gate to Source Voltage Pulsed Drain Current Pulsed Body Diode Current VDSS VGSS IDM ISM Table 4-3 Conditions Ratings Characteristics Parameters Parameter Symbol Conditions Ratings Drain to Source Breakdown Voltage BVDSS ID IDM VGS VGSS Drain Leakage Current IDSS VDS VDSS VGS VGSS Gate Leakage Current IGSS VGS VGSS VDS VDSS Keysight B1506A

210 Parameter Symbol Conditions Ratings Gate Leakage Current (-) a IGSS(-) VGS VGSS VDS VDSS Gate to Source Thershold Voltage b VGS(th) ID IDM Gate to Source Threshold Voltage (Constant Drain to Source Voltage) VGS(th) VDS VDSS ID IDM Transconductance c gfs VDS VDSS ID IDM Drain to Source On Resistance RDS(on) VGS VGSS ID IDM PulseWidth Drain to Source On Voltage VDS(on) VGS VGSS ID IDM PulseWidth Body Diode Forward Voltage VSD IS ISM VGS VGSS Gate Resistance Rg VGS VGSS Input Capacitance Ciss VDS VDSS f VGS VGSS Output Capacitance Coss VDS VDSS f VGS VGSS f 4-42 Keysight B1506A 3

211 Parameter Symbol Conditions Ratings Reverse Transfer Capacitance Crss VDS VDSS VGS VGSS Total Gate Charge Qg Vds VDSS f Vgs(on) Vgs(off) Id VGSS VGSS IDM Gate to Source Charge Qgs Vds VDSS Vgs(on) Vgs(off) Id VGSS VGSS IDM Gate to Drain Charge Qgd Vds VDSS Vgs(on) Vgs(off) Id VGSS VGSS IDM Gate to Source Plateau Voltage Vgs(pl) Vds VDSS Vgs(on) Vgs(off) Id VGSS VGSS IDM a. b. c. B1506A-H20/H21 Keysight B1506A

212 Table 4-4 Symbols X Y X Y Ratings X Y Characteristics Graphs Characteristics Symbols Ratings X Y X Y Output Characteristics VDS ID VDSS IDM Transfer Characteristics VGS ID VGSS IDM Drain to Source Resistance vs. Drain Current Drain to Source Resistance vs. Gate to Source Voltage Drain to Source Voltage vs. Gate to Source Voltage ID RDS IDM VGS RDS VGSS VGS VDS VGSS VDSS Body Diode Forward Characteristics VSD IS VDSS ISM Capacitances vs. Drain to Source Voltage VDS Ciss, Coss, Crss VDSS Gate Charge Characteristics Qg Vgs VGSS Table 4-5 Table 4-3 (p. 4-41) Conditions Table 4-4 (p. 4-44) Symbols MOSFET Symbol VGS VDS ID PulseWidth Keysight B1506A 3

213 Symbol f IS VSD RDS Ciss Coss Crss Qg Vgs Vgs(on) Vgs(off) Vds Id AC Keysight B1506A

214 Table 4-6 IGBT IGBT Maximum Ratings Parameter Collector to Emitter Voltage Gate to Emitter Voltage Pulsed Collector Current Pulsed Freewheeling Diode Current Symbol VCES VGES ICM IFM Table 4-7 Conditions Ratings Characteristics Parameters Parameter Symbol Conditions Ratings Collector to Emitter Breakdown Voltage BVCES IC ICM VGE VGES Collector Leakage Current ICES VCE VCES VGE VGES Gate Leakage Current IGES VGE VGES VCE VCES Gate Leakage Current (-) a IGES(-) VGE VGES VCE VCES Gate to Emitter Threshold VGE(th) IC ICM Voltage b 4-46 Keysight B1506A 3

215 Parameter Symbol Conditions Ratings Gate to Emitter Threshold Voltage (Constant Collector to Emitter Voltage) Collector to Emitter Saturation Voltage VGE(th) VCE VCES IC ICM VCE(sat) VGE VGES IC ICM PulseWidth Transconductance c gfs VCE VCES IC ICM Freewheeling Diode Forward Voltage VF IF IFM VF VCES Gate Resistance Rg VGE VGES Input Capacitance Cies VCE VCES f VGE VGES Output Capacitance Coes VCE VCES f VGE VGES Reverse Transfer Capacitance Cres VCE VCES f VGE VGES Total Gate Charge Qg Vce VCES f Vge(on) Vge(off) IC VGES VGES ICM Keysight B1506A

216 Parameter Symbol Conditions Ratings Gate to Emitter Charge Qge Vce VCES Vge(on) Vge(off) Ic VGES VGES ICM Gate to Collector Charge Qgc Vce VCES Vge(on) Vge(off) Ic VGES VGES ICM Gate to Emitter Plateau Voltage Vge(pl) Vce VCES Vge(on) Vge(off) Ic VGES VGES ICM a. b. c. B1506A-H20/H21 Symbols X Y X Y Ratings X Y 4-48 Keysight B1506A 3

217 Table 4-8 Characteristics Graphs Characteristics Symbols Ratings X Y X Y Output Characteristics VCE IC VCES ICM Transfer Characteristics VGE IC VGES ICM Collector to Emitter Voltage vs. Gate to Emitter Voltage Freewheeling Diode Forward Characteristics VCE VGE VCES VGES VF IF VCES IFM Capacitances vs. Collector to Emitter Voltage VCE Cies, Coes, Cres VCES Gate Charge Characteristics Qg Vge VGES Table 4-9 Table 4-7 (p. 4-46) Conditions Table 4-8 (p. 4-49) Symbols IGBT Symbol VGE VCE IC PulseWidth f IF VF Cies - - AC Keysight B1506A

218 Symbol Coes Cres Qg Vge Vge(on) Vge(off) Vce Ic Keysight B1506A 3

219 Table 4-10 BJT BJT Maximum Ratings Parameter Symbol Collector-Emitter Voltage Collector-Base Voltage Emitter-Base Voltage Collector Current Pulsed Collector Current Base Current Total Power Dissipation Operating Junction Temperature VCEO VCBO VEBO IC ICM IB PD Tj Table 4-11 Conditions Ratings Characteristics Parameters Parameter Symbol Conditions Ratings Collector Cutoff Current ICEO VCE VCEO IB IB Emitter Cutoff Current IEBO VEB VEBO IC IC DC Current Gain a hfe VCE VCEO IC ICM Keysight B1506A

220 Parameter Symbol Conditions Ratings Collector-Emitter Saturation Voltage VCE(sat) IC ICM IB IB Base-Emitter Saturation Voltage VBE(sat) IC ICM IB IB Base-Emitter ON Voltage a VBE(on) VCE VCEO IC ICM Collector-Emitter Breakdown Voltage V(BR)CEO IC IC IB IB Emitter-Base Breakdown Voltage V(BR)EBO IE IB IC IC a. B1506A-H20/H21 Table 4-12 Symbols X Y X Y Ratings X Y Characteristics Graphs Characteristics Symbols Ratings X Y X Y Output Characteristics VCE IC VCE O ICM DC Current Gain a IC hfe ICM Base-Emitter Voltage a IC VBE ICM a. B1506A-H20/H21 Table 4-11 (p. 4-51) Conditions Table 4-12 (p. 4-52) Symbols 4-52 Keysight B1506A 3

221 Table 4-13 BJT Symbol VBE VEB IB IE VCE IC hfe DC Keysight B1506A

222 Table 4-14 Diode Maximum Ratings Parameter Symbol Reverse Voltage Pulsed Forward Current VR IFM Table 4-15 Conditions Ratings Characteristics Parameters Parameter Symbol Conditions Ratings DC Blocking Voltage VDC IR Forward Voltage VF IF IFM Reverse Current IR VR VR Total Capacitance CT VR VR f Symbols X Y X Y Ratings X Y 4-54 Keysight B1506A 3

223 Table 4-16 Characteristics Graphs Characteristics Symbols Ratings X Y X Y Forward Characteristics VF IF IFM Reverse Characteristics VR IR VR Capacitance VR CT VR Table 4-17 Table 4-15 (p. 4-54) Conditions Table 4-16 (p. 4-55) Symbols Diode Symbol IR IF VR f VF CT AC Keysight B1506A

224 ETN DS 1. Identification DUT New Datasheet ETN DS 2. File > Save As ETN DS CustomMOSFET CustomMOSFET.pda-ds.zip ETN DS 3. File > Open ETN DS CustomMOSFET File > Save ETN DS ETN DS NOTE ETN DS Identification Device Type New Datasheet Identification Maximum Ratings Characteristics Parameters Characteristics Graphs 4-56 Keysight B1506A 3

225 Delete Setup Delete Duplicate Setup Duplicate Test Conditions Setup Setup Setup ETN DS ETN DS Keysight B1506A

226 I/V I/V I/V DC MOSFET IGBT I/V I/V MCSMU HVSMU HCSMU UHCU 4-58 Keysight B1506A 3

227 I/V GUI I/V GUI Figure 4-9 I/V GUI 3 a 1 b c 2 1. (p ) a. Setup (p ) b. Characteristics (p ) c. Connections (p ) 2. Automatic Data Save (p ) 3. (p ) (p ) Keysight B1506A

228 I/V (p. 4-91) (p. 4-92) Setup (p ) Characteristics (p ) Connections (p ) Setup DUT I/V Figure 4-10 Setup Device Type DUT MOSFET IGBT BJT Diode Generic2T Generic2T Generic 4-60 Keysight B1506A 3

229 I/V Generic MOSFET MOSFET I/V ID-VDS ID-VDS ID-VGS ID-VGS VGS(th) - RDS-ID - VDS-VGS - - RDS-VGS - - IDSS - IGSS - IS-VSD - IGBT IGBT I/V IC-VCE IC-VCE Keysight B1506A

230 I/V IC-VGE IC-VGE VGE(th) - VCE-VGE - - VCE(sat) - ICES - IGES - IF-VF BJT BJT I/V IC-VCE IC-VCE hfe DC hfe-ic VBE(on) - VBE-IC ICEO 4-62 Keysight B1506A 3

231 I/V - ICES - - IEBO - Diode Diode I/V IF-VF IR-VR Generic2T Generic2T I/V Conduction Isolation Generic Generic General settings (p. 4-64) Gate/Base drive settings (p. 4-65) Drain/Collector drive settings (p. 4-66) Keysight B1506A

232 I/V General settings DC DC Trace Mode Quick Fine Quick Trace Mode Step Time 500 s 5 s Aperture 2 s 20 ms Hold Time s Fine Trace Mode NPLC Delay Time s Hold Time s Auto Period 4-64 Keysight B1506A 3

233 I/V Pulse Period 5 ms 5 s Auto Period Aperture 2 s 20 ms Hold Time s Details Aperture Hold Time Gate/Base drive settings Bias (p ) Keysight B1506A

234 I/V Drain/Collector drive settings Pulse Bias (p ) Step (p ) Pulse Step (p ) Staircase Sweep (p ) Pulse Sweep (p ) Bias (p ) Pulse Bias (p ) Step (p ) Pulse Step (p ) Staircase Sweep (p ) Pulse Sweep (p ) Bias Source 4-66 Keysight B1506A 3

235 I/V Details (p. 4-73) Compliance Voltage Compliance UHCU Pulse Bias Source Details (p. 4-73) Base Compliance Voltage Compliance UHCU Keysight B1506A

236 I/V Pulse Delay Pulse Width Step Step Mode LinearSingle ListSingle Start Step Mode LinearSingle Stop Step Mode LinearSingle Details (p. 4-73) Number of Step Step Mode LinearSingle List Step Mode ListSingle 4-68 Keysight B1506A 3

237 I/V Compliance Power Compliance HVSMU Voltage Compliance UHCU Pulse Step Step Mode LinearSingle ListSingle Start Step Mode LinearSingle Stop Step Mode LinearSingle List Keysight B1506A

238 I/V Step Mode ListSingle Details (p. 4-73) Base Number of Step Step Mode LinearSingle Compliance Power Compliance HVSMU Voltage Compliance UHCU Pulse Delay 4-70 Keysight B1506A 3

239 I/V Pulse Width Staircase Sweep Sweep Mode LinearSingle LogSingle LinearDouble LogDouble Sweep Polarity Bipolar Positive Negative Start Stop Details (p. 4-73) Number of Step Compliance Keysight B1506A

240 I/V Power Compliance HVSMU Voltage Compliance UHCU Pulse Sweep Sweep Mode LinearSingle LogSingle LinearDouble LogDouble Sweep Polarity Bipolar Positive Negative Start Stop Details 4-72 Keysight B1506A 3

241 I/V (p. 4-73) Base Number of Step Compliance Power Compliance HVSMU Voltage Compliance UHCU Pulse Delay Pulse Width Table 4-18 Table 4-19 Keysight B1506A

242 I/V Table 4-18 MCSMU MCSMU MPSMU MPSMU V DC VPulse I DC IPulse Constant Step Sweep 4-74 Keysight B1506A 3

243 I/V Table 4-19 Open UHCU a UHCU HCSMU b HCSMU HVSMU HVSMU MPSMU MPSMU V c DC VPulse I c DC IPulse Constant Step Sweep a. B1506A-H50/H70/H51/H71 b. B1506A-H20/H21 c. UHCU Keysight B1506A

244 I/V Bias V I Constant Pulse Bias VPulse IPulse Constant Step V I Step Pulse Step VPulse IPulse Step Staircase Sweep V I Sweep Pulse Sweep VPulse IPulse Sweep 4-76 Keysight B1506A 3

245 I/V Characteristics I/V Characteristics Figure 4-11 c g b a Characteristics d b e f h a. Setup X Y X Y b. 2 : : Keysight B1506A

246 I/V X 2 A B A B Maker(B) B X B A B-A X Y B A B-A 1 X Y c. Line Dot Line & Dot d. Capture 10 Capture References References References Remove I/V e Keysight B1506A 3

247 I/V : : f. MOSFET ID-VDS IGBT IC-VCE g. X/Y X Y Setup X Y X/Y 3 Linear PositiveLog NegativeLog X Y MOSFET VDS: - ID: RDS: - VGS: - Keysight B1506A

248 I/V IG: IS: VSD: gfs: IGBT VCE: - IC: VGE: - IG: VF: IF: gfs: BJT VCE: - IC: VBE: - IB: hfe: DC Diode VF: IF: VR: IR: Generic2T V: 2-3 I: 2 R: 2-3 VGS: Keysight B1506A 3

249 I/V IG: 1 RGS: 1-3 Generic VDS: 2-3 ID: 2 RDS: 2-3 VGS: 1-3 IG: 1 RGS: 1-3 VSD: 3-2 IS: 3 h. Oscilloscope View Oscilloscope View Oscilloscope View Oscilloscope View (p. 82) Keysight B1506A

250 I/V Oscilloscope View MCSMU HVSMU HCSMU UHCU Characteristics Oscilloscope View Figure 4-12 Oscilloscope View b d a c a. Characteristics e 4-82 Keysight B1506A 3

251 I/V b. c. d. Y X [2 V/div 0 V] 2 V 0 V b. (p. 4-77) c. (p. 4-78) e. Aperture General settings Aperture Keysight B1506A

252 I/V Connections Setup Connections Figure 4-13 Connections 1 Base/Gate 2 Collector/Drain 3 Emitter/Source 4 Guard NOTE Base/Gate Resistor DUT 2. Collector/Drain 3. Emitter/Source DUT 2 2. Collector/Drain DUT 3. Emitter/Source Base/Gate MCSMU k 4-84 Keysight B1506A 3

253 I/V Collector/Drain Resistor Collector/Drain MVSMU k Automatic Data Save Automatic Data Save Data folder Recent data Figure 4-14 Automatic Data Save Device ID Comment DUT ID 10 ID ID ID ID Device ID ID Keysight B1506A

254 I/V Data Data folder Recent data Comment Browse (p. 4-92) more... Open Data File 4-86 Keysight B1506A 3

255 I/V Figure File Open Save Exit Open File I/V Edit Cut Copy Paste On-screen keyboard Measurement Start Measurement Measurement Keysight B1506A

256 I/V Repeat Measurement Stop Measurement Measurement Stop Measurement Measurement > Stop Stop View Go to Palette Figure 4-16 File File (p. 4-92) New Open... Open File Save Save Setup As... Save Setup File 4-88 Keysight B1506A 3

257 I/V Save Data As... Change Device ID... Recent Setup Files Exit Save Data File ID Change Device ID ID Change Device ID (p. 4-91) 10 I/V Edit View Edit Cut Copy Paste On-screen keyboard... View Go to Palette Main Window Main Window Fullscreen Keysight B1506A

258 I/V Color Settings... Color Setting Color Setting (p. 4-91) Measurement Configuration Help Measurement Start Measurement Repeat Measurement Measurement > Stop Stop Measurement Stop Stop Configuration Module... Module Configuration Module Configuration (p ) Help About... (p. 4-92) 4-90 Keysight B1506A 3

259 I/V Change Device ID Change Device ID ID File > Change Device ID... Device ID Add... Remove Execute Close ID ID Color Setting Color Setting Graph Background Graph Axis Graph Grid Graph Text Marker Trance View > Color Settings... Apply Keysight B1506A

260 I/V Reset OK Cancel URL Help > About... Table 4-20 *.pda-iv File ID File *.pda-iv.txt C:\Users\<user name>\ Documents\Keysight\Serie sb150x\powerdeviceanal yzer\iv\datastore 4-92 Keysight B1506A 3

261 I/V <DeviceID>_<TEMP>_<TIME>.pda-iv.txt <DeviceID>: ID <TEMP>: <TIME>: 1. <TEMP> (p. <thermometer>: Ch1 B1506A Channel 1 Ch2 B1506A Channel 2 Air DUT DUT 2. <TIME> Windows 1: _ : _ _PM 3. () 2 Device-1_@Ch1=30degC_Ch2=30degC_ _ (3).pda-iv.txt Keysight B1506A

262 NOTE B1506A-H21/H51/H71 3 Ciss Coss Crss DC 3 kv DC 100 V MOSFET IGBT 4-94 Keysight B1506A 3

263 GUI GUI Figure 4-17 GUI 3 a 1 b c 2 1. (p ) a. Setup (p ) b. Characteristics (p ) c. Connections (p ) 2. Automatic Data Save (p ) 3. (p ) Keysight B1506A

264 (p ) (p ) (p ) Setup (p ) Characteristics (p ) Connections (p ) Setup DUT Figure 4-18 Setup Device Type DUT MOSFET IGBT Diode Generic Generic MOSFET MOSFET 4-96 Keysight B1506A 3

265 Ciss, Coss, Crss - Ciss - Coss - Crss - Cgs, Cds, Cgd Cgs - - Cds - - Cgd - - Rg - Cox - Keysight B1506A

266 IGBT IGBT Cies, Coes, Cres - Cies - Coes - Cres - Cge, Cce, Cgc Cge - - Cce - - Cgc - - Rg - Diode Diode CT 4-98 Keysight B1506A 3

267 Generic Generic Sweep Voltage Between Terminal 2-3 Cp-G - - Sweep Voltage Between Terminal 1-3 Cs-Rs - - General settings Frequency MFCMU 1 khz 1 MHz AC Level MFCMU mv N PLC Power Line Cycle Phase Compensation MFCMU Auto Adaptive Auto MFCMU Details Keysight B1506A

268 AC Level N PLC Phase Compensation Base/Gate drive settings - - Base/Gate Voltage Bias: Bias 100 V +100 V Base/Gate Voltage Sweep: Start 100 V +100 V Stop 100 V +100 V Sweep Mode LinearSingle Start Stop LogSingle Start Stop LinearDouble Start Stop LogDouble Start Stop Keysight B1506A 3

269 Number of Step Hold Time s Delay Time s Zero Bias Time 1 0V s Keysight B1506A

270 MOSFET Ciss, Coss, Crss Ciss Coss Crss Cgs, Cds, Cgd Cgs Cds Cgd IGBT Cies, Coes, Cres Cies Coes Cres Cge, Cce, Cgc Cge Cce Cgc Details Number of Step Hold Time Delay Time Zero Bias Time Collector/Drain drive settings - - Collector/Drain Voltage Bias: Bias Keysight B1506A 3

271 3000 V V Collector/Drain Voltage Sweep: Start 3000 V V Stop 3000 V V Sweep Mode LinearSingle Start Stop LogSingle Start Stop LinearDouble Start Stop LogDouble Start Stop Number of Step Hold Time Delay Time Keysight B1506A

272 Zero Bias Time 1 0V MOSFET Ciss, Coss, Crss Ciss Coss Crss Cgs, Cds, Cgd Cgs Cds Cgd IGBT Cies, Coes, Cres Cies Coes Cres Cge, Cce, Cgc Cge Cce Cgc Details Number of Step Hold Time Delay Time Zero Bias Time Keysight B1506A 3

273 Characteristics Characteristics Figure 4-19 Characteristics c d b e f g a b a. Setup X Y X Y b. 2 : : X Keysight B1506A

274 2 A B A B Maker(B) B X B A B-A X Y B A B-A 1 X Y c. Line Dot Line & Dot d. Capture 10 Capture References References References Remove e Keysight B1506A 3

275 : : f. Ciss, Coss, Crss g. X/Y X Y Setup X Y X/Y 3 Linear PositiveLog NegativeLog Setup Capacitance Conductance Resistance Ciss Cp Capacitance G Conductance Rg Rs Resistance Cs Capacitance Cp Cp-G G Cp-G Keysight B1506A

276 Cs Cs-Rs Rs Cs-Rs Ls Ls-Rs Lp Lp-G R R-X X R-X G G-B B G-B VGS MOSFET VGE IGBT - - IG VDS MOSFET VCE IGBT - - ID MOSFET IC IGBT Keysight B1506A 3

277 Connections Setup Connections Figure 4-20 Connections a b a. 1 Base/Gate 2 Collector/Drain 3 Emitter/Source 4 Guard NOTE DUT 2. Collector/Drain 3. Emitter/Source Ciss, Coss, Crss b.details Details Keysight B1506A

278 Details CMU High/Low DUT 1 3 CMU High Low High DUT CMU High Low DUT CMU Low --- AC Guard/AC Short DUT 1 3 AC Guard DUT 2 3 Com. DUT Floating DUT DC. 2-Short-3 DUT Bias DUT 1 3 DC CMU SMU CMU CMU SMU DUT SMU Com. DUT --- Guard DUT 4 AC Guard Com. DUT Keysight B1506A 3

279 Table 4-21 Floating DUT 4 DC AC Guard Floating CMU High/Low AC Guard/AC Short Bias Guard Floating High --- Low --- Com. --- CMU Com. Com. AC Guard SMU Com. Com. AC Guard --- Floating --- CMU SMU Com. Terminal 2 SMU SMU Com. Terminal Short-3 CMU SMU Com. Terminal 2 SMU SMU Com. Terminal 2 High Low Low CMU Com. Com. AC Guard SMU Com. Com. AC Guard --- High Low Com Com. SMU Com. AC Guard Floating SMU SMU Com. AC Guard SMU CMU Com. AC Guard Low High Com. Com. SMU Com. AC Guard SMU SMU Com. AC Guard Com. CMU Com. AC Guard SMU CMU Com. AC Guard Low High Low Com. SMU Com. AC Guard SMU SMU Com. AC Guard Low High High Com. CMU CMU AC Guard Keysight B1506A

280 Automatic Data Save Automatic Data Save Data folder Recent data Figure 4-21 Automatic Data Save Device ID Comment Data DUT ID 10 ID ID ID ID Device ID ID Comment Keysight B1506A 3

281 Data folder Recent data Browse (p ) more... Open Data File Keysight B1506A

282 Figure 4-22 File File (p ) New Open... Open File Save Save Setup As... Save Setup File Save Data As... Save Data File Change Device ID... Recent Setup Files Exit ID Change Device ID ID Change Device ID (p ) Keysight B1506A 3

283 Edit View Calibration Edit Cut Copy Paste On-screen keyboard... View Go to Palette Main Window Main Window Fullscreen Color Settings... Color Setting Color Setting (p ) Calibration Start Calibration Calibration (p ) Select Data Keysight B1506A

284 Load Factory Default Measurement Configuration Help Measurement Start Measurement Stop Measurement > Stop Stop Measurement Stop Configuration Module... Module Configuration Module Configuration (p ) Help About... (p ) Keysight B1506A 3

285 Figure File Open Save Exit Open File Edit Cut Copy Paste On-screen keyboard Keysight B1506A

286 Measurement Start Measurement Measurement Stop Measurement Measurement > Stop Stop Stop Measurement View Go to Palette Calibration Start Calibration... Select Calibration Data... Calibration Calibration (p ) Keysight B1506A 3

287 Change Device ID Change Device ID ID File > Change Device ID... Device ID Add... Remove Execute Close ID ID Color Setting Color Setting Graph Background Graph Axis Graph Grid Graph Text Marker Trace First 1 Second 2 Third 3 Keysight B1506A

288 View > Color Settings... Apply Reset OK Cancel Calibration Calibration Calibration > Start Full Path Calibration Measurement Minimum Path Calibration Measurement Start Save and Apply Cancel Keysight B1506A 3

289 URL Help > About... Table 4-22 *.pda-cap File ID File *.pda-cap.txt C:\Users\<user name>\ Documents\Keysight\ SeriesB150x\PowerDevice Analyzer\DeviceCapacitan ce\datastore *.pda-cap.cal C:\ProgramData\Keysight\ SeriesB150x\PowerDevice Analyzer\DeviceCapacitan ce\usercalibrationdata C:\ProgramData\Keysight\ SeriesB150x\PowerDevice Analyzer\DeviceCapacitan ce\calibrationdata Keysight B1506A

290 <DeviceID>_<TEMP>_<TIME>.pda-cap.txt <DeviceID>: ID <TEMP>: <TIME>: 1. <TEMP> (p. <thermometer>: Ch1 B1506A Channel 1 Ch2 B1506A Channel 2 Air DUT DUT 2. <TIME> Windows 1: _ : _ _PM 3. () 2 Device-1_@Ch1=30degC_Ch2=30degC_ _ (3).pda-cap.txt Keysight B1506A 3

291 NOTE B1506A-H21/H51/H71 DUT JESD24-2 Qg Keysight B1506A

292 GUI GUI Figure 4-24 GUI 3 a 1 b c 2 1. (p ) a. Conditions (p ) b. Gate Charge Characteristics (p ) c. Switching Waveform (p ) 2. Automatic Data Save (p ) 3. (p ) Keysight B1506A 3

293 (p ) (p ) (p ) Conditions (p ) Gate Charge Characteristics (p ) Switching Waveform (p ) Conditions Table 4-23 (p ) Conditions Figure 4-25 Conditions Drain DUT Vds(off) Id(on) DUT - Current Load DUT Keysight B1506A

294 Current Load DUT Id(on) Gate Current Load DUT Vgs(off) DUT - Vgs(on) DUT - Ig Ig Ig Drain (p ) LoadVgs(off) - LoadVgs(on) - DUT Drain Id(on) - Vgs(off) Vgs(on) - DUT DUT - Vgs(on) Keysight B1506A 3

295 Table 4-23 Vds(off) B1506A-H21 B1506A-H51 B1506A-H71 0 V V Vds(off) -40 V +40 V -60 V +60 V Id(on) max. 20 A 450 A 1100 A Vgs(off) Vgs(on) Ig LoadVgs(off) LoadVgs(on) -30 V +30 V -30 V +30 V 1 A 1 A -30 V +30 V -30 V +30 V Keysight B1506A

296 Gate Charge Characteristics Gate Charge Characteristics Figure 4-26 d Gate Charge Characteristics e f c a b a. JESD24-2 (Derived) Drain (p ) Vgs-Qg (H.C.) Drain (p ) DUT UHCU HCSMU Vgs-Qg (H.V.) Keysight B1506A 3

297 Drain (p ) JESD24-2 (H.C.) Vgs-Qg (H.C.) JEDEC Standard JESD24-2 slope S 1 slope S 2 slope S 3 JESD24-2 (H.V.) Vgs-Qg (H.V.) JEDEC Standard JESD24-2 slope S 1 slope S 2 slope S 3 Vds-Qg (H.C.) Vgs-Qg (H.C.) - HCSMU - Vds-Qg (H.V.) Vgs-Qg (H.V.) - Id-Qg (H.C.) Vgs-Qg (H.C.) Id-Qg (H.V.) Vgs-Qg (H.V.) b. Y X Keysight B1506A

298 [2 V/div 0 V] 2 V 0 V c. 2 A B A B Maker(B) B X B A B-A X Y B A B-A d. Line Dot Line & Dot e. Capture 10 Capture References References References Remove Keysight B1506A 3

299 f. DUT Vgs(th) JESD24-2 (Derived) JESD24-2 (H.C.) JESD24-2 (H.V.) Vgs(pl) Qgs - JEDEC Standard JESD24-2 S 1 Qgd - JEDEC Standard JESD24-2 S 3 Qg(th) Vgs(off) Vgs(th) Qg(on) - Vgs(off) Vgs(on) C1 Qgs/{Vgs(pl)-Vgs(off)} JEDEC Standard JESD24-2 S 1 C2 {Qg(on)-Qgs-Qgd}/{Vgs(on)-Vgs(pl)} JEDEC Standard JESD24-2 S 2 S1 JEDEC Standard JESD24-2 S 1 S2 JEDEC Standard JESD24-2 S 2 Parameters Keysight B1506A

300 Switching Waveform DUT Switching Waveform - 2 High Current Switching Mode UHCU HCSMU Current Load (p ) DUT Drain (p ) Drain (p ) UHCU HCSMU UHCU 60 V HCSMU 20 A 20 V UHCU HCSMU UHCU 60 V HCSMU 20 V DUT High Voltage Switching Mode HVSMU DUT Drain (p ) High Current High Voltage Keysight B1506A 3

301 High Current Switching Mode Figure 4-27 Switching Waveform (High Current Switching Mode) c b a d a. Vds: - Id: Vgs: - Ig: LoadVgs: Current Load - LoadIg: Current Load b. Y X Keysight B1506A

302 [2 V/div 0 V] 2 V 0 V c. c. (p ) d. (p ) e. (p ) d. High Current Setup High Current Setup LoadIg Ig DUT Gate Resistor DUT Id(on) LoadVgs Id(on) - Id(on) - LoadVgs(off) - Vds(off) - Vgs(stop) - Vgs(start) Keysight B1506A 3

303 DelayVds DelayVgs OnPeriod Figure 4-28 High Voltage Switching Mode Switching Waveform (High Voltage Switching Mode) c b a d a. Vds: - Id: Vgs: - Ig: b. Keysight B1506A

304 Y X [2 V/div 0 V] 2 V 0 V c. c. (p ) d. (p ) e. (p ) d. Hight Voltage Setup High Voltage Setup Ig DUT Gate Resistor DUT Vds(off) - Vgs(stop) - Vgs(start) - DelayVgs - - OnPeriod Keysight B1506A 3

305 Automatic Data Save Automatic Data Save Data folder Recent data Figure 4-29 Automatic Data Save Device ID Comment Data DUT ID 10 ID ID ID ID Device ID ID Comment Keysight B1506A

306 Data folder Recent data Browse (p ) more... Open Data File Keysight B1506A 3

307 Figure File Open Save Exit Open File Edit Cut Copy Paste On-screen keyboard Keysight B1506A

308 Measurement Start Measurement Measurement Measurement > Stop Stop Measurement Stop Stop Measurement View Go to Palette Calibration Start Calibration... Select Calibration Data... Calibration Calibration (p ) Keysight B1506A 3

309 Figure 4-31 File File (p ) New Open... Open File Save Save Setup As... Save Setup File Save Data As... Save Data File Change Device ID... Recent Setup Files Exit ID Change Device ID ID Change Device ID (p ) 10 Keysight B1506A

310 Edit View Calibration Edit Cut Copy Paste On-screen keyboard... View Go to Palette Main Window Main Window Fullscreen Color Settings... Color Setting Color Setting (p ) Calibration Start Calibration Calibration (p ) Select Data Keysight B1506A 3

311 Load Factory Default Measurement Configuration Help Measurement Start Measurement Stop Measurement > Stop Stop Measurement Stop Configuration Module... Module Configuration Module Configuration (p ) Help About... (p ) Keysight B1506A

312 Change Device ID Change Device ID ID File > Change Device ID... Device ID Add... Remove Execute Close ID ID Color Setting Color Setting Graph Background Graph Axis Graph Grid Graph Text Marker Gate Charge Characteristics JESD24-2 (H.C.) Vgs-Qg (H.C.) Vds-Qg (H.C.) Id-Qg (H.C.) Keysight B1506A 3

313 JESD24-2 (H.V.) Vgs-Qg (H.V.) Vds-Qg (H.V.) Id-Qg (H.V.) JESD24-2 (Derived) Switching Waveform Vds Id Vgs Ig LoadVgs LoadIg View > Color Settings... Apply Reset OK Cancel Calibration Calibration Calibration > Start Keysight B1506A

314 Default Calibration Advanced DUT User Series Resistor Measure Save and Apply Cancel DUT User Series Resistor DUT Measure Clear Close URL Help > About Keysight B1506A 3

315 Table 4-24 *.pda-qg File ID File *.pda-qg.txt C:\Users\<user name>\ Documents\Keysight\ SeriesB150x\PowerDevice Analyzer\GateCharge\Data Store *.pda-qg.cal C:\ProgramData\Keysight\ SeriesB150x\PowerDevice Analyzer\GateCharge\User CalibrationData C:\ProgramData\Keysight\ SeriesB150x\PowerDevice Analyzer\GateCharge\Cali brationdata Keysight B1506A

316 <DeviceID>_<TEMP>_<TIME>.pda-qg.txt <DeviceID>: ID <TEMP>: <TIME>: 1. <TEMP> (p. <thermometer>: Ch1 B1506A Channel 1 Ch2 B1506A Channel 2 Air DUT DUT 2. <TIME> Windows 1: _ : _ _PM 3. () 2 Device-1_@Ch1=30degC_Ch2=30degC_ _ (3).pda-qg.txt Keysight B1506A 3

317 NOTE B1506A-H21/H51/H71 1 Keysight B1506A

318 GUI GUI Figure 4-32 GUI 3 a b 1 c 2 1. (p ) a. Conditions (p ) b. Inputs (p ) c. Results (p ) 2. Automatic Data Save (p ) Keysight B1506A 3

319 3. (p ) (p ) (p ) (p ) Conditions (p ) Inputs (p ) Results (p ) Conditions Conditions Figure 4-33 Conditions Load Type Inductive: Resistive: Keysight B1506A

320 Inputs DUT I/V Inputs Figure 4-34 Inputs c a d e f g h b a. Device Type DUT MOSFET IGBT Keysight B1506A 3

321 b. Switching Frequency Start Stop Sweep Mode Linear: Log: Number of Step c. Drive Conditions MOSFET f: Switching Frequency Vgs(on): Gate-source turn on Voltage - Vgs(off): Gate-source turn off Voltage - Id: Drain Current Vds: Drain-source Voltage - Rg(ext): External Gate Resistance Keysight B1506A

322 Irms: Effective Drain Current Irms Id (Drain Current) D (Duty Cycle) D: Duty Cycle 0 1 IGBT f: Switching Frequency Vge(on): Gate-Emitter turn on Voltage - Vge(off): Gate-Emitter turn off Voltage - Ic: Collector Current Vce: Collector-Emitter Voltage - Rg(ext): External Gate Resistance Irms: Effective Collector Current Irms Ic (Collector Current) D (Duty Cycle) D: Duty Cycle 0 1 d. Device Parameters MOSFET Qg(on): Gate Charge at on Keysight B1506A 3

323 Qg(on) - Qg(off) Vgs 0 V Qg 0 C Qg(off): Gate Charge at off Qg(on) Qg(off) Vgs 0 V Qg 0 C Rg: Gate Resistance Qsw: Gate Switching Charge (Crss) - - Mirror Charge Vgs(pl): Gate Plateau Voltage Rds(on): On Resistance IGBT Qg(on): Gate Charge at on Qg(on) Qg(off) Vgs 0 V Qg 0 C Qg(off): Gate Charge at off Qg(on) Qg(off) Vgs 0 V Qg 0 C Rg: Gate Resistance Qsw: Gate Switching Charge (Cres) - - Mirror Charge Keysight B1506A

324 Vge(pl): Gate Plateau Voltage Vce(sat): Saturation Voltage - Drive Condition Ic e.output Characteristics I/V Load Measurement Data X Y MOSFET ID-VDS RDS-ID VDS-VGS RDS-VGS I/V Drive Conditions Vgs(on) Device Parameters Rds(on): On Resistance IGBT IC-VCE VCE(sat) VCE-VGE I/V Drive Conditions Vge(on) Keysight B1506A 3

325 Device Parameters Vce(sat): Saturation Voltage f.gate Resistance Rg Load Measurement Data Rg X Y MOSFET Rg Drive Conditions Vgs(off) Device Parameters Rg: Gate Resistance IGBT Rg Drive Conditions Vge(off) Device Parameters Rg: Gate Resistance g. Capacitance Load Measurement Data X Y MOSFET Ciss, Coss, Crss Coss Crss Keysight B1506A

326 Coss Crss Drive Conditions Vgs(off) Vds(off) Device Parameters Qsw: Gate Switching Charge 0 V Vds(off)-Vgs(off) Crss Qsw IGBT Cies, Coes, Cres Coes Cres Coes Cres Drive Conditions Vge(off) Vce(off) Device Parameters Qsw: Gate Switching Charge 0 V Vce(off)-Vge(off) Cres Qsw h. Gate Charge Load Measurement Data X Y Keysight B1506A 3

327 MOSFET Drive Conditions Vgs(on): Gate-source turn on Voltage Vgs(off): Gate-source turn off Voltage Id: Drain Current Vds: Drain-source Voltage Device Parameters Qg(on): Gate Charge at on Qg(off): Gate Charge at off Qsw: Gate Switching Charge (Crss) Vgs(pl): Gate Plateau Voltage IGBT Drive Conditions Vge(on): Gate-Emitter turn on Voltage Vge(off): Gate-Emitter turn off Voltage Ic: Collector Current Vce: Collector-Emitter Voltage Device Parameters Qg(on): Gate Charge at on Qg(off): Gate Charge at off Qsw: Gate Switching Charge (Cres) Vge(pl): Gate Plateau Voltage Results Inputs Keysight B1506A

328 Figure 4-35 Results a b a. Index Inputs Conduction Loss MOSFET IGBT Coss (or Coes) Loss MOSFET = = Keysight B1506A 3

329 IGBT = = Switching Loss Conditions Load Type Inductive (MOSFET) Load Type Resistive (MOSFET) Conditions Load Type Inductive (IGBT) Load Type Resistive (IGBT) Driving Loss MOSFET IGBT Total Loss Keysight B1506A

330 b. X Conduction Loss Output Capacitance Loss Switching Loss Driving Loss X Y Automatic Data Save Automatic Data Save Data folder Recent data Figure 4-36 Automatic Data Save Device ID Comment Data DUT ID 10 ID ID ID ID Device ID ID Comment Keysight B1506A 3

331 Data folder Recent data Browse (p ) more... Open Data File Keysight B1506A

332 Figure File Open Save Exit Open File Edit Cut Copy Paste On-screen keyboard Calculation Start Calculation Stop Measurement Measurement > Stop Stop Keysight B1506A 3

333 Stop Calculation View Go to Palette Figure 4-38 File File (p ) New Open... Open File Save Save Setup As... Save Setup File Save Data As... Save Data File Change Device ID... ID Change Device ID ID Change Device ID (p ) Keysight B1506A

334 Recent Setup Files Exit 10 Edit View Edit Cut Copy Paste On-screen keyboard... View Go to Palette Main Window Main Window Fullscreen Color Settings... Color Setting Color Setting (p ) Keysight B1506A 3

335 Calculation Help Calculation Start Calculation > Stop Stop Calculation Stop Stop Help About... (p ) Keysight B1506A

336 Change Device ID Change Device ID ID File > Change Device ID... Device ID Add... Remove Execute Close ID ID Color Setting Color Setting Graph Background Graph Axis Graph Grid Graph Text Trend Driving Loss Output Capacitance Loss Switching Loss Conduction Loss Trace Keysight B1506A 3

337 View > Color Settings... Apply Reset OK Cancel URL Help > About... Table 4-25 *.pda-pl File ID File *.pda-pl.txt C:\Users\<user name>\ Documents\Keysight\Serie sb150x\powerdeviceanal yzer\powerloss\datastore Keysight B1506A

338 <DeviceID>_<TIME>.pda-pl.txt <DeviceID>: ID <TIME>: Device-1_ _ pda-pl.txt 1. <TIME> Windows 1: _ : _ _PM 2. () 2 Device-1_ _ (3).pda-pl.txt Keysight B1506A 3

339 GUI 2 2 GUI GUI GUI Keysight B1506A

340 GUI GUI GUI Figure 4-39 GUI (p ) DUT 2. (p ) 3. (p ) DUT Idle DUT Thermo-Trigger (p ) Thermal Source (p ) Keysight B1506A 3

341 B1506A DUT Ch.1 1 Ch.2 2 Ch.1 2 ThermoStream ThermalPlate Channel 1 Channel 2 ThermoStream Air DUT DUT ThermalPlate Plate Switch View Minimize Move to the Initial Position Exit Keysight B1506A

342 GUI GUI Figure 4-40 GUI 2 a b c 1 d 1. (p ) a. Thermal Source (p ) b. Monitor (p ) c. Configuration (p ) d. Thermo-Trigger (p ) 2. (p ) (p ) (p ) Keysight B1506A 3

343 (p ) Thermal Source (p ) Monitor (p ) Configuration (p ) Thermo-Trigger (p ) Thermal Source Monitor Figure 4-41 ThermoStream ThermalPlate Monitor Monitor Trigger Status B1506A DUT Idle DUT Thermo-Trigger (p ) DUT Keysight B1506A

344 Ch.1 1 Ch.2 2 Ch.1 2 ThermoStream ThermalPlate Channel 1 Channel 2 ThermoStream Air DUT DUT ThermalPlate Plate Configuration B1506A Figure 4-42 Configuration a b c Configuration a. B1506A Thermometer Keysight B1506A 3

345 B1506A Reading Time Span Channel 1 Channel 2 b. ThermoStream ThermalPlate 1 s 2 s 3600 s 5 s 1 2 Thermometer Reading Time Span 1 s 2 s 3600 s 5 s Air (ThermoStream) DUT (ThermoStream) DUT Plate (ThermalPlate) Keysight B1506A

346 GPIB GPIB NOTE B1506A GPIB B1506A GPIB VISA Address VISA GPIB0::9::INSTR Connect/Disconnect VISA Address Connection Status Connected Disconnected c. Optional Commands Optional Commands Initialization Finalization Keysight B1506A 3

347 Thermo-Trigger Figure 4-43 Thermo-Trigger Thermo-Trigger d c a a. DUT 100 b. Insert Condition Insert Control b Keysight B1506A