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mm 08 8 0 08 0 /"/" /"/8" /8"0.08" /8"/" /"/" /"/8" /8"/" /"/8" /"/8" T P U Q mm 08 8 0 08 0 /"/" /"/8" /8"0.08" /8"/" /"/" /"/8" /8"/" /"/8" /"/8" Q QT QP QU () () Q Q Series

Q Series (0) Q0 Q0 Q0 Q0 W PF.0MPa 000.0..0. (MPa).0..0 0. 0 0 0 0 80 00 0 0 0 0 00 () /8" /" /" ø /" ø /8" /" "

PT M W " " " " " " 8" " 8" " " 8" " 8" " " " " " " " 8" 8" " " "... 0 0... 0 0.. 8. 7.. 8. 8. 8 8 8 7 8 7 0 8 Q-M Q-M Q-M QD-M Q-M QF-M Q-M Q-M Q-M QD-M Q-M Q-M Q-M QD-M Q-M Q-M Q-M QD-M RPT M W ø ø ø ø ø ø " " " 8" 8" " " "... 0 0... 0 0.. 8. 7.. 8. 8. 8 8 8 7 8 7 0 8 Q-M Q-M Q-M Q-M Q-M Q-M Q-M Q-M Q-M Q-M Q-M Q-M Q-M Q-M Q-M Q-M Q-M Q-M Q-M R(PT) () W () W Q Series

Q-F RcPT M W ø ø ø ø ø ø " " " 8" 8" " " "... 0 0 Y........7. 7.. 0 8 Q-F Q-F Q-F Q-F Q-F Q-F Q-F Q-F Q-F Q-F Q-F Q-F Q-F Q-F Q-F Q-F Q-F Q-F RcPT M W " " " " " " 8" " 8" " " 8" " 8" " " " " " " " 8" 8" " " "... 0 0 Y........7. 7.. 0 8 Q-F Q-F Q-F QD-F Q-F QF-F Q-F Q-F Q-F QD-F Q-F Q-F Q-F QD-F Q-F Q-F Q-F QD-F øy () Rc(PT) W W Q Series

/ Q-M RPT M " " " " " " 8" " 8" " " 8" " 8" " " " " " " " 8" 8" " " " 0... 0 8 8.. 8 8 0.. 7.. 8 Q-M Q-M Q-M QD-M Q-M QF-M Q-M Q-M Q-M QD-M Q-M Q-M Q-M QD-M Q-M Q-M Q-M QD-M RPT M ø ø ø ø ø ø " " " 8" 8" " " "... 0 8 8.. 8 8 0 8 0.. 7.. Q-M Q-M Q-M Q-M Q-M Q-M Q-M Q-M Q-M Q-M Q-M Q-M Q-M Q-M Q-M Q-M Q-M Q-M R(PT) () () Q Series

SM Q-F RcPT M ø ø ø ø ø ø " " " 8" 8" " " "... 0 8 0. 8.. 8 8 0 8 Q-F Q-F Q-F Q-F Q-F Q-F Q-F Q-F Q-F Q-F Q-F Q-F Q-F Q-F Q-F Q-F Q-F Q-F RcPT M " " " " " " 8" " 8" " " 8" " 8" " " " " " " " 8" 8" " " " ø. ø. ø. ø ø ø. ø. ø ø. ø. ø. ø ø ø. ø. ø 0... 0 Y Y 8 0. 8.. 8 8 8 Q-F Q-F Q-F QD-F Q-F QF-F Q-F Q-F Q-F QD-F Q-F Q-F Q-F QD-F Q-F Q-F Q-F QD-F ØY () Rc(PT) 7 Q Series

SM / RPT F M " " " 8" 8" " " " ø ø 8 8 0..... 0... 8.. 8... 0 8.... " " " " " " 8" " 8" " " 8" " 8" " " " " QRD-M QRD-M QR-M QR-M QR-M QR-M QR-M QR-M QRD-M QR-M QR-M QR-M QRF-M QR-M QRD-M QR-M QR-M QR-M RPT F M " " " 8" 8" " " " ø ø 8 8 0..... 0.... 8.. 8... 0 8... QR-M QR-M QR-M QR-M QR-M QR-M QR-M QR-M QR-M QR-M QR-M QR-M QR-M QR-M QR-M QR-M QR-M QR-M ø ø ø ø ø ø QR-M R(PT) -Ø () () () F 8 Q Series

SM RcPT F M ø ø 8 8 0.... 0 Y ø. ø. ø ø ø. ø. ø ø... 7. 7.7 " " " " " " 8" " 8" " " 8" " 8" " " " " " " " 8" 8" " " " QRD-F QRD-F QR-F QR-F QR-F QR-F QR-F QR-F QRD-F QR-F QR-F QR-F QRF-F QR-F QRD-F QR-F QR-F QR-F... 8.. 8. RcPT F M " " " 8" 8" " " " ø ø 8 8 0.... 0 Y ø. ø. ø ø ø. ø. ø ø..... 7. 7.7 QR-F QR-F QR-F QR-F QR-F QR-F QR-F QR-F QR-F QR-F QR-F QR-F QR-F QR-F QR-F QR-F QR-F QR-F ø ø ø ø ø ø. 8.. 8. QR-F Rc(PT) () () F ØY () -Ø Q Series

SM / RPT F M " " " 8" 8" " " " ø ø 8 8 0..... 0... 8.. 8... 0 8.... " " " " " " 8" " 8" " " 8" " 8" " " " " QD-M QD-M Q-M Q-M Q-M Q-M Q-M Q-M QD-M Q-M Q-M Q-M QF-M Q-M QD-M Q-M Q-M Q-M RPT F M " " " 8" 8" " " " ø ø 8 8 0..... 0.... 8.. 8... 0 8... Q-M Q-M Q-M Q-M Q-M Q-M Q-M Q-M Q-M Q-M Q-M Q-M Q-M Q-M Q-M Q-M Q-M Q-M ø ø ø ø ø ø Q-M R(PT) -Ø () () F () 0 Q Series

SM ØY RcPT F M ø ø 8 8 0.... 0 Y ø. ø. ø ø ø. ø. ø ø.. 7. 7.7 " " " " " " 8" " 8" " " 8" " 8" " " " " " " " 8" 8" " " " QD-F QD-F Q-F Q-F Q-F Q-F Q-F Q-F QD-F Q-F Q-F Q-F QF-F Q-F QD-F Q-F Q-F Q-F. 8.. 8... RcPT F M " " " 8" 8" " " " ø ø 8 8 0.... 0 Y ø. ø. ø ø ø. ø. ø ø.. 7. 7.7 Q-F Q-F Q-F Q-F Q-F Q-F Q-F Q-F Q-F Q-F Q-F Q-F Q-F Q-F Q-F Q-F Q-F Q-F ø ø ø ø ø ø. 8.. 8. Q-F -Ø Rc(PT) F () () 7.. Q Series

SM SM / Q QT M ø ø 8 8... 0... 8. QT QT QT QT QT QT QT QT QT ø ø ø ø ø 8 8 0 0... 0... 8. QT QT QT QT QT QT QT QT QT " " " 8" " " 8" " " F M M ø ø 8 0... 0... 8. Q Q Q Q Q Q Q Q Q ø ø ø M ø ø 8 0... 0... 8. Q Q Q Q Q Q Q Q Q " " " 8" " " 8" " " F Ø () () -Ø () () () F Q Series

SM / K J M t W ø. ø0. ø. ø0.... 0 7 8 8 0 08 QP QP QP QP QP QP QP QP QP ø ø ø 8 0 7 7 7 0 0 8 ø. ø0. ø. ø0. 0... 0 7 7 7 0 0 7 8 8 0 08 QP QP QP QP QP QP QP QP QP " " " 8" " " 8" " ". 0 7. 0 7 K J M t W M W... 0 77 88 7 8 QU QU QU QU QU QU QU QU QU ø ø ø 8 8 0 0... 0 0 0 77 88 7 8 QU QU QU QU QU QU QU QU QU " " " 8" " " 8" " " M W QU () () W ØK J () () (max.t) W QP W W Q Series

SM SM SM SM T P U mm 08 8 0 08 0 /"/" /"/8" /8"0.08" /8"/" /"/" /"/8" /8"/" /"/8" /"/8" t S Q Q Series

Q P 07 øø øø ø ø ø 0 0 0 08 0 /8"0.08" /"/8" /"/" /8"/" /"/8" /"/8" 0 0 07 classm. classm. Q U 0 U U classm. classm. øø øø ø ø ø 0 0 0 08 0 /8"0.08" /"/8" /"/" /8"/" /"/8" /"/8" 0 0 07 Q P classm. classm. Q Series

ø ø /8" /" ø /" /8" /" /" Q-07 Q-07 Q-0 Q-0 Q /"/8" /8"Q-U0 /" Q-U07 /8" Q-U0 ss'y q Q, Series M-0- Q Series

00% cetic acid 00% cetone 0% mmonium fluoride 0% mmonium hydroxide 00% utyl acetate 00% Methylne chloride 8% ydrochloric acid 0% ydrofluoric acid 0% ydrogen peroxide 00% Methanol Methyl ethyl Ketone 70% itric acid 8% Phosphoric acid 8% austic potash 00% Sulfuric acid Toluene Xylene 00% Sodium hydroxide..- 00%..-Trichloroethane Rhosphorus pentachloride Isobutyl alcohol Isopropyl alcohol Ozone thyl acetate Pure water itrogen Ultrapure water Tmah 00 SM 7

q SMM-0- Q Series q w e r t q w q Q, Series M-0- w /8..0.0. 7..0.0.0 m eqq /8 / /8 / / m 0.0. 0.8..0...0.0.7 r m 0.0.7.....8.

q w e r a) b) c) t q q wq q mm q q w e øø ø ø ø /8"0.08" /"/8" /"/" /8"/" /"/8" /"/8".0.0 8.0 0.0.0.0..7...7.0 0.0 0. 0. 0. 0. 0. 0. 0. 0..0. 0. 0.8.. (mm) (mm) w SMM-0- Q Series 0. 0. 0. 0. 0. 0.