1. ( ) (CR) VOC) VOC VOC CR (p&t) GC/MS VOC 2mm 50 100ml/min P&T 12mm 1,000 3,000m min P&T V( 2.CR 2-1CR Fig.1 12mmi.dx110mm 2.5g TenaxGR AL-410 AL-430 AC100V 1,000ml/min VOC 10 ( 3 ) VOC P&T-GC/MS
JHS-100/100A 250 10 VOC ( ) (255 20 ) GC VOC GC/MS ( ) GC/MS: QPSOOO (EI); :30mx0.25mm,0.25 m,db-1 :50 (3minhold)-300,10 /min. : 1/10 2-2 P&T(JHS-100/100A) GC CR 100ml VOC CR 100ml CR VOC 10 1,000 ml 1/10 1/50
2-3 VOC 10 20ppb VOC 10L 13g 100ppm 1.6 l 50 ( 500ml ) 100ml/min (Tenax ) 5 FID-GC JHS-100/100A 2-4 30m 20L Fig.2 CR ~ 20ppb
2-5 CR CR 15L Fig.3 Room A Room B ( 10ppb) 4 CFC13, ppb 5 CR 2-6 CR CR 2 20L Fig.4 CR
CR N- (NMP) 190ppb 55ppb 2 ( ) NMP
1.8 2-7 CR 2-6 CR VOC Fig.5 Fig 4 Tota lvoc amt. ( ) ( 2 ) VOC 14% ( 3 ) NMP IPA( ) ( ) ( 4 ) VOC
CR VOC 2-8 VOC 3 VOC 2-7 1 0 3 Fig.6 3 (Fig.5 4 ) 10 VOC
3. VOC 3-1 VOC 3.5'' (HDD) Fig.7 HDD VOC GC/MS Table l 1 P&T VOC VOC 2 6 ( ) 3 3.5 HD VOC 2 HDD VOC AQ-200 VOC SW-8
110mm) # # 1 JHS-100/A P&T JHS-100A ( 12 350 2 O-HDD+JHS- 100/A HD VOC HDD : 3 HD-3.5+JHS- 100/A 3.5 HD VOC 3.5 2.5 HD1 10 98 20mm 200 4 HD-5.25+JHS -100/A 5.25 Hd VOC 5.25 3.5 2.5 HD1 10 150 20mm 200 5 HDD-200+JH S-100/A 3.5 HDD 3.5 HDD{150 W 30 H VOC 110mm}1 200x20mm 200 6 HDD-500+JH S-100/A 5.25 HDD 5.25 HDD{205(W) 145(H) 35 VOC }1 3-2 VOC (O-HDD ) HD VOC VOC (O-HDD ) Fig 8
HDD 200ml/min HDD 65 HDD 200ml/min 3 VOC 3-3 HD VOC VOC O-HDD 3.5 HDD 1.2Gb 60 VOC Fig.9 Camphen, -Methystyrene HDD JHS-100A Fig.9 GC/MS MS
3-4 3.5 HD 5.25 HD VOC 3.5 HD 5.25 HD VOC VOC HD-3.5 HD-5.25 Fig 9 HD-3.5 HD-3.5 JHS-100/A VOC HD-5.25 - HDD-200 JHS-100/A VOC ( ) JHS-100/A 3-5 3.5 HD HD 3.5 HD1 VOC Fig.10 HDD HD 200 30 2-
3-6 3.5 HDD VOC HDD VOC VOC HDD-200 Fig.11 HDD 200 mm x 40 mm VOC HDD-200 3.5 HDD l 600ml 600ml
3-7 HDD-200 HDD HDD VOC Fig.12 160 30 HDD TC-5HT,0.32 x 30m,40 (3min) 300,10 /min, /f-250 1/30 2ml/min VOC VOC VOC 16.5ng( VOC ) 310ng VOC 16
3-8 HDD-200 HDD 3-7 HDD ( ) VOC Fig.13 VOC VOC 600ng VOC 156ng VOC 3.8 HDD VOC
,, SW-8, (JHS 100/100A ) GC/MS 8 500 ß@ 1 8 5.25 JHS-100/100A-GC/MS
: 400 : ( 10ml 2.5g TenaxTA ) 150ml/min 30 JHS-100A: JHS-100A :250,15 ( ) : 50 :255 25 GC/MS: QP-5000,EI.70eV :DB-1,0.25mmx30m,0.2 :40(3)-300 10 /min SW-8 obnohy Ł x 8-500 2 SW-8,,400 30 2 4.5 MS 2,000,000, 4.5 3, (DMP) C21 C25 n 10 ng 400 30, MS 3,777,000, 1/5 100 300 100 /min n-,400 DMP, n-,20pg
(p&t) ( OC) VOC,P&T, 95`-3 1 SW-8! 8 1 IC 400 ( 10ml 2.5g Tenax TA ) 150ml/min 30 JHS-100A : 250,15 : 50 : 255 GC/MS QP-5000 EI,70e : DB-1 0.25mm x 30m 0.25 40(3) 300 10 /min
2 400 30 C12 1-Dodecene (n=6) 485 548 400 2, 24 SW-8 3, ( ), (DMP) 17.8 400
œ{ H I B 1 VOC 3.5 HDD Fig 1 HDD VOC GC/MS 2 3.5 HD Fig 2 (HD-3.5 +JHS-100A-GC/MS) Fig.3 :180,30min :60ml/min MS(HP5973,EI,70eV) JHS-100A :200 : -60 :PTE-5, 0.25mmX30m.40 (3 )-280,10 /min