2 / センサの構造と動作原理 Sensor structure and measurement principle Fig-1 sensor package and sensor element Vout2 Piezo element Vdd Vout2 A:Up Vdd B This

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DOCUMENT No. : (Page 1/19) 1. 弊社製品番号 ALPS product No. 2. 製品概要 General description 本製品は シリコンダイアフラム上にピエゾ抵抗が形成されており 荷重が加わるとダイアフラムが撓むことでピエゾ抵抗に応力が発生し 抵抗率が変化するピエゾ抵抗効果を利用した荷重センサ This product is a force sensor using effect of piezo resistive bridge circuit formed on silicondiaphragm. Piezo resistance is changed according to strain by applying force to the diaphragm. 3. 製品の特徴 小型低背です Feature PKG サイズが小さくスペースを取らないため 様々な製品デザインに対応出来ます 感度が高く 直線性に優れます 0.01N レベルの小さな応力から検出可能です 信頼性に優れます 100 万回の荷重試験後で 特性の変化は有りません Small Footprint and Low Profile User design flexibility by small package. High Sensitivity and Good Linearity Precisely detect micro force less than 0.01 N. High Durability No characteristics change after 1 million cycles.

2 / 19 4. センサの構造と動作原理 Sensor structure and measurement principle Fig-1 sensor package and sensor element Vout2 Piezo element Vdd Vout2 A:Up Vdd B This produc A D C B:Down D:Down Vout1 C:Up Vout1 Fig-2 sensor structure Piezo element Force Diaphragm Fig-3 measurement principle (1) Diaphragm is strained by getting force from outside. (2) Resistance of Piezo element on the diaphragm is changed by getting the strain diaphragm deformation (3) Analog voltage is outputted in response to the force change. (Vout=Vout1-Vout2)

5. ブロック図 Functional block diagram 3 / 19 No1 Vdd No2 V2 No3 No4 V1 端子番号 /Pin No. 記号 /Name 機能 /Function No1 Vdd 電源 /Supply Voltage No2 V2 - 出力信号 /Output(-) No3 No4 V1 + 出力信号 /Output(+) *Output = V1-V2 6. 外形図 Full view 0.20mm 0.10mm This produc 0.66mm 2.0mm 1.6mm 1 2 2 1.2mm 1 5 2.0mm 1.4mm 0.56mm 0.4mm 4 1.6mm 3 3 4 0.2mm 0.56mm TOP VIEW BOTTOM VIEW 端子番号 /Pin No. 記号 /Name 機能 /Function 1 Vdd 電源 /Supply Voltage 2 V2 - 出力信号 /Output(-) 3 4 V1 + 出力信号 /Output(+) 5

4 7 5 TITLE 4 / 19 7. 推奨回路 Recommended circuit 7-1. アナログ回路例 Example circuit for analog output. Vcc Sensor AD623 C Vdd V1 V2 RG 3 1 8 2 RG RG +VS OUTPUT REF -VS 6 R1 Vout R2 推奨値 Recommended value 電源電圧 Source Voltage 計装アンプ Instrumentation amplifier 増幅率調整抵抗 Gain adjustment Resistance オフセット調整抵抗 Offset adjustment Resistance Vcc [V] 3.3 - AD623 RG [kω] 1.3 R1 [kω] 10.0 R2 [kω] 3.0 コンデンサ Capasitance 感度 Sensitivity C [uf] 0.1 Sens [mv/n] ( 952 ) 参考 Reference 増幅率 Gain = ( 1 + 100kΩ / RG ) オフセット Offset voltage = R2 / ( R1+R2 ) * Vcc 出力 OUTPUT = Gain*Vin + Offset voltage

5 / 19 7-2. デジタル回路例 Example circuit for digital output. [1 Sensor use] AVdd C LP38690DT-1.8 IN OUT C Sensor Vdd V1 V2 V1 P1 G1 N1 DVdd ALPS original ASIC AVdd SDA V2 P2 G2 N2 D A SCL Alps original ASIC is supplied if there is a request. 推奨値 Recommended value アナログ電源電圧 Analog Source Voltage デジタル電源電圧 Digital Source Voltage レギュレータ Regulator コンデンサ Capasitance 感度 Sensitivity 動作荷重範囲 Force range AVdd [V] 2.4~3.6 DVdd [V] 1.7~AVdd - LP38690DT-1.8 C [uf] 0.1 Sens [Count/N] ( 1150 ) Frng [N] 0~3.5

6 / 19 [2 Sensor use] AVdd LP38690DT-1.8 IN OUT Sensor1 Vdd V1 V2 V1 P1 G1 N1 DVdd AVdd SDA C C Sensor2 Vdd V1 V2 V2 P2 G2 N2 ALPS original ASIC D A SCL Alps original ASIC is supplied if there is a request. 推奨値 Recommended value アナログ電源電圧 Analog Source Voltage デジタル電源電圧 Digital Source Voltage レギュレータ Regulator コンデンサ Capasitance 感度 Sensitivity 動作荷重範囲 Force range AVdd [V] 2.4~3.6 DVdd [V] 1.7~AVdd - LP38690DT-1.8 C [uf] 0.1 Sens [Count/N] ( 1150 ) Frng [N] 0~3.5

Multi-meter Output [mv] TITLE 8. 評価方法例 Evaluation example Force gauge (IMADA Co., Ltd.) 7 / 19 Notes When the gauge is touched to the sensor, it does slowly. The gauge is vertically touched to the sensor. Force more than the maximum ratings is not added. DC power supply unit Multi-meter This produc V1 V2 Vdd Force gauge Sus plate 15mm t=1mm V1 V2 Vdd Force-gauge Output [N] 11mm sample board

9. デザインガイド Design guide TITLE 8 / 19 9-1 PRECAUTIONS Please do not apply the static force and the impact force of 50N or more to this sensor. Recommendation: SUS404C,t=0.2mm F < 50N Please do not apply force at an angle to the sensor. θ<5deg. The dust such as sand must not enter. Something that corrode solder must not enter. Dust Solder corrosion

Sensor Output[mV] TITLE 9 / 19 9-2 Design Guide for Stylus-pen Stopper Metal plate Pre-tension < 8[N] Spring This structure detects load force of pen tip as opposite direction. Therefore impact stress doesn t apply directly to the sensor projection. Spring is recommended below. Coil spring Displacement is limited to X[mm] by the stopper. Limit the impact force applied to the sensor by the stopper. Recommendation) Limit force : F < 8[N] Spring constant : k[n/mm], Displacement : X[mm] F = kx < 8[N] Pre-tension - F > 0[N] Metal plate is recommended stainless steel. e.g.) Metal plate : SUS404C The output of sensor is changed as below figures. X Nib Load Force[N] 2017-06-26 2017-06-26 2017-06-26

10. パッケージ寸法 Package dimensions 10 / 19 Dimension in millimeters Dimension in millimeters Ref Min. Typ. Max. Ref Min. Typ. Max. A 1.90 2.00 2.10 E 0.17 0.20 0.23 B 1.50 1.60 1.70 F 0.37 0.40 0.43 C 0.18 0.20 0.22 G 0.53 0.56 0.59 D 0.62 0.66 0.70 H 0.53 0.56 0.59 I 1.17 1.20 1.23 J 1.37 1.40 1.43 Top view Side view Bottom view

Output [mv] TITLE 11 / 19 11. 電気特性 Electrical specifications Item Symbol Unit. Specification min. Typ. max. 最大定格 Absolute Maximum Ratings 定格電源電圧 Absolute limits supply voltage Vlim [V] - - 4.0 破壊荷重 Destroyed force Flim [N] 50 - - 保存温度範囲 Storage temperature Tstr [ºC] -55 - +125 ESD 耐圧 ESD HBM [V] 1000 - - 寿命 Durability Drbl [Cycles] 1000k - - Notes 1-8N,5Hz, sine curve 使用条件 Operating co This produc 動作荷重範囲 Force range 電源電圧 Supply voltage 動作温度範囲 Operating temperature Frng [N] 0 - Vdd [V] 1.5 - Topr [ºC] -40-8 3.6 +85 電気的仕様 Electrical specifications (T=25ºC) 感度 Sensitivity Sens [mv/v/n] 2.7 3.7 4.7 リニアリティー Linearity Lin [%FS] - - 2.0 オフセット電圧 Null Offset V0 [mv/v] -8-4 0 ブリッジ抵抗 Bridge Resistance Rbrg [kω] 4.5 5.5 6.5 *FS:Full Span B A FS Linear fitting curve : [Output] = [Force] x [Vdd] x α + [Vdd] x β *Sensitivity : α *Null Offset : β *Linearity : (A+B)/FS x 100 Force [N]

0. 5 m m 1. 4 m m 0. 7 m m 0. 6 m m TITLE 12. 推奨ランドパターン Recommended land pattern 12 / 19 1. 2 m m 0. 6 m m 0. 6 m m 0. 3 m m 基板搭載は基本的に実装機にて行って下さい 補修などで手のせをする場合は 受圧部に手や物が触れないようご注意下さい Basically devices shall be mounted by the mounting machine. In case of manual mounting,do not touch knob.

13. 推奨温度プロファイル Recommended soldering conditions 13 / 19 ピーク温度 : 250 以下 10sec 以内 Peak temperature: 250 or less, within 10 seconds. This produc

14. レーザーマーキング仕様 Laser marking specifications 14 / 19 Unit : mm 5 1 2 3 4 Laser Mark No 1 2 3 4 5 Indication item Manufacturing No. Production month Identification number 1pin mark Content of indication 0 ~ 9, A ~ Z (00 ~ ZZ) 1~9, A, B, C A~Z Fix

15 / 19 15. テープ & リール仕様 Tape & Reel specifications 15-1. Storage direction of the products 1Pin mark Emboss Tape Direction of tape drawing out 15-2. Direction of tape drawing out Products Direction of tape drawing out 15-3. Taping Leader area Trailer area storage area Empty area Cover tape area End tape 160mm min. More than 40 pockets 160mm min. More than 40 pockets 400mm min. Heat press bonding 15-4. Peel strength - Peel strength of cover tape shall be 0.1N(10g)~0.7N(70g) for 300mm/min. Peel direction of Top cover tape The emboss tape is fixed. 15-5. Top cover tape offset Emboss tape Top cover tape Overlay of cover tape to the hole (A) is allowed by 0.5mm Bulge of top cover tape (B) is allowed by 0.5mm

16 / 19 15-6. Emboss Tape Dimensions (Unit mm) This produc 15-7. Reel Dimensions (Unit : mm)

17 / 19 15-8. Packing For oversea This product is packed by tape wrapping (3,000 pcs/reel). The barcode label is put on each reel. One reel is stored in one Bag. 15 bags are put in 1 carton (max.45,000pcs/carton) The cushion is stored in the top and bottom of the carton. label Cushion Bag Cushion *Dimension of carton outside. For Japan This product is delivered by the taping wrapping (3,000 pcs/reel). This product is delivered by a non damp-proof packing. The barcode label is put on each reel. 1 reel stored in the carton box. ( carton/with 3,000pcs) *Dimension of carton Recommended storage condition MSL1 Damp-proof packing None Stacking height of carton Minimum Order Quantity Standard Packing Quantity For overses : Maximum 5cartons 3,000 pcs For Japan : Maximum 10cartons

16. LEGAL DISCLAIMER 18 / 19 1. 国内外の輸出関連法規により規制されている製品の輸出に際しては 同法規を遵守の上 必要な許可 手続き等をとってください For the export of products which are controlled items subject to foreign and domestic export laws and regulations, you must obtain approval and/or follow the formalities of such laws and regulations. 2. 軍事用途又はテロ等の反社会活動目的では 当製品を一切使用しないでください また 最終的にそれら用途 目的で使用されるおそれがある法人 団体 個人等へも当製品を一切供給しないでください Products must not be used for military and/or antisocial purposes such as terrorism, and shall not be supplied to any party intending to use the products for such purposes. 3. 当製品は 特に用途を指定していないかぎり 本来 AV 家電 事務機 情報機器 通信機器 アミューズメント機器等の一般電子機器用に設計 製造されたものです したがいまして 原子力制御機器 宇宙 航空機で運行にかかわる機器等の用途では一切使用しないでください 上記の使用禁止の用途以外で 医療機器 防犯機器 防災機器 海底用機器等の高度の安全性 信頼性を必要とする機器でのご使用の際は 弊社営業担当迄ご相談いただくか またはセットでの十分な適合性の確認を行っていただいた上で フェールセーフ設計 保護回路 冗長回路 誤動作防止設計 延焼対策設計等のセットでの安全対策設計を設けてください Unless provided otherwise, the products have been designed and manufactured for application to equipment and devices which are sold to end-users in the market, such as AV (audio visual) equipment, home electric equipment, office and commercial electronic equipment, information and communication equipment or amusement equipment. The products are not intended for use in, and must not be used for, any application of nuclear equipment, driving control equipment for aerospace or any other unauthorized use. With the exception of the above mentioned banned applications, for applications involving high levels of safety and liability such as medical equipment, burglar alarm equipment, disaster prevention equipment and undersea equipment, please contact an Alps sales representative and/or evaluate the total system on the applicability. Also, implement a fail-safe design, protection circuit, redundant circuit, malfunction protection and/or fire protection into the complete system for safety and reliability of the total system. 4. 車載対応製品以外の製品を車載用にご使用される場合は 事前に弊社へご相談ください Before using products which were not specifically designed for use in automotive applications, please contact an Alps sales representative.

17.Notes concerning patent 19 / 19 1. 当社では 当製品の構造を除いて 本資料における使用例を含めまして当製品の利用に関し 第三者が保有する一切の特許等の知的財産権を侵害していないことについて保証しかねますので 貴社にて調査含めましてご対応くださるようお願いします Except for the structure of this product, Alps will not indemnify, defend and hold harmless you from and against any third party s intellectual properties rights such as patents even if examples of use for this product are shown in this documents, you shall do patent clearance search for your product incorporating this product.