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1 1. ( ) (CR) VOC) VOC VOC CR (p&t) GC/MS VOC 2mm ml/min P&T 12mm 1,000 3,000m min P&T V( 2.CR 2-1CR Fig.1 12mmi.dx110mm 2.5g TenaxGR AL-410 AL-430 AC100V 1,000ml/min VOC 10 ( 3 ) VOC P&T-GC/MS

2 JHS-100/100A VOC ( ) ( ) GC VOC GC/MS ( ) GC/MS: QPSOOO (EI); :30mx0.25mm,0.25 m,db-1 :50 (3minhold)-300,10 /min. : 1/ P&T(JHS-100/100A) GC CR 100ml VOC CR 100ml CR VOC 10 1,000 ml 1/10 1/50

3 2-3 VOC 10 20ppb VOC 10L 13g 100ppm 1.6 l 50 ( 500ml ) 100ml/min (Tenax ) 5 FID-GC JHS-100/100A m 20L Fig.2 CR ~ 20ppb

4 2-5 CR CR 15L Fig.3 Room A Room B ( 10ppb) 4 CFC13, ppb 5 CR 2-6 CR CR 2 20L Fig.4 CR

5 CR N- (NMP) 190ppb 55ppb 2 ( ) NMP

6 CR 2-6 CR VOC Fig.5 Fig 4 Tota lvoc amt. ( ) ( 2 ) VOC 14% ( 3 ) NMP IPA( ) ( ) ( 4 ) VOC

7 CR VOC 2-8 VOC 3 VOC Fig.6 3 (Fig.5 4 ) 10 VOC

8 3. VOC 3-1 VOC 3.5'' (HDD) Fig.7 HDD VOC GC/MS Table l 1 P&T VOC VOC 2 6 ( ) HD VOC 2 HDD VOC AQ-200 VOC SW-8

9 110mm) # # 1 JHS-100/A P&T JHS-100A ( O-HDD+JHS- 100/A HD VOC HDD : 3 HD-3.5+JHS- 100/A 3.5 HD VOC HD mm HD-5.25+JHS -100/A 5.25 Hd VOC HD mm HDD-200+JH S-100/A 3.5 HDD 3.5 HDD{150 W 30 H VOC 110mm}1 200x20mm HDD-500+JH S-100/A 5.25 HDD 5.25 HDD{205(W) 145(H) 35 VOC }1 3-2 VOC (O-HDD ) HD VOC VOC (O-HDD ) Fig 8

10 HDD 200ml/min HDD 65 HDD 200ml/min 3 VOC 3-3 HD VOC VOC O-HDD 3.5 HDD 1.2Gb 60 VOC Fig.9 Camphen, -Methystyrene HDD JHS-100A Fig.9 GC/MS MS

11 HD 5.25 HD VOC 3.5 HD 5.25 HD VOC VOC HD-3.5 HD-5.25 Fig 9 HD-3.5 HD-3.5 JHS-100/A VOC HD HDD-200 JHS-100/A VOC ( ) JHS-100/A HD HD 3.5 HD1 VOC Fig.10 HDD HD

12 HDD VOC HDD VOC VOC HDD-200 Fig.11 HDD 200 mm x 40 mm VOC HDD HDD l 600ml 600ml

13 3-7 HDD-200 HDD HDD VOC Fig HDD TC-5HT,0.32 x 30m,40 (3min) 300,10 /min, /f-250 1/30 2ml/min VOC VOC VOC 16.5ng( VOC ) 310ng VOC 16

14 3-8 HDD-200 HDD 3-7 HDD ( ) VOC Fig.13 VOC VOC 600ng VOC 156ng VOC 3.8 HDD VOC

15 ,, SW-8, (JHS 100/100A ) GC/MS ß@ JHS-100/100A-GC/MS

16 : 400 : ( 10ml 2.5g TenaxTA ) 150ml/min 30 JHS-100A: JHS-100A :250,15 ( ) : 50 : GC/MS: QP-5000,EI.70eV :DB-1,0.25mmx30m,0.2 :40(3) /min SW-8 obnohy Ł x SW-8,, MS 2,000,000, 4.5 3, (DMP) C21 C25 n 10 ng , MS 3,777,000, 1/ /min n-,400 DMP, n-,20pg

17 (p&t) ( OC) VOC,P&T, 95`-3 1 SW-8! 8 1 IC 400 ( 10ml 2.5g Tenax TA ) 150ml/min 30 JHS-100A : 250,15 : 50 : 255 GC/MS QP-5000 EI,70e : DB mm x 30m (3) /min

18 C12 1-Dodecene (n=6) , 24 SW-8 3, ( ), (DMP)

19 œ{ H I B 1 VOC 3.5 HDD Fig 1 HDD VOC GC/MS HD Fig 2 (HD-3.5 +JHS-100A-GC/MS) Fig.3 :180,30min :60ml/min MS(HP5973,EI,70eV) JHS-100A :200 : -60 :PTE-5, 0.25mmX30m.40 (3 )-280,10 /min

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