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1 Si-OH, Si-H, Si-Cl, SI-F 1. SiOH OH OH Type III(Type II) OH OH OH OH CVD OH OH (EELS) -ppm OH 1100cm -1 Si-O 2200cm cm cm % OH ( 2500cm -1 ) Cabosil OH OH OH OH Si-O-Si (3747cm -1 ) SiOH 3660cm -1 SiOH 3450cm cm -1 SiOH cm -1 Abe 10 OH 2
2 3676cm -1 OH 50-80L/mol cm Shelby (J.E.Shelby et al., J.Am.Ceram.Soc., 65, C59-60 (1982).) 181L/molcm(= cm 2 )Abe Shelby 181L/molcm Stephenson 77.5L/molcm(G.Stephenson and K.H.Jack, written contribution to Ref.1, Trans. Br. Ceram. Soc., 59, 397 (1960)) m OH OH 2 OH
3 OH 5 Suprasil W2(Type IV) ±3.0ml/min.(0.467±0.020atm (355±15mmHg)) (A) 80, 150, 250, 350, (B) 150, (A) ( ) 3672cm -1 Si-OH cm -1, 3400cm -1 OH3230cm -1 Free H2O OH Shelby OH 1Grad OH OH OH 1 3 ( 7-10%) OH (
4 7)(a)7.5eV (b)940cm -1 OH (a)(6.4ev)940cm -1 (~9eV)940cm eV /cm 2 ()940cm -1 17eV (c) 6.4eV 10.8eV 0.03 Shelby 3670cm -1 ( OH ) 940cm -1 () 2. SiH SiH SiH SiH, SiH2, SiH3 3 SiH Si-O
5 Lucovsky 8 SiH 3 Pouling SR(Rj)SiH 3 (C2H5) Cl 3.62, 4.93 SR(Rj)=13.48 SiH, SiH2, SiH3 2280cm -1, 2220cm -1, 2200cm -1 SiH 9 (Suprasil W) /cm 3 rad 3660cm cm -1 OH SiH Si-O-Si + H2 Si-OH + H-Si H = (0.45±0.06)OHShelbySiOH SiOHHetheringtonSiOH= 77.5L/molcm(Phys.Chem.Glasses, 3, 129 (1962).)SiH SiHSiH = 35L/molcmShelbySiOH 181L/molcmSiHSiH = 81L/molcm Beckmann 10 ATR SiH---O = 2222cm -1, SiH = 2353cm -1,OH---O = 3375cm -1, OH = 3600cm -1 HSiH---O, OH---OSiH---O, OH---O SiH---O ~ cm 2 (SiH---O ~ 52L/molcm), OH---O ~ cm 2 (SiH---O ~ 52L/molcm) OH, SiHOH, SiHOH ~ cm 2 (OH ~ 52L/molcm), SiH ~ cm 2 (SiH ~ 42L/molcm)OHSiHShelby HetheringtonSi-O(~1100cm -1 ) SiHx(x=1, 2, 3) 9 Si-O GeH SiH Ge 11 GeH, GeH2 Lucovsky SiH GeH2 GeH SiH, SiH2, SiH3 SiH GeH, GeH2 2150cm -1, 2180cm Ge (1GeO2:9SiO2) He/Hg 5eV (a)(b) (a) 3675cm -1, 2185cm -1 SiOH(GeOH), GeH2 (b) 3550cm -1 GeOH~ GeOH, H2O2140cm -1 GeH 11
6
7 3..14 a 18K 2.9mmol/cm 3 b D2 18K 2.8mmol/cm 3 c H2 D2 d 18K SiOH GeOH
8 15 (a) (b)siod, D2O 4. Si-F, Si-Cl Si-Cl 1100cm -1 Si-O Si-F 945cm m 2 /g SiO2 Si(OC2H5)3F cm -1 Si-OH Si-F (F/Si=0.247) Si-F VAD SF6 17(a)FS, FL EPMA cm -3, cm cm -1 Si-F 800cm cm -1 (D1, D2) 4, 3 17(b)
9 5. SiOH, SiH SiH SiOH Type III) OH OH 18 Cl2, F2, O3, POL(), O2 19 H2O 170nm(7.3eV) 100atm -1 cm -1 at cm 2 OH 7.3eV ~ cm 2 H2O 400 (b)
10 6. Si-O (1100cm -1 ) 1100cm -1 Si-O cm -1 ~1122cm -1 (K-K ) K-K K-K Si-O , 800, 1000Si-O 1066cm cm -1 Bending, Rocking 21 Si-O , 1000 Si-O VAD [OH] < 0.1ppm, [Cl] ~ 1000ppm, [Na] ~ 0.04ppm 24(a) Si-O (b) Si-O
11
12 [1] M.L.Hair, J.Non-Cryst.Solids, 19, 299 (1975). [2] Y.Abe and D.E.Clark, J.Mat.Sci.Lett., 9, 244 (1990). [3] Wood et al., J.Am.Ceram.Soc., 66, 693 (1983). [4] K.M.Davis and M.Tomozawa, J.Non-Cryst.Solids, 201, 177 (1996). [5] J.E.Shelby, J.Non-Cryst.Solids, 179, 138 (1994). [6] H.Imai et al., J.Appl.Phys., 79, 8304 (1996). [7] G.Lucovsky, Solid Stat.Commun., 29, 571 (1979). [8] J.E.Shelby, J.Appl.Phys., 50, 3702 (1979). [9] K.H.Beckmann et al., J.Electrochem.Soc., 118, 614 (1971). [10] K.Awazu, J.Non-Cryst.Solids, 201, 267 (1996). [11T.E.Huber et al, Phys.Rev. B40, (1989). [12] E.J.Heilwell et al., J.Chem.Phys., 82, 5216 (1985). [13]S.Shibata et al., J.Non-Cryst.Solids, 100, 269 (1988). [14] K.Awazu et al., J.Appl.Phys., 69, 4183 (1991). [15] K.Awazu et al., J.Appl.Phys., 73, 1644 (1993). [16] K.Awazu et al., J.Non-Cryst.Solids, 179, 214 (1994). [17] K.Watanabe, J.Opt.Soc.Am., 43, 753 (1953). [18] G.Lucovsky, J.Vac.Sci.Tech., B5, 530 (1987). [19] J.T.Fitch et al., J.Vac.Sci.Tech., B7, 153 (1989).
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4 450kg500kg 185cm 95kg 100kg 185 ( ) Vision , 40 8/138/15 1/11/3 1 13,000 11,700 9,500 3,500 13,000 11,700 9,500 3,500 http://www.care-mirai.com 1 37 38 1 1,000PPM soda premium 1,100ppm http://www.care-mirai.com/mirai/carbonated.html
印刷用一括
I.... - 2 -...- 2 -...- 2 -...- 2 -...- 3 -...- 4 -...- 6 - II.... - 7 - III.... - 9 -...- 9 -...- 15 -...- 20 -...- 22 -...- 28 - IV.... - 33 -...- 33 -...- 33 -...- 70 -...- 85 -...- 106 - V.... - 122
From Evans Application Notes
3 From Evans Application Notes http://www.eaglabs.com From Evans Application Notes http://www.eaglabs.com XPS AES ISS SSIMS ATR-IR 1-10keV µ 1 V() r = kx 2 = 2π µν x mm 1 2 µ= m + m 1 2 1 k ν = OSC 2
4 13 6 7 6 13 9 19
13 9 4 13 6 7 6 13 9 19 139 173 i 1 1 2 1 3 2 4 2 5 1 3 6 4 7 5 8 6 9 6 Q&A Q1 QA 9 Q2 9 Q3 10 Q4 11 Q5 11 Q6 11 Q7 12 Q8 12 ii Q9 12 Q101 13 Q102 13 Q11 17 Q12 18 Q13 18 Q14 19 Q15 19 Q16 20 Q17 20 Q18
SURF 200000300104 Sendai Urban Research Forum 1 1 1 4 5 5 5 5 6 8 8 13 17 18 20 20 23 29 35 35 35 35 36 36 37 37 39 40 44 44 45 45 49 51 52 54 60 52 63 69 69 70 71 72 73 70 70 70 71 71 72 74 78 86 102
無印良品のスキンケア
2 3 4 5 P.22 P.10 P.18 P.14 P.24 Na 6 7 P.10 P.22 P.14 P.18 P.24 8 9 1701172 1,400 1701189 1,000 1081267 1,600 1701257 2,600 1125923 450 1081250 1,800 1125916 650 1081144 1,800 1081229 1,500 Na 1701240
180 30 30 180 180 181 (3)(4) (3)(4)(2) 60 180 (1) (2) 20 (3)
12 12 72 (1) (2) (3) 12 (1) (2) (3) (1) (2) (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (11) (1) (2) 180 30 30 180 180 181 (3)(4) (3)(4)(2) 60 180 (1) (2) 20 (3) 30 16 (1) 31 (2) 31 (3) (1) (2) (3) (4) 30
... 6 1) 2) No. 01 02 03 04 05 06 07 08 09 10 11 12 No. 1 2 2 3 3cm 4 untitled
1....1 2....2 2.1...2 2.2...2 3....14 3.1...14 3.2...14 4....15 4.1...15 4.2...18 4.3...21 4.4...23 4.5...26 5....27 5.1...27 5.2...35 5.3...54 5.4...64 5.5...75 6....79 6.1...79 6.2...85 6.3...94 6.4...
