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2 From Evans Application Notes
3 From Evans Application Notes
4
5 XPS AES ISS SSIMS ATR-IR 1-10keV µ
6 1 V() r = kx 2 = 2π µν x mm 1 2 µ= m + m k ν = OSC 2 π µ OSC E = E E = hν vib n+ 1 n OSC k > k > k C C C= C C C
7
8 ATR-IR DRS or DRIFT ERS or RAS PAS
9 n 1 ATR θ n 2 R R = = θ φ 2 sin ( ) 2 sin ( θ + φ) θ φ 2 tan ( ) 2 tan ( θ + φ) p-
10 2 (ATR-IR) θ Depth/µm KRS-5 45 Ge 30 Ge 45 Ge 60 Si n=2.35 n=4.0 n= n 2 = Wavenumber/cm λ d = ( n sin θ n ) p 2π /2 1 2
11 n ATR KRS-5 (a) =45 (b) =60
12 ATR-IR LB (T.Ohinishi et al.,j.phys.chem.,82, 1990(1978).) 1200cm -1
13 PE A.Ishitani et al., Nucl. Inst. Methods Phys. Res., B39, 783(1989).
14 ν (C-O-C) Absorbance ν (C=O) ν (NH) ν (NCO) wavenumber(cm -1 )
15 PDMS 2.5nm thick PET (b) (a) PDMS(2.5nm) on PET (b) PET (c) (a)-(b) 6nm Ag film Y. Nishikawa et al., Appl. Spectrosc., 45, 752(1991).
16 ATR-IR Monolayer Flow cell to Detector IR in Silicon IRE Si HO O O Si HO Si OH O OH O Si O O Si OH OH HO H H HO H H O O H HO HO Si Si Si Si Si Silicon wafer Si OH O OH Si Si OH O Si O O H HO O H Si Si Absorbance IRE Wavenumber(cm -1 )
17 Adsorbance at 1550 cm -1 A Start of First Rinse Start of Second Rinse B Start of Second E Protein Flow Ab C D F A 0 =Aa+Ab Amount of Equilibrium Protein Adsorption Start of First Protein Flow Time Γ / µg.cm OTS OTS/FOETS FOETS Time / minutes 3 1 BSA 48 J. Biomater. Sci.. Polym. Ed., Vol.9, 131 (1998)
18 3) (Reflection Absorption Spectroscopy:RAS) d R 0 θ R vacuum ε 1 (n 1 ) adsorbate ε 2 (n 2 ) R S = n cos θ 2 + k 2 n + cos θ 2 + k 2 R P = n sec θ 2 + k 2 n+ sec θ 2 + k 2 metal ε 3 (n 3 ) R S R S = 8πd λ cos θ I m ε 2 ε 3 1 ε 3 R P R P = 8πd λ cos θ I m ε 2 ε 3 1 1/ε 2 ε 3 ε 2 + ε 3 sin 1 ε 3 1 1/ε 3 1+ε 3 sin 2 θ 2 θ R P R P = 8πdsin2 θ λ cos θ I m 1 ε 2
19 R R I = αd I 0 4n sin θ α d θ = 3 0 n2cos R: R 0 : 4sin 2 : 1/cos : RAS 1) 2) 3) 85-88
20 LB (TAS) (RAS) Cd LB TAS RAS
21 A sin φ A m φ+ m φ 2 T = cos sin R z x 1. CH 2 2. CH 2 A: φ m z,x cos α+ cos β+ cos θ= 1 (m x m z 1/
22 P(VDF-co-TrFE) film on Au J. Vac. Sci. Technol. B, 121(1998)
23 (Diffuse Reflectance Spectroscopy:DRS) I: R: D: r r (sample) = r (standard) 2 (1 r ) K f( r ) = = 2r S (a) DRS, (b) KB TAS) r : K: (I=I 0 exp(-kl)) S:
24 Application of Diffuse Reflectance Spectroscopy(DRS) PAA Na-PA ν=ν as ν s Unidentate Bidentate Bridging PAA/Al 2 O 3 ν(unidentate)> ν(ionic) ν(bridging) > ν(bidentate) K. Vermohlen et al., Coll. Surf. A, 170, 181 (2000)
25 5) (Photoacoustic Spectroscopy) µm PA PAS
26 (PAS) (a) PS (b) PS (c) PS
27 Polymer 43, 4055 (2002). PAS
28 PAS , 1170 cm -1 Symmetric and antisymmetric SO 3 - stretching mode 1412 cm -1 Symmetric COO - stretching mode µ 400Hz 1/2 2α 1045, 1170 cm -1 µ = SO 3- stretching mode ω 730 CH 2 -rocking 1472 M. G. Sowa et al., J. Mol. Struct., 379, 77(1996). CH 2 -bending
29 XPS) 1) ν 2p L2,3 2s L1 KLL 2p 2s 1s K 1s h X (MgK AlK E k E b E = hν E φ C 1s C b Electron Spectroscopy for Chemical Analysis(ESCA) k
30 XPS
31 C=O (B. D. Ratner and D. Castner)
32 2 XPS 10-9 torr (1torr=133Pa)
33 XPS X
34 λ = 3) XPS Inelastic Mean Free Path(IMFP) Tanuma-Powell-Penn(TTP-2M E eV Nv M E g E p ρ E λ= 2 2 E ( βln( γe) C/E+ D/E ) C = U IMFP 0.3-3nm D = U 100eV 2 U = N Vρ / M = E P / S. Tanuma et al. Surf. Interface Anal., 21, 165(1994). P β= (E + E ) ρ γ= 0.191ρ / P g
35 4) XPS
36 α θ θ = i i dn i( ) L i( ) i Re xp( )dz sin θ λi sin θ θ α σ ns β 3 α = + α 2 2 z i 2 L( i ) ki[1 0 ( sin 1)] t N it ( θ ) = L i( α)niσλ i isir[1 exp( )] λ sin θ i
37 C=O C-O O O O O CH 2 CH 2 -C-O- C=O (PET) C 1s
38
39
40 nm d 0 X-ray Analyzer e θ =90 deg. X-ray d=d sin 0 θ e θ Analyzer Analytical depth/nm λ=10nm d = 3λsinθ θ/deg
41 I 1
42 LB CF 3 (CF 2 ) 7 CH 2 CH 2 COOCH 2 CH 2 CF 3 (CF 2 ) 7 CH 2 CH 2 COOCH 2 CH 2 = O N C CH 2 N CH 3 + CH 3 CH 3 Cl - F 2C C -de-c N Cl - FC Macromolecules, Vol.21, 2443 (1988).
43 X 1. X AlK 10kV,20mA C 1. 2.
44 7) F 1) 100% 2)
45 8)
46 9) Rept. Progr. Polym. Phys. Jpn., Vol.28, 275 (1985).
47 PEG Polym. Bull. Vol.24, 333 (1990).
48 PVME PS PVME PS/PVME(50/50) θ 90deg. C TCE toluene -C-C*-C- -C*-Oπ π Binding energy / ev 280
49 XPS PTMO(1000)BDO in Water N 1s x10 C 1s -C-C-C- -C-O-C- -C=O in Air x Binding energy / ev J. Biomater. Sci., Polym. Ed.,Vol.5, 183 (1993).
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Compton Scattering Beaming exp [i k x ωt] k λ k π/λ ω πν k ω/c k x ωt ω k α c, k k x ωt η αβ k α x β diag + ++ x β ct, x O O x O O v k α k α β, γ k γ k βk, k γ k + βk k γ k k, k γ k + βk 3 k k 4 k 3 k
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