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1 Si-OH, Si-H, Si-Cl, SI-F 1. SiOH OH OH Type III(Type II) OH OH OH OH CVD OH OH (EELS) -ppm OH 1100cm -1 Si-O 2200cm cm cm % OH ( 2500cm -1 ) Cabosil OH OH OH OH Si-O-Si (3747cm -1 ) SiOH 3660cm -1 SiOH 3450cm cm -1 SiOH cm -1 Abe 10 OH 2
2 3676cm -1 OH 50-80L/mol cm Shelby (J.E.Shelby et al., J.Am.Ceram.Soc., 65, C59-60 (1982).) 181L/molcm(= cm 2 )Abe Shelby 181L/molcm Stephenson 77.5L/molcm(G.Stephenson and K.H.Jack, written contribution to Ref.1, Trans. Br. Ceram. Soc., 59, 397 (1960)) m OH OH 2 OH
3 OH 5 Suprasil W2(Type IV) ±3.0ml/min.(0.467±0.020atm (355±15mmHg)) (A) 80, 150, 250, 350, (B) 150, (A) ( ) 3672cm -1 Si-OH cm -1, 3400cm -1 OH3230cm -1 Free H2O OH Shelby OH 1Grad OH OH OH 1 3 ( 7-10%) OH (
4 7)(a)7.5eV (b)940cm -1 OH (a)(6.4ev)940cm -1 (~9eV)940cm eV /cm 2 ()940cm -1 17eV (c) 6.4eV 10.8eV 0.03 Shelby 3670cm -1 ( OH ) 940cm -1 () 2. SiH SiH SiH SiH, SiH2, SiH3 3 SiH Si-O
5 Lucovsky 8 SiH 3 Pouling SR(Rj)SiH 3 (C2H5) Cl 3.62, 4.93 SR(Rj)=13.48 SiH, SiH2, SiH3 2280cm -1, 2220cm -1, 2200cm -1 SiH 9 (Suprasil W) /cm 3 rad 3660cm cm -1 OH SiH Si-O-Si + H2 Si-OH + H-Si H = (0.45±0.06)OHShelbySiOH SiOHHetheringtonSiOH= 77.5L/molcm(Phys.Chem.Glasses, 3, 129 (1962).)SiH SiHSiH = 35L/molcmShelbySiOH 181L/molcmSiHSiH = 81L/molcm Beckmann 10 ATR SiH---O = 2222cm -1, SiH = 2353cm -1,OH---O = 3375cm -1, OH = 3600cm -1 HSiH---O, OH---OSiH---O, OH---O SiH---O ~ cm 2 (SiH---O ~ 52L/molcm), OH---O ~ cm 2 (SiH---O ~ 52L/molcm) OH, SiHOH, SiHOH ~ cm 2 (OH ~ 52L/molcm), SiH ~ cm 2 (SiH ~ 42L/molcm)OHSiHShelby HetheringtonSi-O(~1100cm -1 ) SiHx(x=1, 2, 3) 9 Si-O GeH SiH Ge 11 GeH, GeH2 Lucovsky SiH GeH2 GeH SiH, SiH2, SiH3 SiH GeH, GeH2 2150cm -1, 2180cm Ge (1GeO2:9SiO2) He/Hg 5eV (a)(b) (a) 3675cm -1, 2185cm -1 SiOH(GeOH), GeH2 (b) 3550cm -1 GeOH~ GeOH, H2O2140cm -1 GeH 11
6
7 3..14 a 18K 2.9mmol/cm 3 b D2 18K 2.8mmol/cm 3 c H2 D2 d 18K SiOH GeOH
8 15 (a) (b)siod, D2O 4. Si-F, Si-Cl Si-Cl 1100cm -1 Si-O Si-F 945cm m 2 /g SiO2 Si(OC2H5)3F cm -1 Si-OH Si-F (F/Si=0.247) Si-F VAD SF6 17(a)FS, FL EPMA cm -3, cm cm -1 Si-F 800cm cm -1 (D1, D2) 4, 3 17(b)
9 5. SiOH, SiH SiH SiOH Type III) OH OH 18 Cl2, F2, O3, POL(), O2 19 H2O 170nm(7.3eV) 100atm -1 cm -1 at cm 2 OH 7.3eV ~ cm 2 H2O 400 (b)
10 6. Si-O (1100cm -1 ) 1100cm -1 Si-O cm -1 ~1122cm -1 (K-K ) K-K K-K Si-O , 800, 1000Si-O 1066cm cm -1 Bending, Rocking 21 Si-O , 1000 Si-O VAD [OH] < 0.1ppm, [Cl] ~ 1000ppm, [Na] ~ 0.04ppm 24(a) Si-O (b) Si-O
11
12 [1] M.L.Hair, J.Non-Cryst.Solids, 19, 299 (1975). [2] Y.Abe and D.E.Clark, J.Mat.Sci.Lett., 9, 244 (1990). [3] Wood et al., J.Am.Ceram.Soc., 66, 693 (1983). [4] K.M.Davis and M.Tomozawa, J.Non-Cryst.Solids, 201, 177 (1996). [5] J.E.Shelby, J.Non-Cryst.Solids, 179, 138 (1994). [6] H.Imai et al., J.Appl.Phys., 79, 8304 (1996). [7] G.Lucovsky, Solid Stat.Commun., 29, 571 (1979). [8] J.E.Shelby, J.Appl.Phys., 50, 3702 (1979). [9] K.H.Beckmann et al., J.Electrochem.Soc., 118, 614 (1971). [10] K.Awazu, J.Non-Cryst.Solids, 201, 267 (1996). [11T.E.Huber et al, Phys.Rev. B40, (1989). [12] E.J.Heilwell et al., J.Chem.Phys., 82, 5216 (1985). [13]S.Shibata et al., J.Non-Cryst.Solids, 100, 269 (1988). [14] K.Awazu et al., J.Appl.Phys., 69, 4183 (1991). [15] K.Awazu et al., J.Appl.Phys., 73, 1644 (1993). [16] K.Awazu et al., J.Non-Cryst.Solids, 179, 214 (1994). [17] K.Watanabe, J.Opt.Soc.Am., 43, 753 (1953). [18] G.Lucovsky, J.Vac.Sci.Tech., B5, 530 (1987). [19] J.T.Fitch et al., J.Vac.Sci.Tech., B7, 153 (1989).
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物理化学I-第12回(13).ppt
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27.2.9 TOF-SIMS SIMS TOF-SIMS SIMS Mass Spectrometer ABCDE + ABC+ DE + Primary Ions: 1 12 ions/cm 2 Molecular Fragmentation Region ABCDE ABCDE 1 15 atoms/cm 2 Molecular Desorption Region Why TOF-SIMS?
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無印良品のスキンケア
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