20 EBSD 2008.11.28 scanning electron microscope: SEM EBSD electron back scattering diffraction [1-4] 10 EBSD anisotropy polycrystal orientation texture EBSD EBSD EBSD EBSD Table 1 EBSD
Table 1-10 mmφ < ~60 min / pole figure [5,6] 1 < 1 mmφ < ~30 min / point [6] 5 < 10 µmφ < ~30 min / point [7-9] 0.5 < 5 µmφ < ~15 min / point [10,11] 0.5 < 5 µmφ < ~30 min / point [11-13] 0.1 < 10 nmφ < <0.02 s / point [1-4] < 10~15 1 µmφ < ~10 min / point [14] 0.1 < nmφ < ~5 min / point [15,16] X X [5,6] X 111 pole figure 111 X X orientation determination function: ODF [6] Figure 1 X ODF [17] ODF [6] X X
Fig.1 {111} ODF Al [17] Laue X X [18,19] {111}, {110}, {100} SEM [7-9, 20-22] Figure 2 Fe-19Cr Fe-36Ni SEM [23] BCC {110} 12 <111> FCC {111} {001} <110>
[23,24] Fe-19Cr SEM Fig.3 [25] {001} {111} 10 m Fig.2 Fe-19Cr Fe-36Ni SEM [23]
Fig.3 Fe-19Cr SEM [25] SEM scanning electron microscope EBSD X [10,11] Figure 4 [11] EBSD Kikuchi X Fig.4 X SEM
Fig.4 [11] SEM Fig.5 (a) [13] Fig.5 (b) Kikuchi ECP electron channeling pattern [11-13] Kikuchi m ECP ECP Fig.6 [26] Fe-19Cr 185 Fig.5 (a) ECP [13] (b) ECP
Fig.6 ECP Fe-19Cr 185 TEM transmission electron microscope TEM SAD selected area diffraction Fig.7 001 [001] 10 15 [14] SAD EBSD
Fig.7 BCC [27]
EBSD EBSD SEM electron back-scattering pattern Kikuchi Kikuchi EBSD Fig.8 EBSD 1973 [1] EBSD 1991 1993 Adams [28,29] Orientation Imaging Microscopy (OIM) [1] Fig.9 EBSD SEM microstructure grain boundary interface Kikuchi EBSD OIM Fig.8 Kikuchi SBSD
Fig.9 EBSD [3] EBSD Kikuchi 0.1 ECP Fig.6 EBSD EBSD
EBSD ECP Fig.10 ARB 4.8 EBSD 200nm 40 50nm Fig.10 ARB 4.8 Al EBSD (a) ND (b) RD (c) [30] EBSD Figure 11 EBSD [31,32] [31,32] EBSD EBSD Fig.11 [33]
Fig.11 (a) 28.5at%Ni (b) 0.2wt%C EBSD [31,32] EBSD [33,34] 1 2 EBSD TEM Kikuchi TEM/Kikuchi EBSD [15] TEM/Kikuchi EBSD [1] Electron Backscatter Diffraction in Materials Science, Edited by A.J.Schwartz, M.Kumar and B.L.Adams, Kluwer Academic / Plenum Publishers, New York, (2000). [2] Microtexture Determination and its applications, V.Randle, The Institute of Materials, London, (1992) [3], 50 (2000), 86. [4], 40 (2001), 612. [5] (1984) [6] X (1977) [7], 18 (1979), 282.
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