2006.2.27 Fantastic Voyage 1966 1
2006.2.27 Fantastic Voyage 2006.2.27 2
2006.2.27 How Small is Micro & Nano? 1mm 10µm 2nm 1m DNA 10 2 10 10 0 10-1 10-2 10-3 10-4 10-5 10-6 10-7 10-8 10-9 10-10 (m) Macroscopic Mesoscopic Microscopic LSI 100µm 2006.2.27 M 3 = /MEMS/MST Micromachine (Japan) MST (Micro System Technology) (Europe MEMS Micro ElectroMechanical Systems US 3
2006.2.27 :10 : 25 75 150 250 (1991-1993) (1994-1995) (1996-2000) 15 SII 7 2006.2.27 4
2006.2.27 2006.2.27 1987 Bell Lab. 5
2006.2.27? 2006.2.27 1989 MIT 6
2006.2.27 1989 MIT 2006.2.27 Linear Rack Sandia National Lab. http://www.mdl.sandia.gov/ 7
2006.2.27 MEMS2006 at Istanbul 19th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2006 January 22-26, 2006 Lütfi Kirdar Convention and Exhibition Centre, Istanbul 2006.2.27 Abstracts and Contributions for MEMS Conf. 800 MEMS2006 Submitted; 789 Submitted 600 400 200 0 Accepted Poster Oral 1989 1991 1993 1995 1997 1999 2001 2003 2005 8
2006.2.27 Abstracts by Country 250 200 208 Asian Countries 150 136 100 82 70 50 0 USA Japan South Korea 55 42 27 19 19 17 16 14 13 13 9 8 5 5 Taiwan Germany China Switzerland Denmark France UK Canada Netherlands Turkey Singapore Israel Sweden Belgium Italy Misc. 27 2006.2.27 Micromachine Market Forecast MARKET (billion ) 20 10 Estimation by Micromachine Center 15 NEW MARKET 19 3.7 6.4 REPLACE 0 1.3 1993 2005 2010 9
2006.2.27 MST/MEMS Market MST NEWS Vol.5 2005 2006.2.27 MST/MEMS Market by Application Fields MST NEWS Vol.5 2005 10
2006.2.27 MST/MEMS Market in Consumer Electronics MST NEWS Vol.5 2005 2006.2.27 Why Micro? ex. 11
2006.2.27 10 12 bit/inch 2 2006.2.27 AFM Data Storage Millipede by IBM,1999 10 12 bit/inch 2 Dia: 10 nm, pitch: 20 nm 12
2006.2.27 Why Micro? ex. 2006.2.27 Digital Micromirror Device (DMD) Texas Instruments 13
2006.2.27 Why Micro? ex. 2006.2.27 DNA 50µm Conventional CE (35 mm 20 mm) CE using Micro/Nano Structure 14
2006.2.27 Bio-Disk Platform Bio-Disk droplet of blood Mobile Player Courtesy of Prof. Zengerle Vision application specific disk low-cost disposable process control by frequency integrated detection unit 2006.2.27 Why Micro? ex. 15
2006.2.27 Automotive 2006.2.27 16
2006.2.27 3.6mm 3.6mm 2006.2.27 SENS (Synthesis Engineering for Nano Systems) Lab. 17
2006.2.27 2006.2.27 Promising Application Fields ACRONYM Bio MEMS Optical MEMS µtas RF MEMS Power MEMS Space MEMS Marine MEMS Agro MEMS Environment MEMS 18
2006.2.27 Fingerprint Sensor NTT 2006.2.27 Bio-Detector Kovacs, Stanford Univ. 19
2006.2.27 Information Technology From 2001 2006.2.27 RF Communication 20
2006.2.27 Optical Router by Lucent & AT&T Bell Lab. 2006.2.27 Microsystem for the Land Warrior G. Fleming (TACOM 2001) 21
2006.2.27 Space 2006.2.27 Aeronautics z Micro bubble actuator z by CALTEC θ α x y 22
2006.2.27 MEMS for Amenity, Safety, Maintenance 2006.2.27 Small Complex System = MEMS Fracture origin 1µm 23
2006.2.27 Research Trend in MEMS MEMS = Small Complex System in Interdiscipline Multi Scale (Scale Down) MEMS/MS NEMS/NS Multi Physics (Interdiscipline) Physical Sensor BioMEMS, µtas Multi Material (Complexify) Metal, Ceramics, Polymer 2006.2.27 Miniaturization of Complex System Initially Feature of MM,MEMS MST Batch-Process Pre-Assemble Nowadays In future Nano System Big Question? Can we hold? Batch Process Pre-assemble 24
2006.2.27 Richard P. Feynman 1959 vs "There's Plenty of Room at the Bottom" Engines for Creation" http://www.foresight.org/eoc/index.html Eric Drexler 1986 2006.2.27 MEMS Analysis Synthesis MEMS 25
2006.2.27 / SENS: Synthetic Engineering for Nano System / 2006.2.27 26
2003 10 2005 4 35 2005 9 100 21 COE 1 34 120 120 1897 2 1 1942 1949 1960 1975 1953 1966 2 1994 4 2 240 1997 2000 4 2 2005 4 6 (1) 21
2005 10 17 MEMS Micro Electro Mechanical Systems µtas Micro Total Analysis Systems (1, 3) µm µ µ µ
µ, Vol.47, pp.6-7, 2004 (4) http://www.kogaku.kyoto-u.ac.jp/gakukyo/inttech/index.htm Basic Operations Applicable Examples Substrate Rotation Stage Resist Moving Mask Stage X-Ray Exposure System Y-axis Stage Alignment Stage X-axis Stage y x z Shutter Substrate Tilting Stage 1 ~180 V Microscope Probe Loadcell Specimens PZT Stage 2