技術調査レポート(セット版)0318
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- きのこ ごちょう
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1 1 MEMS MEMS(Micro Electro Mechanical Systems) MEMS MEMS 1990 MEMS MEMS
2 2 MEMS MEMS MEMS mm ( ) MEMS MST 1mm 1m Ball Semiconductor Inc. IC [2] IC [2] Si
3 3 MEMS 2.1 MEMS DNA MEMS 80 MEMS ABS 2.0mm 15mm
![[3] 1,200](/docs-images/87/96316792/images/4-4.jpg "1inch 7,400")
4 4 2 3 MEMS 3,000 ( 300 [3] 1,200 1inch 7, a b b a [2] MEMS 0.4m (2,800 /mm)
![mm DNA [2] MEMS 90m](/docs-images/87/96316792/images/5-2.jpg "40m DNA MEMS DNA ( )")
5 5 DNA MEMS 1996 MEMS DNA DNA MEMS DNA 90m 40m DNA DNA DNA DNA 424 DNA 75m mm DNA [2] MEMS 90m 40m DNA MEMS DNA ( )
6 MEMS MEMS ( ) MEMS MEMS 5,0009,000 * 2000 MEMS 95 * 1 = 120 MEMS MEMS SRI Consulting Business Intelligence DNA Lab. on Chip) MEMS 6
7 . 3.1 MEMS RF-MEMS LAN Lab. on Chip RF (Radio Frequency - MEMS RF RF RF RF-MEMS RF RF RF RF MEMS RF RF-MEMS RF [2] RF [2] 7
![on Chip [2]](/docs-images/87/96316792/images/8-2.jpg "MEMS 90 ~")
![120 m [2]](/docs-images/87/96316792/images/8-3.jpg "Lab. on Chip")
8 300400m m OFF ON Lab. on Chip [2] MEMS 90 ~ 120 m [2] Lab. on Chip cm 8
![PC [2] CO 2 H2 O 2](/docs-images/87/96316792/images/9-1.jpg "CH 3 OH H 2 O MEMS")
9 PC MEMS CH 3 OHH 2 O Cu-Zn CO 2 3H 2 PC [2] CO 2 H2 O 2 CH 3 OH H 2 O MEMS 9
10 3.2 MEMS ,000 * (39 ) ,000 * (96 RF-MEMS MEMS * 1 =
11 WIPO DOD ISI Web of Science EU micromachine OR micro machine OR micromachining OR micro machining OR MEMS OR MST OR LIGA OR microactuator OR micro actuator WIPO WIPO WIPO EPC micromachine OR micro machine OR micromachining OR micro machining OR MEMS OR MST OR LIGA OR microactuator OR micro actuator
12 4.2 DARPA MEMS 7 ATP ,000 MEMS MEMS Analog Device, Inc., Motorola, Delphi Delco, GE NovaSensor, Draper Labs Hewlett-Packard, Carnegi Mellon, Caltech, Texas Instruments, Seagate RF-MEMS Cronos(MEMSCAP), Rockwell, MEMS University of California Berkeley Xros(Nortel), Optical Micromachines, Integrated Micromachines, Movaz Networks, Cronos(MEMSCAP), Agilent, Calient Networks, MEMS Onix Microsystems, Silicon Light Machines Texas Instruments, Microvision DNA Affymetrix, Motorola, University of Winsconsin Cepheid, Aclara Biosciences, Caliper Technologies, Nanogen, Oak Ridge National Laboratories Sandia National Lab., University of Michigan, University of Cincinati, Harvard University SRI Consulting Business Intelligence 4.3 MEMS Industry Group (2001) 150 MEMS
13 13 MEMS MEMS MEMS MEMS MEMS MEMS MEMS 5.1 MEMS MEMS ( ) ( ) MEMS MEMS
14 14 MEMS 5.2 NTT
![( IC [2] 5m](/docs-images/87/96316792/images/15-1.jpg "nmos IC IC")
![[4] MEMS [3]](/docs-images/87/96316792/images/15-2.jpg)
15 15 MEMS MEMS MEMS MEMS MEMS MEMS (MEMS MEMS IC [2] 5m nmos IC IC [4] MEMS [3]
16 MEMS (2000/11/06 No.782) IC pp , p.176 [2] Ball Semiconductor Inc. Three Axis Accelerometer ( MEMS 2.1 Canon [2] Vol.17 No (pp.54-59, ) [3] CanonPIXUS950i IBM DNA MEMS TeleChem International, Inc.Homepage [2] OSWELHomepage DNA Homepage MEMS Explorer Viewpoints Micromachining July 2001 (Ref. 3) In-Stat/MDRWiCHT TECHNOLOGIE CONSULTING(WTC Strategy Analytics 3.1 RF (Radio Frequency )-MEMS Intel MEMS for wireless integration ( [2] EDN Japan Homepage [2] P Lab. on Chip Homepage [2] Technisch-Wetenschappelijk AttachesHomepage [3] Homepage Homepage [2] In-Stat/MDRWiCHT TECHNOLOGIE CONSULTING(WTC Strategy Analytics MEMS Coventor WareHP ( [2] (2000/11/06 No.782) IC pp , p.176 [3] Homepage [4] Ball Semiconductor Inc. Three Axis Accelerometer ( 16
17 MEMS 2, 3, 18 2, MEMS 4, 22 4, 22 SPM RF 3 7 MEMS RF MEMS 7 8, 23 8, 23 MEMS DMD DNA DNA
![[4] [3]](/docs-images/87/96316792/images/18-2.jpg "18")
18 MEMS 1.1 ( [2] [4] [3] 18
![1.2 [2]](/docs-images/87/96316792/images/19-0.jpg "[3] 19")
19 1.2 [2] [3] 19
20 1.3 VTR [2] [3] 20
21 [2] 21
22
23 ３ オプティカルMEMS 3.1 光スイッチ 電磁石 １ 応用分野 次世代のネットワークの基幹系に搭載 ヒーター 光出力 光出力 光入力 ２ 動作原理 光出力 ①メカニカル型 光ファイバを電磁力などで移動させる ことで経路を変更 光出力 光入力 平面光導波路型 メカニカル型 ②平面導波路型 光導波路上にペルチェ素子やヒーターを 設置し 温度により導波路の屈折率が変 化する現象を利用して経路を変更させる 光出力1 光出力 光入力 ③ミラー型 ２次元 ３次元 ８ページ参照 バブル 可動式 ミラー 光導波路 光入力1 光出力2 光入力2 ④バブル型 石英ガラスの光導波路の各交点に微小 な穴 トレンチ を形成し オイルを 充填する ヒータを用いて この液体 から泡 バブル を生成 消滅させる ことで 光信号の経路を変える インクジェットプリンタヘッドのバブ ルジェット技術の応用 ミラー型 バブル型 ① ④ 光スイッチの動作原理イメージ ②平面導波路型光スイッチ [2] 23 微少な穴 (トレンチ)
![3 [2] 24](/docs-images/87/96316792/images/24-1.jpg)
24 3.2DMD 10 DMD 3.3 [2] 24
25 MEMS 1.1 (Spring 2000 No.93)( [2] ( [3] Ball Semiconductor Inc. Three Axis Accelerometer( [4] 1.2 ( [2] ( [3] ( 1.3 (pp ) [2] ( [3] ( 1.4 (2001/9) LSI (pp , p.132) 1.5 Design Wave Magazine(2001/9) (p.100) ( [2] ( 1.6 ( 1.7 p.115, 116 MEMS 3.1 ( [2] NTT (Olive*) ( 3.2DMD Design Wave Magazine(2001/11) (p.84) ( 3.3 ( [2] ( 25
26 IT 26
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