Park Systems www.parkafm.co.jp
Park Systems Enabling Nanoscale Advances ㅣ ㅣ ㅣ ㅣ ㅣ ㅣ ㅣ ㅣ ㅣ ㅣ ㅣ ㅣ ㅣ ㅣ ㅣ ㅣ ㅣ
Courtesy NASA/JPL-Caltech Park Systems Enabling Nanoscale Advances 5
98 988 997 Prof. C.F. Quate Dr. Sang-il Park Park Scientific Instruments Park Systems Headquarters Invention of AFM (Stanford University) 6 Park Systems Enabling Nanoscale Advances [] Microscopy Devices Market (Optical, Electron and Scanning Probe Microscopes, Semiconductor, Life Sciences, Nanotechnology, Material Sciences) Global Industry Analysis, Size, Share, Growth, Trends and Forecast, -8, by Transparency Market Research. 7
Park SmartScan True Non-Contact Mode nm 8 Unprocessed raw data Decoupled XY and Z Scanners & Unprocessed row data Less than nm Highly Linear and Orthogonal XY Scan Park Systems Enabling Nanoscale Advances 8 Park Systems Enabling Nanoscale Advances 9
Park NX Park NX SICM Park NX-Bio Park NX Park NX-Hivac Park NX-HDM Park NX-PTR Park XE7 Park XE5 Park NX-Wafer Park NX-DM Park Systems Enabling Nanoscale Advances
-.5-5 -7.5-6 Park NX Park NX QuickStep SCM PinPoint CP-AFM V 8 µm Defect Site PinPoint Park Systems Enabling Nanoscale Advances
x 7 / Cm Park NX-Hivac Park XE7..8..6 5 6 7 5 5 Cm Cm Cm / / / 9 8 x x x Cm Cm / / 6 5 x x 5 6 6 8 Si Si Si Si.75.5.5 5 6 7 5 6 5 6 8 Si Si Si Park Systems Enabling Nanoscale Advances 5
Park XE5 Park NX SICM a b 7 6 Park Systems Enabling Nanoscale Advances 7
Park NX-Bio Park NX-HDM d r d q d d d d 5 75 5 5 5 5 5 75 8 Park Systems Enabling Nanoscale Advances 9
Park NX-PTR Park NX-Wafer µm 7.5 5.5.5 5 7.5 µm µm.6..8...8..6 µm ABS µm x µm Y X Y Y l X X l 5 µm x µm Park Systems Enabling Nanoscale Advances
,µ.. 5 Z@ 5 mm 5 6 7 6 7 Z@5 mm 5 6 7 Z@ mm 5 6 7 Z@5 mm 5 6 7 Z@ mm 5 6 7 CD, nm CD, by SEM 5 CD, by AFM, Z@ nm CD, by AFM, Z@5 nm CD, by AFM, Z@5 nm 5 5 5 5 97 9 8 7 65 57 8 Height, nm Aerial image contrast, % 5 5 5 5 5 Height by SEM 97 9 8 7 65 57 8 Aerial image contrast, % Park NX-DM Z, µm Y, µm Park Systems Enabling Nanoscale Advances Y, µm Y, µm Y, µm Y, µm Z, µm....5. Y, µm..5.... Z Height (µm)......5.....5...5.......... X Position(µm).....6...5.......5......5.6........5.6..6.8 Z, µm Z, µm Z, µm Z Height (µm) Top - -.5 Sidewall - -.5 Bottom - -.5.... X Position(µm) RMS=.9 nm.5 RMS=5.8 nm.5 RMS=.5 nm.5
5 Park Systems Enabling Nanoscale Advances
Company DC AC OUT NX BIAS COUPLER 7 6 Park Systems Enabling Nanoscale Advances
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