Si-OH, Si-H, Si-Cl, SI-F 1. SiOH OH OH Type III(Type II) OH OH OH OH CVD OH OH (EELS) -ppm OH 1100cm -1 Si-O 2200cm -1 1100cm -1 1100cm -1 1 1% OH ( 2500cm -1 ) Cabosil OH OH OH OH Si-O-Si (3747cm -1 ) SiOH 3660cm -1 SiOH 3450cm -1 970cm -1 SiOH 1 1100cm -1 Abe 10 OH 2
3676cm -1 OH 50-80L/mol cm Shelby (J.E.Shelby et al., J.Am.Ceram.Soc., 65, C59-60 (1982).) 181L/molcm(=3.0 10-19 cm 2 )Abe Shelby 181L/molcm Stephenson 77.5L/molcm(G.Stephenson and K.H.Jack, written contribution to Ref.1, Trans. Br. Ceram. Soc., 59, 397 (1960)) 1.3-2.5m OH OH 2 OH
OH 5 Suprasil W2(Type IV) 80 55.0±3.0ml/min.(0.467±0.020atm (355±15mmHg)) (A) 80, 150, 250, 350, 650 400 (B) 150, 250 144 260 (A) (950-650) 3672cm -1 Si-OH 350 3608cm -1, 3400cm -1 OH3230cm -1 Free H2O OH Shelby OH 1Grad 6 300 OH OH OH 1 3 ( 7-10%) OH (
7)(a)7.5eV (b)940cm -1 OH (a)(6.4ev)940cm -1 (~9eV)940cm -1 10.8eV 2.9 10 19 /cm 2 ()940cm -1 17eV (c) 6.4eV 10.8eV 0.03 Shelby 3670cm -1 ( OH ) 940cm -1 () 2. SiH SiH SiH SiH, SiH2, SiH3 3 SiH Si-O
Lucovsky 8 SiH 3 Pouling SR(Rj)SiH 3 (C2H5) Cl 3.62, 4.93 SR(Rj)=13.48 SiH, SiH2, SiH3 2280cm -1, 2220cm -1, 2200cm -1 SiH 9 (Suprasil W) 6.5 10 20 /cm 3 rad 3660cm -1 2280cm -1 OH SiH Si-O-Si + H2 Si-OH + H-Si H = (0.45±0.06)OHShelbySiOH SiOHHetheringtonSiOH= 77.5L/molcm(Phys.Chem.Glasses, 3, 129 (1962).)SiH SiHSiH = 35L/molcmShelbySiOH 181L/molcmSiHSiH = 81L/molcm Beckmann 10 ATR SiH---O = 2222cm -1, SiH = 2353cm -1,OH---O = 3375cm -1, OH = 3600cm -1 HSiH---O, OH---OSiH---O, OH---O SiH---O ~ 8.7 10-20 cm 2 (SiH---O ~ 52L/molcm), OH---O ~ 5.75 10-19 cm 2 (SiH---O ~ 52L/molcm) OH, SiHOH, SiHOH ~ 3.9 10-19 cm 2 (OH ~ 52L/molcm), SiH ~ 7 10-20 cm 2 (SiH ~ 42L/molcm)OHSiHShelby HetheringtonSi-O(~1100cm -1 ) SiHx(x=1, 2, 3) 9 Si-O GeH SiH Ge 11 GeH, GeH2 Lucovsky SiH GeH2 GeH SiH, SiH2, SiH3 SiH GeH, GeH2 2150cm -1, 2180cm -1 12 Ge (1GeO2:9SiO2) 200 600 13 He/Hg 5eV (a)(b) (a) 3675cm -1, 2185cm -1 SiOH(GeOH), GeH2 (b) 3550cm -1 GeOH~ GeOH, H2O2140cm -1 GeH 11
3..14 a 18K 2.9mmol/cm 3 b D2 18K 2.8mmol/cm 3 c H2 D2 d 18K SiOH GeOH
15 (a) (b)siod, D2O 4. Si-F, Si-Cl Si-Cl 1100cm -1 Si-O Si-F 945cm -1 16 200-650m 2 /g SiO2 Si(OC2H5)3F 110 960cm -1 Si-OH Si-F (F/Si=0.247) Si-F VAD SF6 17(a)FS, FL EPMA 2.9 10 20 cm -3, 6.2 10 20 cm -3 945cm -1 Si-F 800cm -1 945cm -1 (D1, D2) 4, 3 17(b)
5. SiOH, SiH SiH SiOH Type III) OH OH 18 Cl2, F2, O3, POL(), O2 19 H2O 170nm(7.3eV) 100atm -1 cm -1 at 0 4 10-18 cm 2 OH 7.3eV ~1 10-20 cm 2 H2O 400 (b)
6. Si-O (1100cm -1 ) 1100cm -1 Si-O 1 1100cm -1 ~1122cm -1 (K-K ) K-K K-K Si-O 20 700, 800, 1000Si-O 1066cm -1 1077cm -1 Bending, Rocking 21 Si-O 22 23 700, 1000 Si-O VAD [OH] < 0.1ppm, [Cl] ~ 1000ppm, [Na] ~ 0.04ppm 24(a) Si-O (b) Si-O
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