プラズマ核融合学会誌７月号【８１－７】／集中講座

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さやなふじがわ
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1 Faculty of Engineering, Graduate School of Chuo University, Tokyo , Japan 1) Faculty of Engineering, Doshisha University, Kyotanabe , Japan 2) Graduate School of Engineering, Nagoya University, Nagoya , Japan 3) Department of Electrical Engineering, Chubu University, Kasugai , Japan 4) Department of Electrical Engineering, Tohoku University, Sensai , Japan 5) Naka Fusion Research Establishment, JAERI, Ibaraki , Japan 6) Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, Sagamihara, , Japan 7) Graduate School of Engineering, Kyoto University, Kyoto , Japan

2 et al. Fig. 1.1 Probe circuit. Fig. 1.2 Probe characteristics I p - V p, semi-log plot of I p,andthe second derivative I p. Fig. 1.3 Cross-section of cylindrical and spherical probes and orbits of charged particles. Top: retardation, bottom: acceleration.

4 et al.

6 et al. Fig. 1.4 Circuit for measuring the second derivative I p using the small ac voltage superposition method.

7 Fig. 1.5 Several types of probes.

8 et al. Fig. 1.6 Variation of asymmetric double probe currents with thearearatios 2/S 1.

9 Fig. 1.7 Top: equivalent circuit of contaminated (dirty) probe. Bottom: Characteristics of clean and dirty probes.

10 et al. μ Fig. 1.8 Equivalent circuit of probe in RF plasma showing some methods for RF compensation.

11 The Characteristics of Electrical Discharge in Magnetic Fields Spacechargeflow Electrical Probes for Plasma Diagnostics Probe Method for Low Temperature Plasma Emissive probes in Plasma Diagnostics Vol.1 Proc.XXIII Int.Conf.Phenom. Ioniz. Gases The Physical Basis of Ultra Vacuum, et al.,

12 et al. Fig Typical probe I -V characteristic and the second derivative of probe current with respect to the bias voltage for a hydrogen plasma. The very sharp peak on the second derivative trace near the plasma potential corresponds to probe current due to negative ions. (after [5].)

13 I V IV Fig An electrical circuit to detect photodetachment signal from an electrostatic probe immersed in negative ion containing plasma.

14 et al. Principle of Plasma Discharges and Materials Processing

16 et al. Fig (a) Schematic drawing of biased optical probe, and (b) RF-biased optical probe.

17 Fig Simulated characteristics of the RF BOP. (a) Applied retarding voltage, and (b) the emission intensity, as a function of normalized time. T R is decay time constant of upper state normalized by the period of the RF retarding voltage. (c) The emission intensity as a function of the retarding voltage.

18 et al. Fig Emission intensity (open circles) and excitation rate coefficient (filled circles) as a function of the retarding voltage. Fig (a) Excitation rate of the RF-BOP as a function of the BOP retarding voltage in the Ar CCP. Open and filled plots indicate measurements with and without fluorocarbon deposition on the probe surface. (b) EEDF of CCP with pure Ar discharge (open plots) and with Ar/C 4F 8(10%) discharge.

19 Fig EEDFs at various distances from the ICP coil. Fig EEDFs of ICP (open plots) and DC discharge (filled plots) plasmas. Table of Spectral Lines of Neutral and Ionized Atoms

et al. toyota@nuee.nagoya-u.ac.jp Fig. 2.3.

20 et al. Fig Environment of capacitively-coupled plasma source used for actual processing.

21 Fig Configuration of plasma oscillation prove. Fig Examples of spectrum of plasma.

22 et al. Fig Time variation of electron density in pulsemodulated chlorine plasmas. Fig Surface wave probe system.

23 Fig Variation of reflection coefficient with wave frequency as a parameter of ICP discharge power. Fig Bias power dependence of radial profile of electron density in narrow-gap parallel-plate plasma sources.

24 et al. 25th International Conference on Phenomena in Ionized Gases Gaseous Electronics Conference 2004 Int. Symp. Dry Process Proc. Int. Conf. Phenomena in Ionized Gases

25 Fig Schematic view of Mach probes. (a)up-down type, (b)para-perp type. Fig Schematic view of Harbour s Mach probe.

et al. Fig. 2.4.3 The ratio R =j up/j down as a function of u d=(t e/m i) 1/2 [Fig. 19 in Ref(9)]. 1:Stangeby[6], 2:Proudfoot et al.

26 et al. Fig The ratio R =j up/j down as a function of u d=(t e/m i) 1/2 [Fig. 19 in Ref(9)]. 1:Stangeby[6], 2:Proudfoot et al. [7], 3:Chung and Hutchinson [9], 4:Hutchinson[8], 5: Mott-Smith and Langmuir[1]. Fig (a)schematic view of DLP. (b)definition of angle between probe face and plasma flow direction.

27 Fig Fig Dependencies of J is on cos in two different flow conditions of subsonic (: M i =0.8,U p = 19km/s, T i = 11eV and T e = 6.2 ev) and supersonic (:M i =1.3: U p =28km/s,T i = 8.6 ev and T e =5.3eV)flow. Relations between ln(j up / j down) andj para / j perp. M i calculated by eq.(5) using M c = 0.4 is also shown. Dotted line is the simulation results of T i =2T e. Fig The ratio j up / j down as a function of M i. Dotted line is the simulation results of T i =2T e.

28 et al. Fig Fig Relations between K and T i/t e. : PIC simulation by Hutchinson[10] in unmagnetized plasma, : Kinetic model calculation by Chung et al. [9] in magnetized plasma. Relations between M c and T i / T e in various ion specific heat ratio i. et al ibid et al et al ibid. et al et al et al akira@ecei.tohoku.ac.jp

29 Fig Typical Langmuir probe characteristics obtained at the divertor plasma in JFT-2M [10].

30 et al. Fig Retarding field (enegy) analyzer (RF(E)A, Model design) [18]. Fig Example of the electron energy distribution function obtained at the divertor plasma in JFT-2M, where V S = 32 V [10].

Fig. 2.5.4 Ion sensitive probe (Model design). Fig. 2.5.5 Time behaviour example of the ion sensitive probe (ISP) measurement.

the ion current using the ISP are given. The extent of rise time is shown by arrows [2]. Fig. 2.5.

31 Fig Ion sensitive probe (Model design). Fig Time behaviour example of the ion sensitive probe (ISP) measurement. From upper to down, the probe voltage V p, the Langmuir probe characteristics as an electrode using the electron guard and the ion current using the ISP are given. The extent of rise time is shown by arrows [2]. Fig (a) The configuration of the asymmetric double probe against the magnetic field B. (b) The V p-i p characteristics of the asymmetric double probe.

et al. Fig. 2.5.7 The relation between the ion saturation current ratio of I 2/I 1 andtheiontemperaturet i in the asymmetric probe (Estimation of for JFT-2M probe) [32].

32 et al. Fig The relation between the ion saturation current ratio of I 2/I 1 andtheiontemperaturet i in the asymmetric probe (Estimation of for JFT-2M probe) [32]. Fig The ion temperature profile obtained in the JFT-2M ohmic heated (OH) plasma using the asymmetric double probe (a) [31], and using the tooth brush probe (b) [32].

33 Fig (a) The configuration of the rotating symmetric double probe against the magnetic field B. (b) The time (and/or angle) behaviour of the ion saturation current. Fig The ion saturation current on the rotating symmetricdoubleprobewithaflow(thedependenceofangle) [36]. T e V f V s

34 et al. Fig Radial profile of E // estimated by eq.(6) (a) and poloidal phase velocity measured by two point correlation (b). Closed circle indicated to [no bias] case, open triangle to [Uni-180 V] case and crosses to [Dif +180 V] case, respectively [49].

35 Fig The time behaviour of the space potential V S (= P) and the pressure profile (n et e)observed by the RLP at the SOL plasmas in JFT-2M. The bottom trace indicates the position from the last closed flux surface (LCFS) [50]. Fig The pistol probe for measureing the hot and dense fusion plasma (a simple designal picture). TheCharacteristicsofElectricalDischargesin Magnetic Field, et al., et al., Tokamaks et al., et al., et al., et al., et al., et al., et al., et al., et al., ibid. et al., et al., et al., et al., ö et al., et al., et al.,

36 et al. et al., et al., Proc. AsiaPacific Conf. on Plasma Science and Technology ü et al., ö et al., et al., et al., et al., et al., et al., et al., et al., et al.,, et al., et al., ibid. et al., ibid. et al., et al., et al., et al., et al., et al., et al., et al., ç et al., et al., et al., et al., et al., et al., submitted to Fig Height profile of electron density and ion composition of the earth ionosphere and inner plasma sphere.

Fig. 2.6.2 Electron density profiles obtained with contaminated Langmuir probe(black circle), and glass sealed Langmuir probe (thick line). Fig. 2.6.4 Upper panel: Glass-sealed Langmuir.

37 Fig Electron density profiles obtained with contaminated Langmuir probe(black circle), and glass sealed Langmuir probe (thick line). Fig Upper panel: Glass-sealed Langmuir. Lower panel: Electron temperature obtained with Glass- sealed Langmuir probe. Fig Contamination layer of the electrode and its equivalent circuit.

38 et al. i i

39 Fig Scientific satelliteakebonoand two circular electrodes which are attached at the end of solar cell paddles. Fig Behavior of electron temperature at the height of 600 km in the longitude zone of degrees. Fig Height profile of electron temperature up to 800 km obtained withakebono(left) and its comparison with computer model, which is developed by Sheffield University group (right).

40 et al. Fig Example of Electron temperature model in the inner plasma sphere, that is constructed by accumulating AKEBONO data.

41 μ Fig (a) Single-probe voltage-current characteristic measured in a He discharge at 44 kpa. The discharge is 2 mm long and the probe with 100 μmdiameteris located in the middle of the discharge channel. (b) Probe electron current as a function of probe bias voltage. The open circles are raw data and the crosses are modified data for T e derivation [5].

42 et al. μ Gas Discharge Physics Int. Workshop on Cold Atmospheric Pressure Plasmas: Sources and Applications et al.

プラズマ核融合学会誌１１月【８１‐１１】／小特集５

プラズマ核融合学会誌１１月【８１‐１１】／小特集５ Japan Atomic Energy Agency, Ibaraki 311-0193, Japan 1) Kyoto University, Uji 611-0011, Japan 2) National Institute of Advanced Industrial Science and Technology, Tsukuba 305-8569, Japan 3) Central Research