LSI LSI Logic Detection by using Laser Probing Pad
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- あきひろ しどり
- 5 years ago
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1 LSI LSI Logic Detection by using Laser Probing Pad
2 LPP : Laser Probing Pad() 1 3p 3p 3p 2 4p 2.1 4p 2.2 5p G6p p 2.3 8p 2.4 9p 3 10p p p 4 LPP 13p p p p p p 5 16p 6 17p 6.1 LPP 19p p p 1
3 7 LPP 25p p p p 8 31p 9 32p 33p 33p 2
4 1 LSI LSI LSI LSI LSI OBICOptical Beam Induced Current LSI Pch-Tr Nch-Tr Tr Tr LSI 3
5 2 LSI Tr 2.1 LSI 2.1 Ev Ec 2.1 E1 E EE1 E= h ( 2.1) Eh 2.2 c 2.2 Ehc =6.6210^34[J/s] =4.1410^-15[eVs] 3.010^8[m/s] hce 2.3 4
6 E(=Ec-Ev)1.12[eV] 1.12[eV] [m] m 632.8nm 2.1 LSI 632.8nm E1=hc632.8[nm] =1.2410^-6( ^-9) =1.96[eV] PN OBIC 2.2 OBIC Optical Beam Induced Current 2.2 OBIC NOT Pch-Tr Nch-Tr 2 5
7 2.2.1 G Pch-Tr Nch-Tr Pch-Tr ON Nch-Tr OFF Nch-Tr P ON Pch-Tr VDD Nch-Tr P GND NchTr Nch-Tr Pch-Tr N-well VDD Nch-Tr OFF ON Pch-Tr VDD VDD PchTr 6
8 2.2.2 Pch-Tr Nch-Tr Pch-Tr OFF Nch-T ON Pch-Tr Pch-Tr N-well VDD ON Nch-Tr GND PchTr Nch-Tr Pch-Tr OFF ON Nch-Tr GND P GND GND 2.6 7
9 2.6NchTr Tr Pch-Tr Nch-Tr NOT Tr Nch-OFF Pch-ON 2.7 8
10 Pch-OFF Nch-ON 2.7 NOT Tr Tr OFF ON Pch-Tr Nch-Tr Tr 2 Tr Tr Tr LSI Tr LSI OBIC N P PN 9
11 OBIC 3.1 OBIC DOB-10 Refrigerated Air Dryer Hitachi HD-8X Hitachi P0D-0 75PSC6 Olympus optical co TDL Olympus Japan BH3-MJLA2 Digital Scanning Microscope 6602E 5 1/2 Digit Multimeter Agilent technologies 34405A DC Power Supply Agilent technologies E3642A OBIC VDEC SK-Electronics co.,ltd. VDEC-MOT23-80QFP 10
12 3.2 OBIC CLSM Confocal Laser Scanning Microscopy He-Ne OBIC OBIC OBIC LSI OBIC OBIC 3.1 Pch-Tr Nch-Tr 3.1 NOT OBIC 0[0V][5V] 11
13 3.1 OBIC Pch-Tr Nch-Tr 3.1 OBIC Pch-Tr ON Nch-Tr OFF 2 Pch Nch NOT Pch-Tr VDD Nch-Tr GND NAND NOR VDD VDD GND Pch ch 12
14 4 LPP LPP Tr Tr LSI (Laser Probing Pad :LPP) P-sub LPP LPP 4.1 P-sub 4.1LPP LPP NOT 4.1 Pch-Tr ONNch-Tr OFF ON Pch-Tr GND
15 4.2LPP 4.2 Pch-Tr OFFNch-Tr ON Pch-Tr OFF Nch-Tr GND LPP 14
16 L H 4.2 H Tr Tr LPP 2 Tr Tr Tr LSI Tr LPP LSI LPP LSI LPP LPP Tr Tr 2 LPP LPP LPP 2 2m^2 LPP 0.007pF
17 VDD GND LPP VDD 4 3 LPP LPP 8 ( 9 16
18 LPP LPP LPP m VDEC NOT LPP 3 OBIC VDEC (VLSI Design and Education Center) BH398 BH7786 AM NOT 6. 17
![VDEC 3.3[V] 3 LPP 6.](/docs-images/98/136259858/images/19-0.jpg "2 6.2 LPP [ N+ P-sub ]")
19 VDEC 3.3[V] 3 LPP LPP [ N+ P-sub ] 18
20 6.1 LPP 6.2 LPP 3 LPP OBIC 3 LPP LPP 6.3 (VDD,GND)0V BC 0.65m B LPP P-sub 0.48m 0.28m 0V 19
21 N P P-sub B C P-sub LPP-B LPP-C V LPP LPP 20
22 6.2 LPP OBIC A B C 1~ 0.96V 6.6 OBIC 3 LPP LPP-A,LPP-B,LPP-C OBIC OBIC 13 21
23 OBIC OBIC 0.75LPP-C LPP P-sub 0.84V LPP-B 0.84V LPP-B 0.96V LPP LPP-C LPP-B 6.1 LPP LPP-C LPP-C LPP-A OBIC 6.7 0V LPP 13% LPP (A )(B ) LPP A B A B
24 B A 6.8 LPP OBIC LPP-CLPP LPP-C 0V 13 23
25 A 2 PN B B OBIC 6.10 P-sub P-sub N AB 24
26 7 LPP % 100% LPP 1800 LPP 1212 m^ m^2 33 m^ LPP m^ LPP (A) (B) (C) 7.1 LPP- 3.3V 25
27
28 VDD 27
29
30 GND
31 7.3 LPP A<B<C 13 LPP 30
32 LPP 3 OBIC 31
33 9 1 LPP 2 NOT Pch-TrNch-Tr LH2 LPP 1 Pch,Nch NOT 4 LPP 2 32
34 [1] LSI Vol.102, No.622( ) [2] [2005] [3] OBIC JBS1181 [4] [5] [2006] [6] [7] [1998] [8] [2008] 33
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